CN100538298C - 用于储存真空计校准参数及测量数据于真空计结构上的方法及装置 - Google Patents
用于储存真空计校准参数及测量数据于真空计结构上的方法及装置 Download PDFInfo
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- CN100538298C CN100538298C CNB2005800426520A CN200580042652A CN100538298C CN 100538298 C CN100538298 C CN 100538298C CN B2005800426520 A CNB2005800426520 A CN B2005800426520A CN 200580042652 A CN200580042652 A CN 200580042652A CN 100538298 C CN100538298 C CN 100538298C
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- vacuum meter
- vacuum
- memory body
- temperature
- sensor
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- 238000005259 measurement Methods 0.000 title claims abstract description 47
- 238000000034 method Methods 0.000 title claims abstract description 27
- 230000004044 response Effects 0.000 claims abstract description 7
- 230000006870 function Effects 0.000 abstract 1
- 238000011835 investigation Methods 0.000 abstract 1
- 238000009434 installation Methods 0.000 description 21
- 125000004122 cyclic group Chemical group 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 230000002452 interceptive effect Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 241001269238 Data Species 0.000 description 1
- 240000004859 Gamochaeta purpurea Species 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000011088 calibration curve Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- NHDHVHZZCFYRSB-UHFFFAOYSA-N pyriproxyfen Chemical compound C=1C=CC=NC=1OC(C)COC(C=C1)=CC=C1OC1=CC=CC=C1 NHDHVHZZCFYRSB-UHFFFAOYSA-N 0.000 description 1
- 241000894007 species Species 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/30—Vacuum gauges by making use of ionisation effects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
Abstract
Description
Claims (7)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/012,871 US7313966B2 (en) | 2004-12-14 | 2004-12-14 | Method and apparatus for storing vacuum gauge calibration parameters and measurement data on a vacuum gauge structure |
US11/012,871 | 2004-12-14 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009101502381A Division CN101666697B (zh) | 2004-12-14 | 2005-11-29 | 用于储存测量数据于真空计结构上的方法及装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101084422A CN101084422A (zh) | 2007-12-05 |
CN100538298C true CN100538298C (zh) | 2009-09-09 |
Family
ID=36180190
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005800426520A Expired - Fee Related CN100538298C (zh) | 2004-12-14 | 2005-11-29 | 用于储存真空计校准参数及测量数据于真空计结构上的方法及装置 |
CN2009101502381A Expired - Fee Related CN101666697B (zh) | 2004-12-14 | 2005-11-29 | 用于储存测量数据于真空计结构上的方法及装置 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009101502381A Expired - Fee Related CN101666697B (zh) | 2004-12-14 | 2005-11-29 | 用于储存测量数据于真空计结构上的方法及装置 |
Country Status (7)
Country | Link |
---|---|
US (2) | US7313966B2 (zh) |
EP (1) | EP1825241B1 (zh) |
JP (3) | JP5124283B2 (zh) |
KR (1) | KR20070090012A (zh) |
CN (2) | CN100538298C (zh) |
TW (1) | TWI417528B (zh) |
WO (1) | WO2006065535A1 (zh) |
Families Citing this family (24)
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US7207224B2 (en) * | 2005-06-10 | 2007-04-24 | Brooks Automation, Inc. | Wide-range combination vacuum gauge |
US7418869B2 (en) * | 2005-06-10 | 2008-09-02 | Brooks Automation, Inc. | Wide-range combination vacuum gauge |
US20070286994A1 (en) * | 2006-06-13 | 2007-12-13 | Walker Christopher B | Durable antireflective film |
US8343624B2 (en) | 2006-06-13 | 2013-01-01 | 3M Innovative Properties Company | Durable antireflective film |
US7429863B2 (en) * | 2006-07-18 | 2008-09-30 | Brooks Automation, Inc. | Method and apparatus for maintaining emission capabilities of hot cathodes in harsh environments |
ITTO20080103A1 (it) * | 2008-02-08 | 2009-08-09 | Itw Metalflex Druzba Za Proizvodnjo Delov Za... | Sensore di pressione perfezionato per un elettrodomestico e metodo associato |
DE102008013455A1 (de) * | 2008-03-10 | 2009-09-17 | Pfeiffer Vacuum Gmbh | Verfahren zum Betrieb eines Totaldrucktransmitters |
JP2010261881A (ja) * | 2009-05-11 | 2010-11-18 | Yokogawa Electric Corp | 圧力伝送器 |
EP2499476A4 (en) | 2009-11-09 | 2017-07-26 | MKS Instruments, Inc. | Vacuum quality measurement system |
JP2011191284A (ja) * | 2010-03-12 | 2011-09-29 | Toyo Denshi Kenkyusho:Kk | 冷陰極形電離真空計付き熱陰極形電離真空計 |
WO2012133339A1 (ja) * | 2011-03-29 | 2012-10-04 | 凸版印刷株式会社 | 反射防止フィルム及び偏光板 |
CN102230837A (zh) * | 2011-03-30 | 2011-11-02 | 厦门大学 | 一种带温度补偿式微真空传感器 |
WO2013016551A1 (en) * | 2011-07-26 | 2013-01-31 | Mks Instruments, Inc. | Cold cathode gauge fast response signal circuit |
JP2013040914A (ja) * | 2011-08-15 | 2013-02-28 | Toyo Denshi Kenkyusho:Kk | 校正機能付き冷陰極形電離真空計 |
JP5827532B2 (ja) * | 2011-09-27 | 2015-12-02 | 株式会社アルバック | 熱陰極電離真空計 |
WO2013105933A1 (en) * | 2012-01-10 | 2013-07-18 | Micro Motion, Inc. | Field service device and method for facilitating a processing system replacement in a vibratory flowmeter |
WO2015048664A1 (en) * | 2013-09-30 | 2015-04-02 | Mks Instruments, Inc. | Cold cathode ionization vacuum gauge |
JP6275454B2 (ja) * | 2013-11-18 | 2018-02-07 | 株式会社アルバック | 電流測定装置、および、イオン電流測定システム |
CN104481514A (zh) * | 2014-12-17 | 2015-04-01 | 中国石油集团川庆钻探工程有限公司长庆井下技术作业公司 | 一种CalScan小直径压力计整体标校专用接头 |
WO2020121576A1 (ja) * | 2018-12-12 | 2020-06-18 | 株式会社アルバック | 真空計及びこの真空計を備える圧力測定システム |
US10917102B2 (en) | 2019-03-18 | 2021-02-09 | Analog Devices International Unlimited Company | Signal gauge |
CN110954265A (zh) * | 2019-10-31 | 2020-04-03 | 华北电力大学 | 一种新型热阴极电离真空计电参数校准装置 |
CN111678642A (zh) * | 2020-05-29 | 2020-09-18 | 中国航发南方工业有限公司 | 一种热阴极电离真空计发射电流测试装置及方法 |
GB2621399A (en) * | 2022-08-12 | 2024-02-14 | Edwards Ltd | Vacuum pressure gauge |
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FR2431138A1 (fr) | 1978-07-12 | 1980-02-08 | Commissariat Energie Atomique | Procede de lecture automatique de la dose d'irradiation d'un dosimetre portatif a chambre d'ionisation et dispositif mettant en oeuvre ce procede |
US4237900A (en) | 1979-02-14 | 1980-12-09 | Pacesetter Systems, Inc. | Implantable calibration means and calibration method for an implantable body transducer |
EP0074498B1 (de) | 1981-09-04 | 1985-12-04 | F. HOFFMANN-LA ROCHE & CO. Aktiengesellschaft | Verfahren und Vorrichtung zum Eichen von Messfühlern |
NL8302964A (nl) * | 1983-08-24 | 1985-03-18 | Cordis Europ | Inrichting voor het bepalen van de aktiviteit van een ion (pion) in een vloeistof. |
JPH0746074B2 (ja) | 1984-11-27 | 1995-05-17 | 日電アネルバ株式会社 | 真空計 |
GB8603999D0 (en) * | 1986-02-18 | 1986-03-26 | Vg Instr Group | Vacuum monitoring apparatus |
JPH0330640Y2 (zh) * | 1986-06-30 | 1991-06-27 | ||
US4866640A (en) | 1987-08-20 | 1989-09-12 | Granville-Phillips Company | Temperature compensation for pressure gauge |
JP2628341B2 (ja) | 1988-05-19 | 1997-07-09 | フィガロ技研株式会社 | ガス検出方法及びその装置 |
JPH03197832A (ja) * | 1989-12-26 | 1991-08-29 | Fujitsu Ltd | 真空測定装置 |
JPH03235030A (ja) * | 1990-02-13 | 1991-10-21 | Seiko Instr Inc | デジタル表示式水晶真空計 |
US5250906A (en) * | 1991-10-17 | 1993-10-05 | Granville-Phillips Company | Ionization gauge and method of using and calibrating same |
US5422573A (en) | 1990-04-11 | 1995-06-06 | Granville-Phillips Company | Ionization gauge and method of using and calibrating same |
US5296817A (en) * | 1990-04-11 | 1994-03-22 | Granville-Phillips Company | Ionization gauge and method of using and calibrating same |
JPH04110249A (ja) * | 1990-08-29 | 1992-04-10 | Omron Corp | 車載用コントローラ |
US5185709A (en) * | 1991-02-01 | 1993-02-09 | Mdt Corporation | Apparatus and method for measuring pressure changes within pressure vessels |
JPH05215633A (ja) * | 1992-02-06 | 1993-08-24 | Fujitsu Ltd | 真空装置の監視装置及び監視方法 |
JP3188752B2 (ja) * | 1992-04-27 | 2001-07-16 | 日本真空技術株式会社 | ピラニ真空計 |
US5347476A (en) | 1992-11-25 | 1994-09-13 | Mcbean Sr Ronald V | Instrumentation system with multiple sensor modules |
US5422572A (en) * | 1993-08-06 | 1995-06-06 | Toshiba America Mri, Inc. | Method and apparatus for substantially simultaneously exciting a plurality of slices in NMR imaging |
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JP4493139B2 (ja) * | 2000-02-02 | 2010-06-30 | キヤノンアネルバ株式会社 | 電離真空計 |
US7076920B2 (en) * | 2000-03-22 | 2006-07-18 | Mks Instruments, Inc. | Method of using a combination differential and absolute pressure transducer for controlling a load lock |
JP4592897B2 (ja) * | 2000-08-30 | 2010-12-08 | キヤノンアネルバ株式会社 | 圧力測定装置および複合型圧力測定装置 |
US6672171B2 (en) * | 2001-07-16 | 2004-01-06 | Mks Instruments, Inc. | Combination differential and absolute pressure transducer for load lock control |
JP3549505B2 (ja) * | 2001-08-10 | 2004-08-04 | 本田技研工業株式会社 | データ記録装置 |
US6756785B2 (en) * | 2002-07-25 | 2004-06-29 | Mks Instruments, Inc. | Pressure controlled degas system for hot cathode ionization pressure gauges |
JP2004163136A (ja) | 2002-11-11 | 2004-06-10 | Junko Saeki | 真空計用圧力補正装置 |
US6909975B2 (en) * | 2003-11-24 | 2005-06-21 | Mks Instruments, Inc. | Integrated absolute and differential pressure transducer |
US20060113322A1 (en) * | 2004-11-09 | 2006-06-01 | Maser Bryan A | Monitoring operation of a fluid dispensing system |
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US7207224B2 (en) * | 2005-06-10 | 2007-04-24 | Brooks Automation, Inc. | Wide-range combination vacuum gauge |
-
2004
- 2004-12-14 US US11/012,871 patent/US7313966B2/en active Active
-
2005
- 2005-11-29 WO PCT/US2005/043269 patent/WO2006065535A1/en active Application Filing
- 2005-11-29 EP EP05852494.3A patent/EP1825241B1/en not_active Not-in-force
- 2005-11-29 JP JP2007546716A patent/JP5124283B2/ja not_active Expired - Fee Related
- 2005-11-29 KR KR1020077016088A patent/KR20070090012A/ko not_active Application Discontinuation
- 2005-11-29 CN CNB2005800426520A patent/CN100538298C/zh not_active Expired - Fee Related
- 2005-11-29 CN CN2009101502381A patent/CN101666697B/zh not_active Expired - Fee Related
- 2005-12-13 TW TW094144066A patent/TWI417528B/zh not_active IP Right Cessation
-
2007
- 2007-06-20 US US11/820,629 patent/US7921719B2/en active Active
-
2012
- 2012-03-21 JP JP2012063178A patent/JP2012112981A/ja not_active Withdrawn
-
2015
- 2015-06-09 JP JP2015116249A patent/JP6069415B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2008523410A (ja) | 2008-07-03 |
CN101666697A (zh) | 2010-03-10 |
KR20070090012A (ko) | 2007-09-04 |
US7921719B2 (en) | 2011-04-12 |
WO2006065535A1 (en) | 2006-06-22 |
CN101666697B (zh) | 2012-07-04 |
US20070251293A1 (en) | 2007-11-01 |
CN101084422A (zh) | 2007-12-05 |
JP2012112981A (ja) | 2012-06-14 |
TWI417528B (zh) | 2013-12-01 |
JP6069415B2 (ja) | 2017-02-01 |
US20060123915A1 (en) | 2006-06-15 |
US7313966B2 (en) | 2008-01-01 |
EP1825241A1 (en) | 2007-08-29 |
EP1825241B1 (en) | 2014-03-05 |
TW200632298A (en) | 2006-09-16 |
JP2015179095A (ja) | 2015-10-08 |
JP5124283B2 (ja) | 2013-01-23 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: MKS INSTRUMENTS INC. Free format text: FORMER OWNER: BROOKS AUTOMATION INC. Effective date: 20141210 |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20141210 Address after: The city of Massachusetts, Massachusetts Patentee after: MKS Instruments Inc. Address before: massachuetts Patentee before: Brooks Automation Inc. |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090909 Termination date: 20201129 |