CN100523979C

CN100523979C - Method and device for multi-state interferometric light modulation

Info

Publication number: CN100523979C
Application number: CNB2005101050507A
Authority: CN
Inventors: 克拉伦斯·徐; 威廉·J·卡明斯; 布莱恩·J·加利
Original assignee: IDC LLC
Current assignee: Qualcomm MEMS Technologies Inc
Priority date: 2004-09-27
Filing date: 2005-09-26
Publication date: 2009-08-05
Anticipated expiration: 2025-09-26
Also published as: CN1755490A

Abstract

The present invention relates to a multi-state light modulator which comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and the first electrode. The second reflector is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector. In one embodiment, the three positions correspond to reflecting white light, being non-reflective, and reflecting a selected color of light. Another embodiment is a method of making the light modulator. Another embodiment is a display including the light modulator.

Description

The method and apparatus that is used for the multi-state interferometric optical modulation

Technical field

Technical field of the present invention relates to MEMS (micro electro mechanical system) (MEMS).

Background technology

MEMS (micro electro mechanical system) (MEMS) comprises micromechanical component, driver and electronic equipment.Micromechanical component can adopt deposition, etching and/or other several portions that can etch away substrate and/or institute's deposited material layer maybe can add several layers and make with the micromachined technology that forms electric and electromechanical assembly.One type MEMS device is called interferometric modulator.Interferometric modulator can comprise the pair of conductive plate, one of them or the two all or part of be transparent and/or the tool reflectivity, and when applying suitable electric signal, can relatively move.One of them plate can comprise the quiescent layer that is deposited on the substrate, and another plate can comprise one and separates the metal film of an air gap with described quiescent layer.Said apparatus is with a wide range of applications, and utilizes in affiliated technical field and/or revise the characteristic of device of these types so that its feature can be used for improving existing product and makes still undeveloped at present new product will be rather useful.

Summary of the invention

System of the present invention, method and device have many aspects separately, and arbitrary single aspect all can not determine the attribute that it is desired separately.Now its outstanding feature is made brief description, this not delimit the scope of the invention.After considering this argumentation, especially after having read the part that is entitled as " embodiment ", how can understand feature of the present invention provides the advantage that is better than other display device.

One embodiment provides a kind of photomodulator, it comprises first reflecting body, apart from first electrode of described first reflecting body, one segment distance location, and second reflecting body of between described first reflecting body and described first electrode, locating, described second reflecting body can move between non-activation point, first activation point and second activation point, wherein said first activation point is than more close described first reflecting body of described non-activation point, and wherein said second activation point is more farther than described first reflecting body of described non-activation point distance.

Another embodiment provides a kind of optic modulating device, and it comprises: be used for catoptrical first member; Be used for catoptrical second member, described second reflecting member is configured to be positioned at the arbitrary position in first and second side of non-activation point and described non-activation point; And align member, it is used for described second reflecting member is positioned at a position of the second place on second side of primary importance on first side of described non-activation point, described non-activation point and described non-activation point.

Another embodiment provides a kind of method of the MEMS of driving device, the travelling electrode that described MEMS device comprises first electrode, second electrode and is positioned between described first electrode and described second electrode and be configured to move between at least three positions, described method comprises: apply the first voltage potential difference so that move the described travelling electrode of driving towards described first electrode between described first electrode and described travelling electrode, wherein produce first attractive force between described travelling electrode and described first electrode; And it is poor to apply second voltage potential between described first electrode and described travelling electrode, and between described second electrode and described travelling electrode, apply the tertiary voltage potential difference (PD), so that leave described first electrode and towards the described travelling electrode of described second electrode drive, wherein apply the described second voltage potential difference and between described travelling electrode and described first electrode, produce second attractive force, and apply described tertiary voltage potential difference (PD) and between described travelling electrode and described second electrode, produce the 3rd attractive force, and wherein said the 3rd attractive force is greater than described second attractive force.

Another embodiment provides a kind of method of manufacturing one multimode photomodulator, described method comprises: form one first reflecting body, form first electrode apart from described first reflecting body, one segment distance location, and form second reflecting body of between described first reflecting body and described first electrode, locating, described second reflecting body can be at a non-activation point, move between one first activation point and one second activation point, wherein said first activation point is than more close described first reflecting body of described non-activation point, and wherein said second activation point is more farther than described first reflecting body of described non-activation point distance.

Description of drawings

Fig. 1 is an isogonism view, it shows the part of an embodiment of an interferometric modulator display, wherein one of one first interferometric modulator removable reflection horizon is in an off-position, and a removable reflection horizon of one second interferometric modulator is in an excited target position.

Fig. 2 is a system block diagram, and its demonstration comprises an embodiment of the electronic installation of one 3 * 3 interferometric modulator displays.

Fig. 3 for the removable mirror position of an exemplary embodiments of interferometric modulator shown in Figure 1 with respect to the graph of a relation that applies voltage.

Fig. 4 is the synoptic diagram that can be used for driving one group of row and column voltage of an interferometric modulator display.

Fig. 5 A is presented at an exemplary frame of display data in 3 * 3 interferometric modulator displays shown in Figure 2.

Fig. 5 B demonstration can be used for writing the capable signal of frame shown in Fig. 5 A and an exemplary sequential chart of column signal.

Fig. 6 A is the cross-sectional view of device shown in Figure 1.

Fig. 6 B is the cross-sectional view of an alternate embodiment of an interferometric modulator.

Fig. 6 C is the cross-sectional view of another alternate embodiment of an interferometric modulator.

Fig. 7 is the side cross-sectional view of an exemplary interferometric modulator of the spectral characteristic of the light that explanation produced.

Fig. 8 is that the reflectivity of mirror of several exemplary interferometric modulators is with respect to the graphic extension of the relation of wavelength.

Fig. 9 is a chromatic diagram, and it shows that one comprises the producible color of color monitor of several groups of exemplary redness, green and blue interferometric modulators.

Figure 10 is the side cross-sectional view of an exemplary multi-state interferometric modulator.

Figure 11 A-11C is the side cross-sectional view of another exemplary multi-state interferometric modulator.

Figure 12 A and 12B are system block diagram, and its demonstration comprises an embodiment of the visual display unit of a plurality of interferometric modulators.

Embodiment

One interferometric modulator has a reflecting body that can move between three positions.At the non-driven state of described modulator, removable mirror is in a non-activation point.At first driving condition of described modulator, removable mirror is displaced to first activation point than the more close described fixed mirror of described non-activation point towards a fixed mirror.At second driving condition of described modulator, removable mirror leaves described fixed mirror and is displaced to than the second farther activation point of the described non-activation point described fixed mirror of distance.In one embodiment, when described removable mirror is in described non-activation point, described modulator is non-reflection, for example be black, when described removable mirror is in described first activation point, described modulator reflected white-light, and when described removable mirror is in described second activation point, the light of the selected color of described modulator reflection.Therefore, comprise the strong relatively white light of color monitor reflection of these modulators, have big colour gamut simultaneously.

Below describe in detail and relate to some embodiments of the invention.But the present invention can implement by many different modes.In this explanation, with reference to the accompanying drawings, in the accompanying drawings, similarly parts use similar Digital ID from start to finish.Find out easily that according to following explanation the present invention can in office one be configured in the device that is used for display image (no matter no matter is dynamic image (for example video) or still image (for example rest image), be character image or picture also) and implements.More specifically, imagination the present invention can for example implement in the multiple electronic installation below (but being not limited to) or be associated with these electronic installations: mobile phone, wireless device, personal digital assistant (PDA), handheld computer or portable computer, gps receiver/omniselector, camera, the MP3 player, video camera (camcorder), game machine, wrist-watch, clock, counter, TV monitor, flat-panel monitor, computer monitor, automotive displays (for example, mileometer display etc.), driving cabin controller and/or display, the camera view display (for example, the rear view camera display of vehicle), electronic photo, electronics billboard or label, projector, building structure, packing, and aesthetic structures (for example, the image display of a jewelry).Also can be used for non-display application, for example electronic switching device with the MEMS device of the similar of these devices described herein.

Show among Fig. 1 that one comprises the interferometric modulator display embodiment of an interfere type MEMS display element.In these devices, pixel is in bright state or dark state.When being in bright (" opening (on) " or " opening (open) ") state, described display element reflects the major part of incident visible light to the user.When being in dark (" closing (off) " or " closing (closed) ") state, described display element reflects the incident visible light to the user hardly.Depend on embodiment, can put upside down the light reflectance properties of " opening " and " pass " state.The MEMS pixel can be configured to mainly reflect under selected color, so that also can realize colored the demonstration except black and white.

Fig. 1 is an isogonism view, and it shows two neighbors in a series of pixels of a visual display, and wherein each pixel all comprises a MEMS interferometric modulator.In certain embodiments, an interferometric modulator display comprises a row/column array of being made up of these interferometric modulators.Each interferometric modulator includes a pair of reflection horizon, and this is positioned to each other one section variable and controlled distance apart to the reflection horizon, has at least one variable-sized optical resonator to form one.In one embodiment, one of them reflection horizon can be moved between the two positions.Be called in the primary importance of release conditions at this paper, the partially reflecting layer that the position of displaceable layers distance one is fixed is far away relatively.In the second place, the position of displaceable layers is more closely near described partially reflecting layer.The position of depending on removable reflection horizon, from the incident light of this two layers reflection can with mutually long or mutually the mode of disappearing interfere, thereby form the mass reflex or the non-reflective state of each pixel.

Pixel array portion depicted in figure 1 comprises two adjacent interferometric modulator 12a and 12b.In the interferometric modulator 12a in left side, demonstration one movably high reflection layer 14a is in an off-position, and this off-position is apart from fixing partially reflecting layer 16a one preset distance.In the interferometric modulator 12b on right side, show that movably high reflection layer 14b is in an excited target position, this excited target position is near fixing partially reflecting layer 16b.

Fixed bed 16a, 16b can conductions, partially transparent and tool partial reflection, and can make by (for example) deposits one or more respectively do for oneself chromium and tin indium oxide on a transparent substrates 20 layer.Described each layer pattern changes into parallel band, and can form the column electrode in the display device, hereinafter will further specify this.Displaceable layers 14a, 14b can form by being deposited on one or more depositing metal layers on pillar 18 tops (and column electrode 16a, 16b quadrature) and and be deposited on the series of parallel band that the middle expendable material between the pillar 18 constitutes.After etching away expendable material, these deformable metal levels separate with the air gap 19 of the metal level of fixing by a regulation.These deformable layer can use one to have high conductivity and reflexive material (for example aluminium), and those bands can form the row electrode in the display device.

When not applying voltage, cavity 19 remains between a layer 14a, the 16a, and deformable layer is in the mechanical relaxed state shown in pixel 12a among Fig. 1.Yet when a selected row and column applies potential difference (PD), the capacitor that forms at the respective pixel place of described row and column electrode intersection becomes charged state, and electrostatic force pulls to these electrodes together.If voltage is enough high, then displaceable layers generation deformation, and be forced on the fixed bed (can on fixed bed, deposit a dielectric material (not shown in this Figure), preventing short circuit, and the control separation distance), shown in the pixel 12b on the right side among Fig. 1.Regardless of the polarity of the potential difference (PD) that is applied, the behavior is all identical.In this way, used row/row encourage similar in many aspects in the row of the non-relatively reflective pixel state of may command reflection/row excitation and traditional LCD and other display techniques.

Fig. 2 to Fig. 5 B shows the exemplary methods and the system that use an interferometric modulator array in display application.Fig. 2 is a system block diagrams, and it shows that one can comprise an embodiment of the electronic installation of the some aspects of the present invention.In this exemplary embodiments, described electronic installation comprises a processor 21, and it can be any general purpose single-chip or multicore sheet microprocessor, for example ARM,

Pentium

Pro, 8051,

Power

Or any special microprocessor, for example digital signal processor, microcontroller or programmable gate array.According to the convention in the affiliated technical field, processor 21 can be disposed for carrying out one or more software modules.Except that carrying out an operating system, also this processor can be disposed for carrying out one or more software applications, comprise web browser, telephony application, e-mail program or any other software application.

In one embodiment, processor 21 also is configured to communicate with an array controller 22.In one embodiment, array control unit 22 comprises horizontal drive circuit 24 and the column drive circuit 26 that signal is provided to pel array 30.The xsect of array shown in Fig. 1 illustrates with line 1-1 in Fig. 2.For the MEMS interferometric modulator, OK/the row excitation protocol can utilize the hysteresis property of these devices shown in Figure 3.It may need the potential difference (PD) of (for example) 10 volts to make a displaceable layers be deformed into actuated state from release conditions.Yet, when voltage when this value reduces, be lower than 10 volts along with voltage drop is back to, it is constant that described displaceable layers is kept its state.In the exemplary embodiments of Fig. 3, described displaceable layers is reduced to below 2 volts up to described voltage and just discharges fully.Therefore, in example shown in Figure 3, have the voltage range of about 3-7V, exist one to apply voltage window in this voltage range, described device keeps stable under release or actuated state in this window.This paper is called it " lag windwo " or " stability window ".For the array of display of hysteresis characteristic, OK/the row excitation protocol can be designed so that to be expert at during the gating, make gating treat that actuated pixel is subjected to about 10 volts voltage difference in capable, and make pixel to be discharged be subjected to voltage difference near 0 volt with Fig. 3.After gating, it is poor to make pixel be subjected to about 5 volts steady state voltage, and gating makes its residing state so that its maintenance is expert at.After writing, in this example, each pixel all experiences the potential difference (PD) in " stability window " of 3-7 volt.This characteristic makes pixel design shown in Figure 1 be stabilized in an existing actuated state or release conditions under the voltage conditions in identical applying.Owing to no matter be in actuated state or release conditions, each pixel of interferometric modulator all is a capacitor that is formed by fixing and mobile reflection horizon basically, so this steady state (SS) can be kept and almost inactivity consumption under the voltage in lag windwo.If the current potential that is applied is fixed, then there is not electric current to flow into pixel basically.

In the typical case uses, can be by determining that according to one group of desired actuated pixels in first row one group of row electrode forms a display frame.After this, horizontal pulse is put on the electrode of row 1, thereby encourage the pixel corresponding with determined alignment.After this, determined one group of row electrode is become corresponding with desired one group of actuated pixels in second row.After this, pulse is put on the electrode of row 2, thereby come suitable pixel in the action line 2 according to determined row electrode.The pixel of row 1 is not subjected to the influence of the pulse of row 2, and remains on the state that its impulse duration of 1 of being expert at sets.The property mode repeats this process to the row of whole series in order, to form frame.Usually, repeating this process continuously by the speed with a certain required frame number/second to refresh and/or upgrade these frames with new video data.Also have a variety of row and the row electrodes that are used to drive pel array to be known by people, and can be used for the present invention with the agreement that forms display frame.

Fig. 4, Fig. 5 A and Fig. 5 B show a possible excitation protocol that is used for forming a display frame on 3 * 3 arrays shown in Figure 2.Fig. 4 shows the one group of possible row of the pixel that can be used for those hysteresis curves that show Fig. 3 and the voltage level of going.In the embodiment shown in fig. 4, encouraging a pixel to comprise is set to suitable row-V _Bias, and suitable row is set to+Δ V, it can be respectively to being applied to-5 volts and+5 volts.Discharging pixel then is by suitable row are set to+V _BiasAnd suitable row is set to identical+Δ V realizes so that form the potential difference (PD) of zero volt at the pixel two ends.Remain in 0 volt the row at those row voltages, pixel is stabilized in its original residing state, and is to be in+V with these row _BiasStill-V _BiasIrrelevant.Among Fig. 4 also the explanation, should be appreciated that the voltage that can use with above-mentioned voltage opposite polarity, for example actuate pixel can comprise with suitably row be set to+V _Bias, and suitable row is set to-Δ V.In this embodiment, discharging pixel is to be set to-V by will suitably being listed as _BiasAnd will suitably go and be set to identical-Δ V and realize so that form the potential difference (PD) of zero volt at the pixel two ends.

Fig. 5 B is a series of sequential charts that are applied to the row and column signal of 3 * 3 arrays shown in Figure 2 of a demonstration, and it will form the demonstration shown in Fig. 5 A and arrange that wherein actuated pixels is non-reflectivity.Before writing the frame shown in Fig. 5 A, pixel can be in any state, and in this example, all row all are in 0 volt, and all row all be in+5 volts.By the voltage that these applied, all pixels all are stable at its existing actuated state or release conditions.

In the frame shown in Fig. 5 A, pixel (1,1), (1,2), (2,2), (3,2) and (3,3) are encouraged.For realizing this, during be expert at 1 " line time ", row 1 and row 2 are set at-5 volts, and row 3 are set at+5 volts.This can not change the state of any pixel, because all pixels all remain in the stability window of 3-7 volt.After this, rise to 5 volts of pulses that are back to 0 volt that descend again then by one from 0 volt and come gating capable 1.Actuate pixel (1,1) and (1,2) and discharge pixel (1,3) thus.Other pixel in the array is all unaffected.For row 2 is set at desired state, row 2 is set at-5 volts, and row 1 and row 3 are set at+5 volts.After this, apply identical strobe pulse with actuate pixel (2,2) and discharge pixel (2,1) and (2,3) to row 2.Equally, other pixel in the array is all unaffected.Similarly, by row 2 and row 3 being set at-5 volts and row 1 are set at+5 volts and row 3 is set.The strobe pulse of row 3 is set at state shown in Fig. 5 A with the pixel of row 3.After writing incoming frame, the row current potential is 0, and the row current potential can remain on+5 or-5 volts, and after this display will be stable at the layout shown in Fig. 5 A.Should be appreciated that, can be to beating or hundreds of the identical programs of array use that row and column constitutes by several.The timing, order and the level that should also be clear that the voltage that is used to carry out row energization and row excitation can alter a great deal in above-mentioned General Principle, and above-mentioned example only is exemplary, and any actuation voltage method all can be used for the present invention.

Detailed structure according to the interferometric modulator of above-mentioned principle operation can have a great difference.For example, Fig. 6 A-6C shows three different embodiment of moving lens structure.Fig. 6 A is a cross-sectional view embodiment illustrated in fig. 1, and wherein a strip of metal material 14 is deposited on the support member 18 of quadrature extension.In Fig. 6 B, removable reflecting material 14 only is attached to support member around the corner on tethers 32.In Fig. 6 C, removable reflecting material 14 is suspended in the below of deformable layer 34.Because can be with respect to the structural design and the material therefor of optical characteristics optimization reflecting material 14, and can be with respect to the structural design and the material therefor of desired mechanical property optimization deformable layer 34, so this embodiment has a plurality of advantages.In many open files, comprise in the open application case of (for example) No. 2004/0051929 U.S., the manufacturing of various dissimilar interferometric device has been described.Multiplely know technology and can be used for making said structure, this comprises a series of material depositions, patterning and etching step.

The embodiment of above-mentioned interference formula modulator is with a kind of state operation in reflective condition (colorama that it produces white light or is determined by the distance between mirror 14 and 16) or non-reflection (for example, the black) state.In other embodiments, for example at United States Patent (USP) the 5th, 986, among the embodiment that is disclosed in No. 796, removable mirror 14 can be positioned in the position range with respect to fixed mirror 16, changing the size in resonance gap 19, and therefore changes catoptrical color.

Fig. 7 is the side cross-sectional view of an exemplary interferometric modulator 12, and it shows by removable mirror 14 being positioned at the spectral characteristic of the light that is produced on the position range 111-115.As mentioned above, the potential difference (PD) between row and the row electrode can make removable mirror 14 be offset.Described exemplary modulator comprises that one serves as tin indium oxide (ITO) conductive layer 102 of a row electrode.In described exemplary modulator, mirror 14 comprises column conductor.

In one embodiment, aluminium oxide (Al for example ₂O ₃) wait the dielectric layer 104 of material to be positioned on the chromium layer of the reflecting surface that forms mirror 16.As described above with reference to Figure 1, when mirror 14 skew, described dielectric layer 104 prevents short circuit and controls spacing between mirror 14 and 16.Therefore, the optical cavity that forms between

mirror

14 and 16 comprises described dielectric layer 104.Every relative size of why choosing among Fig. 7 is the purpose that shows modulator 12 for convenience.Therefore, these distances are disproportionate, and are not any specific embodiment that is intended to represent modulator 12.

Fig. 8 is that the reflectivity of mirror 16 of several exemplary optical stack (optical stack) is with respect to the graphic extension of the relation of wavelength.Transverse axis represents to be incident in the wavelength of visible light scope on the described optical stack.Z-axis is represented the reflectivity as the optical stack of the number percent of the incident light under the specific wavelength.One wherein optical stack do not comprise among the embodiment of dielectric layer 104 that the reflectivity of the mirror 16 that is formed by a chromium layer is about 75%.Comprise that one comprises

The optical stack of the dielectric layer 104 of alumina layer produces 65% reflectivity, and comprises

The dielectric layer 104 of alumina layer produces 55% reflectivity.As shown in the figure, in these specific embodiments, reflectivity can not change with wavelength.Therefore, by adjusting Al ₂O ₃The thickness of layer can as one man be controlled the reflectivity of mirror 16 on visible spectrum, so that select the particular characteristics of interferometric modulator 12.In certain embodiments, described dielectric layer 104 is that a thickness exists Al in the scope ₂O ₃Layer.In other embodiments, dielectric layer 104 comprises a thickness and exists

Al in the scope ₂O ₃Thin layer and a thickness exist

Body SiO in the scope ₂Layer.

As mentioned above, modulator 12 comprises an optical cavity that forms between mirror 14 and 16.The characteristic distance of described optical cavity or effective path length L determine the resonance wavelength of described optical cavity and therefore determine the resonance wavelength of interferometric modulator 12.The resonance wavelength of described interferometric modulator 12 is generally corresponding to the color that is perceived by the light of described modulator 12 reflections.On mathematics, distance L=1/2N λ, wherein N is an integer.Therefore, a given resonance wavelength is that the interferometric modulator 12 of 1/2 λ (N=1), λ (N=2), 3/2 λ (N=3) etc. reflects by distance L.Integer N can be called catoptrical interference level.As used herein, when mirror 14 was at least one position, the progression of modulator 12 also referred to the progression N of the light that reflected by described modulator 12.For example, the distance L of the red interferometric modulator 12 of the first order can be about 325nm, and it is corresponding to the wavelength X of about 650nm.Correspondingly, the distance L of the red interferometric modulator 12 in the second level can be about 650nm.In general, the progression of modulator 12 is high more, the light in the narrow more wavelength coverage of its reflection, and therefore produce more saturated colorama.

Notice that in certain embodiments, distance L equals the distance between

mirror

14 and 16 substantially.Space between

mirror

14 and 16 only comprises when having the gas (for example, air) that approximates 1 refractive index, and effective path length equals the distance between

mirror

14 and 16 substantially.In comprising the embodiment that has greater than the dielectric layer 104 of 1 refractive index, by selecting the distance between the

mirror

14 and 16 and being chosen in dielectric layer 104 between described

mirror

14 and 16 or the thickness and the refractive index of any other layer forms the optical cavity with required optical path length.In one embodiment, mirror 14 can be offset in the certain position scope one or more position with output respective range color.For example, the voltage potential difference that can adjust between row and the row electrode makes mirror 14 be offset to a position of certain position scope with respect to mirror 16.Usually, by adjust Control of Voltage mirror position at utmost near the un-offset position in the path of mirror 14 (for example, for less deviation, as the peak excursion of the un-offset position of distance mirror 14 about 1/3 in skew).

In Fig. 7, represent each position one group of ad-hoc location 111-115 of removable mirror 14 with a line that extends to the arrow tip of indicating positions 111-115 from fixed mirror 16.Therefore, chosen distance 111-115 is so that calculate the thickness and the refractive index of dielectric layer 104.When removable mirror 14 is offset to each position (each position is corresponding to different distance L) among the 111-115 of position, modulator exports light to observation place 101, and its different spectral response is corresponding to the different colours of the incident light of being launched by described modulator 12.In addition, in the position 111, removable mirror 14 close enough fixed mirrors 16, so that interference effect can ignore, and modulator 12 serves as and reflects the mirror of the incident visible light of all colours (for example, white light) substantially.Because described small distance L is too little the optical resonance in visible band, so cause broadband mirror effect.Therefore, mirror 14 only serves as the reflecting surface with respect to visible light.

When the gap increased to post-11.2, because the clearance distance of the increase between

mirror

14 and 16 has reduced the reflectivity of mirror 14, modulator 12 showed gray tone.In the position 113, because resonance wavelength is outside visible range, so distance L makes described cavity with the interference mode operation but do not reflect the light of visible wavelength basically.

Along with distance L further increases, the peak spectral response of modulator 12 moves in the visible wavelength.Therefore, when removable mirror 14 is in position 114, modulator 12 reflect blue.When removable mirror 14 is in position 115, modulator 12 reflect green light.When removable mirror 14 is in un-offset position 116, modulator 12 reflect red.

When the display of interferometric modulator 12 is used in design, can form modulator 12 so that increase catoptrical color saturation.Saturation degree is meant the form and aspect intensity of colorama.High saturation color has distinctness and strong color mutually, and weak colour seems softer and gloomy mutually.For example, the laser of generation utmost point narrow range of wavelengths produces high saturated light.By contrast, general incandescent lamp bulb produces the red or blue white light that can have desaturation.In one embodiment, make the distance L of formed modulator 12, to increase the saturation degree of reflect color light corresponding to higher order of interference (for example, 2 grades or 3 grades).

One exemplary color monitor comprises redness, green and blue display element.Come in this display, to produce other color by changing by the relative intensity of the light that described redness, green and blue element produced.Can be perceived as other color by human eye such as former mixture of colours such as redness, green and bluenesss.Redness in this color system, green and blue relative value can be called the tristimulus value(s) of the red, green and blue photaesthesia part of relevant excitation human eye.In general, primary colors is saturated more, and the scope of the producible color of display is big more.In other embodiments, display can comprise having according to being different from the modulator 12 that redness, green and several groups of blue primary colors define several groups of colors of other color system.

Fig. 9 is for showing the chromatic diagram of the color that can be produced by the color monitor that comprises two groups of exemplary redness, green and blue interferometric modulators.Transverse axis and Z-axis define a colourity coordinate system, can describe spectral tristimulus value in described system.Particularly, 120 colors that show by the light of exemplary redness, green and blue interferometric modulators reflection.Point 122 expression white lights.Each point 120 is to the saturation degree of the distance of the point 122 of white light (for example, the distance 124 between the point 120 of the point 122 of white light and green glow) expression by the light of corresponding modulator 12 generations.By triangle trace 126 area surrounded corresponding to can be by being blended in the color gamut that light that 120 places a little produce produce.This color gamut can be called the colour gamut of display.

Another organizes the spectral response of exemplary modulator 12 point 128 expressions.Point 128 shows less than point 120 and the distance of point between 122 with distance between the white point 122, corresponding to the saturation degree of the saturation degree of putting 128 the light that modulator 12 produced less than the light that is produced corresponding to the modulator 12 of putting 120.Trace 130 shows the scope of the color that can produce by the light of mixing point 128.As shown in Figure 9, the area that the area that trace 126 is surrounded is surrounded greater than trace 130, thus schematically be presented at relation between the colour gamut size of the saturation degree of display element and display.

In reflected displaying device, the white light that uses these saturated interferometric modulators to produce often has relatively low intensity for observer, because only reflection incident wavelength among a small circle forms white light.By contrast, (for example, all substantially incident wavelengths) mirror has bigger intensity to the reflection wideband white, because the wider incident wavelength of its reflection.Therefore, use the incompatible generation white light of primary color set to cause compromise between the color saturation of the white light that display exported and colour gamut and the brightness usually with design reflectivity formula display.

Figure 10 is the side cross-sectional view of an exemplary multi-state interferometric modulator 140, and described interferometric modulator 140 can produce high saturated colorama and produce stronger white light relatively under another kind of state under a kind of state.Therefore, described exemplary modulator 140 will be exported the color saturation and the brightness decoupling of white light.Described modulator 140 comprises that one is positioned at the removable mirror 14 between two electrodes 102 and 142.Described modulator 140 also comprises second group of pillar 18a, and described pillar 18a forms on a side relative with pillar 18 of mirror 14.

In certain embodiments, each

mirror

14 and 16 can be a part that is used to carry out the lamination that is different from catoptrical function that defines reflecting body or reflection part.For example, in the exemplary modulator of Figure 10, mirror 14 is formed by one or more conduction reflecting material (for example aluminium) layer.Therefore, mirror 14 also can serve as conductor.Equally, mirror 16 can be formed so that carry out the function of electrode 102 by one or more layer of reflective material and one or more conductive material layer.In addition, each

mirror

14 and 16 can comprise that also one or more has the layer of other function, so that (for example) control influences the mechanical property of mirror 14 skews.In one embodiment, removable mirror 14 is suspended in the below of an extra deformable layer, as described in conjunction with Fig. 6 C.

Comprise among the embodiment of modulator of reflect red, green glow and blue light that one the modulator of reflection different colours uses different reflecting materials, so that improve the spectral response of these modulators 12.For example, in the modulator 12 that is configured to reflect red, removable mirror 14 can comprise gold.

In one embodiment, dielectric layer 144 can be positioned on the either side of conductor 142.

Dielectric layer

144a and 104 advantageously prevents the electrical short between the other parts of the current-carrying part of mirror 14 and modulator 140.In one embodiment, mirror 16 and the electrode 102 common reflection parts that form.

In described exemplary embodiments, when removable mirror 14 is in non-activation point, the optical path length L the when distance between fixed mirror 16 and the removable mirror 14 is non-reflection or " black " corresponding to modulator 140.In described exemplary embodiments, when driving removable mirror 14 towards fixed mirror 16, the optical path length L of the distance between fixed mirror 16 and the removable mirror 14 during corresponding to modulator 140 reflected white-light.In described exemplary embodiments, when driving removable mirror 14 towards conductor 142, the optical path length L of the distance between fixed mirror 16 and the removable mirror 14 during corresponding to coloramas such as modulator 140 reflections as redness, blueness or greens.In certain embodiments, the distance between removable mirror 14 of non-driving and the fixed mirror 16 equals the distance between removable mirror 14 of non-driving and the electrode 142 substantially.It is two modulators of locating around single removable mirror 14 that these embodiment can be considered.

When applying the first voltage potential difference between mirror 14 and electrode 102, mirror 14 is offset to define the first optical path length L corresponding to first driving condition towards mirror 16.Under this first driving condition, removable mirror 14 is than more close mirror 16 under non-driven state.When applying the second voltage potential difference between mirror 14 and electrode 142, mirror 14 leaves mirror 16 skews to define the second optical path length L corresponding to second driving condition.Under this second driving condition, removable mirror 14 is than farther apart from mirror 16 under non-driven state.In certain embodiments, by reaching at least a state in first driving condition and second driving condition applying the voltage potential difference between mirror 14 and the electrode 102 and between mirror 14 and electrode 142.In certain embodiments, select second voltage difference so that the required skew of mirror 14 to be provided.

As shown in figure 10, under first driving condition, mirror 14 is offset to by the indicated position of dotted line 152.In described exemplary modulator 140, under first driving condition, the distance between the

mirror

14 and 16 is corresponding to the thickness of dielectric layer 104.In described exemplary modulator 140, mirror 14 serves as the broadband mirror in this position, thereby reflects the light of all visible wavelengths substantially.Thereby when shining by wideband white, modulator 140 produces wideband white.

Under second driving condition, mirror 14 is offset to by the indicated position of dotted line 154.In described exemplary modulator 140, this distance is corresponding to colorama, blue light for example.Under non-driven state, mirror 14 is located as shown in figure 10.In un-offset position, mirror 14 keeps at a certain distance away with mirror 16 so that reflect visible light not substantially for example is " pass " or non-reflective state.Therefore, modulator 140 defines an interferometric modulator with at least three kinds of discrete states.In other embodiments, if need, can be chosen in the position of the removable mirror 14 these three kinds of states under so that generation on the same group color not comprises black and white.

In one embodiment, light enters modulator 12 and exports observation place 141 to by substrate 20.In another embodiment, put upside down lamination shown in Figure 10, its middle level 144 rather than layer 102 the most close substrate 20.In some this type of embodiment, can observe modulators 12 by lamination one side relative rather than by substrate 20 with substrate 20.In this type of embodiment, on ITO layer 102, form layer of silicon dioxide so that ITO layer 102 electrical isolation.

As mentioned above, have one and be used for can making the characteristic of described modulator control color saturation select and influence the characteristic decoupling of the brightness of white output at the separate state of a modulator 140 output white lights.Therefore, can select the distance of modulator 140 and other characteristic not to influence the white light that under first state, is produced so that high saturated color to be provided.For example, in an exemplary color monitor, can make one or more modulator 12 of formed redness, green and blue modulator 12 have optical path length L corresponding to higher order of interference.

Modulator 140 can use photoetching technique known in the affiliated technical field and form as described in modulator 12 as above.For example, can form fixed mirror 16 by one or more chromium layer of deposition on transparent substantially substrate 20.Can form electrode 102 by deposition one layer or more transparent conductor (for example ITO) on substrate 20.Described conductor layer is patterned to parallel band, and can forms plural electrode array.Removable mirror 14 can form by being deposited on one or more depositing metal layers (and described row electrode 102 quadratures) on pillar 18 tops and being deposited on the series of parallel band that the middle expendable material between the pillar 18 constitutes.The path that passes above-mentioned one layer or more can be provided so that etching gas (as xenon difluoride) can arrive as described in sacrifice layer.After etching away expendable material, described deformable metal layers and fixed bed are kept apart by an air-gap.Deformable layer can adopt has high conductivity and reflexive material, and for example aluminium, and these bands can form column electrode in a display device.Conductor 142 can form by the following method: deposition pillar 18a on removable mirror 14, and expendable material in the middle of the deposition between pillar 18a, deposition one layer or more conductor (for example aluminium) on the top of pillar 18a, and on described expendable material, deposit a conductive layer.After etching away described expendable material, described conductive layer can serve as electrode 142, and described electrode 142 is kept apart by second air-gap and mirror 14.Each air-gap provides a cavity, and mirror 14 can move in described cavity to reach each state of above-mentioned state.

Shown in Figure 10 was further, in exemplary modulator 140, conduction mirror 14 was connected to the line driver 24 of array control unit 22.In exemplary modulator 140,

conductor

102 and 142 is connected to the independent row in the row driver 26.In one embodiment, by between mirror 14 and

row conductor

102 and 142, applying the state that suitable voltage potential difference is selected modulator 140 according to reference Fig. 3 and 4 described methods.

Another the exemplary interferometric modulator 150 that provides more than two states is provided Figure 11 A-11C.In exemplary modulator 150, mirror 16 comprises that a reflection horizon and a conductive layer are so that carry out the function of the electrode 102 among Figure 10.Conductive layer 142 also can be subjected to the protection of the second dielectric layer 144a, and by above removable mirror 14, keeping the stayed surface 148 of a certain distance to support by second group of support member 18a.

Figure 11 A shows the non-driven state of modulator 150.As the modulator 140 of Figure 10, the mirror 14 of the exemplary modulator 150 of Figure 11 A-11C can be towards dielectric layer 104 skews (for example, downward), as be in the driving condition shown in Figure 11 B, and can (for example, upwards) be offset, shown in Figure 11 C along opposite or relative direction.This shift state that " makes progress " can be called " opposite driving condition ".

The person of ordinary skill in the field will understand, and this opposite driving condition can be realized with several different methods.In one embodiment, opposite driving condition is by using available electrostatic means to draw the additional charge plate of mirror 16 or conductive layer 142 to realize in the upward direction, as shown in Figure 11 C.Described exemplary modulator 150 consists essentially of two interferometric modulators around single removable mirror 14 symmetry location.This configuration allows the conductive layer of mirror 16 and each layer of conductive layer 142 to attract mirror 14 along relative direction.

In certain embodiments, additional conductive layer 142 can be used as electrode, so that overcome the static friction (static friction) that may form during closely near to or in contact with dielectric layer 104 at mirror 14.These power can comprise Van der Waals force or electrostatic force and other possible power that the person of ordinary skill in the field understood.In one embodiment, the potential pulse that is applied to the conductive layer of mirror 16 can make removable mirror 14 enter " normally " driving condition of Figure 11 B.Similarly, next potential pulse can be applied to conductive layer 142 to attract removable mirror 14 away from mirror 16.In certain embodiments, this type of potential pulse that is applied to conductive layer 142 can be used for quickening removable mirror 14 and recovering to be back to the non-driven state shown in Figure 11 A from the driving condition shown in Figure 11 B by drive removable mirror 14 towards opposite driving condition.Therefore, in certain embodiments, modulator 150 only can move in two states, i.e. the driving condition of the non-driven state of Figure 11 A and Figure 11 B, and can use conductive layer 142 as electrode to help to overcome static friction.In one embodiment, whenever modulator 150 when the activation point of Figure 11 C changes to the non-activation point of Figure 11 A, can drive conductive layer 142 as mentioned above.

The person of ordinary skill in the field will understand, and not be to need all these elements in each embodiment.For example, if in the operation of these embodiment, (for example, shown in Figure 11 C) accurate relative quantity is uncorrelated, and conductive layer 142 can be positioned on the different distance place apart from removable mirror 14 so in upwards skew.Therefore, may not need support component 18a, dielectric layer 144a or stayed surface 148 independently.In these embodiments, how far important not necessarily removable mirror 14 upwards is offset, but conductive layer 142 attracts mirror 14 through the location between in due course, so that (for example) rips modulator 12.In other embodiments, the position of the removable mirror 14 shown in Figure 11 C can cause the mutagenic desirable characteristics of interferometric modulator.In these embodiments, removable mirror 14 is along the accurate distance to skew can be relevant with the picture quality of improved device upward.

The person of ordinary skill in the field should be appreciated that, the material that is used to produce described layer 142,144a and stayed surface 148 does not need and is used to produce the materials similar of equivalent layer 16,105 and 20.For example, light does not need to pass layer 148.In addition, if conductive layer 142 is positioned at the position that does not arrive when removable mirror 14 is in deformation position upwards, modulator 150 can not comprise dielectric layer 144a so.In addition, being applied to the voltage of conductive layer 142 and removable mirror 14 can be based on above different and corresponding difference.

The person of ordinary skill in the field should be appreciated that, applied be used for the voltage that removable mirror 14 drives the non-driven state that is back to Figure 11 A from the driving condition of Figure 11 B can be different from removable mirror 14 from the non-driven state of Figure 11 A be urged to Figure 11 C upwards or the opposite required voltage of driving condition, because under these two states, conductive layer 142 can be different with distance between the removable mirror 14.These requirements can be depending on required application and side-play amount, and can consider that this announcement is definite afterwards by the person of ordinary skill in the field.

In certain embodiments, the amount of applied force or duration make it only increase interferometric modulator rate of transition between driving condition and non-driven state between conductive layer 142 and removable mirror 14.Owing to removable mirror 14 can be attracted to conductive layer 142 or conduction mirror 16 on the opposite side that is positioned at removable mirror 14, therefore can provide an extremely of short duration driving force to weaken the interaction of removable mirror 14 and opposite layer.For example, when driving removable mirror 14 so that its when interacting with fixing conduction mirror 16, the energy pulse of conductive layer 142 can be used for weakening the interaction of removable mirror 14 and fixed mirror 16 relatively, thereby makes removable mirror 14 be easier to move to non-driven state.

Figure 12 A and Figure 12 B are the system block diagram of an embodiment of demonstration one display device 2040.Display device 2040 can be (for example) cellular phone or mobile phone.Yet the same components of display device 2040 or its slight variations also can illustrate dissimilar display device, for example TV and portable electronic device.

Display device 2040 comprises a shell 2041, a display 2030, an antenna 2043, a loudspeaker 2045, an input media 2048 and a microphone 2046.Shell 2041 is made by the arbitrary technology in the known multiple manufacturing process of person of ordinary skill in the field usually, comprises injection moulding and vacuum forming.In addition, shell 2041 can be made by any material in the many kinds of materials, includes, but is not limited to plastics, metal, glass, rubber and pottery or its combination.In one embodiment, shell 2041 comprises the removable section (not shown) that can have different colours with other or comprise the removable section exchange of unlike signal, picture or symbol.

The display 2030 of exemplary display device 2040 can be any display in the many kinds of displays, comprises bistable display as described herein.In other embodiments, know as the person of ordinary skill in the field, display 2030 comprises: flat-panel monitor, for example above-mentioned plasma, EL, OLED, STN LCD or TFT LCD; Or non-tablet display, for example CRT or other tubular device.But, for the purpose of explanation present embodiment, display 2030 comprises interferometric modulator display as described herein.

Each assembly that in Figure 12 B, schematically shows an embodiment of exemplary display device 2040.Shown in exemplary display device 2040 comprise a shell 2041, and can comprise that other is at least partially enclosed within the assembly in the shell 2041.For example, in one embodiment, exemplary display device 2040 comprises a network interface 2027, and network interface 2027 comprises that one is coupled to the antenna 2043 of transceiver 2047.Transceiver 2047 is connected to processor 2021, and processor 2021 is connected to adjusting hardware 2052.Regulate hardware 2052 and can be configured to conditioning signal (for example, signal being carried out filtering).Regulate hardware 2052 and be connected to loudspeaker 2045 and microphone 2046.Processor 2021 also is connected to input media 2048 and driving governor 2029.Driving governor 2029 is coupled to frame buffer 2028 and array driver 2022, and array driver 2022 is coupled to array of display 2030.Power supply 2050 is powered to all component according to the designing requirement of particular exemplary display device 2040.

Network interface 2027 comprises antenna 2043 and transceiver 2047, so that exemplary display device 2040 can be communicated by letter with one or more devices by network.In one embodiment, network interface 2027 also can have some processing capacity, to reduce the requirement to processor 2021.Antenna 2043 is used to transmit and receive the antenna of signal for known any of person of ordinary skill in the field.In one embodiment, antenna transmits and receives the RF signal according to IEEE 802.11 standards (comprise IEEE 802.11 (a) and (b) or (g)).In another embodiment, antenna is according to bluetooth (BLUETOOTH) standard emission and reception RF signal.If be cellular phone, then antenna be designed to receive CDMA, GSM, AMPS or other and be used for the known signal that in the wireless cellular telephone network network, communicates.The signal that transceiver 2047 pre-service receive from antenna 2043 is so that these signals can be received and further be handled by processor 2021.Transceiver 2047 is also handled the signal that self processor 2021 receives, so that can be by antenna 2043 from exemplary display device 2040 these signals of emission.

In an alternate embodiment, transceiver 2047 can be substituted by a receiver.In another alternate embodiment, network interface 2027 can be substituted by the image source that can store or produce the view data to processor 2021 to be sent.For example, this image source can be digital video disk (DVD) or the hard disk drive that comprises view data or is the software module that produces view data.

The overall operation of processor 2021 common control example expressivity display device 2040.Processor 2021 automatic network interfaces 2027 or image source receive data, for example compressed view data, and described data processing become raw image data or a kind of form that is easy to be processed into raw image data.After this, the data after processor 2021 will be handled are sent to driving governor 2029 or frame buffer 2028 is stored.Raw data typically refers to the information of the picture characteristics of each position in sign one image.For example, these picture characteristics can comprise color, saturation degree and gray level.

In one embodiment, processor 2021 comprises microprocessor, CPU or is used for the logical block of the operation of control example expressivity display device 2040.Regulating hardware 2052 generally includes and is used for to loudspeaker 2045 transmission signals and from the amplifier and the wave filter of microphone 2046 received signals.Adjusting hardware 2052 can be the discrete component in the exemplary display device 2040, perhaps can incorporate in processor 2021 or other assembly.

Driver controller 2029 directly receives the raw image data that is produced by processor 2021 from processor 2021 or from frame buffer 2028, and with described raw image data reformatting suitably, with high-speed transfer to array driver 2022.Particularly, driving governor 2029 is reformatted as one with raw image data and has the data stream of a grating class form, is applicable to the chronological order that scans whole array of display 2030 so that it has one.After this, the information after driving governor 2029 will format is sent to array driver 2022.Although driving governor 2029 (for example lcd controller) usually as one independently integrated circuit (IC) be associated with system processor 2021, these controllers also can be implemented by multiple mode.It can be used as in the hardware embedded processor 2021, as in the software embedded processor 2021 or together fully-integrated with example, in hardware and array driver 2022.

Usually, the self-driven controllers 2029 of array driver 2022 receive the information after the format and video data are reformatted as one group of parallel waveform, and the parallel waveform per second of this group repeatedly is applied to from hundreds of of the x-y picture element matrix of display and is thousands of lead-in wires sometimes.

In one embodiment, driving governor 2029, array driver 2022 and array of display 2030 are applicable to the display of any kind as herein described.For example, in one embodiment, driving governor 2029 is a traditional display controller or a bistable state display controller (a for example interferometric modulator controller).In another embodiment, array driver 2022 is a legacy drive or a bistable state display driver (a for example interferometric modulator display).In one embodiment, driving governor 2029 integrates with array driver 2022.This embodiment is very common in the integrated system of for example cellular phone, wrist-watch and other small-area display equal altitudes.In another embodiment, array of display 2030 is a typical array of display or a bistable state array of display (a for example display that comprises an interferometric modulator array).

Input media 2048 makes the operation that the user can control example expressivity display device 2040.In one embodiment, input media 2048 comprises keypad (for example qwerty keyboard or telephone keypad), button, switch, touch sensitive screen, pressure-sensitive or thermosensitive film.In one embodiment, microphone 2046 is the input media of exemplary display device 2040.When using microphone 2046, can provide voice command to come the operation of control example expressivity display device 2040 by the user to these device input data.

Well-known various energy storing devices in the technical field under power supply 2050 can comprise.For example, in one embodiment, power supply 2050 is rechargeable accumulator, for example nickel-cadmium accumulator or lithium-ions battery.In another embodiment, power supply 2050 is regenerative resource, capacitor or solar cell, comprises plastic solar cell and solar cell coating.In another embodiment, power supply 2050 is configured to receive electric power from wall plug.

In certain embodiments, programmability is as indicated above resides in the driving governor in control, and this driving governor can be arranged on several positions of electronic display system.In some cases, the control programmability resides in the array driver 2022.The person of ordinary skill in the field will understand, and above-mentioned optimization is implemented in hardware that can any amount and/or component software and different configurations.

Although above detailed description shows, describes and pointed out to be applicable to the novel feature of the present invention of each embodiment, but should be understood that the person of ordinary skill in the field can form and the details to shown device or method make various omissions, substitute or change under the situation that does not break away from spirit of the present invention.To understand, the present invention can not provide the form of all features as herein described and benefit to embody, and this is to use or implement because some feature can be independent of further feature.Scope of the present invention should be defined by enclose claims but not above description.All meaning and interior changes of scope that fall into the counterpart of claims all will be included within the scope of claims.

Claims

1. display equipment, it comprises:

One first reflecting body;

One first electrode apart from described first reflecting body, one segment distance location; With

One is positioned second reflecting body between described first reflecting body and described first electrode, described second reflecting body can move between a non-activation point, one first activation point and one second activation point, wherein said first activation point is than more close described first reflecting body of described non-activation point, and wherein said second activation point is more farther than described first reflecting body of described non-activation point distance;

Wherein said first reflecting body comprises one second electrode and wherein said second reflecting body comprises a third electrode, the voltage potential that wherein said second electrode response applies between described second electrode and described third electrode is configured to described second reflecting body is driven towards described first activation point, the voltage potential that wherein said first electrode response applies between described first electrode and described third electrode is configured to described second reflecting body is driven towards described second activation point, and the voltage potential that applies between described first electrode and described second electrode of wherein said first electrode response is configured to drive described second reflecting body and leaves described first activation point.

2. device according to claim 1, wherein said first reflecting body is partially transparent at least.

3. device according to claim 1, wherein said first reflecting body comprises at least one layer of reflective material.

4. device according to claim 1, each electrode in wherein said second electrode and the described third electrode all comprises a conductive material layer.

5. device according to claim 1, wherein when described second reflecting body is in described first activation point, described device reflected white-light, wherein said device absorbs visible light substantially at described non-activation point place, and wherein when described second reflecting body is in described second activation point, the light in the visible wavelength region that described device optionally reflects with a color is associated.

6. device according to claim 1, wherein when described second reflecting body is in described second activation point, the light in the visible wavelength region that described device optionally reflects with a color is associated.

7. device according to claim 1, wherein when described second reflecting body was in described non-activation point, described device absorbed the incident visible light substantially.

8. device according to claim 1, it further comprises:

At least one electric connection in one processor, itself and described first electrode, described first reflecting body and described second reflecting body, described processor is configured to image data processing; With

One with the memory storage of described processor electric connection.

9. device according to claim 8, it further comprises one drive circuit, and described driving circuit is configured at least one signal is sent in described first electrode, described first reflecting body and described second reflecting body at least one.

10. device according to claim 9, it further comprises a controller, and described controller is configured at least a portion of described view data is sent to described driving circuit.

11. device according to claim 8, it further comprises an image source module, and described image source module is configured to described image data transmission to described processor.

12. device according to claim 11, wherein said image source module comprises at least one in a receiver, transceiver and the transmitter.

13. device according to claim 8, it further comprises an input media, and described input media is configured to receive the input data and described input data are sent to described processor.

14. device according to claim 1, wherein said first reflecting body comprises the dielectric layer of described first activation point that closes on described second reflecting body.

15. an optic modulating device, it comprises:

Be used for catoptrical first member;

Be used for catoptrical second member, described second reflecting member is configured to be positioned on the position in the second place on one second side of primary importance on one first side of a non-activation point, described non-activation point and described non-activation point; With

First align member, it is used for described second reflecting member is positioned at a position of the described second place on one second side of described primary importance on one first side of described non-activation point, described non-activation point and described non-activation point,

Wherein said first reflecting member comprises one second align member, described second align member is configured to described second reflecting member is driven towards described first activation point, and wherein said first align member is configured to described second reflecting member is driven towards described second activation point; Wherein when described second reflecting member is in described primary importance, described device reflected white-light,

Wherein said device absorbs visible light substantially at described non-activation point place, and wherein when described second reflecting member is in described second activation point, the light in the visible wavelength region that described device optionally reflects with a color is associated.

16. device according to claim 15, each self-contained reflection horizon of wherein said first and second reflecting members.

17. device according to claim 15, wherein each described align member comprises an electrode.

18. device according to claim 15, wherein said second reflecting member comprises described first align member.

19. device according to claim 15, it further comprises the member that is used to activate described first and second align members.

20. device according to claim 19, wherein said activating element comprises one drive circuit.

21. device according to claim 15, wherein said first reflecting member is configured to partially transparent.

22. device according to claim 15, wherein said first reflecting member comprises at least one layer of reflective material.

23. a display, it comprises modulator according to claim 15.

24. method that drives a MEMS devices, the travelling electrode that described MEMS devices comprises one first electrode, one second electrode and is positioned between described first electrode and described second electrode and be configured to move between at least three positions, described method comprises:

It is poor to apply one first voltage potential between described first electrode and described travelling electrode, so that from one not activation point drive described travelling electrode towards described first electrode with first activation point that contacts with a dielectric layer substantially, wherein said first activation point wherein produces one first attractive force than more approaching described first reflecting body of described not activation point between described travelling electrode and described dielectric layer;

It is poor to apply one second voltage potential between described first electrode and described travelling electrode, and between described second electrode and described travelling electrode, apply a tertiary voltage potential difference (PD), so that leave described first electrode and towards the described travelling electrode of described second electrode drive, wherein apply the described second voltage potential difference and cause between described travelling electrode and described first electrode, producing one second attractive force, and apply described tertiary voltage potential difference (PD) and cause between described travelling electrode and described second electrode, producing one the 3rd attractive force, and the wherein said second and the 3rd attractive force overcomes described first attractive force between described travelling electrode and described dielectric layer, leave described dielectric layer so that drive described travelling electrode; With

It is poor to apply one the 4th voltage potential between described second electrode and described travelling electrode, so that towards described second electrode drive to, second activation point, described second activation point is more farther than described first reflecting body of described not activation point distance with described travelling electrode.

25. method according to claim 24, wherein said first attractive force comprises a static friction.

26. method according to claim 24 wherein applies described first potential difference (PD) and further comprises reflected white-light.

27. method according to claim 24 wherein applies the described second and the 3rd potential difference (PD) and further comprises reflect color light.

28. method according to claim 24 wherein is lower than first potential difference (PD) of a first threshold and applies second potential difference (PD) that is lower than one second threshold values between described second electrode and described travelling electrode and comprise and absorb incident light substantially applying one between described first electrode and the described travelling electrode.

29. a method of making a multimode photomodulator, described method comprises:

Form one first reflecting body;

Form first electrode apart from described first reflecting body, one segment distance location; With

Form second reflecting body that is positioned between described first reflecting body and described first electrode, described second reflecting body can move between a non-activation point, one first activation point and one second activation point, wherein said first activation point is than more close described first reflecting body of described non-activation point, and wherein said second activation point is more farther than described first reflecting body of described non-activation point distance;

Wherein forming described first reflecting body comprises to form one second electrode and wherein form described second reflecting body and comprises and form a third electrode, wherein said second electrode is formed in response to a voltage potential that applies between described second electrode and the described third electrode described second reflecting body is driven towards described first activation point, wherein said first electrode is formed in response to a voltage potential that applies between described first electrode and the described third electrode described second reflecting body is driven towards described second activation point, and wherein said first electrode is formed and drives described second reflecting body in response to a voltage potential that applies between described first electrode and described second electrode and leave described first activation point.

30. comprising, method according to claim 29, each electrode that wherein forms described second electrode and described third electrode form a conductive material layer.

31. method according to claim 29 wherein forms described first reflecting body and comprises the dielectric layer that formation one closes on described first activation point of described second reflecting body.

32. a photomodulator, it is by method manufacturing according to claim 29.