CN100481438C - 划片路径中具有光学控制模块的晶片 - Google Patents
划片路径中具有光学控制模块的晶片 Download PDFInfo
- Publication number
- CN100481438C CN100481438C CNB2004800384275A CN200480038427A CN100481438C CN 100481438 C CN100481438 C CN 100481438C CN B2004800384275 A CNB2004800384275 A CN B2004800384275A CN 200480038427 A CN200480038427 A CN 200480038427A CN 100481438 C CN100481438 C CN 100481438C
- Authority
- CN
- China
- Prior art keywords
- ocm
- field
- control module
- wafer
- dicing paths
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
- G03F7/70433—Layout for increasing efficiency or for compensating imaging errors, e.g. layout of exposure fields for reducing focus errors; Use of mask features for increasing efficiency or for compensating imaging errors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54453—Marks applied to semiconductor devices or parts for use prior to dicing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Abstract
Description
Claims (2)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP03104953.9 | 2003-12-23 | ||
EP03104953 | 2003-12-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1898796A CN1898796A (zh) | 2007-01-17 |
CN100481438C true CN100481438C (zh) | 2009-04-22 |
Family
ID=34717249
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004800384275A Expired - Fee Related CN100481438C (zh) | 2003-12-23 | 2004-12-09 | 划片路径中具有光学控制模块的晶片 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7508051B2 (zh) |
EP (1) | EP1700340A1 (zh) |
JP (1) | JP2007516618A (zh) |
KR (1) | KR20060117974A (zh) |
CN (1) | CN100481438C (zh) |
WO (1) | WO2005064678A1 (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2168156B1 (en) | 2007-07-12 | 2010-10-20 | Nxp B.V. | Integrated circuits on a wafer and methods for manufacturing integrated circuits |
JP5466820B2 (ja) * | 2007-10-18 | 2014-04-09 | ピーエスフォー ルクスコ エスエイアールエル | 半導体基板、及び半導体装置の製造方法 |
CN108957960A (zh) * | 2018-06-06 | 2018-12-07 | 中国电子科技集团公司第五十五研究所 | 一种提升衬底有效芯片数目的曝光方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5129974A (en) * | 1990-08-23 | 1992-07-14 | Colorcode Unlimited Corporation | Microlabelling system and method of making thin labels |
JPH10274855A (ja) * | 1997-03-31 | 1998-10-13 | Mitsubishi Electric Corp | レチクルおよびそれによって転写されたパターンならびに補正方法 |
JP4301584B2 (ja) * | 1998-01-14 | 2009-07-22 | 株式会社ルネサステクノロジ | レチクル、それを用いた露光装置、露光方法および半導体装置の製造方法 |
US6400173B1 (en) * | 1999-11-19 | 2002-06-04 | Hitachi, Ltd. | Test system and manufacturing of semiconductor device |
US6699627B2 (en) * | 2000-12-08 | 2004-03-02 | Adlai Smith | Reference wafer and process for manufacturing same |
US6503765B1 (en) * | 2001-07-31 | 2003-01-07 | Xilinx, Inc. | Testing vias and contacts in integrated circuit fabrication |
US20030034489A1 (en) * | 2001-08-16 | 2003-02-20 | Broadcom Corporation | Apparatus and method for a production testline to monitor CMOS SRAMs |
KR20040037174A (ko) * | 2001-09-28 | 2004-05-04 | 코닌클리즈케 필립스 일렉트로닉스 엔.브이. | 집적 회로 제조 방법, 집적 회로, 웨이퍼 및 시스템 |
US6974653B2 (en) * | 2002-04-19 | 2005-12-13 | Nikon Precision Inc. | Methods for critical dimension and focus mapping using critical dimension test marks |
US6967348B2 (en) * | 2002-06-20 | 2005-11-22 | Micron Technology, Inc. | Signal sharing circuit with microelectric die isolation features |
US7102363B2 (en) * | 2003-11-21 | 2006-09-05 | Neocera, Inc. | Method and system for non-contact measurement of microwave capacitance of miniature structures of integrated circuits |
-
2004
- 2004-12-09 CN CNB2004800384275A patent/CN100481438C/zh not_active Expired - Fee Related
- 2004-12-09 EP EP04801509A patent/EP1700340A1/en not_active Withdrawn
- 2004-12-09 KR KR1020067012630A patent/KR20060117974A/ko not_active Application Discontinuation
- 2004-12-09 WO PCT/IB2004/052721 patent/WO2005064678A1/en not_active Application Discontinuation
- 2004-12-09 JP JP2006546424A patent/JP2007516618A/ja not_active Withdrawn
- 2004-12-09 US US10/584,102 patent/US7508051B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN1898796A (zh) | 2007-01-17 |
US7508051B2 (en) | 2009-03-24 |
JP2007516618A (ja) | 2007-06-21 |
WO2005064678A1 (en) | 2005-07-14 |
US20070111352A1 (en) | 2007-05-17 |
KR20060117974A (ko) | 2006-11-17 |
EP1700340A1 (en) | 2006-09-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: NXP CO., LTD. Free format text: FORMER OWNER: KONINKLIJKE PHILIPS ELECTRONICS N.V. Effective date: 20070817 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20070817 Address after: Holland Ian Deho Finn Applicant after: Koninkl Philips Electronics NV Address before: Holland Ian Deho Finn Applicant before: Koninklijke Philips Electronics N.V. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090422 Termination date: 20201209 |