CN100462723C - Miniature mechanical three-axis angular rate sensor - Google Patents
Miniature mechanical three-axis angular rate sensor Download PDFInfo
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- CN100462723C CN100462723C CNB2005100961349A CN200510096134A CN100462723C CN 100462723 C CN100462723 C CN 100462723C CN B2005100961349 A CNB2005100961349 A CN B2005100961349A CN 200510096134 A CN200510096134 A CN 200510096134A CN 100462723 C CN100462723 C CN 100462723C
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Abstract
The invention relates to the sensor used to measure three-axial direction angular rate for rotating substance. It includes X, Y, Z three space axial angle rate sensors each of which is made up of ST self test interface circuit, sensing element circuit, charge pump booster circuit, demodulation filter circuit, and output amplifying circuit. The output of the self test interface and charge pump circuit are respectively connected with the input of the sensing element circuit of which output is connected with output amplifying circuit by demodulation filter circuit. Angle rate sensor based on resonator gyro principle uses sensing element formed by MEMS technique chip to receive electrical signal caused by Cuneo sport for the substance with angle rate. The electrical signal is processed by demodulation filter circuit and output amplifying circuit to output analogue signal which be in direct proportion to angle rate to corresponding micro processor. The product has the advantages of reasonable structure, convenient operation, little size, low fabricating cost, wide application in inertia measurement, vehicle stabilization control, strap down INAS fields etc.
Description
Affiliated technical field
Content of the present invention belongs to the inertia measurement device technical field, relate to a kind of angular rate sensor that can measure three axial angle speed of rotating object, industry field such as its product can be widely used in that inertial measurement system, stable platform, missile guidance and control, aviation aircraft stablize that control, inertial navigation, automotive electronic technology, antenna are adjusted, digital photography gyrostat and robot control.
Background technology
The angular rate sensor overwhelming majority of generally using in above-mentioned every profession and trade field all is mechanical at present, floating or half liquid floating, the flexible angular rate sensor that rotation motor is arranged etc. as liquid, the outstanding shortcoming that these old-fashioned angular rate sensors exist in actual applications be volume big, cost an arm and a leg, fragile, impact-resistant acceleration is low, the life-span is short, measurement range little (only 500 ° of maximums/s), frequency response low (mostly being 100HZ most) and how not possess from detecting (Self-Test) function etc.In above every shortcoming: volume is big, has limited the installation and the application of product; Cost an arm and a leg (most), make the general user be difficult to bear more than 20,000 yuan; Fragile is that these rotating parts damage easily because old-fashioned angular rate sensor all has the motor of high speed rotating and high-accuracy framework; The reason that impact-resistant acceleration is low is that rotation motor belongs to the accurate device be difficult for being hit, and after inherent sensitive element (pick-off) is subjected to greater impact, can be shifted, and influences precision; Life-span is short mainly because of due to the wearing and tearing of moving part; Certainly the disappearance that detects (Self-Test) function then means in the control system of using the mechanical type angular rate sensor can't realize detecting in the machine BIT (Built-in-Test) function.Even current advanced optical fiber or laser angular rate sensor also since its cost an arm and a leg and volume big etc. former thereby be difficult to be widely used.
Summary of the invention
The objective of the invention is to the problem that prior art exists is solved, so provide that a kind of structural behaviour practicality is reasonable, easy to operate, volume is little, in light weight, cost is low, the miniature mechanical three-axis angular rate sensor of applied range.
The technical solution that adopts is so for achieving the above object: the miniature mechanical three-axis angular rate sensor that is provided comprises that three are respectively applied for measured X, Y, the sensor of Z spatial axes angular speed and three by A/D converter separately respectively with three spatial axes angular rate sensor output terminal microprocessor linked, the output terminal of three microprocessors is connected on the input end of a RS232/RS422/RS485 interface circuit, it is characterized in that each spatial axes angular rate sensor detects interface circuit certainly by the ST that adopts MEMS technology chip (micromechanics-electronic technology chip), the sensitive element circuit, charge pump booster circuit, demodulation filtering circuit and output amplifier are formed, ST is connected to the input end of sensitive element circuit respectively from the output terminal that detects interface circuit and charge pump booster circuit, and the output terminal of sensitive element circuit connects with the input end of output amplifier by the demodulation filtering circuit.In the practical application, this angular rate sensor is worked according to the resonator gyro principle, the sensitive element that constitutes with MEMS technology chip receives the moving and generation electric signal of the Olympic Games in the section that produces when object has angular speed, this electric signal is output delivers to demodulation filtering circuit and output amplifier, and then export the simulating signal that is proportional to angular speed, again through sending corresponding microprocessor after each A/D converter conversion.
Tri-axis angular rate sensor of the present invention belongs to the solid-state angular rate sensor of motor without spin, its internal circuit working component adopts the chip of micro-mechanical-electronic system (MEMS) technology, it makes the production technology of employing ambipolar metal-oxide semiconductor (MOS) (BIMOS) technology and the current-carrying welder technology that ball grid is arranged, product has high reliability and high encapsulation soundness, and possess self-checking function, can realize detecting in the machine (BIT).
Description of drawings
Fig. 1 is a design concept block diagram of the present invention.
Fig. 2 is the design concept block diagram of single shaft angular rate sensor.
Fig. 3 is the circuit theory diagrams of a single shaft angular rate sensor embodiment.
Fig. 4 is the used microprocessor circuit figure of the present invention.
Embodiment
Referring to accompanying drawing 1 and accompanying drawing 2, comprise three sensors 1,2,3 that are respectively applied for measured X, Y, Z spatial axes angular speed in the miniature mechanical three-axis angular rate sensor of the present invention, the output terminal of each spatial axes angular rate sensor 1,2,3 respectively is connected with the input end of a microprocessor 7,8,9 respectively by A/D converter 4,5,6 separately, and the output terminal of three microprocessors 7,8,9 then is attempted by on the input end of a RS232 or RS422 or RS485 interface circuit 10.Each spatial axes angular rate sensor among the present invention is formed from detecting interface circuit 11, sensitive element circuit 12, charge pump booster circuit 13, demodulation filtering circuit 14 and output amplifier 15 by the ST that adopts MEMS technology chip, ST is connected to the input end of sensitive element circuit 12 respectively from the output terminal that detects interface circuit 11 and charge pump booster circuit 13, and the output terminal of sensitive element circuit 12 connects by the input end of demodulation filtering circuit 14 with output amplifier 15.In the side circuit shown in the accompanying drawing 3, sensitive element circuit 12 is that the sensitive element chip of PO-XRS and integrated chip that model is LTC2053 constitute by model, the input termination angular speed input signal of PO-XRS, demodulation filtering circuit 14 is that the chip of LB8207 constitutes by model, output amplifier 15 is that the integrated chip of LTC2053 constitutes by model, and the integrated chip that 13 of charge pump booster circuits are REG711-5 by two LTC2053 integrated chips and model constitutes.Label 16 is a reference voltage circuit among Fig. 2.
In the structure of the present invention used microcontroller circuit as shown in Figure 4, it by two models respectively the integrated chip of Aduc834C and SN65HVD3082 constitute.The angular speed output signal that the microprocessor pick-up transducers is sent, and be converted into digital signal, carry out filtering and eliminating noise, temperature drift correction, gamma correction, zero migration correction and sensitivity correction then, at last by RS232, RS422 or RS485 interface circuit 10 output angle rate signals.
Tri-axis angular rate sensor of the present invention mainly can be used for following technical field:
Stable and the control technology field of missile guidance, aircraft: in missile control system and comprise in the automatic control of the various aircraft in transporter, fighter plane, multi-purpose unmanned plane and rocket ship etc. are again, the sensor of measuring the aircraft tri-axis angular rate is to realize increasing steady flight control automatically and drive the main sensitive element of function automatically, it can improve the hit rate of guided missile, improve the maneuverability and the maneuverability of aircraft, make aircraft obtain good manipulation and stabilizing quality;
Industrial measurement and control technical field: every equipment or target that angular speed is arranged, all need to measure angular speed in order to stablize with accurate control, and, be used for the fast and stable control system, thereby controlling object is controlled accurately and effectively as main signal introducing control system;
The inertial navigation technical field: this product is as the requisite matching component of strapdown inertial navitation system (SINS), is used for that strapdown inertial navitation system (SINS) is carried out the position and the boat appearance is resolved, and can replace the flexible angular rate sensor product of mechanical type that existing strapdown inertial navitation system (SINS) is used;
The automatic driving technical field: use this product be used to measure multiple car body turning, pitching up and down, about the tri-axis angular rate that jolts, introduce vehicle steadily control and automated driving system, thereby control effectively and the driving of stable automobile, particularly high performance automobile has been become indispensable matching component gradually;
The Robotics field: use this product to be used for the angular speed of each joint part of robot measurement and rotating part, as the automatic control system that feedback signal enters robot, make robot accurately, flexibly, action stably.
Claims (1)
1, a kind of miniature mechanical three-axis angular rate sensor, comprise that three are respectively applied for measured X, Y, the sensor (1 of Z spatial axes angular speed, 2,3) and three by A/D converter (4 separately, 5,6) respectively with three spatial axes angular rate sensors (1,2,3) the output terminal microprocessor linked (7,8,9), three microprocessors (7,8,9) output terminal is connected on the input end of a RS232/RS422/RS485 interface circuit (10), it is characterized in that each spatial axes angular rate sensor detects interface circuit (11) certainly by the ST that adopts MEMS technology chip, sensitive element circuit (12), charge pump booster circuit (13), demodulation filtering circuit (14) and output amplifier (15) are formed, ST is connected to the input end of sensitive element circuit (12) respectively from the output terminal that detects interface circuit (11) and charge pump booster circuit (13), and the output terminal of sensitive element circuit (12) connects by the input end of demodulation filtering circuit (14) with output amplifier (15).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100961349A CN100462723C (en) | 2005-10-12 | 2005-10-12 | Miniature mechanical three-axis angular rate sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100961349A CN100462723C (en) | 2005-10-12 | 2005-10-12 | Miniature mechanical three-axis angular rate sensor |
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| Publication Number | Publication Date |
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| CN1948969A CN1948969A (en) | 2007-04-18 |
| CN100462723C true CN100462723C (en) | 2009-02-18 |
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| CNB2005100961349A Expired - Fee Related CN100462723C (en) | 2005-10-12 | 2005-10-12 | Miniature mechanical three-axis angular rate sensor |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101661047B (en) * | 2009-09-29 | 2011-03-16 | 哈尔滨工程大学 | Output conversion device of strapdown inertial navigation accelerometer |
| CN101750055B (en) * | 2009-12-22 | 2011-08-17 | 浙江大学 | Virtual implementation device of vibrating micromechanical gyro based on Coriolis effect |
| CN101839719A (en) * | 2010-05-16 | 2010-09-22 | 中北大学 | Inertial measurement unit based on gyroscope and geomagnetic sensor |
| CN113093797A (en) * | 2021-03-31 | 2021-07-09 | 广东电网有限责任公司 | Unmanned aerial vehicle-based intelligent power transmission line inspection method and system |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US4920801A (en) * | 1987-07-29 | 1990-05-01 | The Marconi Company Limited | Accelerometer |
| US5253510A (en) * | 1989-06-22 | 1993-10-19 | I C Sensors | Self-testable micro-accelerometer |
| CN1460867A (en) * | 2003-05-23 | 2003-12-10 | 中国石油化工股份有限公司石油勘探开发研究院南京石油物探研究所 | Three-component digital seismic exploration wave detector |
| CN1570651A (en) * | 2004-04-29 | 2005-01-26 | 中国科学院上海微系统与信息技术研究所 | Accelerometer with static self test realized by single silicon slice micro mechanical technique |
| CN1664506A (en) * | 2004-03-05 | 2005-09-07 | 清华大学 | Carrier attitude measurement method and system |
| CN2828821Y (en) * | 2005-10-12 | 2006-10-18 | 西安中星测控有限公司 | Micromechanical triaxial angle rate sensor |
-
2005
- 2005-10-12 CN CNB2005100961349A patent/CN100462723C/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4920801A (en) * | 1987-07-29 | 1990-05-01 | The Marconi Company Limited | Accelerometer |
| US5253510A (en) * | 1989-06-22 | 1993-10-19 | I C Sensors | Self-testable micro-accelerometer |
| CN1460867A (en) * | 2003-05-23 | 2003-12-10 | 中国石油化工股份有限公司石油勘探开发研究院南京石油物探研究所 | Three-component digital seismic exploration wave detector |
| CN1664506A (en) * | 2004-03-05 | 2005-09-07 | 清华大学 | Carrier attitude measurement method and system |
| CN1570651A (en) * | 2004-04-29 | 2005-01-26 | 中国科学院上海微系统与信息技术研究所 | Accelerometer with static self test realized by single silicon slice micro mechanical technique |
| CN2828821Y (en) * | 2005-10-12 | 2006-10-18 | 西安中星测控有限公司 | Micromechanical triaxial angle rate sensor |
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