CN100485443C - Open hole-based diffractive light modulator - Google Patents
Open hole-based diffractive light modulator Download PDFInfo
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- CN100485443C CN100485443C CNB200510120099XA CN200510120099A CN100485443C CN 100485443 C CN100485443 C CN 100485443C CN B200510120099X A CNB200510120099X A CN B200510120099XA CN 200510120099 A CN200510120099 A CN 200510120099A CN 100485443 C CN100485443 C CN 100485443C
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- reflection part
- perforate
- reflection
- light
- base component
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1828—Diffraction gratings having means for producing variable diffraction
Abstract
This invention relates to a diffractive light modulator. Particularly, the invention relates to an open-hole based diffractive light modulator. In the modulator, a lower reflective part is provided on a base member and open holes are formed through an upper micromirror raised from the base member so that one pixel is formed using one element having the ribbon-shaped upper micromirror.
Description
Technical field
A kind of diffractive light modulator of relate generally to of the present invention, more particularly, the present invention relates to a kind of diffractive light modulator based on perforate, the bottom reflection part wherein is set on base component, form perforate by top minitype reflector, make and use a unit to form a pixel with this top minitype reflector shape from the base component projection.
Background technology
Usually, the advantage of optical signalling treatment technology is, and is different with the conventional digital information processing technology that can not handle mass data in real time, with parallel mode fast processing mass data.To binary phase filter, optical logic gate, light amplifier, image processing techniques, optical device and adopt the design and the production run of the photomodulator of spatial light modulation technology to study.
Spatial light modulator is applied to optical memory, optical display spare, printer, optical interconnection and holographic field, and studies, and adopts its display device with exploitation.
Reflection deformation diffractive light modulator 10 implementation space photomodulators shown in Figure 1.People such as Bloom disclose this modulator 10 in the 5th, 311, No. 360 United States Patent (USP)s.Modulator 10 comprises a plurality of reflection deformed belts 18, and reflection deformed belt 18 is based on the reflecting surface part, and is floating empty on the top of silicon substrate 16 and disconnected from each otherly open rule at interval.Insulation course 11 is deposited on the silicon substrate 16.Then, deposition of silica diaphragm 12 and low stress nitride silicon fiml 14.
Utilize deformed belt 18 graphical nitride films 14, the etching part silica membrane 12 then, thereby utilize nitride structure 20 that deformed belt 18 is remained on the oxide-isolation layer 12.
In order to modulate single wavelength X
0Light, the design modulator so that the thickness of deformed belt 18 and oxide interlayer 12 is respectively λ
0/ 4.
Be subjected to the restriction of the reflecting surface 22 of each deformed belt 18 and the vertical range (d) between the substrate 16, by between deformed belt 18 (as the reflecting surface of the deformed belt 18 of first electrode) and substrate 16 (at the conductive layer 24 that the downside of substrate 16 forms), applying voltage, control the grating amplitude of modulator 10 as second electrode.
Be not applied at photomodulator under the non-deformation state of voltage, the grating amplitude is λ
0/ 2, and the total round trip path difference between deformed belt and the substrate beam reflected is λ
0Therefore, strengthened catoptrical phase place.
Therefore, under deformation state not, in the 10 reflection incident light time of modulator, modulator 10 is as plane mirror.In Fig. 2, Ref. No. 20 is represented the incident light of modulator 10 reflections under the deformation state not.
When applying correct voltage between deformed belt 18 and substrate 16, electrostatic force makes deformed belt 18 move down towards the surface of substrate 16.At this moment, the grating amplitude changes to λ
0/ 4.Total round trip path difference is half of wavelength, and the destroyed property of the light interference of the light of deformed belt 18 reflections and substrate 16 reflections.
Utilize this interference, modulator diffraction incident light 26.In Fig. 3, Ref. No. 28 and 30 is illustrated respectively under the deformation state, with+/-light beam that diffraction pattern (D+1, D-1) is interfered.
Yet the photomodulator of Bloom invention adopts electrostatic methods, the position of control minitype reflector, its shortcoming is, operating voltage higher (being generally about 30V), and the voltage that is applied and the relation between the displacement be not linear, therefore controls the reliability bad luck of light.
The photomodulator that the patent of Bloom is described can be with the device that acts on display image.In this case, minimum two adjacent cells can form a pixel.Certainly, 3 unit can form a pixel, and perhaps 4 or 6 unit can form a pixel.
Yet the photomodulator that the patent of Bloom is described is being restricted aspect the realization miniaturization.That is, the limitation of photomodulator is that the width of formed its unit is not less than 3 μ m, and the interval between the formed unit is not less than 0.5 μ m.
In addition, two unit of minimum needs constitute diffraction pixel, therefore are being restricted aspect this miniaturization of devices.
Summary of the invention
Therefore,, propose the present invention, and the purpose of this invention is to provide a kind of diffractive light modulator, wherein use as few as a deformed belt unit and form a pixel, miniaturization product thus in order to solve the above-mentioned problems in the prior art.
To achieve these goals, the invention provides a kind of diffractive light modulator, comprising: base component based on perforate; First reflection part, support by base component, and comprise the center section that separates with base component, feasible qualification interval therebetween, towards base component and separate with it and as the first surface of reflecting surface with the reflection incident light, and by formed first reflection part so that pass its at least one perforate by incident light; Second reflection part, between first reflection part and base component, described second reflection part separates with first reflection part, and comprises towards the reflecting surface of first reflection part, with the incident light of reflection by described at least one perforate; And actuating unit, be used for moving the center section of first reflection part relative to second reflection part, changing the diffraction light intensity, this diffraction light uses the light that is reflected from first reflection part and second reflection part to form.
In also one side of the present invention, first reflection part is across the groove that is formed on the base component, side wall supports second reflection part of the groove of base component, to become parallel spaced-apart relation with first reflection part, second reflection part towards or removable away from first reflection part, with the incident light of reflection by perforate; And actuating unit moves second reflection part with respect to first reflection part, and to change the diffraction light intensity, this diffraction light uses from the light of first reflection part and the reflection of second reflection part and forms.
In addition, the invention provides diffractive light modulator, comprise base component based on perforate; Arrange a plurality of first reflection parts that form array, each first reflection part part therebetween separates from base component, so that form betwixt at interval, each first reflection part is all supported by base component, each first reflection part all have leave base component towards reflecting surface with the reflection incident light, and each first reflection part all is formed with at least one perforate and passes through incident light so that pass it; Second reflection part, between first reflection part and base component, so that limit at interval with respect to first reflection part, and second reflection part has reflecting surface with the incident light of reflection by perforate; And a plurality of actuating units, be used for the center section that mobile phase is answered first reflection part, to change the diffraction light intensity, this diffraction light uses from the light of first reflection part and the reflection of second reflection part and forms.
In another aspect of this invention, first reflection part is across the groove that is limited by base component, described second reflection part is arranged and is formed array, and by the supporting of the recess sidewall of base component, to become parallel spaced relation with corresponding first reflection part, second reflection part towards or removable away from first reflection part, with the incident light of reflection by perforate; Described actuating unit moves corresponding second reflection part with respect to first reflection part, and to change the diffraction light intensity, this diffraction light uses from the light of first reflection part and the reflection of second reflection part and forms.
In addition, the invention provides the display device of use, comprise radiative light source based on the diffractive light modulator of perforate; Based on the diffractive light modulator of perforate, modulating the incident light is to generate diffraction light; Optics is used for the incident light from light emitted is applied to diffractive light modulator based on perforate; Filter optics, be used for from selecting the diffraction light of expectation level by the diffraction light of modulating based on the diffractive light modulator of perforate, make to pass it by selected diffraction light; And projection and scanning optical parts, be used on screen, scanning by filtering the diffraction light of optics.Diffractive light modulator based on perforate comprises base component; Be arranged as a plurality of first reflection parts that form array, each first reflection part is supported by base component, make and between the middle part of first reflection part part and base component, form at interval, and each first reflection part has the perforate that forms therein, make and pass it, and reflecting surface is with the reflection incident light by light; Second reflection part, by the base component supporting, described second reflection part and first reflection part are separated, and described second reflection part comprises reflecting surface, with the incident light of reflection by the perforate of first reflection part; And a plurality of actuating units, be used for moving the center section of corresponding first reflection part with respect to second reflection part, to change the diffraction light intensity, this diffraction light uses from the light of first reflection part and the reflection of second reflection part and forms.
In addition, the invention provides diffractive light modulator, comprise substrate based on perforate; The insulation course that on substrate, deposits; At least one sacrifice layer that on insulation course, deposits; The reflection part of placing on insulation course is placed this reflection part with the reflection incident light; Be positioned at the supporting at least one sacrifice layer, form first perforate by this supporting; Be placed on the minitype reflector in the described supporting, this minitype reflector has reflecting surface with the reflection incident light, and second perforate that forms in minitype reflector with corresponding to first perforate, is passed it and passed through incident light; And at least one actuating unit, with when when it applies voltage, move the center section of supporting, change the diffraction light intensity thus, this diffraction light is to use and forms from the light of minitype reflector and reflection part reflection.
Description of drawings
According to the detailed description of doing below in conjunction with accompanying drawing, can more be expressly understood above-mentioned and other purposes, feature and other advantages of the present invention, accompanying drawing comprises:
Fig. 1 illustrates according to conventional art, adopts the grating light modulator of electrostatic methods;
Fig. 2 is illustrated in not under the deformation state, adopts the incident light of the grating light modulator reflection of electrostatic methods according to conventional art;
Fig. 3 is illustrated under the deformation state that electrostatic force causes, according to the incident light of conventional art by the grating light modulator diffraction;
Fig. 4 a is according to the first embodiment of the present invention, the skeleton view based on the diffractive light modulator of perforate that part is separated;
Fig. 4 b is according to a second embodiment of the present invention, the skeleton view based on the diffractive light modulator of perforate that part is separated;
Fig. 4 c is an a third embodiment in accordance with the invention, the skeleton view based on the diffractive light modulator of perforate that part is separated;
Fig. 4 d is an a fourth embodiment in accordance with the invention, the skeleton view based on the diffractive light modulator of perforate that part is separated;
Fig. 4 e is according to a fifth embodiment of the invention, the skeleton view based on the diffractive light modulator of perforate that part is separated;
Fig. 4 f is according to a sixth embodiment of the invention, the skeleton view based on the diffractive light modulator of perforate that part is separated;
Fig. 4 g is according to a seventh embodiment of the invention, the skeleton view based on the diffractive light modulator of perforate that part is separated;
Fig. 4 h is according to the eighth embodiment of the present invention, the skeleton view based on the diffractive light modulator of perforate that part is separated;
Fig. 4 i is according to the ninth embodiment of the present invention, the skeleton view based on the diffractive light modulator of perforate that part is separated;
Fig. 4 j is according to the tenth embodiment of the present invention, the skeleton view based on the diffractive light modulator of perforate that part is separated;
Fig. 5 illustrates the 1-D array structure based on the diffractive light modulator of perforate according to the first embodiment of the present invention;
Fig. 6 illustrates the 2-D array structure based on the diffractive light modulator of perforate according to a seventh embodiment of the invention;
Fig. 7 illustrates use according to an embodiment of the invention based on the display system of the diffractive light modulator of perforate;
Fig. 8 a is according to an embodiment of the invention based on the skeleton view of the diffractive light modulator of perforate, wherein the top minitype reflector of incident light oblique fire unit 1-D array; And
Fig. 8 b is according to an embodiment of the invention based on the skeleton view of the diffractive light modulator of perforate, wherein the top minitype reflector of light vertical incidence unit 1-D array.
Embodiment
Describe the preferred embodiments of the present invention in detail below with reference to Fig. 4 a to 8b.
Fig. 4 a is the skeleton view based on the diffractive light modulator of perforate that illustrates according to first embodiment of the invention.
With reference to the accompanying drawings, the diffractive light modulator based on perforate according to first embodiment of the invention comprises: silicon substrate 501a, insulation course 502a, minitype reflector 503a and unit 510a.Although with individual course structure insulation course and minitype reflector, can realize this insulation course in this embodiment, as minitype reflector with when it has reflective character.Therefore in addition, at this, insulation course 502a is shown on the surface of base component 501a and forms, but insulation course is not essential, can form reflection part 503a and does not form insulation course 502a.
In the both sides of lower support 511a piezoelectric layer 520a and 520a ' are set respectively, and, provide the actuation force of unit 510a by set piezoelectric layer 520a and the pucker ﹠ bloat of 520a '.
The oxide of silicon (for example, SiO
2Deng), nitride (for example, the Si of silicon
3N
4Deng), ceramic substrate (Si, ZrO
2And Al
2O
3Deng) or the carbonide of silicon can be used to construct lower support 511a.Can omit this lower support 511a as required.
Left and right piezoelectric layer 520a or 520a ' comprising: lower electrode layer 521a or 521a ' are suitable for providing piezoelectric voltage; Piezoelectric material layer 522a or 522a ' are formed on lower electrode layer 521a or the 521a ', and when its both sides are applied voltage, are suitable for by pucker ﹠ bloat, produce vertical actuation force; And top electrode layer 523a or 423a ', be formed on piezoelectric material layer 521a or the 521a ', and be suitable for providing piezoelectric voltage piezoelectric material layer 521a or 521a '.When top electrode layer 523a and 523a ' and lower electrode layer 521a and 521a ' are applied voltage, piezoelectric material layer 521a and 521a ' pucker ﹠ bloat, therefore cause lower support 511a towards or away from minitype reflector 503a vertical moving.
Pt, Ta/Pt, Ni, Au, Al, Ti/Pt, IrO
2And RuO
2Can be used as the material of electrode 521a, 521a ', 523a and 523a ', and utilize spraying plating or gasification method, deposit these materials, to have the degree of depth in 0.01 to 3 mu m range.
Simultaneously, at the core of lower support 511a, deposition top minitype reflector 530a.Top minitype reflector 530a comprises a plurality of perforate 531a
1To 531a
3In this case, preferably with perforate 531a
1To 531a
3Form rectangle, but can form such as circular or oval-shaped any enclosed shape.In addition, lower support 511a and top minitype reflector 530a can be called as top reflection part 540a.If lower support is made of reflectorized material, then do not need to deposit independent top minitype reflector, and lower support is used alone as reflection part 540a.
This perforate 531a
1To 531a
3Light is incided on the unit 510a, and passing it, so light incides corresponding to perforate 531a
1To 531a
3Part bottom minitype reflector 503a on, therefore can make bottom minitype reflector 503a and top minitype reflector 530a form pixel.
That is, for example, form perforate 531a therein
1-531a
3The part (A) of top minitype reflector 530a and the part (B) of bottom minitype reflector 503a can form a pixel.
In other words, because top minitype reflector 530a has reflecting surface, its reflection incident light allows incident light to arrive bottom reflection part 503a by perforate to form reflected light simultaneously.Reflection part 503a in bottom reflects incident light to form reflected light then, and therefore the light from top minitype reflector 530a reflection interferes with each other with the light that reflects from bottom minitype reflector 530a, forms diffraction light thus.The diffraction light intensity depends on the distance between top minitype reflector 530a and the bottom reflection part 503a.
In this case, the perforate 531a by top minitype reflector 530a
1To 531a
3Incident light can incide on the appropriate section of bottom minitype reflector 503a, and the difference in height between top minitype reflector 530a and bottom minitype reflector 503a produces the strongest diffraction light when being one of odd-multiple of λ/4.Equally, at this, a unit 510a only is shown, the diffractive light modulator based on perforate still of the present invention can comprise a plurality of unit parallel to each other.In other words, the diffractive light modulator based on perforate of the present invention can comprise cell array, and it is shown in Fig. 5 and 6.
When using, can use the unit that is less than prior art to realize having the display device of expecting pixel according to cell array of the present invention.
For example, in the prior art, can use at least two striped cell to form a pixel.In the prior art, when two striped cell constituted a pixel, diffraction efficiency was 50% or lower, and therefore four or six unit constitute pixels so that increase diffraction efficiency.When four or when more multiple-unit constitutes a pixel, diffraction efficiency is 70% or higher, thus the top efficiency that can obtain to expect by the increase of number of unit.In the first embodiment of the present invention, the top minitype reflector 530a of the upper member by constituting a unit 510a forms three perforate 531a1-531a3, pass through incident light to pass it, to reach bottom reflection part 503a, obtain thus and six identical diffraction efficiencies of prior art that the unit forms a pixel of use.That is to say that according to the first embodiment of the present invention, the reflection mirror component of the first perforate 531a1 of adjacent upper portions minitype reflector 530a reflection incident light is with a deformed belt unit as prior art.In addition, part bottom reflection part 503a reflection thus serves as another deformed belt unit by the incident light of the first perforate 531a1, and described part bottom reflection part 503a is positioned under the first perforate 531a1 so that on the position corresponding to first perforate.In addition, the reflection mirror component reflection incident light of the second perforate 531a2 of adjacent upper portions minitype reflector 530a, with another deformed belt unit as prior art, and reflection part 503a reflection in part bottom is by the incident light of the second perforate 531a2, thus serve as another deformed belt unit, described part bottom reflection part 503a is positioned under the second perforate 531a2 so that on the position corresponding to second perforate.Equally, the reflection mirror component reflection incident light of the 3rd perforate 531a3 of adjacent upper portions minitype reflector 530a, with another deformed belt unit as prior art, and reflection part 503a reflection in part bottom is by the incident light of the 3rd perforate 531a3, thus serve as another deformed belt unit, described part bottom reflection part 503a is positioned under the 3rd perforate 531a3 so that on the position corresponding to the 3rd perforate.As mentioned above, pass top minitype reflector 530 and the bottom reflection part 503a that it forms three perforate 531a1-531a3 if use, the identical diffraction efficiency that obtains in the time of can using a deformed belt unit 510a to obtain to use six deformed belt unit to form a pixel in the prior art.
If use above-mentioned diffractive light modulator to realize digital TVHD form corresponding to 1080 * 1920,1080 pixels of homeotropic alignment and each pixel stand optical modulation 1920 times, form a frame thus.If use four or six to drive pixel of deformed belt (driving ribbon) formation by prior art, need the individual driving deformation in 1080 * 4 (or 6) bring and form 1080 pixels.On the other hand, when having the striped cell of two or three perforates, can only use 1080 * 1 striped cell to form 1080 pixels if use according to of the present invention.Therefore, easily realize to make, output improves, and can make and have undersized equipment.
Fig. 4 b is according to a second embodiment of the present invention, the skeleton view based on the diffractive light modulator of perforate that part is separated.
With reference to accompanying drawing, the diffractive light modulator based on perforate according to a second embodiment of the present invention comprises base component 501b, bottom reflection part 503b and unit 510b.
Different with first embodiment, bottom reflection part 503b comprises a plurality of bottom reflective graphics 503b1-503b3, these a plurality of bottom reflective graphics 503b1-503b3 are by on the surface that is disposed on insulation course 502a, make they on the position corresponding to the perforate 531b1-531b3 of top minitype reflector 530b.Other structures are identical with Fig. 4 a's.
Fig. 4 c is an a third embodiment in accordance with the invention, the skeleton view based on the diffractive light modulator of perforate that part is separated.
With reference to accompanying drawing, the diffractive light modulator based on perforate of a third embodiment in accordance with the invention comprises base component 501c, it comprises SIMOX SOI (silicon-on-insulator that is injected into oxygen separates) substrate (being called hereinafter, " silicon-on-insulator substrate "), bottom reflection part 503c and unit 510c.
First embodiment that the third embodiment of the present invention is different from Fig. 4 a is silicon-on-insulator substrate, rather than silicon substrate, is used as base component 501c.Its manufacturing is known, therefore omits its detailed description at this.
The base component 501c of the silicon-on-insulator that uses among the present invention comprises silicon substrate 501c1, silicon dioxide insulating layer 501c2, and it forms and sacrificial silicon layer 501c3 by inject oxonium ion in silicon substrate, and it forms by inject high concentration oxygen in silicon substrate.The part that is positioned at below the minitype reflector 530a of top of sacrificial silicon layer 501c3 is etched, makes to guarantee to move (air-gap) at interval, and unit 510c can vertical moving therein.In addition, sacrificial silicon layer 501c3 is positioned at piezoelectric layer 520a, and the part below the 520a ' is made to activate top minitype reflector 530a by the piezoelectric 522c of piezoelectric layer 520c and 520c ' and the pucker ﹠ bloat of 522c ' by partially-etched.Equally, silicon dioxide insulating layer 501c2 can be considered to etch stopper, is used for preventing that silicon substrate 501c1 is etched when etching silicon sacrifice layer 501c3.
In addition, the third embodiment of the present invention is also different with first embodiment, is that bottom reflection part 503c comprises a plurality of bottom reflective graphics 503c1-503c3 separated from one another.From this aspect, it is identical with second embodiment.
In addition, the third embodiment of the present invention is different with first embodiment, is that sacrificial silicon layer 501c3 moves (air-gap) at interval for unit 510c provides.That is to say, in the third embodiment of the present invention, on silicon substrate 501c1, there is no need the groove that provides independent.See in this, can think that sacrificial silicon layer 501c3 is the supporting member that is used for bearing unit 510c, think that unit 510c provides at interval mobile.In addition, a third embodiment in accordance with the invention is identical based on those of the diffractive light modulator of perforate and first embodiment.
Fig. 4 d is an a fourth embodiment in accordance with the invention, the skeleton view that part is separated based on the diffractive light modulator of perforate, and this photomodulator comprises base component 501d, bottom reflection part 503d and the unit 510d that includes silicon substrate.
The 4th embodiment of Fig. 4 d is different with the embodiment of Fig. 4 a to be vertically not arrange perforate 531d1-531d3, but transversely arranged.Other structures are identical with Fig. 4 a.
Fig. 4 e is according to a fifth embodiment of the invention, the skeleton view based on the diffractive light modulator of perforate that part is separated.
With reference to accompanying drawing, be different from diffractive light modulator according to the diffractive light modulator of the 5th embodiment based on perforate according to the 4th embodiment based on perforate, be the base component 501e upper process of the lower support 511e of unit 510e, to provide at interval from silicon substrate.The result is that unit 510e can vertical moving.
That is, unit 510e has the top minitype reflector 530e that is used to reflect incident light, and can vertical moving, simultaneously from base component 501e upper process.In the case, if lower support has reflective character, can realize lower support with as minitype reflector, and needn't form independent minitype reflector.
The lower support 511e projection of unit 510e is to provide air-gap to unit 510e, and its both sides invest on the base unit 510e.
In addition, comprising deposition insulating layer 502e and bottom reflection part 503e on the base component 501e of silicon substrate, reflection part 503e reflection in bottom is by the incident light of perforate.In the case, if insulation course has reflective character, insulation course can be used as the bottom reflection part, and needn't form independent bottom reflection part.
When voltage was applied to top electrode layer 523e and 523e ' and lower electrode layer 521e and 521e ', unit 510e moved up and reflects incident light to form reflected light.
Removed the core of the unit 510e of the piezoelectric layer 520e of lower support 511e and 520e ' therein and placed top minitype reflector 530e, and on the minitype reflector 530e of top, perforate 531e1 to 531e3 has been set.In this case, perforate 531e1_531e3 preferably forms rectangle, but also can form close-shaped arbitrarily for example circular or oval.
This perforate 531e1_531e3 allows the part bottom minitype reflector 503e corresponding to perforate 531e1 to 531e3, and the part top minitype reflector 530e of the perforate 531e1 to 531e3 of adjacent upper portions minitype reflector 530e, forms pixel.
That is, for example, part top minitype reflector 530e (A) wherein forms perforate 531e1 to 531e3, and single pixel is formed at part bottom minitype reflector 503e (B).
In the case, the incident light that passes the perforate 531e1 to 531e3 of top minitype reflector 530 can incide on the appropriate section of bottom minitype reflector 503e, be appreciated that and when the difference in height between top minitype reflector 530e and the bottom minitype reflector 503e is one of the odd-multiple of λ/4, generate the strongest diffraction light.
Fig. 4 f is according to a sixth embodiment of the invention, the skeleton view based on the diffractive light modulator of perforate that part is separated.
With reference to accompanying drawing, be different from diffractive light modulator according to the diffractive light modulator of the 6th embodiment based on perforate according to the 5th embodiment based on perforate, be that perforate arranges in a lateral direction.Other structures are identical with the diffractive light modulator based on perforate as Fig. 4 e.
Fig. 4 g is according to a seventh embodiment of the invention, the skeleton view based on the diffractive light modulator of perforate that part is separated.With reference to accompanying drawing, the diffractive light modulator based on perforate according to a seventh embodiment of the invention comprises silicon substrate 501g, stacked bottom reflection part 503g and top minitype reflector 510g on silicon substrate.
Bottom reflection part 503g goes back reflected light to form reflected light not only as lower electrode.
Top minitype reflector 510g has the perforate 511g1_511g3 that is provided with therein.In the case, preferably perforate 511g1_511g3 forms rectangle, but also can form close-shaped arbitrarily for example circular or oval.
This perforate 511g1_511g3 allows the part bottom minitype reflector 503g corresponding to perforate 511g1_511g3, and the part top minitype reflector 530e of the perforate 511g1_511g3 of adjacent upper portions minitype reflector 510g, forms pixel.
That is, for example, part top minitype reflector 510g (A) wherein forms perforate, and single pixel is formed at part bottom minitype reflector 503g (B).
In the case, the incident light that passes the perforate 511g1_511g3 of top minitype reflector 510g can incide on the appropriate section of bottom minitype reflector 503g, be appreciated that and when the difference in height between top minitype reflector 510g and the bottom minitype reflector 503g is one of the odd-multiple of λ/4, generate the strongest diffraction light.
Fig. 4 h is according to the eighth embodiment of the present invention, the skeleton view based on the diffractive light modulator of perforate that part is separated.
With reference to accompanying drawing, the diffractive light modulator based on perforate that is different from according to seventh embodiment of the invention according to the diffractive light modulator based on perforate of eighth embodiment of the invention is that perforate is horizontal.Other structure is identical with Fig. 4 g.Simultaneously, in first to the 6th embodiment of the present invention, use piezoelectric material layer to generate vertical actuation force, and in the 7th and the 8th embodiment, use electrostatic force to generate vertical actuation force.In addition, use electromagnetic force to generate vertical actuation force.
Simultaneously, in the 4th to the 8th enforcement power, a mirror layer constitutes the bottom reflection part, and still, shown in second embodiment, the bottom reflection part can be by comprising a plurality of bottoms reflective graphics at interval.That is to say that the bottom reflection part comprises a plurality of bottoms reflective graphics, and by at interval a plurality of bottoms reflective graphics being set on the surface of insulation course, make they on the position corresponding to the perforate of bottom minitype reflector.
Fig. 4 i is according to the ninth embodiment of the present invention, the skeleton view based on the diffractive light modulator of perforate that part is separated.
With reference to accompanying drawing, the diffractive light modulator based on perforate according to ninth embodiment of the invention comprises base component 501i, comprise silicon substrate, bottom reflection part 510i, be formed in the middle of the groove of base component 501i and top minitype reflector 520i, be suitable for upper space across base component 501i.Bottom reflection part 510i not only reflects incident light to form reflected light, also as upper electrode.
Bottom portion of groove at base component 501i forms lower electrode layer 503i.Lower electrode layer 503i, and be positioned at the middle bottom reflection part 510i (upper electrode) of groove, reflection part 510i provides the vertical actuation force that is caused by electrostatic force to the bottom.
That is, lower electrode 503i and bottom reflection part 510i since electrostatic force attract each other, and if it is applied voltage, generate downward actuation force, if perhaps it is not applied voltage, they produce downward actuation force by recuperability (restoring force).
Simultaneously, on the minitype reflector 520i of top, perforate 531i1-531i3 is set.Perforate 531i1-531i3 preferably forms rectangle, but also can form any close-shaped, for example circular or oval.
This perforate 531i1-531i3 makes corresponding to the part bottom reflection part 510i of perforate 531i1-531i3, and the part top minitype reflector 520i that closes on opening 531i1-531i3, forms pixel.
That is, for example, form the part (A) of top minitype reflector 520i of perforate 531i1-531i3 and the part (B) of bottom minitype reflector thereon and can form a pixel.
In this case, the incident light of the perforate by top minitype reflector 520i can incide on the appropriate section of bottom minitype reflector 510i, and be appreciated that and produce the strongest diffraction light when difference in height between top minitype reflector 520i and bottom minitype reflector 510i is one of odd-multiple of λ/4.
Fig. 4 j illustrates the photomodulator based on perforate according to tenth embodiment of the invention, its is different with the 9th embodiment, horizontally set perforate.
Simultaneously, in the 4th embodiment, and among the 7th to the tenth embodiment, silicon substrate is used as base component, still, shown in the 3rd embodiment, can use silicon-on-insulator substrate.
Fig. 5 is the skeleton view based on the unit 1-D array of the photomodulator of perforate that illustrates according to first embodiment of the invention.
With reference to accompanying drawing, in unit 1-D array, have a plurality of unit 610a-610n unidirectional array parallel to each other of top minitype reflector based on the photomodulator of perforate according to first embodiment of the invention, so the diffraction incident light.Simultaneously, only describe unit 1-D array, but also can realize the unit 1-D array of according to the present invention second to the tenth embodiment in the same manner based on the photomodulator of perforate based on the photomodulator of perforate according to first embodiment of the invention at this.
Fig. 6 is the skeleton view based on the unit 2-D array of the photomodulator of perforate that illustrates according to seventh embodiment of the invention.
With reference to accompanying drawing, in unit 2-D array, on X-and Y-direction, arrange a plurality of unit 710a1-710nn based on the photomodulator of perforate according to seventh embodiment of the invention.Only describe unit 2-D array at this, but also can realize unit 2-D array in the same manner based on the photomodulator of perforate according to other embodiments of the invention based on the photomodulator of perforate according to seventh embodiment of the invention.
Simultaneously, although in this instructions, described the situation of single piezoelectric material layer, can realize the multiple piezoelectric material layer that forms by a plurality of piezoelectric material layers.
Fig. 7 illustrates the display device based on the photomodulator of perforate of use according to the embodiment of the invention.As mentioned above, the optical system of for example using in display device also can be used in the printer, and, in the case, can use magnetic drum (drum) rather than screen 818, as mentioned below.Under the situation of using magnetic drum, because magnetic drum rotates, independent scanning optical parts rotation as in display device, therefore must not used the scanning optical parts.
With reference to Fig. 7, use display device to comprise display optical system 802 and show electronic system 804 based on the photomodulator of perforate according to the embodiment of the invention.Display optical system 802 comprises light source 806, optics (light optical part) 808, be used for and be converted to linear light from the light of light source 806 emissions, feasible form with linear light is shone the photomodulator 810 based on perforate, should be used to modulate the linear light that forms by optics 808 based on the photomodulator 810 of perforate, to form diffraction light, filter part (filtering optical part) 812, be used to separate level by the diffracted beam of modulating based on the photomodulator 810 of perforate, to pass the diffracted beam level that it was hoped by the mid-term not at the same level of diffracted beam, projection and scanning optical parts 816, be used for the diffracted beam of optically focused, to press the some light (point light) of 2-D image scanning optically focused by filter part 812, and display screen 818.
Show electronic system 804 be connected to light source 806, based on diffractive light modulator 810 and the projection and the scanning optical parts 816 of perforate.
In addition, if incide on the photomodulator 810 based on perforate from the linear light of optics 808, modulator to generate diffraction light, is therefore launched it by showing the control modulating the incident light of electronic system 804.
Fig. 8 a is based on the skeleton view of the photomodulator of perforate, wherein a plurality of top minitype reflector 812a-811n of linear light oblique illumination unit 811a-811n1-D array.If a plurality of tops minitype reflector 812a-812n vertical moving, because the difference in height between top minitype reflector 812a-812n and the bottom reflection part 813, modulation incident linear light generates diffraction light thus.In the case, because the light oblique incidence, diffraction light is tiltedly launched.
Fig. 8 b is based on the skeleton view of the diffractive light modulator of perforate, wherein linear light a plurality of top minitype reflector 812a-811n of illumination unit 811a-811n1-D array vertically.If a plurality of tops minitype reflector 812a-812n vertical moving, because the difference in height between top minitype reflector 812a-812n and the bottom reflection part 813, modulation incident linear light generates diffraction light thus.In the case, vertically launch 0 order diffraction light beam, and oblique emission ± 1 order diffraction light beam, left and right, because vertical incidence only.
Simultaneously, when diffraction light was incident thereon, filter system 812 separated the expectation level of diffracted beam from each grade of diffracted beam.Filter system 812 comprises fourier transform lens (not shown) and filtrator (not shown), and optionally by 0 or ± 1 order diffraction light beam.
Equally, projection and scanning optical parts 816 comprise collector lens (not shown) and scanning reflection mirror (not shown), and scan diffracted beam on screen 818, and control simultaneously shows electronic system 804.
Show that electronic system 804 drives the scanning reflection mirror (not shown) of projection and scanning optical parts 816.Projection and scanning optical parts 816 are in projects images on the screen 818 and scan it on display screen 818, to form the 2-D image on display screen 818.
Simultaneously, in Fig. 7 to 8b, only describe the generation of monochrome image, but can generate coloured image.Can realize the generation of coloured image by extraly two light sources, two diffractive light modulators and filtrator being applied to display optical system 802.
As mentioned above, the invention is intended to use one to drive pixel of deformed belt unit formation.
In addition, the invention is intended to form a plurality of perforates, generate diffraction light thus with improved diffraction efficiency by the top minitype reflector of deformed belt unit.
Equally, the invention is intended to replace four or six conventional ADS driving unit, improve manufacture process output thus and reduce manufacturing cost with a driver element.
Claims (24)
1. diffractive light modulator based on perforate comprises:
(a) base component;
(b) first reflection part by the base component supporting, comprising:
The center section that separates with base component is so that limit betwixt at interval;
Back to described base component and separation with it, and be used as reflecting surface first with the reflection incident light;
Passing described first reflection part extends and forms and make and pass it with at least one perforate by incident light;
(c) second reflection part, between first reflection part and base component, described second reflection part: separate with first reflection part; And
Comprise towards the reflecting surface of first reflection part, with the incident light of reflection by described at least one perforate; And
(d) actuating unit is used for moving with respect to second reflection part center section of first reflection part, and to change the diffraction light intensity, this diffraction light uses from the light of first reflection part and the reflection of second reflection part and forms;
Wherein said actuating unit comprises:
Piezoelectric layer, be placed on the primary importance of the position of the center section that is different from first reflection part, the exercisable pucker ﹠ bloat of described piezoelectric layer, thus when the opposite side to piezoelectric layer applies voltage, towards or direction away from second reflection part on actuation force is provided.
2. the diffractive light modulator based on perforate as claimed in claim 1, wherein said base component comprises:
Substrate; And
Supporting member stretches out from substrate, and the mode that described supporting member separates with the center section of first reflection part and substrate supports the disconnected position of first reflection part, to form betwixt at interval;
Wherein, place second reflection part, with the incident light of reflection by the perforate of first reflection part with respect to substrate.
3. the diffractive light modulator based on perforate as claimed in claim 2 also is included in the insulation course that inserts between the substrate and second reflection part.
4. the diffractive light modulator based on perforate as claimed in claim 1, wherein said base component limits groove to provide at interval, in the groove of base component, place second reflection part, and first reflection part across groove, so that the intermediate portion separates with second reflection part, to form at interval betwixt.
5. the diffractive light modulator based on perforate as claimed in claim 4, wherein: first reflection part is across the groove of base component, second reflection part is by the side wall supports of the groove of base component, to separate abreast with first reflection part, second reflection part towards or removable away from first reflection part, with the incident light of reflection by perforate; And
Described actuating unit moves second reflection part with respect to first reflection part, and to change the diffraction light intensity, this diffraction light uses from the light of first reflection part and the reflection of second reflection part and forms.
6. the diffractive light modulator based on perforate as claimed in claim 4 also is included in the insulation course that inserts between the base component and second reflection part.
7. the diffractive light modulator based on perforate as claimed in claim 1, wherein first reflection part comprises:
First supporting course has the center section of placing with respect to base component, so that form betwixt at interval, described supporting course is by the base component supporting and limit formed at least one perforate, passes through incident light so that pass it; And
First minitype reflector, thereby be placed on base component and separation dorsad with it on first supporting course, with the corresponding position of at least one perforate of first supporting course on, described first minitype reflector defines at least one perforate, and form and pass it by incident light, and described first minitype reflector also has surface as reflecting surface with the reflection incident light.
8. the diffractive light modulator based on perforate as claimed in claim 1 is wherein constructed first reflection part so that the intermediate portion separates with second reflection part, to provide betwixt at interval.
9. the diffractive light modulator based on perforate as claimed in claim 1, wherein first reflection part has arrangement a plurality of perforates in one direction, and described direction is identical across the direction of base component with first reflection part.
10. the diffractive light modulator based on perforate as claimed in claim 1, wherein first reflection part has arrangement a plurality of perforates in one direction, and described direction is transverse to the direction of first reflection part across base component.
11. the diffractive light modulator based on perforate as claimed in claim 1 also comprises at least two piezoelectric layer parts that are separated from each other with respect to first reflection part on the position.
12. the diffractive light modulator based on perforate as claimed in claim 11 also comprises the electrode layer that is placed on the piezoelectric layer part, so that piezoelectric voltage to be provided.
13. the diffractive light modulator based on perforate as claimed in claim 1:
Also comprise the electrode layer that is placed on the piezoelectric material layer, so that piezoelectric voltage to be provided, and wherein, first reflection part is as the electrode of piezoelectric layer.
14. the diffractive light modulator based on perforate as claimed in claim 1:
Wherein piezoelectric layer comprises:
A plurality of piezoelectric material layers when when its both sides apply voltage, generate the pucker ﹠ bloat actuation force;
A plurality of first electrode layers insert between a plurality of piezoelectric material layers, so that piezoelectric voltage to be provided;
The second electrode lay is placed on the outermost layer of a plurality of piezoelectric material layers, so that piezoelectric voltage to be provided; And
Wherein first reflection part is as the electrode of piezoelectric layer.
15. the diffractive light modulator based on perforate comprises:
Base component;
A plurality of first reflection parts are arranged and are formed array, and each first reflection part is:
From base component therebetween partly separately, make that formation at interval betwixt;
Each first reflection part is supported by base component, and each first reflection part has the reflecting surface that leaves the base component sensing; And each first reflection part is formed with at least one perforate, makes that passing it passes through incident light;
Second reflection part between first reflection part and base component, makes to limit at interval with respect to first reflection part, and this second reflection part has reflecting surface with the incident light of reflection by perforate; And
A plurality of actuating units are used for the center section that mobile phase is answered first reflection part, and to change the diffraction light intensity, described diffraction light uses from the light of first reflection part and the reflection of second reflection part and forms;
Wherein said actuating unit comprises:
Piezoelectric layer, be placed on the primary importance of the position of the center section that is different from first reflection part, the exercisable pucker ﹠ bloat of described piezoelectric layer when the opposite side to piezoelectric layer applies voltage, provides actuation force thus on the direction perpendicular to first reflection part.
16. the diffractive light modulator based on perforate as claimed in claim 15, wherein said base component comprises:
Substrate; And
At least one supporting member stretches out from substrate, and the mode of separating with the center section and the substrate of each first reflection part supports first reflection part, to form betwixt at interval;
Wherein place second reflection part, with the incident light of reflection by the perforate of a plurality of first reflection parts with respect to substrate.
17. the diffractive light modulator based on perforate as claimed in claim 15, wherein said base component has the surface of relatively flat, the center section of a plurality of first reflection parts separates with second reflection part, make and limit betwixt at interval, and substantially parallel first reflection part of arranging, to form array.
18. the diffractive light modulator based on perforate as claimed in claim 15, wherein said base component has the part of qualification groove to provide at interval, second reflecting part is positioned at the groove of base component, and a plurality of first reflection parts are respectively across groove, make intermediate portion and corresponding second reflection part separate, forming betwixt at interval, and arrange a plurality of first reflection parts to form array.
19. the diffractive light modulator based on perforate as claimed in claim 18, wherein:
Described first reflection part is across the groove of base component;
Described second reflection part is arranged and is formed array and by the recess sidewall supporting of base component, separating abreast with corresponding first reflection part, described second reflection part towards or removable away from first reflection part, with the incident light of reflection by perforate; And
Described actuating unit moves corresponding second reflection part with respect to first reflection part, and to change the diffraction light intensity, this diffraction light uses from the light of first and second reflection parts reflection and forms.
20. a use comprises based on the display device of the diffractive light modulator of perforate:
Radiative light source;
Based on the diffractive light modulator of perforate, modulating the incident light comprises to generate diffraction light:
Base component;
A plurality of first reflection parts are arranged and are formed array, and each is supported by base component, make and between the center section of first reflection part and base component, form at interval, and each first reflection part is formed with perforate, so that pass it by light, and reflecting surface is with the reflection incident light;
By second reflection part of base component supporting, described second reflection part separates with first reflection part, and described second reflection part comprises that reflecting surface is with the incident light of reflection by the perforate of first reflection part; And
A plurality of actuating units are used for moving with respect to second reflection part center section of corresponding first reflection part, and to change the diffraction light intensity, this diffraction light uses from the light of first reflection part and the reflection of second reflection part and forms;
Optics is used for the incident light from light emitted is applied to diffractive light modulator based on perforate;
Filter optics, be used for from selecting the diffraction light of expectation level by the diffraction light of modulating based on the diffractive light modulator of perforate, make to pass it by selected diffraction light; And
Projection and scanning optical parts are used for scanning on screen by filtering the diffraction light of optics;
Wherein said actuating unit comprises:
Piezoelectric layer, be placed on the primary importance of the position of the center section that is different from first reflection part, the exercisable pucker ﹠ bloat of described piezoelectric layer, thus when the opposite side to piezoelectric layer applies voltage, towards or direction away from second reflection part on actuation force is provided.
21. a use comprises based on the printing equipment of the diffractive light modulator of perforate:
Radiative light source;
Based on the diffractive light modulator of perforate, modulating the incident light comprises to generate diffraction light:
Base component;
A plurality of first reflection parts are arranged and are formed array, and each is supported by base component, to form between part and the base component at interval therebetween, and each described first reflection part is formed with perforate, so that pass it by light, and reflecting surface is with the reflection incident light;
By second reflection part of base component supporting, described second reflection part separates with first reflection part, and described second reflection part comprises that reflecting surface is with the incident light of reflection by perforate; And
A plurality of actuating units are used for moving the center section of corresponding first reflection part, and to change the diffraction light intensity, this diffraction light uses from the light of first reflection part and the reflection of second reflection part and forms;
Optics is used for the incident light from light emitted is applied to diffractive light modulator based on perforate;
Filter optics, be used for from selecting the diffraction light of expectation level by the diffraction light of modulating based on the diffractive light modulator of perforate, make to pass it by selected diffraction light; And
The projection optics parts are used for throwing on magnetic drum by filtering the diffraction light of optics;
Wherein said actuating unit comprises:
Piezoelectric layer, be placed on the primary importance of the position of the center section that is different from first reflection part, the exercisable pucker ﹠ bloat of described piezoelectric layer, thus when the opposite side to piezoelectric layer applies voltage, towards or direction away from second reflection part on actuation force is provided.
22. the diffractive light modulator based on perforate comprises:
Substrate;
Insulation course is placed on the substrate;
At least one sacrifice layer is placed on the insulation course, and the part that is positioned under the minitype reflector that will be provided with on the described sacrifice layer is etched;
Reflection part is placed on the insulation course, lays described reflection part with the reflection incident light;
Supporting is arranged at least one sacrifice layer, and forms first perforate by it;
Minitype reflector is placed in the supporting, and described minitype reflector has reflecting surface with the reflection incident light, forms second perforate with corresponding first perforate on catoptron, passes through incident light to pass it; And
At least one actuating unit with when when it applies voltage, moves the center section of supporting, changes the diffraction light intensity thus, and this diffraction light uses from the light of minitype reflector and reflection part reflection and forms;
Wherein said substrate is a silicon substrate, and described actuating unit has piezoelectric, and piezoelectric is set on electrode, makes when to electrode application voltage the actuating unit pucker ﹠ bloat.
23. the diffractive light modulator based on perforate as claimed in claim 1, wherein first reflection part is crooked under the influence of actuating unit, thus towards or move away from second reflection part.
24. the diffractive light modulator based on perforate as claimed in claim 1, wherein first reflection part towards or away from the direction of second reflection part on elongate and flexible.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020050034685 | 2005-04-26 | ||
| KR1020050034685A KR100832646B1 (en) | 2004-04-29 | 2005-04-26 | Open-hole based diffractive optical modulator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1854796A CN1854796A (en) | 2006-11-01 |
| CN100485443C true CN100485443C (en) | 2009-05-06 |
Family
ID=35911372
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200510120099XA Expired - Fee Related CN100485443C (en) | 2005-04-26 | 2005-11-02 | Open hole-based diffractive light modulator |
Country Status (3)
| Country | Link |
|---|---|
| CN (1) | CN100485443C (en) |
| FR (1) | FR2884932B1 (en) |
| GB (2) | GB2425613B (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5311360A (en) * | 1992-04-28 | 1994-05-10 | The Board Of Trustees Of The Leland Stanford, Junior University | Method and apparatus for modulating a light beam |
| US5949570A (en) * | 1995-06-20 | 1999-09-07 | Matsushita Electric Industrial Co., Ltd. | Diffractive optical modulator and method for producing the same, infrared sensor including such a diffractive optical modulator and method for producing the same, and display device including such a diffractive optical modulator |
| US6141139A (en) * | 1998-11-30 | 2000-10-31 | Eastman Kodak Company | Method of making a bistable micromagnetic light modulator |
| US7027204B2 (en) * | 2003-09-26 | 2006-04-11 | Silicon Light Machines Corporation | High-density spatial light modulator |
| DE102005018604A1 (en) * | 2004-04-29 | 2005-11-24 | Samsung Electro-Mechanics Co., Ltd., Suwon | Open hole-based diffractive light modulator used in e.g. optical memory, has upper micromirror comprising open holes at center, such that it reflects/diffracts incident light based on height difference between upper and lower micromirrors |
-
2005
- 2005-11-02 CN CNB200510120099XA patent/CN100485443C/en not_active Expired - Fee Related
- 2005-11-02 FR FR0511173A patent/FR2884932B1/en not_active Expired - Fee Related
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2006
- 2006-01-05 GB GB0600087A patent/GB2425613B/en not_active Expired - Fee Related
- 2006-01-05 GB GB0600093A patent/GB2425614B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1854796A (en) | 2006-11-01 |
| FR2884932B1 (en) | 2011-06-24 |
| GB2425614A (en) | 2006-11-01 |
| GB0600087D0 (en) | 2006-02-15 |
| GB0600093D0 (en) | 2006-02-15 |
| GB2425613A (en) | 2006-11-01 |
| GB2425614B (en) | 2007-06-20 |
| FR2884932A1 (en) | 2006-10-27 |
| GB2425613B (en) | 2007-06-20 |
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