CN100449698C - Exhaust control apparatus for gumming machine - Google Patents
Exhaust control apparatus for gumming machine Download PDFInfo
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- CN100449698C CN100449698C CNB2006100299235A CN200610029923A CN100449698C CN 100449698 C CN100449698 C CN 100449698C CN B2006100299235 A CNB2006100299235 A CN B2006100299235A CN 200610029923 A CN200610029923 A CN 200610029923A CN 100449698 C CN100449698 C CN 100449698C
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- glue spreader
- valve
- exhaust
- adjuster valve
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Abstract
The invention discloses an evacuating control device of glue coater, comprising a vent-pipe of glue coater, an overall vent-pipe, a sensor, a controller and an adjustable valve. The sensor is positioned in the vent-pipe of glue coater, used for having response to displacement of the glue coater. The adjustable valve is positioned between the vent-pipe of glue coater and the overall vent-pipe, used for controlling the displacement of the glue coater. The controller is connected with the sensor and the adjustable valve, used for receiving induction signals from the sensor and giving control signals to the adjustable valve. The invention of the evacuating control device of glue coater can realize automatic and correct control for the displacement of the glue coater, improving quality and repeatability of coating technology of photoresist.
Description
Technical field
The present invention relates to technical field of manufacturing semiconductors, particularly a kind of exhaust control device of glue spreader.
Background technology
In the semiconductor fabrication process, photoetching process is considered to the step of most critical in the integrated circuit manufacturing always, need to be used multiple times in whole technical process, its stability, reliability and process yield are to quality, yield and the cost important influence of product.The essence of photoetching is will carry out after the patch structure is copied to the form of figure on the wafer that etching or ion inject.Photoetching process is the process of a complexity, at first covers one deck photosensitive material--photoresist on wafer, directional light is radiated at through a mask to make its exposure on the photoresist and go bad again, and utilizes developer solution to develop at last and finishes figure transfer.Wherein the uniformity of photoresist has very big influence to the quality of photoetching process, has only photoresist to have good tack, etch resistance and high-resolution and could realize complete figure transfer.So for semiconductor fabrication process, the formation quality of photoresist is extremely important.
Application number is that 97111875.2 Chinese patent discloses a kind of method that forms photoresist film, this method is behind the spin coating photoresist, be dispersed in microwaviness, pin hole and the decortication part of eliminating on the wafer on the glued membrane with high pressure nitrogen, remove the interior solvent of glued membrane with the nitrogen of high temperature drying again, some defectives that occur in the photoresist film have been improved, but this method can not prevent this class generation of defects, can only be to reduce its harmfulness to a certain extent.In addition, this method is also more to the change of glue spreader, realizes comparatively difficulty; It also need increase N
2To the heat treated of wafer, be unfavorable for the raising of device performance down.
Producing if can prevent defective in the forming process of photoresist, for the formation quality that improves photoresist, is even more ideal method, needs the forming process of photoresist is analyzed for this reason, and the process that may cause defective is improved.Generally be to utilize the method for rotation gluing to coat layer of even liquid phase photoresist material in the photoetching in wafer surface.Used equipment is called glue spreader (Spin Coater) or sol evenning machine during gluing, and its operation principle is the high speed rotating wafer, and the glue that utilizes centrifugal force to make to drop on the wafer is coated on the wafer equably.Fig. 1 is the structural representation of existing glue spreader, as shown in Figure 1, in order to be rotated gluing, at first wafer 101 is adsorbed on the slide holder 102, there are a lot of vacuum holes on this slide holder surface, and link with vacuum tube 103, can hold wafer 101 when it is rotated with box lunch under motor 104 drives; Then, the liquid photoresist of some is dropped on the wafer by nozzle 105, this nozzle has resorption parts, drops in wafer surface to prevent cull; Then, the rotation wafer obtains the layer of even photoresist coating.In addition, the chamber 106 of glue spreader is linked to each other with blast pipe 107, so that in the gluing process of photoresist, chamber is carried out pump-down process.In the gluing process, the deflation rate of glue spreader must accurately be controlled, and its control is bad can to influence the formation quality that directly arrives photoresist, forms defectives such as microwaviness, pin hole and decortication in glued membrane.As, if exhaust is strong excessively in the gluing process, can produces too big air-flow and cause photoresist too dry, cause the photoresist decortication; If the bad impurity particle that then may cause of exhaust can not be taken away by air-flow, stain but be deposited on to cause on the wafer, form needle pore defect.
For this reason, if can accurately control the air displacement of glue spreader, for the defective that reduces in the photoresist, the formation quality that improves photoresist is very favourable.
Fig. 2 is the schematic diagram of existing glue spreader exhaust control device.For glue spreader, required air displacement was different when required air displacement was with the rotation gluing when its slide holder was static, and the former is when the 50Pa left and right sides, and the latter may be about 100Pa, thereby existing exhaust control device generally is made up of two control valves.As shown in Figure 2, the exhaust control device of existing glue spreader is made up of with second control valve 203 that links to each other with glue spreader blast pipe 205 first control valve 202 that links to each other with total air escape pipe 201.Wherein, the air displacement of first control valve 202 during generally by the bigger rotation gluing of required air displacement manually is provided with, as air displacement is set is 100Pa; Second control valve 203 is the control valves by electromagnetic switch valve 204 control open and close, the air displacement setting of its value of setting during by less static of required flow.When glue spreader was in the spin coating state, required air displacement was bigger, and the glue spreader setting program is given " pass " signal of electromagnetically operated valve, controls the state that second control valve is in the pass, and the air displacement of glue spreader is limited by first control valve only, and promptly air displacement can reach 100Pa; When glue spreader remains static, required air displacement is less, the glue spreader setting program is given " opening " signal of electromagnetically operated valve, control the state that second control valve is in out, the air displacement of glue spreader also can be subjected to the restriction of the set air displacement size of second control valve at this moment, the air displacement of glue spreader reduces, as is 50Pa.Though pass through automatic switch control in the exhaust control device of existing glue spreader to second control valve, realized automatic control to the folk art term position of air displacement, satisfied the basic exhaust requirements of coating technique, but its air displacement size to the folk art term position still all rests on the stage of realizing by manual adjustments, has brought some inconveniences to practical operation.
In actual process, regular meeting departs from the value of setting during the air displacement of glue spreader, causes that the reason of this phenomenon mainly contains two: the one, and the fluctuation of the glue spreader air displacement that causes because of the variation of the gross exhaust gas of factory; The 2nd, in exhaust process, often there are some tiny impurity particles to be brought in the blast pipe, on exhaust wall, to adhere to, this air displacement that also can cause glue spreader departs from the value of setting.And two control valves of existing glue spreader all are the sizes by the manual adjustments air displacement, do not possess by the self-regulating ability of actual row tolerance, promptly do not possess the ability of anti-air displacement fluctuation, can not realize the accurate control of glue spreader air displacement.
Except that the passive adjusting that above-mentioned said need carry out the glue spreader air displacement, also need the size of air displacement is carried out some active adjustment in the coating technique of existing glue spreader: experiment shows, different photoresists, difference because of composition, colloidal sol amount in the glued membrane that needs to remove in the gluing process is also different, the air displacement size that causes various photoresists to be suitable for when obtaining optimum gluing quality is also inequality, for this reason often need according to type with photoresist the air displacement of glue spreader is finely tuned.And the manual adjustments mode of existing glue spreader is for this requirement, implements very inconveniently, needs operating personnel to carry out manual adjustments repeatedly, easily causes human error.
Summary of the invention
The invention provides a kind of exhaust control device of glue spreader, can be exactly to the control that automatically adjusts of the air displacement of glue spreader, improved the formation quality of photoresist.
The invention provides a kind of exhaust control device of glue spreader, comprise glue spreader blast pipe, total air escape pipe and inductor, controller, adjuster valve; And described inductor is positioned at described glue spreader blast pipe, is used to respond to the air displacement of described glue spreader; Described controller links to each other with described adjuster valve with described inductor, is used to be provided with the induced signal of target exhaust value and the described inductor of reception, and sends the adjusting control signal to described adjuster valve; Described adjuster valve is used for according to the described adjusting control signal that receives, the air displacement of regulating described glue spreader between described glue spreader blast pipe and described total air escape pipe.
Wherein, described adjuster valve is proportional control valve or the electromagnetically operated valve that can regulate continuously.
Wherein, described controller sends conditioning signal according to the comparative result of described target exhaust value and described induced signal to adjuster valve; Described adjuster valve is to the state information of controller transmission itself; Described controller sends conditioning signal according to the comparative result of described target exhaust value and described induced signal and the oneself state signal of adjuster valve transmission to adjuster valve.
Wherein, described inductor is a flow probe.
The present invention has the exhaust control device of the another kind of glue spreader of identical or relevant art feature, comprises glue spreader blast pipe, total air escape pipe, the master control valve between glue spreader blast pipe and total air escape pipe; And inductor, controller and adjuster valve; And described inductor is positioned at described glue spreader blast pipe, is used to respond to the air displacement of described glue spreader; Described controller links to each other with described adjuster valve with described inductor, is used to be provided with the induced signal of target exhaust value and the described inductor of reception, and sends the adjusting control signal to described adjuster valve; Described adjuster valve is used for according to the described adjusting control signal that receives, the air displacement of regulating described glue spreader between the blast pipe and described master control valve of described glue spreader; Described master control valve is positioned between described adjuster valve and the described total air escape pipe, is used to limit the maximum air displacement of described glue spreader.
Wherein, described adjuster valve is proportional control valve or the electromagnetically operated valve that can regulate continuously.
Wherein, described controller sends conditioning signal according to the comparative result of described target exhaust value and described induced signal to adjuster valve; Described adjuster valve is to the state information of controller transmission itself; Described controller sends conditioning signal according to the comparative result of described target exhaust value and described induced signal and the oneself state signal of adjuster valve transmission to adjuster valve.
Wherein, described inductor is a flow probe.
Compared with prior art, the present invention has the following advantages:
Glue spreader exhaust control device of the present invention, replaced manual exhaust control device in the existing glue spreader with having the feedback and the exhaust control device of self-regulation ability, improved the problem that fluctuation takes place because of the glue spreader air displacement that gross exhaust gas fluctuates and pipeline has attachment to cause, can be comparatively exactly the air displacement of glue spreader be automatically adjusted, improve the quality and the repeatability of photoresist spin coating proceeding, improved the rate of finished products of product.
Glue spreader exhaust control device of the present invention, can also by program be provided with automatically according to type with photoresist the air displacement of glue spreader is finely tuned, further improve the formation quality of photoresist.
Glue spreader exhaust control device of the present invention, less to the change of glue spreader, realize comparatively simple.
Description of drawings
Fig. 1 is the structural representation of existing glue spreader;
Fig. 2 is existing glue spreader exhaust control device connection diagram;
Fig. 3 is the connection diagram of first specific embodiment of glue spreader exhaust control device of the present invention;
Fig. 4 is the connection diagram of second specific embodiment of glue spreader exhaust control device of the present invention.
Embodiment
For above-mentioned purpose of the present invention, feature and advantage can be become apparent more, the specific embodiment of the present invention is described in detail below in conjunction with accompanying drawing.
The exhaust control device that exhaust control device usefulness of the present invention has feedback and self-regulation ability has replaced the manual exhaust control device in the existing glue spreader, not only can react to the fluctuation of glue spreader air displacement, can also be embodied as the fine setting of the air displacement of optimizing process conditions and carrying out, realize control automatically comparatively accurately air displacement.
Fig. 3 is the connection diagram of first specific embodiment of glue spreader exhaust control device of the present invention.As shown in Figure 3, exhaust control device of the present invention is made up of glue spreader blast pipe 205, inductor 301, controller 302, adjuster valve 303 and total air escape pipe 201.Wherein, inductor 301 is positioned at the glue spreader blast pipe, is used to respond to the actual row tolerance of glue spreader; Controller 302 links to each other with adjuster valve 303 with inductor 301, is used to be provided with the induced signal of target exhaust value and reception inductor, and sends the adjusting control signal to adjuster valve 303; Adjuster valve 303 is used for regulating the air displacement of glue spreader according to the adjusting control signal that receives between the blast pipe 205 and total air escape pipe 201 of glue spreader.
In the present embodiment, the target exhaust value is arranged in the controller, is transmitted control signal to adjuster valve by this value of setting by controller, the adjuster valve in the present embodiment is a proportional control valve, this valve can be opened ratio in the control signal adjustment of controller, realizes the target exhaust amount.For guarding against deviations, utilize inductor again, in the present embodiment flow probe, the actual row tolerance in the blast pipe is responded to, and will be responded to the result and be dealt in the controller; After controller receives this induced signal, be converted into the signal of telecommunication earlier, again itself and the target exhaust value that is provided with compared, and obtain comparative result.Simultaneously, proportional control valve also sends to controller with the adjustment state signal of himself, controller sends the adjustment signal to proportional control valve again according to the status signal of comparative result and proportional control valve, further the resize ratio of control ratio control valve is realized the basically identical between the actual row tolerance and the value of setting.
In the present embodiment, controller links to each other with the computer control system of glue spreader, can carry out the parameter setting to it by computer, when each technological parameter of glue spreader is provided with, finishes air displacement, i.e. the setting of controller parameter.As glue spreader air displacement under static state is set in the computer program of glue spreader is 50Pa, air displacement under rotation status is 100Pa, then when glue spreader operation setting program arrives inactive state, controller sends the control signal that air displacement is 50Pa to proportional control valve, and actual row tolerance is detected by the inductor of installing in the glue spreader blast pipe, if because the obstruction in the pipeline, make that the actual row tolerance ratio value of setting is little, as be 40Pa, then controller can be after receiving induced signal and comparing, send the control signal that strengthens air displacement to proportional control valve, proportional control valve is strengthened open ratio so that the approaching value of setting of actual row tolerance; If because the fluctuation of gross exhaust gas, detected air displacement is greater than the value of setting, as is 60Pa, then controller sends the control signal that reduces the ratio of opening to control valve again after receiving induced signal, and air displacement is reduced with the approaching value of setting.When glue spreader moved setting program to rotation status, controller sent the control signal that air displacement is 100Pa to proportional control valve, the ratio of opening of resize ratio control valve; And by the inductor of installing in the blast pipe actual row tolerance is detected equally, the induced signal that detection is obtained sends to controller; Send adjustment signal according to this induced signal to proportional control valve by controller again, the control ratio control valve is realized the automatic adjustment of air displacement size.
In addition, present embodiment can also be provided with different operation sequences at dissimilar photoresists, and in each program, carry out the optimization setting of air displacement, like this, when operation, only need call the different air displacement setting that corresponding program just can realize different photoresists easily, reduce because the operative employee manually regulates some human errors that cause repeatedly.As: for being applicable to that exposure wavelength is the photoresist of 193nm, optimal amount of exhaust gas under its inactive state is 60-70Pa, as be 65Pa, and for being applicable to that exposure wavelength is the photoresist of 248nm, optimal amount of exhaust gas under its inactive state is 45-55Pa, as be 50Pa, the different parameter that they were suitable for is separately positioned in its pairing program, just can realize the pairing different optimization air displacement of different photoresists easily.
Fig. 4 is the connection diagram of second specific embodiment of glue spreader exhaust control device of the present invention.As shown in Figure 4, exhaust control device of the present invention is made up of glue spreader blast pipe 205, inductor 401, controller 402, adjuster valve 403, master control valve 404 and total air escape pipe 201.Wherein, inductor 401 is positioned at the glue spreader blast pipe, is used to respond to the air displacement of glue spreader; Controller 402 links to each other with adjuster valve 403 with inductor 401, is used to be provided with the induced signal of target exhaust value and reception inductor 401, and sends the adjusting control signal to adjuster valve 403; Adjuster valve 403 is used for regulating the air displacement of glue spreader according to the adjusting control signal that receives between glue spreader blast pipe 205 and master control valve 404; Master control valve 404 is used to limit the maximum air displacement of glue spreader between adjuster valve 403 and total air escape pipe 201.
In the present embodiment, in order to increase degree of regulation, master control valve and the higher adjuster valve of degree of regulation combined realize the control of air displacement.To be limited in towards the air displacement of adjuster valve in the certain value by the master control valve earlier, regulate in this scope by adjuster valve again, make that the range of flow of adjuster valve can be less, increase the degree of regulation of adjuster valve.
Master control valve in the present embodiment can adopt the mode of manual adjustments, it is set to the scope of a broad, as the maximum air displacement that needs in the glue spreader is 100Pa, then in the fluctuation of considering that the particle that may adhere on the blast pipe sidewall and gross exhaust gas may take place, the air displacement size of master control valve is set to 120Pa, and it is the hand control valve of 300Pa that this master control valve can be selected range of flow.Then, utilizing the less adjuster valve of scope, is that the electromagnetically operated valve that can regulate continuously of 150Pa is finely tuned the flow of concrete needs as range of flow, and for the less electromagnetically operated valve of range of flow, the precision of its adjusting is higher, and it is more accurate to control.
In the present embodiment, the target exhaust value can be arranged in the controller equally, send signal of telecommunication control electromagnetically operated valve by controller by this value of setting again and adjust switch size; Simultaneously, utilize flow probe that the actual row tolerance in the blast pipe is responded to, and will respond to the result and be dealt in the controller; After controller should be responded to the result and was converted to the signal of telecommunication, target exhaust value with this electrical signal of reaction and setting compares again, and according to comparative result the control signal of telecommunication of electromagnetically operated valve is sent in adjustment, the control electromagnetically operated valve is adjusted the degree of its switch automatically, has promptly controlled the size of air displacement.
Controller in the present embodiment carries out parameter by computer and is provided with, and dissimilar photoresists are to the different requirements of air displacement, can be by the control that realizes different air displacemenies that is provided with to program separately.For the different requirements of the different conditions of glue spreader, then can realize by the different value that is provided with to the different phase in the program to air displacement.Controller sends the different control signals of telecommunication according to these values of setting to the continuously controllable electromagnetically operated valve, makes it can automatically realize being undertaken by the value of setting the control of air displacement size.As: for being applicable to that exposure wavelength is the photoresist of 193nm, the air displacement that is provided with in its gluing program under the inactive state is 65Pa, air displacement under the rotation status is 100Pa, then when the setting program of glue spreader runs to inactive state, controller sends the control signal that air displacement is 65Pa to electromagnetically operated valve, and the induction result who utilizes the interior inductor of installing of glue spreader blast pipe to beam back to actual row tolerance, send the adjustment signal to electromagnetically operated valve, make that finally the actual row tolerance of glue spreader is basicly stable at 65Pa.When the setting program of glue spreader runs to rotation status, controller sends the control signal that air displacement is 100Pa to electromagnetically operated valve, and by the inductor of installing in the blast pipe actual row tolerance is detected equally, send the adjustment signal by controller again, the control electromagnetically operated valve air displacement of glue spreader the most at last is stabilized in 100Pa.
And for being applicable to that exposure wavelength is the photoresist of 248nm, the air displacement that can be provided with in its gluing program under the inactive state is 50Pa, air displacement under the rotation status is 90Pa, then when the setting program of glue spreader ran to inactive state, controller sent the control signal that air displacement is 50Pa to electromagnetically operated valve; When the setting program of glue spreader runs to rotation status, controller sends the control signal that air displacement is 90Pa to electromagnetically operated valve, and the induction result who all utilizes the inductor installed in the glue spreader blast pipe to beam back in each stage to actual row tolerance, compare respectively with the value of setting in each stage, send to electromagnetically operated valve again and adjust signal, finally make the actual row tolerance of glue spreader can be stabilized in respectively on the set different value of different phase.
Among other embodiment of the present invention, inductor and controller also can utilize the data collecting card with traffic probe head to realize its function.
In the foregoing description, controller is linked to each other with computer system, and by to computer program the exhaust amount parameter setting of realization to controller be set, among other embodiment of the present invention, also can be to the exhaust amount parameter setting in the controller by controller manually is provided with realization.
Though the present invention with preferred embodiment openly as above; but it is not to be used for limiting the present invention; any those skilled in the art without departing from the spirit and scope of the present invention; can make possible change and modification, so protection scope of the present invention should be as the criterion with the scope that claim of the present invention was defined.
Claims (12)
1, a kind of exhaust control device of glue spreader comprises glue spreader blast pipe and total air escape pipe; It is characterized in that: described device also comprises inductor, controller and adjuster valve; Described inductor is positioned at described glue spreader blast pipe, is used to respond to the air displacement of described glue spreader; Described controller links to each other with the computer control system of described glue spreader, described inductor and described adjuster valve, described controller is used for by described computer control system target exhaust amount parameter being set, receive the induced signal of described inductor, send the adjusting control signal to described adjuster valve, and described be provided with target exhaust amount parameter comprise according to glue spreader different conditions of living in or with photoresist dissimilar different target exhaust values is set respectively; Described adjuster valve is used for according to the described adjusting control signal that receives, the air displacement of regulating described glue spreader between described glue spreader blast pipe and described total air escape pipe.
2, exhaust control device as claimed in claim 1 is characterized in that: described adjuster valve is proportional control valve or the electromagnetically operated valve that can regulate continuously.
3, exhaust control device as claimed in claim 1 is characterized in that: described controller sends conditioning signal according to the comparative result of described target exhaust value and described induced signal to adjuster valve.
4, exhaust control device as claimed in claim 1 is characterized in that: described adjuster valve is to the state information of controller transmission itself.
5, exhaust control device as claimed in claim 4 is characterized in that: described controller sends conditioning signal according to the comparative result of described target exhaust value and described induced signal and the oneself state signal of adjuster valve transmission to adjuster valve.
6, exhaust control device as claimed in claim 1 is characterized in that: described inductor is a flow probe.
7, a kind of exhaust control device of glue spreader comprises glue spreader blast pipe, total air escape pipe and the master control valve between glue spreader blast pipe and total air escape pipe; It is characterized in that: described device also comprises inductor, controller and adjuster valve; Described inductor is positioned at described glue spreader blast pipe, is used to respond to the air displacement of described glue spreader; Described controller links to each other with the computer control system of described glue spreader, described inductor and described adjuster valve, described controller is used for by described computer control system target exhaust amount parameter being set, receive the induced signal of described inductor, send the adjusting control signal to described adjuster valve, and described be provided with target exhaust amount parameter comprise according to glue spreader different conditions of living in or with photoresist dissimilar different target exhaust values is set respectively; Described adjuster valve is used for according to the described adjusting control signal that receives, the air displacement of regulating described glue spreader between the blast pipe and described master control valve of described glue spreader; Described master control valve is positioned between described adjuster valve and the described total air escape pipe, is used to limit the maximum air displacement of described glue spreader.
8, exhaust control device as claimed in claim 7 is characterized in that: described adjuster valve is proportional control valve or the electromagnetically operated valve that can regulate continuously.
9, exhaust control device as claimed in claim 7 is characterized in that: described controller sends conditioning signal according to the comparative result of described target exhaust value and described induced signal to adjuster valve.
10, exhaust control device as claimed in claim 7 is characterized in that: described adjuster valve is to the state information of controller transmission itself.
11, exhaust control device as claimed in claim 10 is characterized in that: described controller sends conditioning signal according to the comparative result of described target exhaust value and described induced signal and the oneself state signal of adjuster valve transmission to adjuster valve.
12, exhaust control device as claimed in claim 7 is characterized in that: described inductor is a flow probe.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100299235A CN100449698C (en) | 2006-08-10 | 2006-08-10 | Exhaust control apparatus for gumming machine |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2006100299235A CN100449698C (en) | 2006-08-10 | 2006-08-10 | Exhaust control apparatus for gumming machine |
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| CN101122801A CN101122801A (en) | 2008-02-13 |
| CN100449698C true CN100449698C (en) | 2009-01-07 |
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| CNB2006100299235A Expired - Fee Related CN100449698C (en) | 2006-08-10 | 2006-08-10 | Exhaust control apparatus for gumming machine |
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| CN106610568A (en) * | 2015-10-27 | 2017-05-03 | 沈阳芯源微电子设备有限公司 | Glue coating development process module and control method for module internal environment parameters |
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|---|---|---|---|---|
| JPS57166033A (en) * | 1981-04-06 | 1982-10-13 | Toshiba Corp | Applying device for resist with adjusting mechanism for quantity of exhaust gas |
| JPS6464217A (en) * | 1987-09-02 | 1989-03-10 | Nec Corp | Applicator for photo-resist |
| JPH0435768A (en) * | 1990-05-29 | 1992-02-06 | Fujitsu Ltd | Spin-coating method |
| US5254367A (en) * | 1989-07-06 | 1993-10-19 | Tokyo Electron Limited | Coating method and apparatus |
| US6027760A (en) * | 1997-12-08 | 2000-02-22 | Gurer; Emir | Photoresist coating process control with solvent vapor sensor |
| CN2605929Y (en) * | 2003-02-17 | 2004-03-10 | 袁连科 | Two-component coater |
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2006
- 2006-08-10 CN CNB2006100299235A patent/CN100449698C/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57166033A (en) * | 1981-04-06 | 1982-10-13 | Toshiba Corp | Applying device for resist with adjusting mechanism for quantity of exhaust gas |
| JPS6464217A (en) * | 1987-09-02 | 1989-03-10 | Nec Corp | Applicator for photo-resist |
| US5254367A (en) * | 1989-07-06 | 1993-10-19 | Tokyo Electron Limited | Coating method and apparatus |
| JPH0435768A (en) * | 1990-05-29 | 1992-02-06 | Fujitsu Ltd | Spin-coating method |
| US6027760A (en) * | 1997-12-08 | 2000-02-22 | Gurer; Emir | Photoresist coating process control with solvent vapor sensor |
| CN2605929Y (en) * | 2003-02-17 | 2004-03-10 | 袁连科 | Two-component coater |
Non-Patent Citations (2)
| Title |
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| 改进光致抗蚀剂自旋涂胶均匀性的气流控制器. R.Murray等.微纳电子技术，第1期. 1989 |
| 改进光致抗蚀剂自旋涂胶均匀性的气流控制器. R.Murray等.微纳电子技术，第1期. 1989 * |
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Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING |
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