CN100501492C - Device for machining an object by means of laser radiation - Google Patents

Device for machining an object by means of laser radiation Download PDF

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Publication number
CN100501492C
CN100501492C CNB2005800239736A CN200580023973A CN100501492C CN 100501492 C CN100501492 C CN 100501492C CN B2005800239736 A CNB2005800239736 A CN B2005800239736A CN 200580023973 A CN200580023973 A CN 200580023973A CN 100501492 C CN100501492 C CN 100501492C
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lens
object lens
imaging
equipment
light path
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CN1985207A (en
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M·汉夫特
D·穆尔霍夫
M·杰拉克
E·埃伯特
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Carl Zeiss Meditec AG
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Carl Zeiss Meditec AG
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Abstract

The invention relates to a device for machining an object (1) by means of laser radiation (32), in particular by using the photodisruption method. Said device comprises an observation device (13) for imaging the object (1) and a laser scanning device (15) by means of which the laser radiation (32) is passed over a predetermined sector (2) of the object (1) for scanning said sector. According to the invention, such a device comprises the observation device (13) with a first lens (14) for imaging the object (1); the laser scanning device (15) with a second lens (16), through which the laser radiation (32) is guided, wherein both lenses (14, 16) with regard to the dimension of the regions to be produced in the images and/or with regard to their focal intercept are different from each other; and means for alternately imaging the respective region of the object (1) in a first operating mode by the first lens (14) and in a second operating mode by the second lens (16). It is thus possible to use in both operating modes a lens (14 or 16) adapted to the intended imaging purpose.

Description

Equipment by means of the laser beam handled object
Technical field
The present invention relates to a kind of equipment by means of the laser beam handled object, it comprises finder and the laser scanning device that is used for object image-forming, utilize this scanister for energy input purpose with laser beam scanning ground through on the object or within the zone predesignated.
Background technology
In the prior art, the more known method and apparatus that are arranged with the laser beam handled object is for example in order to eliminate the method and apparatus that the defects of vision are used for cornea (Kornea) moulding.During processing desired energy be with pulsed laser irradiation in tissue, wherein ray scanning ground is organized separated through crystalline lens introducing there from described crystalline lens.
With this class eliminate that defects of vision ophthalmological surgery method is associated than new development, use ultra-short pulse laser in order to introduce energy, and be known in the crowd with the title of fs-LASIK.This state of development for example at people such as R.Kurtz " Femtosecond Laser CornealRefractive Surgery ", there is explanation among the Proc.SPIE 3591,209 (1999).
At this, laser beam focuses on the focus of a few micron number magnitudes in the cornea.Form plasma in focus, this plasma with the tissue vaporization of direct adjacency, plays the effect at this this tissue of position separating rapidly thus.
This interaction of laser radiation and tissue is called light and punctures (Photodisruption).Because puncturing, light is confined in the micro-little scope, thus can carry out accurate operation cutting within the eye, so that reach the purpose that the cornea tissue local finite separates.Undertaken by the arrangement that on purpose Disengagement zone is connected to each other, macroscopic cutting is possible, and the cornea partial volume of predesignating can be kept apart.Along with the taking-up of this partial volume, reached desired cornea refracting power and changed, thereby reached defects of vision correction.The method that is based upon light puncture basis is referred to as fs-LASIK below.
This method regulation, before fs-LASIK began, earlier by means of optical viewer, preferably microscope was checked object to be processed, and determined the parameter such as laser beam intensity, pulse train, the Cutting Length that will carry out and trend or the like processing procedure.Handle with laser scanning device then.
Generally to go the evaluation process result with optical viewer again.Carry out such as taking out additional work such as the correction volume downcut and wound care.
For the operation and the process that can make each method step becomes best and effective, hope mutually combines optical viewer and laser scanning device, make operating personnel not only when preparing, handle during and also when check gaze direction can remain to the eyepiece of optical viewer all the time.
But, in order to prepare at first to produce imaging, consider this imaging of subsequent treatment to make object analysis and select want on the handled object or within the zone become possibility, optical viewer and laser scanning device are combined just are difficult to solution.Wish to mould a zone of object, this zone will be obviously greater than zone to be processed for this reason.In addition, also all will be during watching through instrument commonly used at the enterprising line operate of object by optical viewer, this just requires that enough spaces are arranged between optical viewer and object.
In order to ensure this point, use a kind of sectional width (Schnittweite) that has〉optical viewer of the imaging system of 100mm, make that not only the enough big regional imaging of object becomes possibility, and also leave the space of on object, operating with instrument based on the distance between object lens and the object.
The processing stage then opposite, laser beam is targeted to object by object lens, require the distance between object and the object lens to keep short and small, although therefore big relatively aperture and on a large scale, object lens can be made with compact form, might remedy distance between object lens and the object with contact glass (Kontaktglas) in addition, this contact glass is used for fixing object, especially when described object is eyes.
For make these different and in a sense contradiction to the requirement of optical system on the one hand for the preparatory stage and on the other hand for the processing stage all reasonable, developed device with the variable imaging system of sectional width.For example in US 2003/0053219 A, set forth a kind of like this imaging device.
This imaging system has a bigger sectional width, comes from above-mentioned reason and is used to prepare and test mode.Opposite for tupe, sectional width is diminished by from the imaging light path, removing optical element.
Major defect in this disposal route and a kind of like this imaging system is, however the distance between object lens and the object is big not enough in preparation and test mode, stereoscopic observation is impossible, and object lens or last being placed on apart from the nearest lens of object must have very big diameter.
When the about 200mm of desirable sectional width for example, last is about 45mm apart from the near lens diameter of object.But, owing to the such diameter of anatomical reason hinders object lens to shift near object, because can when handling eyes, bump against with patient's nose or forehead at object lens under this size situation.
Summary of the invention
From this prior art, task of the present invention is further to develop this paper to begin to locate described that class device, the feasible regional imaging that not only will handle in more favourable mode on the ergonomics concerning observing in preparation and test mode but also in tupe.
This task of the present invention solves with a kind of equipment by means of the laser beam handled object, mainly comprises:
-have first object lens that are used for imaging object finder and
-having the laser scanning device of second object lens, laser beam passes described second object lens scanning ground by wanting the zone of processed object, wherein
Aspect the range size that-two object lens can illustrate in imaging and/or differing from one another aspect their sectional width, and
-exist to be used for the instrument that alternately the object respective regions carried out imaging in the neutralization of first mode of operation in second mode of operation by second object lens by first object lens.
Therefore the shortcoming of prior art is eliminated, because might in two mode of operations, use object lens that separate, that be complementary with at that time hope to go imaging now respectively, promptly on the one hand in first mode of operation (be referred to as below and prepare and test mode), the imaging mirror group that have the heavy gauge width, preferentially is used for the object area three-dimensional imaging can unhinderedly shift near object, and described zone is the same with processed zone at least big; In second mode of operation (being referred to as tupe below), the imaging mirror group with small section width can unhinderedly shift near object on the other hand, not only had been applicable to laser beam scanning but also was applicable to the imaging in processed zone during handling.
Preferably, present device is equipped with locating device so that can change the position of object with respect to two object lens, wherein prepare and test mode in object be in the focus of first object lens and in tupe object be in the focus of second object lens.
Therefore, between ready position object lens and object, there is enough big workplace distance, and obviously reduces in the another position spacing.
So, main invention conception is, laser scanning device and finder are interconnected, its mode be handle the time standby laser scanning device object lens replace the object lens of finder, wherein the scan function of laser scanning device object lens keeps, yet this object lens subsidiary being used for observes.
In order to make this become possibility, in the light path of laser scanning device, be useful on the outgoing mirror group of coming from object during handling and will pass through the light of laser scanning device object lens, and in the light path of finder, be provided with will with the corresponding input mirror group of this outgoing mirror group, make laser scanning device object lens replace during the tupe preparing and test mode in the finder object lens that are used to observe be used.
In order to transmit light to the input mirror group, there are optics and/or optoelectronics assembly from the outgoing mirror group.Advantageously, in the object lens of finder and the light path between the input mirror group controllable shutter is arranged, the light that can come from untapped finder object lens in tupe with this shutter blocks.
In addition, in the light path of the object lens of laser scanning device and input mirror group, be provided with shutter, this shutter prepare and test mode in block by light at these untapped laser scanning device object lens.
Like this, in corresponding work mode, avoided because the undesirable influence that wrong light causes imaging.
In a particularly preferred expansion scheme of present device, finder is configured to stereo microscope, mainly comprise:
-stereomicroscopy endoscope objective lens is as first object lens,
-two separation, enable the imaging light path that stereoscope presents,
-in each imaging light path, have respectively amplification converter, tube lens system (Tubuslinsensystem) and an eyepiece that is used to predesignate different imaging ratios and
-input mirror group.
The input mirror group can be made up of one or two ray beam splitter in principle, described ray beam splitter is implemented as ray beam splitter cube or ray beam splitter plate, and so designed, make light to export from the both direction input with at both direction respectively.Except for visual observation enters the image reflection the imaging light path, also might be other optical viewer by this way, for example the CCD-gamma camera carries out the output of part light.
Except producing pure overview function, obtain the device of image with CCD-gamma camera or other, also created the basis for other function.Like this, for example can remove to support the calibration process of tupe with thus obtained image.When setting up regulating loop to be purpose, the CCD-gamma camera constitutes main assembly with computing machine and suitable manipulater.
Preferably the input mirror group is made up of two ray beam splitters, respectively distributes a ray beam splitter wherein for each imaging light path, and respectively is arranged in there between amplification converter and the tube lens system.By selecting the allocation proportion (transmission/reflection ratio) in the layering of ray beam splitter, can change the brightness of image.
Recommendable is between two ray beam splitters shutter to be set, so that avoid because interfering the influencing each other that the light of input causes two imaging light paths.
If replace the stereo-inspection device, carry out monoscope with this optical viewing system and observe, then certainly also within the scope of the invention with optical viewing system.
In order to transmit light from laser scanning device to finder, optical module can be set to comprise lens, prism, ray director element and/or fiber optic line.
The light with passing the laser scanning device object lens that will send from object thus is sent to finder, and is input in the imaging light path by means of the input mirror group there.
In concrete expansion scheme, be used for can mainly comprising to the optical module that finder transmits light from laser scanning device:
-have the lens combination of rearmounted field lens, be used to produce from intermediate image by second object lens, the light beam that promptly comes from the laser scanning device object lens,
-lens combination is used at least one the imaging intermediate image at two imaging light paths of finder, and
-be used for the optical element of inflection and/or ray folding (Strahlfaltung).
In addition, can arrange optical focal distance setting system from laser scanning device at light to the transfer path of finder, be used to change the imaging ratio of focal length or intermediate image, this system for example comprises two lens or the lens combination that can change mutually on its position.
Like this, operating personnel just might go imaging to be processed and in this zone that will observe as required either large or smallly.
In addition, within the scope of the invention,, photoelectron subassembly is set in order to transmit light to finder from laser scanning device.Thereby, for example in tupe the imaging of object can be by means of second object lens, promptly in the photoelectron gamma camera, finish by means of the object lens of laser scanning device, this gamma camera mainly is to be made of video object lens and CCD-receiver.Be arranged in after the gamma camera is image signal processing apparatus and Pictur recording device, and be provided with the image that is used on Pictur recording device, to reproduce and be input at least one instrument that goes of two light paths of finder, also can in tupe, observe zone to be processed by this way by the eyepiece of finder even if make.
At this, can advantageously use the LC-display as Pictur recording device.
It is contemplated that in addition in order to transmit light from laser scanning device to finder, combination with one another ground uses optical module and photoelectron subassembly, perhaps also can exchange use selectively mutually.
In another special expansion scheme, present device is replenished with a kind of device, this device makes it possible to determine the relevant procedure parameter of handling, make it possible to determine the numerical value that characterizes object constituent material characteristic, and make it possible to collect the measured value that provides relevant object expansion or want the situation of processing region.
To this, for the message reflection that will so obtain in one or two imaging light path of finder, can there be other instrument, make operating personnel during tupe, can not only observe processed zone, and also obtain the information of relevant procedure parameter, size and/or material behavior simultaneously by eyepiece.
Relevant therewith, another is expanded possibility especially and is, finder is configured to stereo microscope according to the Greenough type.Under this microscopical situation, in each of two stereoscope imaging light paths, there are object lens, therefore can be advantageously the device that is used for determining the information of relevant procedure parameter, dimension of object or material behavior be arranged in space between these two object lens.
Description of drawings
Further set forth the present invention according to embodiment below.In the accompanying drawings,
Fig. 1 illustrates the principle signal with the equipment of laser beam handled object in the preparatory stage according to prior art,
The principle signal according to Fig. 1 of equipment processing stage that Fig. 2 being illustrated in,
Fig. 3 illustrates the principle signal of using the equipment of laser beam handled object according to the present invention in preparation and test mode, dispose and be used for exporting light and being input to the optical module that finder imaging light path goes from laser scanning device, described finder designs as stereo microscope
Fig. 4 is illustrated in the principle signal according to the present device of Fig. 3 in the tupe,
Fig. 5 illustrates equipment of the present invention and has other and be used for from laser scanning device output light and be input to the optical module that finder imaging light path goes, and described finder is as the stereo microscope design,
Fig. 6 illustrates present device, has to be used for exporting light and being input to the photoelectron subassembly that finder imaging light path goes from laser scanning device,
Fig. 7 illustrates a kind of expansion of present device, and finder is the stereo microscope according to the Greenough type design in this expansion, arranges the device that is used for gatherer process parameter, material property and/or dimension of object between the preceding object lens of this stereo microscope,
Fig. 8 illustrates a kind of specific embodiment of optical module and is transmitting the acting in conjunction of light time from laser scanning device to finder,
Fig. 9 illustrates a kind of expansion of present device, and the input mirror group is constructed to have the binocular beam splitter of the imaging light path output that is used for the CCD-gamma camera in this expansion,
Figure 10 illustrates the demonstration of Fig. 9 binocular beam splitter and implements, and comprises three groups of preferred regulations to allocation proportion,
Figure 11 exemplarily illustrates the layout of graticule (Zielmarke) in the intermediate image plane of equipment, and the object that described graticule is used for handling is relatively aimed at laser scanning device.
Embodiment
The primary clustering of a kind of equipment according to fs-LASIK handled object 1 shown in Figure 1, as known in the art.
Described object 1 is patient's eyes, will handle may also puncturing by light in the zone 2 on adjacent surface under the surface from described eyes.
In order to handle, use the lasing light emitter that produces the ultrashort pulse ray, laser scanning device is arranged in thereafter.It has been well-known that the document that corresponding device thereof begins to locate to provide at this paper also has other document, thereby there is no need to describe in detail light puncture method at this.
Equipment according to prior art is the preparatory stage that is positioned at processing in Fig. 1, and the result after also being used to check processing in this configuration.
Finder 3, microscope for example, be used for before processing procedure begins the fragment that comprises zone 2 of imaging object 1 at first either large or smallly, described regional 2 is processed subsequently, and operating personnel just might limit zone 2 and stipulate out such as processing parameters such as transmitted intensity, irradiation duration, pulse train and length partly like this.
Finder 3 has object lens 4, passes this object lens from the light of object 1 light path 5.
Ray beam splitter 6 and beam splitter system 7 are arranged in after the object lens 4.The laser beam 8 that is used to handle can be through 6 inputs of ray beam splitter; With beam splitter system 7 light path 5 is branched into part light path 5.1,5.2.In part light path 5.1,5.2, be provided with tube lens 9.1,9.2 and eyepiece 10.1,10.2.
By means of the lens combination 11 that can advance and produce in light path 5 transfers, can change the sectional width of the optical system that comprises object lens 4 and lens combination 11, as setting forth among US 2003/0053219 A1.Advance light path 5 if lens combination 11 as illustrated in fig. 1 is changeed, then for example carry out the imaging of object 1 with the sectional width of 100mm.This has following advantage, promptly first can imaging and observe and want handled object 1 in a big way, second between object 1 and object lens 4 space of useful instrumentation.
Laser ray source and laser scanning device did not put into operation in the preparatory stage of the processing procedure shown in Fig. 1.For the sake of clarity, effectively light path is represented with solid line in Fig. 1 and in other accompanying drawing, and the light path that reality does not have to use dots.
If processing procedure is ready to complete, device translates is to the tupe shown in Fig. 2.
In order to change, at first lens combination 11 is removed the sectional width of imaging mirror group thereby diminish from light path 5.Requiring in tupe has less sectional width, so that make the focal length between object lens 4 and the object 1 keep for a short time, thereby now no longer needs can remedy with contact glass with the space of instrumentation, for positioning object 1 this piece glass is necessary.
Subsequently lasing light emitter and laser scanning device are put into operation, laser beam 8 is input to light path 5 through ray beam splitters 6, passes object lens 4 and aims at objects 1, and scanning ground is by the zone 2 selected or move on zone 2, and carry out light puncture this moment in this zone.The carrying out of zone 2 and processing procedure watches by means of finder 3.
In the prior art shown in this individual major defect is arranged, promptly only just might observe by means of the monoscope imaging.
In order not only in ready mode but also in tupe, to use identical lens barrel visual (eyepiece 20.1,20.2 and tube lens system 19.1,19.2), in ready mode, might carry out stereo-inspection and satisfy following conditions in addition, promptly in ready mode (also at test mode), carry out imaging with the small section width with the imaging of heavy gauge width with in tupe, to further develop with equipment of the present invention in the prior art shown in Fig. 1 and Fig. 2, illustrate according to Fig. 3 to Fig. 8 below.
Shown on the principle among Fig. 3, present device comprises finder 13 that has first object lens 14 and the laser scanning device 15 that has second object lens 16.Finder 13 designs as stereo microscope, and each has an amplification converter 18.1,18.2, tube lens system 19.1,19.2 and eyepiece 20.1,20.2 in two imaging light paths 17.1,17.2.
According to adjustment with 18.1,18.2 pairs of imaging ratios of amplification converter, operating personnel can observe the either large or small scope of object 1 by eyepiece 20.1,20.2, select to be processed regional 2 and determine processing parameter based on his experience and knowledge the estimation to situation from this scope.
As Fig. 3 showed, object lens 14 had big relatively sectional width, for example greater than 100mm.
The object lens 16 of laser scanning device 15 be on the contrary with significantly little sectional width for example 5mm implement, thereby the diameter of these object lens can be implemented enough for a short time and object 1 is little of it can be remedied by contacting glass 21 as much as possible with intermediate space between the object lens 16.
According to the present invention's regulation, finder 13 and laser scanning device 15 are interconnective through optical couping device 22, and this coupling device is used for and will be sent to finder 13 from object 1 and the light that passes object lens 16.
In order to export the light that transmits from laser scanning device 15, laser scanning device is equipped an outgoing mirror group 23, and it is for example carried out as the ray beam splitter.
Corresponding is that input mirror group 24 is set in finder 13 therewith, and its preferred arrangements is between amplification converter 18.1,18.2 and tube lens system 19.1,19.2.Input mirror group 24 for example is to implement with ray beam splitter form equally, wherein ray beam splitter 25.1 be distribute to imaging light path 17.1 and another ray beam splitter 25.2 is distributed to imaging light path 17.2.
Can expect that coupling device 22 has various different allocation plans.In the scheme shown in Fig. 3, coupling device 22 comprises and is used for producing the lens combination 26 of intermediate image 27 and being used for this intermediate image 27 is imaged onto the lens combination 28 that imaging light path 17.1 and/or 17.2 goes.Director element 29 is used for the direction of the light path between lens combination 26 and lens combination 28 is changed.
In addition as can be seen from fig. 3, in the light path of imaging light path 17.1,17.2, shutter 30 is set, and between laser scanning device 15 and finder 13, shutter 31 is set, can alternately control two shutters, so as once will by object lens 14 to the light path of eyepiece 20.1,20.2 block (shutter 30) or will be from object lens 16 to eyepiece 20.1,20.2 light path blocking-up (shutter 31).
Shown in Figure 3 is prepare and test mode in present device.Object 1 is positioned at the focus of object lens 14 at this, and shutter 30 is opened, and operating personnel can observe object 1 and prepare processing procedure as mentioned above by eyepiece 20.1,20.2.
In order to avoid when this working method crosstalking or the influencing each other of undesirable imaging light path 17.1,17.2, another shutter 33 is set between ray beam splitter 25.1 and 25.2, this shutter can be used when needed with blocking.
Laser ray source and laser scanning device (not shown in Fig. 3) quit work, and this represents by the dotted line of beam guiding in laser scanning device 15.Shutter 31 is closed, and making does not have light to be sent to the imaging light path 17.1,17.2 of finder 13 through optical couping device 22 from laser scanning device 15.
If processing procedure be ready to complete and determine processing parameter, then equipment is from preparing and test mode is transformed into tupe, this is shown in Figure 4.
For this reason, at first on direction R with respect to object lens 14 and 16 mobile objects 1, make object 1 no longer be positioned at the focus of object lens 14 but be positioned at the focus of object lens 16.Can move by this way, the equipment that makes moves with respect to object 1, yet preferably object 1 (or patient) moves with respect to equipment or object lens 14 and 16.
In order to realize this point, locating device can be set, at this device place, be positioned at the focus of object lens 14 at the first terminal position object 1, be positioned at the focus of object lens 16 at the second terminal position object 1.Locating device does not illustrate in the accompanying drawings.It can dispose movable estrade, and estrade is connected with gearing.Reaching each terminal position is to control by the sensor of corresponding layout, and these sensors are connected to gearing through the control device that is used to out and close.
In case object 1 has left the visual field of object lens 14, shutter 30 just is closed by the control corresponding device and shutter 31 is opened.Just reach the imaging light path 17.1,17.2 of finder 13 through outgoing mirror group 23, lens combination 26 and lens combination 28 from light object 1, by object lens 16, make the intermediate image 27 on consequent, as to redirect to ray beam splitter 25.1 and the 25.2 beam splitter face, reach eyepiece 20.1,20.2 by lens cone system 19.1,19.2, operating personnel observe object 1 or to be processed regional 2 by object lens 16 from now on.
For processing procedure is begun, laser scanning device 15 is put into operation, consequent laser beam 32 is directed to object lens 16 in the beam splitter layering of the output unit 23 that is embodied as the execution of ray beam splitter, and passes the zone 2 that these object lens scan the ground process or pass through object.The carrying out of processing procedure followed the tracks of by object lens 16 by operating personnel.
Use present device, can prepare and object 1 is observed on test mode neutral body ground, and operating personnel also can be by carrying out identical, be used for eyepiece 20.1, the 20.2 tracking processing procedures of stereo-inspection in preparation or inspection period.
If relatively moving between object 1 and the present device designs like this, the equipment that makes keeps static, and object 1 moves on direction R, then from prepare and test mode when tupe is changed and during reverse conversion operating personnel also its gaze direction can be remained on eyepiece 20.1 and 20.2.
Might in two mode of operations, use object lens 14 or 16 that are fit to special hope to remove imaging object 1 respectively with this equipment, in other words on the one hand prepare and test mode in reach the stereoscope imaging during at the heavy gauge width, in tupe, reach imaging on the other hand with less sectional width, make it possible to advantageously keep big spacing and keep little spacing in preparation and test mode between corresponding object lens and object 1 in tupe, this spacing can remedy by contacting glass 15.
As setting forth, can arrange coupling device 22 in every way.
Like this, in according to one of Fig. 5 expansion modification, additional arrangement has pancratic optical system 34 between outgoing mirror group 23 and input mirror group 24, and this system is used for during tupe looking like ratio presenting at regional 2 o'clock and change over.
Except being used for from laser scanning device 15 to finder 13 transmits the pure optical tooling of light, also given application photoelectron subassembly as shown in Figure 6.
At this object 1 or zone 2 at first are imaged onto on the CCD-receiver 36 with video object lens 35.At this situation video object lens 35 and CCD-receiver 36 are assemblies of photoelectron gamma camera.
In addition, as showing symbolically that in Fig. 6 image signal processing apparatus 37 and Pictur recording device 38 are arranged in after the CCD-receiver 36.Pictur recording device 38 for example can be used as the LC-display and designs.
The imaging that produces on Pictur recording device 38 is input in the imaging light path 17.1,17.2 through lens combination 39 and input mirror group 24, and the input mirror group preferably can be made up of two ray beam splitters 25.1 and 25.2 as setting forth.
In an expansion scheme of the present device shown in Fig. 7, stereo microscope according to Greenough (lattice Reno) type is set as finder 13.Such stereo microscope has preceding object lens 40 or 41 in each of two observation light paths that incline towards each other.
Owing to incline towards each other and between two imaging light paths 17.1,17.2, produce untapped space, utilize this space to lay to be used to gather down the device 50 of column data according to the present invention:
-procedure parameter,
-measure numerical value, described numerical representation method constitutes the material behavior of object 1, and/or
-length measurements is used for determining to relate to the data of regional 2 sizes.
The at first information translation of optically detecting like this is become electronic signal, continue to be sent to the image signal processing apparatus of crossing for this expansion scheme corresponding modify 37 through signal path 42, convert the receivable information of vision to and be input to one or two imaging light path 17.1 and 17.2 through input mirror group 24 by means of Pictur recording device 38.
Thereby in two mode of operations, use object lens 14 and 16 imagings that obtain, and for example be incorporated into the information of the α-numerical value that goes in these imagings in addition for being not only of operating personnel's use.
The collection of these information and input also can be carried out separately under the situation of the imaging of no object 1.
Be optical module and shown in Fig. 8, mainly comprising transmitting the coefficient specific enforcement of light to finder 13 from laser scanning device 15:
-optical module 43 and field lens 44, they will be merged into intermediate image 45 from the light beam of laser scanning device (not shown at this) object lens 16, and
-optical module 46, it is incorporated in imaging light path 17.1,17.2 through input mirror group 24 intermediate image 45 and is incorporated into the tube lens system 18.1,18.2 (not shown at this) of finder 13 thus.
Mirror 47,48 and 49 makes the ray trend can adapt to the space situation of predesignating.
Fig. 9 copies Fig. 5 that a kind of expansion scheme of present device is shown, and input mirror group 24 has the output of the part light path that is registered on the CCD-gamma camera 51 as the design of binocular beam splitter in this expansion scheme.
Not only can prepare and test mode with this expansion scheme, and can realize imaging on object 1 or zone 2 to the CCD-gamma cameras 51 at tupe.For example can support the calibration process of tupe with the imaging of acquisition like this.
Be the details of input mirror group 24 among Fig. 9 shown in Figure 10 a.This can be seen that be assigned on three passage K1, K2 and the K3 from the light of object 1, K1 and K2 passage are distributed to tube lens system 19.1 or 19.2 (comparison diagram 9) from described passage, the K3 passage is distributed to CCD-gamma camera 51.
By the allocation proportion (transmission/reflection) in the ray beam splitter layering 52 and 53 of suitable selection ray beam splitter 25.1 or 25.2, can be with the brightness optimization of imaging, wherein preparing and the optimal brightness of the imaging that test mode is obtained by object 1 can be different from the desired brightness of tupe.
To this, in the table of Figure 10 b, provide to demonstration three preferred setting T1, T2 and T3 that are used for allocation proportion.
Reach imaging with setting T1 in preparation and test mode (through object lens 14 or 16) with optimal brightness.Transmission is relative big at this, and the image that produces through passage K1 and K2 has identical brightness.
The brightness value of the imaging that obtains at tupe (through object lens 16) has deviation to this.Advantageously, can use two ray beam splitters 25.1 and 25.2 that have the same allocated ratio by this way.
Brightness is identical to each other for the image that obtains at tupe with setting T2.When setting T3, prepare and test mode just as the imaging that reaches same brightness at tupe.Yet, on ray beam splitter 25.1 or 25.2, need different allocation proportions for this reason.
Depend on which of these selections hope want, draw the setting of allocation proportion.Here it may be noted that the little or loss-free layering of presumed loss in given example in advance with considering.If the absorption of beam splitter layering reaches vital amount, then allocation proportion has some changes in detail.
When making equipment operation of the present invention,, require to position with respect to 15 pairs of objects 1 of laser scanning device in order to prepare handled object 1.In addition, given position and physical location can be compared in order to make operating personnel, preferably visual object 1 is with respect to the position of reference point on the equipment.Such reference point can realize that this graticule is coated on the transparent panel that is placed in the intermediate image plane by graticule 54.Show suitable intermediate image position at Figure 11 with demonstrating.The plate that is provided with graticule 54 can be stood in the intermediate image 27 of coupling device 22 like this or stand in the intermediate image of eyepiece 20.1,20.2.
In addition, also can pass through the visual reference point of display 38 (referring to Fig. 7).For visual object 1 can be imagined various realizations.Some object 1 has a kind of structure, can describe the point of some signs in this structure.Under the situation of patient's eyes, just can select pupil center as reference.Another kind may be to set up artificial mark.
After object 1 to be processed is located with respect to scanister 15, carry out the procedure parameter collection of tupe alternatively.If object 1 is eyes (Pachymetrie), for example just can remove to determine corneal thickness with the confocal microscopy optical principle.Other parameter is determined such as the also available such device of epithelial thickness.
The another kind of possibility of gatherer process parameter is to use the detecting device of interferometry.Like this, for example just can carry out OCT (Optical CoherenceTomography optical coherence tomography) with the device of interferometry.
Reference numerals list
1 object
2 zones
3 finders
4 object lens
5 light paths
5.1,5.2 part light paths
6 ray beam splitters
7 beam splitter systems
8 laser beams
9.1,9.2 tube lenses
10.1,10.2 eyepieces
11 set of lenses
13 finders
14 object lens
15 laser scanning devices
16 object lens
17.1,17.2 imaging light paths
18.1,18.2 amplification converters
19.1,19.2 tube lens systems
20.1,20.2 eyepieces
21 contact glass
22 coupling devices
23 outgoing mirror groups
24 input mirror groups
25.1,25.2 ray beam splitters
26 lens combination
27 intermediate images
28 lens combination
29 director elements
30,31 shutters
32 laser beams
33 shutters
34 optical systems
35 video object lens
36 CCD-receivers
37 image signal processing apparatus
38 Pictur recording devices
39 lens combination
Object lens before 40,41
42 signal paths
43 optical modules
44 field lenses
45 intermediate images
46 optical modules
47,48,49 mirrors
50 image data devices
51 CCD-gamma cameras
52,53 ray beam splitter layerings
54 graticules
55 intermediate images
K1, K2, K3 passage
T1, T2, T3 predesignates allocation proportion
The R direction

Claims (20)

1. by means of the equipment of laser beam handled object (1), comprise
-have first object lens (14) that are used for object (1) imaging finder (13) and
-having the laser scanning device (15) of second object lens (16), laser beam (8) passes described second object lens (16) scanning ground by wanting the zone (2) in the handled object (1), wherein
Aspect the range size of the object (1) that-two object lens (14,16) can illustrate in imaging and/or differing from one another aspect their sectional width, and
-be useful on alternately the instrument that in second mode of operation, object (1) is carried out imaging by second object lens (16) in the neutralization of first mode of operation by first object lens (14).
2. equipment as claimed in claim 1 is characterized in that,
In order to change the position of object (1), locating device is arranged, wherein with respect to two object lens (14,16)
-object in first mode of operation (1) be positioned at first object lens (14) focus and
-object in second mode of operation (1) is positioned at the focus of second object lens (16).
3. equipment as claimed in claim 1 or 2 is characterized in that,
-in the light path of laser scanning device (15),, outgoing mirror group (23) is arranged for from the zone (2) of object (1) and pass the light of second object lens (16),
-in the light path of finder (13), the light of this outgoing mirror group (23) output of serving as reasons is provided with input mirror group (24),
-in order to transmit light to input mirror group (24), optics or photoelectron subassembly are arranged from outgoing mirror group (23).
4. equipment as claimed in claim 3 is characterized in that,
Described outgoing mirror group (23) is embodied as the ray beam splitter.
5. equipment as claimed in claim 3 is characterized in that,
In-the light path between first object lens (14) and input mirror group (24) shutter (30) is set, this shutter blocks the light from first object lens (14) in second mode of operation, and/or
In-the light path between second object lens (16) and input mirror group (24) shutter (31) is set, this shutter blocks the light that comes by second object lens (16) in first mode of operation.
6. equipment as claimed in claim 1 is characterized in that,
Described finder (13) is constructed to stereo microscope, and comprises:
-the first object lens (14),
-two separation, enable the imaging light path (17.1,17.2) that solid presents, and in two imaging light paths (17.1,17.2), comprise respectively
-amplification converter (18.1,18.2) is used for predesignating different amplifications during first mode of operation,
-tube lens system (19.1,19.2),
-eyepiece (20.1,20.2), and
-by two ray beam splitters (25.1,25.2) the input mirror group (24) that forms, wherein the first ray beam splitter (25.1) is arranged in the first imaging light path (17.1), the second ray beam splitter (25.2) is arranged in the second imaging light path (17.2), these two ray beam splitters are arranged in amplification converter (18.1,18.2) with tube lens system (19.1,19.2) between.
7. equipment as claimed in claim 6 is characterized in that,
Shutter (33) is set between two ray beam splitters (25.1,25.2), and this shutter stops influencing each other of described imaging light path (17.1,17.2) in first mode of operation.
8. equipment as claimed in claim 1 is characterized in that,
In order to transmit light to finder (13), the optical module that is made of lens, prism and inflection element is set from laser scanning device (15).
9. equipment as claimed in claim 8 is characterized in that,
Described optical module comprises
-the light beam that is used for coming by second object lens (16) is merged into the lens combination (26) of intermediate image (27),
-be used for the lens combination (28) of middle image (27) being carried out imaging at the imaging light path of finder (13),
-be used for the folding optical element of inflection or ray.
10. as the described equipment in one of claim 8 or 9, it is characterized in that,
Arrange in the transfer path of light to be used to change the optical system (34) that focal length also changes over the picture ratio thus that this optical system has two lens that can change mutually or lens combination on its position.
11. equipment as claimed in claim 1 is characterized in that,
In order to transmit light to finder (13), photoelectron subassembly is set, wherein from laser scanning device (15)
-in second mode of operation, the imaging of object (1) is to finish to CCD-receiver (36) through video object lens (35) by means of second object lens (16),
-image signal processing apparatus (37) and Pictur recording device (38) be disposed in CCD-receiver (36) afterwards and
-be useful on the instrument in the imaging light path (17.1,17.2) that will be input to finder (13) at the image that Pictur recording device (38) upward reproduces, make
-in second mode of operation, can see the image that produces by means of second object lens (16) by eyepiece (20.1,20.2).
12. equipment as claimed in claim 11 works being characterised in that,
The LC-display is set as Pictur recording device (38).
13. equipment as claimed in claim 1 is characterized in that,
In order to transmit light to finder (13), both can use optical module also can use photoelectron subassembly and can exchange mutually selectively from laser scanning device (15).
14. equipment as claimed in claim 1 is characterized in that,
Harvester is arranged, be used for gathering
The procedure parameter of-relevant processing procedure,
-relevant the numerical value that constitutes the material behavior of object (1), or
The numerical value of-relevant object (1) size.
15. equipment as claimed in claim 14 is characterized in that,
Setting according to the stereo microscope of lattice Reno type as finder (13), it has two preceding object lens (40,41), from described preceding object lens (40,41) distribute one to give imaging light path (17.1 respectively, 17.2), described harvester (50) is disposed in the space between two preceding object lens (40,41).
16. equipment as claimed in claim 1 is characterized in that,
Being provided for will
The procedure parameter of-relevant processing procedure,
-relevant the numerical value that constitutes the material behavior of object (1), or
The numerical value of-relevant object (1) size
Be input to the instrument in one or two imaging light path (17.1,17.2) of finder (13).
17. equipment as claimed in claim 1 is characterized in that,
Be provided for the instrument of output, and this part light path is registered on the CCD-gamma camera (51) for the imaging of object (1) from the part light path of object (1) and the light by first and second object lens (14,16).
18. equipment as claimed in claim 1 is characterized in that,
Have and be used for the instrument of visual object (1) with respect to the position of reference point.
19. equipment as claimed in claim 18 is characterized in that,
Described reference point is configured to graticule (54).
20. equipment as claimed in claim 19 is characterized in that,
Described graticule (54) is fixed on the optical sheet, and this optical sheet is positioned in the intermediate image of imaging light path.
CNB2005800239736A 2004-07-16 2005-07-12 Device for machining an object by means of laser radiation Active CN100501492C (en)

Applications Claiming Priority (3)

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DE102004034952.5 2004-07-16
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CN102798981B (en) * 2012-08-24 2015-06-17 深圳市麟静科技有限公司 Biomimetic 3D (three dimensional) stereoimaging system
US11400311B2 (en) 2016-06-17 2022-08-02 Gensight Biologics Device for illuminating an object with a controlled light intensity and associated method
WO2018172916A1 (en) * 2017-03-22 2018-09-27 Novartis Ag Reconfigurable surgical microscope
DE102017108371B4 (en) * 2017-04-20 2020-08-27 Carl Zeiss Meditec Ag Medical optical display system and method for operating the same
DE102018218569A1 (en) * 2018-10-30 2020-04-30 Carl Zeiss Microscopy Gmbh Greenough-type stereomicroscope, optical assembly for adjusting a stereo angle in a greenough-type stereomicroscope and zoom system for a greenough-type stereomicroscope

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