CN100413047C - Substrate processing apparatus - Google Patents

Substrate processing apparatus Download PDF

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Publication number
CN100413047C
CN100413047C CNB2006100069568A CN200610006956A CN100413047C CN 100413047 C CN100413047 C CN 100413047C CN B2006100069568 A CNB2006100069568 A CN B2006100069568A CN 200610006956 A CN200610006956 A CN 200610006956A CN 100413047 C CN100413047 C CN 100413047C
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mentioned
shelf
substrate
receptacle
conveyance
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CN1819135A (en
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光吉一郎
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Skilling Group
Dainippon Screen Manufacturing Co Ltd
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Dainippon Screen Manufacturing Co Ltd
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Publication of CN1819135A publication Critical patent/CN1819135A/en
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Abstract

The invention provides a substrate processing device capable of transporting a storage device in a storage device accommodating-transporting unit at high efficiency. A transporting manipulator (130a) is used for transporting FOUP (80) among a loading port (10), a third loading section (150) and a show shelf (140), and a transporting manipulator (130b) arranged on the opposite side of the transporting manipulator (130a) over the show shelf (140) is used for transporting the FOUP (80) between the show shelf (140) and a second loading section (160). A mapping treatment and a transportation treatment for transporting a substrate stored in the FOUP (80) to a substrate processing device (200) are carried out in the third loading section (150). Accordingly, a plurality of transportation treatments can be carried out almost at the same time. Additionally, the transporting manipulators (130a, 130b) can execute FOUP(80) transportation treatments without interfering spatially to each other.

Description

Substrate board treatment
Technical field
The present invention relates to a kind of substrate board treatment that semiconductor substrate, liquid crystal indicator are handled with (hereinafter referred to as " substrates ") such as substrates with glass substrate, CD with glass substrate, photomask, particularly relate to for conveyance receptacle and the improvement carried out efficiently in the ccontaining conveyance of receptacle unit.
Background technology
From in the past, known substrate board treatment with the ccontaining conveyance of receptacle unit, the ccontaining conveyance of this receptacle unit is ccontaining when depositing the receptacle of substrate, receptacle carried out conveyance handle (for example, patent documentation 1) for handing-over substrate between substrate processing unit.Here, the substrate board treatment of patent documentation 1 has that the degree of depth that makes loader 10 diminishes and the advantage that can reduce floor space.
Patent documentation 1:JP spy opens the 2002-231785 communique
; in the substrate board treatment of patent documentation 1; because the carrying manipulator of loading portion is provided between ccontaining shelf and the load port, so when between load port and loading portion, carrying out the handing-over of receptacle, need make carrying manipulator keep out of the way suitable position.
In addition, in the substrate board treatment of patent documentation 1, between ccontaining shelf and open portion, carry out conveyance by a carrying manipulator.Therefore, almost can't carry out simultaneously from ccontaining shelf to the conveyance of open portion with from the conveyance of open portion to ccontaining shelf.
Summary of the invention
Therefore, the object of the invention be to provide a kind of can be in the ccontaining conveyance of receptacle unit the substrate board treatment of conveyance receptacle efficiently.
(1). in order to solve above-mentioned problem, the invention provides a kind of substrate board treatment, it is handled substrate, it is characterized in that, has: substrate processing unit, it is used for substrate is handled; The ccontaining conveyance of receptacle unit, itself and aforesaid substrate processing unit are arranged side by side, and the receptacle of substrate is deposited in ccontaining and conveyance; First loading part, it is arranged side by side on the ccontaining conveyance of above-mentioned receptacle unit, is used to load above-mentioned receptacle, and the ccontaining conveyance of above-mentioned receptacle unit has: a plurality of shelf, it keeps above-mentioned receptacle; Second loading part, it is configured between aforesaid substrate processing unit and the above-mentioned a plurality of shelf, and loads receptacle; Switching mechanism, it opens and closes the open-close lid that is loaded in the receptacle on above-mentioned second loading part; First conveying unit, it visits above-mentioned a plurality of shelf in the direction side shifting of above-mentioned a plurality of shelf at above-mentioned a plurality of shelf from an above-mentioned direction side, thus, conveyance receptacle between above-mentioned first loading part and above-mentioned a plurality of shelf; Second conveying unit, it visits above-mentioned a plurality of shelf in above-mentioned a plurality of shelf another direction side shifting at above-mentioned a plurality of shelf from above-mentioned another direction side, thus, conveyance receptacle between above-mentioned a plurality of shelf and above-mentioned second loading part.
(2)., it is characterized in that above-mentioned first conveying unit is configured between above-mentioned first loading part and the above-mentioned a plurality of shelf as above-mentioned (1) described substrate board treatment, and from a direction side of above-mentioned a plurality of shelf to above-mentioned a plurality of shelf conveyance receptacles.
(3)., it is characterized in that above-mentioned second conveying unit is configured between aforesaid substrate processing unit and the above-mentioned a plurality of shelf as above-mentioned (2) described substrate board treatment, simultaneously from another direction sides of above-mentioned a plurality of shelf to above-mentioned a plurality of shelf conveyance receptacles.
(4). as above-mentioned (3) described substrate board treatment, it is characterized in that, above-mentioned first conveying unit and second conveying unit have the holding element that keeps receptacle from the downside of receptacle, and above-mentioned a plurality of shelf have and are used to make above-mentioned holding element along the portion that passes through that vertical is passed through.
(5)., it is characterized in that the ccontaining conveyance of above-mentioned receptacle unit also has as above-mentioned (4) described substrate board treatment: the 3rd loading part, it is configured in an opposite side with above-mentioned second loading part across above-mentioned a plurality of shelf, is used to load receptacle; Judging part is judged the situation of depositing that is contained in the substrate in the receptacle that is loaded on above-mentioned the 3rd loading part.
(6)., it is characterized in that above-mentioned first conveying unit is carried out the conveyance to receptacle as above-mentioned (5) described substrate board treatment between above-mentioned judging part and above-mentioned first loading part.
(7)., it is characterized in that the ccontaining conveyance of above-mentioned receptacle unit also has as above-mentioned (6) described substrate board treatment: directed portion, it adjusts the position of substrate; The 3rd conveying unit, it takes out substrate one by one from the receptacle that is loaded in above-mentioned judging part, and to above-mentioned directed portion conveyance substrate, will adjust the substrate of position to the receptacle that is loaded in above-mentioned judging part conveyance one by one in above-mentioned directed portion simultaneously.
(8). as above-mentioned (1) described substrate board treatment, it is characterized in that, along vertical and the above-mentioned a plurality of shelf of horizontal direction two-dimensional arrangements.
(9)., it is characterized in that the ccontaining conveyance of above-mentioned receptacle unit also has elevating mechanism as above-mentioned (1) described substrate board treatment, this elevating mechanism keeps being loaded in the receptacle on above-mentioned second loading part, makes its lifting simultaneously.
(10). as above-mentioned (5) described substrate board treatment, it is characterized in that above-mentioned judging part has: switching mechanism, its switching is positioned at the open-close lid of the receptacle of above-mentioned judging part; Counting device, it is counted the number that leaves the substrate in the receptacle in, and this receptacle is in the state that is opened by above-mentioned switching mechanism.
(11). as above-mentioned (1) described substrate board treatment, it is characterized in that the aforesaid substrate processing unit has transport mechanism, it is taken out of for the receptacle that is loaded in above-mentioned second loading part and moves into.
According to the described invention in above-mentioned (1)~(11), can carry out the conveyance of handling and between second loading part and a plurality of shelf, carrying out in the conveyance of carrying out by first conveying unit between first loading part and a plurality of shelf synchronously and handle by second conveying unit.Therefore, the disposal ability of receptacle ccontaining conveyance unit and even substrate board treatment can be improved, the open-close lid of the receptacle that is loaded in second loading part can be opened and closed.
Particularly, according to above-mentioned (2) described invention, first conveying unit is configured between first loading part and a plurality of shelf, thereby can easily visit the receptacle of first loading part and a plurality of shelf.
Particularly, according to above-mentioned (3) described invention, second conveying unit is configured between a plurality of shelf and second loading part, thereby can easily visit the receptacle of a plurality of shelf and second loading part.In addition, first conveying unit and second conveying unit can be visited the receptacle that is loaded in a plurality of shelf from a direction side and another direction side.Therefore, can need not to consider first conveying unit and second conveying unit spatially interference and set the synchronization action of each conveying unit.
Particularly, according to above-mentioned (4) described invention, by making the holding element that keeps receptacle from by portion's process, and can directly join receptacle to a plurality of shelf respectively from holding element.In addition, rise from the below of the receptacle that remains on a plurality of shelf by making holding element, and can receive receptacles from a plurality of shelf.Therefore, the required time of action of handing-over receptacle can be shortened, thereby the disposal ability of receptacle ccontaining conveyance unit and even substrate board treatment can be further improved.
Particularly, according to above-mentioned (5) described invention, can judge the situation of depositing of the substrate in the receptacle by the judging part that is provided with in addition with second loading part.Thus, can carry out synchronously substrate transferring to the processing of substrate processing unit with judge the processing of the situation of depositing of receptacle.Therefore, can further improve the disposal ability of receptacle ccontaining conveyance unit and even substrate board treatment.
Particularly, according to above-mentioned (6) described invention, can the judging part of the receptacle conveyance of first loading part to the ccontaining conveyance of receptacle unit will be loaded in.Thus, can promptly confirm to be contained in the situation of depositing of the substrate in the receptacle of moving into the ccontaining conveyance of receptacle unit, this deposits the required stand-by period of situation thereby can reduce affirmation.Therefore, can further improve the disposal ability of receptacle ccontaining conveyance unit and even substrate board treatment.
Particularly, according to above-mentioned (7) described invention, can carry out synchronously from second loading part to the processing of substrate processing unit conveyance substrate with adjust the directional process of the attitude of the substrate that takes out one by one from judging part.Therefore, can be suppressed at the reduction of carrying out the disposal ability of handling in the ccontaining conveyance of the receptacle unit, also can adjust the attitude of substrate simultaneously.
Particularly,, by a plurality of shelf are carried out two-dimensional arrangements, and can improve, also can suppress the increase of the floor space of substrate board treatment simultaneously from the access efficiency of first conveying unit and second conveying unit according to above-mentioned (8) described invention.
Particularly, according to above-mentioned (9) described invention, can make the receptacle that is loaded in second loading part rise to the top of second loading part by elevating mechanism.Thus, make second conveying unit during making a round trip between a plurality of shelf and second loading part, can be with receptacle from a plurality of shelf to the second loading part conveyance, and can be with receptacle from second loading part to a plurality of shelf conveyances.Therefore, can be in the ccontaining conveyance of receptacle unit conveyance receptacle efficiently.
Particularly, according to above-mentioned (10) described invention, can count the number of the substrate that leaves the receptacle that is arranged in judging part in.
Particularly, according to above-mentioned (11) described invention, can take out of and move into processing being loaded in receptacle on second loading part by transport mechanism.
Description of drawings
Fig. 1 is the stereogram of all structures of the substrate board treatment in the expression embodiment of the present invention.
Fig. 2 is the stereogram of the structure of the FOUP in the expression embodiment of the present invention.
Fig. 3 is the vertical view of the loading and unloading portion in the first embodiment of the invention.
Fig. 4 is the front view of the loading and unloading portion in the first embodiment of the invention.
Fig. 5 is the cutaway view of shelf component and FOUP.
Fig. 6 is near the vertical view the shelf component.
Fig. 7 is the vertical view of the loading and unloading portion in the second embodiment of the invention.
Fig. 8 is the front view of the loading and unloading portion in the second embodiment of the invention.
Fig. 9 is second switching mechanism in the present invention first and second execution mode and the end view of transport mechanism.
Figure 10 is the end view of first and second switching mechanism in the present invention first and second execution mode.
Embodiment
Below, be described in detail with reference to accompanying drawing and at embodiments of the present invention.
(first execution mode)
1.1. the formation of substrate board treatment
Fig. 1 is the stereogram of all structures of the substrate board treatment 1 in the expression embodiment of the present invention.Substrate board treatment 1 is the device that carries out following processing substrate successively, promptly, to leave one group of a plurality of substrate among the FOUP (frontopening unified pod: front open type unified standard case) 80 (Lot: group) take out, and these a plurality of substrates are used the etch processes of soups such as fluoric acid and use the flushing processing etc. of pure water in from FOUP.As shown in Figure 1, substrate board treatment 1 mainly has: load port 10, loading and unloading portion 1 00, substrate processing unit 200.In addition, in Fig. 1 and later each accompanying drawing, according to the needs of the direction relations of wanting clear and definite these structures, to be provided with the Z-direction be vertical, be the XYZ orthogonal coordinate system of horizontal plane with the XY plane.
Here, describe at FOUP (receptacle) 80.Fig. 2 is the stereogram of the structure of expression FOUP80.Basket 81 tops at FOUP80 are formed with flange 82.By controlling flange 82, FOUP80 is held with the state of hanging by lifting arm 171 (with reference to Fig. 3 and Fig. 4).
In addition, the one side of basket 81 (face that the direction of the arrow A R1 from Fig. 2 is observed) is provided with and covers 83.Lid 83 is provided with the locking mechanism of relative basket 81.If make locking mechanism carry out its function will covering under 83 states that are installed on the basket 81, then cover 83 and be fixed on the basket 81 and basket 81 inside become the space of closing of a sealing.
Thus, when the outside conveyance FOUP80 of substrate board treatment 1, will cover 83 and be installed on the basket 81 and make locking mechanism carry out its function, and can make basket 81 inside become seal cavity.Therefore, FOUP80 inside can not be subjected to being provided with substrate board treatment 1 Clean room cleanliness factor influence and keep high-cleanness, high.
On the other hand, when removing above-mentioned locking mechanism, lid 83 can be opened from basket 81, thereby can be taken out substrate from the inside of basket 81 and to the internal storage substrate of basket 81.In addition, for example with 25 or 13 plate bases so that its interarea separately be stored in the basket 81 along the mode of horizontal direction.
Load port (first loading part) the 10th, the carrying device of the outside of mounting substrate processing unit 1 (for example, the loading stage of AGV (Automatic Guided Vehicle: automatic guided vehicle)), the FOUP80 that there joins from the operator of substrate board treatment 1.As shown in Figure 1, load port 10 is arranged side by side with loading and unloading portion 100, and is mounted with a plurality of (being 4 in the present embodiment) FOUP80 on its loading surface 10a simultaneously.
In addition, as Fig. 1 and shown in Figure 3, the side at load port 10 sides of loading and unloading portion 100 is provided with a plurality of (being 4 in the present embodiment) baffle plate 11.If open baffle 11, the then peristome of the inner space of the space outerpace of formation connection substrate board treatment 1 and loading and unloading portion 100.
Therefore, the carrying manipulator 130a of loading and unloading portion 100 (with reference to Fig. 3 and Fig. 4) can pass through this peristome conveyance FOUP80 between the inner space of load port 10 and loading and unloading portion 100.That is, deposit the FOUP80 of untreatment base to 100 conveyances of loading and unloading portion from load port 10.In addition, deposit the FOUP80 of the substrate of handling by substrate processing unit 200 of finishing dealing with to load port 10 conveyances from loading and unloading portion 100.
The FOUP80 that loading and unloading portion 100 will be loaded on the load port 10 temporarily is contained in its inside, is used as the FOUP80 that will deposit substrate simultaneously and uses to the ccontaining conveyance of the receptacle unit of substrate processing unit 200 side conveyances.As shown in Figure 1, loading and unloading portion 100 is configured in the position that is clipped between load port 10 and the substrate processing unit 200.
In addition, substrate processing unit 200 has and is used for second switching mechanism 180 and the transport mechanism 190 that between second loading part 160 and substrate processing unit 200 substrate are joined.As Fig. 3 and shown in Figure 9, these second switching mechanisms 180 and transport mechanism 190 are provided near the baffle plate 161 of loading and unloading portion 100.
Fig. 9 is second switching mechanism 180 of substrate processing unit 200 and the end view of transport mechanism 190.In addition, Figure 10 is the end view of second switching mechanism 180.The inside of substrate processing unit 200 has dipper that stores soup and the rinsing bowl that stores pure water, and passes through substrate storage in these dippers and rinsing bowl, and substrate is implemented the processing substrate of regulation.
As Fig. 9 and shown in Figure 10, second switching mechanism 180 mainly has sticking department 181 and lifting unit 182.Sticking department 181 can with lid 83 tablings of FOUP80.In addition, sticking department 181 is installed in the end of movable part 182b.When the cylinder 182a of lifting unit 182 made movable part 182b along the motion of arrow A R2 direction (being roughly Z-direction) advance and retreat, sticking department 1 81 was along arrow A R2 direction lifting (with reference to Fig. 9).And then sticking department 181 can move (with reference to Figure 10) along arrow A R3 direction (Y direction) by horizontal mobile mechanism (omitting diagram).
Therefore, if sticking department 181 moves along arrow A R2, AR3 direction with the state with lid 83 tablings, basket 81 inner spaces that then are loaded in the FOUP80 on second loading part 160 are by open or sealed.
Transport mechanism 190 mainly has support portion 191 and advance and retreat portion 192.Transport mechanism 190,, is carried out taking out of of substrate to this FOUP80 and moves into processing when the lid 83 that is loaded in the FOUP80 on second loading part 160 is opened by in open at baffle plate 161.
Support portion 191 mainly has a plurality of (being 25 or 13 in the present embodiment) support arm 191a and installation component 191b.Each support arm 191a when horizontal direction (roughly Y direction) is extended along vertical (roughly Z-direction) with uniformly-spaced configuration, and support with the interarea of substrate and the mode of XY plane almost parallel.In addition, the end of substrate processing unit 200 sides of each support arm 191a is installed on the installation component 191b that vertical is extended.
In addition, the downside end of installation component 191b is arranged on the movable carriage 192a of advance and retreat portion 192.As shown in Figure 9, advance and retreat portion 192 has three carriages ( movable carriage 192a, 192b and analog bracket 192c), and each carriage sets by the order of 192a, 192b, 192c from top to bottom.And then the analog bracket 192c of advance and retreat portion 192 is installed in axle and is supported on the rotating shaft 194 on the base station 193, can be that rotate at the center with axle center 194c and make advance and retreat portion 192.
Thus, with regard to advance and retreat portion 192,, make 192a simultaneously, support portion 191 is moved between solid line position and dotted line position with respect to the movable carriage 192b motion of advancing and retreat by making movable carriage 192b with respect to the analog bracket 192c motion of advancing and retreat.Therefore, leave the untreatment base of basket 81 inside of FOUP80 in, by the support portion 191 of transport mechanism 190 support on one side, move in the substrate processing unit 200 on one side.In addition, in substrate processing unit 200, implemented the substrate of finishing dealing with of processing substrate, Yi Bian supported by support portion 191, Yi Bian take out of from substrate processing unit 200, and be stored in the basket 81 of FOUP80.
Like this, be handed off to the substrate of substrate processing unit 200 from loading and unloading portion 100, by being stored in these dippers, the rinsing bowl, and implement as processing substrate that clean etc. is stipulated by the transport mechanism 190 of substrate processing unit 200.In addition, with the substrate of having finished predetermined processing by transport mechanism 190 from substrate processing unit 200 conveyances to loading and unloading portion 100.
Control unit 50 shown in Figure 1 has: memory 51, its stored program and variable; CPU52, it is carried out according to the control that is stored in the program in the memory 51.In addition, the controlling object of the baffle plate 11 of loading and unloading portion 100, carrying manipulator 130 and lift 170 (with reference to Fig. 3) etc. is not electrically connected with control unit 50 by there being illustrated holding wire.Therefore, CPU52 makes these controlling object carry out work with predetermined timing according to the program that is stored in the memory 51.
1.2. the structure of loading and unloading portion
Fig. 3 and Fig. 4 are respectively the vertical view and the front views of the loading and unloading portion 100 in the present embodiment.Fig. 5 is the cutaway view of shelf component 141a and FOUP80.Fig. 6 is near the vertical view the shelf component 141a.Here, be elaborated at the loading and unloading portion 100 that uses as the ccontaining conveyance of receptacle unit.
As Fig. 3 and shown in Figure 4, loading and unloading portion 100 mainly has two carrying manipulators 130 (130a, 130b), shelf array 140, two loading parts (the second and the 3rd loading part 160,150).
In addition, as shown in Figure 3, each element that is configured in the loading and unloading portion 1 00 disposes along horizontal direction (roughly X-direction) respectively, and lines up 3 row.That is, begin several first row from load port 10 sides, be equipped with carrying manipulator (first conveying unit) 130a, the 3rd loading part (judging part) 150.In addition, in secondary series, be equipped with shelf array 140.In addition, in the 3rd row, be equipped with carrying manipulator (second conveying unit) 130b, second loading part 160.
Shelf array 140 is holding parts of ccontaining a plurality of (being 16 in the present embodiment) FOUP80.That is, in shelf array 140, not only be equipped with the FOUP80 of ccontaining untreatment base, also be equipped with the FOUP80 that takes out the sky behind the substrate.As Fig. 3 and shown in Figure 4, shelf array 140 is that a plurality of shelf are carried out the array that two-dimensional arrangements forms along vertical (Z-direction) and horizontal direction (X-direction).
A plurality of shelf have a pair of shelf component 141a separately.As Fig. 5 and shown in Figure 6, each shelf component 141a has the roughly shape of L font, and is installed on the corresponding frame 145 with the length direction of each shelf component 141a and the mode of Y direction almost parallel.In addition, on the face of the side of the loading FOUP80 of shelf component 141a, be provided with and be located at the hole portion 85 corresponding juts 142 of the bottom of FOUP80.Therefore, be entrenched in the hole portion 85 of FOUP80, FOUP80 stably can be remained on the shelf component 141a by jut 142 with a pair of shelf component 141a.
Like this, in the present embodiment, a pair of shelf component 141a uses as the ccontaining shelf of ccontaining FOUP80, in addition, the zone that is clipped between a pair of shelf component 141a is used as the accommodation space 141 of ccontaining FOUP80.
In addition, between two shelf component 141a that constitute ccontaining shelf, be formed with the bigger peristome 146 of size than the leading section 139 of carrying manipulator 130 (130a, 130b).And as shown in Figure 4, each peristome 146 disposes along vertical (Z-direction).
Therefore, while the leading section 139 of carrying manipulator 130 passes through these peristomes 146 in the lifting of the inside of shelf array 140.That is, be included in each peristome 146 of a plurality of ccontaining shelf in the shelf array 140, becoming can be by the portion that passes through of leading section 139 in vertical.
As shown in Figure 3, carrying manipulator 130a, 130b are configured in load port 10 sides when shelf array 140 is observed and the FOUP conveying unit of substrate processing unit 200 sides respectively.That is, be provided in the position of the reverse side of carrying manipulator (second conveying unit) 130b in the middle of carrying manipulator (first conveying unit) 130a across shelf array 140.
In addition, in the present embodiment, two manipulator 130a, 130b have roughly the same hardware configuration.Therefore, in the following description, when need not to distinguish carrying manipulator 130a and carrying manipulator 130b, be called " carrying manipulator 130 " simply.
The leading section 139 of carrying manipulator 130 is the holding elements that keep FOUP80 from downside, has the shape that roughly is triangle.Near each summit of the upper surface side of leading section 139, be provided with jut 139a.In addition, in the bottom of FOUP80, be provided with corresponding three the hole portions 87 of jut 139a (with reference to Fig. 5: because illustrated relation, in only having put down in writing three two).In addition, leading section 139 is installed on the arm 138a via the rotating shaft 134b that is provided with Z axle almost parallel ground, thereby can be that the center is rotated with rotating shaft 134b.Therefore, Yi Bian carrying manipulator 130 makes leading section 139 rotations, Yi Bian, come the stable FOUP80 of maintenance by three jut 139a being fitted in the upward corresponding hole of the FOUP80 portion 86.
And then arm 138a is via being installed on the arm 138b with the rotating shaft 134c of Z axle almost parallel ground setting, and arm 138b is installed on the fixed station 136 via rotating shaft 134a.In addition, fixed station 136 liftably is arranged on the pillar 131 that vertical (Z-direction) is extended.And then pillar 131 can slide along the guide rail 132 that extends to level (X-direction) direction.
Thus, carrying manipulator 130 (130a, 130b) makes the FOUP80 that is maintained on the leading section 139 move in the horizontal direction along shelf array 140, makes it in the vertical lifting simultaneously.Thus, carrying manipulator 130a conveyance FOUP80 between ccontaining shelf, load port 10 and the 3rd loading part 150 of shelf array 140.In addition, carrying manipulator 130b conveyance FOUP80 between the ccontaining shelf of shelf array 140 and second loading part 160.
Carrying manipulator 130a carry out the FOUP80 that will move into from load port 10 processing from load port 10 conveyances to shelf array 140, from the processing of load port 10 conveyances to the three loading parts 150, from 150 conveyances of the 3rd loading part to shelf array 140 processing, will leave FOUP80 in the shelf array 140 in to the processing of load port 10 conveyances.
In addition, with carrying manipulator 130b carry out with leave FOUP80 in the shelf array 140 processing in from 140 conveyances of shelf array to second loading part 160, from of the processing of the 3rd loading part 150 to 140 conveyances of shelf array.
Like this, be relative to the configuration across shelf array 140 in the middle of carrying manipulator 130a, the 130b, handle and can almost carry out a plurality of conveyances simultaneously, thereby can improve loading and unloading portion 100 disposal ability on the whole.In addition, when visiting same ccontaining shelf, the conveyance of FOUP80 is carried out on carrying manipulator 130a, 130b mutually noninterfere spatially ground.Therefore, can need not to consider the interference of carrying manipulator 130a, 130b and the action of setting each manipulator.
And then, in the present embodiment, the conveyance of the FOUP80 that carries out between load port 10 and substrate processing unit 200 is not to be carried out by the conveying unit that load port 10 has, but is carried out by two carrying manipulator 130a, 130b of loading and unloading portion 100.Therefore, in the present embodiment, when the substrate processing unit 200 conveyance FOUP80, any one carrying manipulator 130a, 130b do not need to keep out of the way yet, thereby can carry out the conveyance of FOUP80 efficiently from load port 10.
In addition, the conveyance of the FOUP80 that carries out between each ccontaining shelf of carrying manipulator 130 (130a, 130b) and shelf array 140 is carried out in the following way.Promptly, with FOUP80 when carrying manipulator 130 is handed off to ccontaining shelf, at first, the leading section 139 of mobile carrying manipulator 130 makes the height and position (Z-direction position) of the bottom 88 that is contained in the FOUP80 in the ccontaining shelf higher than the height and position of shelf component 141a (141b, 141c) top 143 (with reference to Fig. 5).Secondly, leading section 139 is descended, thereby make the jut 142 of a pair of shelf component 141a (141b, 141c) be fitted to the hole portion 85 of FOUP80.
And, by leading section 139 is descended, make FOUP80 be loaded in a pair of shelf component 141a (141b, 141c) top 143 on, separate from hole portion 87 by the jut 139a that makes leading section 139 simultaneously, thereby end is handed off to FOUP80 the processing of ccontaining shelf from carrying manipulator 130.
On the other hand, FOUP80 when ccontaining shelf are handed off to carrying manipulator 130, at first, is moved to the below that is loaded in the FOUP80 in the ccontaining shelf with the leading section 139 of carrying manipulator 130.Next, leading section 139 is risen, thereby make the jut 139a of leading section 139 be embedded into the hole portion 87 of FOUP80.
And, further rising by making leading section 139, FOUP80 is kept by leading section 139, and jut 142 separates from hole portion 85, thereby finishes FOUP80 is handed off to from ccontaining shelf the processing of carrying manipulator 130.
Like this, carry out between carrying manipulator 130 and ccontaining shelf in the process of conveyance of FOUP80, FOUP80 is moved to the top of shelf component 141a (141b, 141c).Therefore, the height setting with accommodation space 141 becomes higher than the height of FOUP80.
Second loading part 160 is used to substrate processing unit 200 for the substrate delivery/reception that will leave in the FOUP80, and as shown in Figure 3, during from 140 observations of shelf array, it is configured in substrate processing unit 200 sides.
Shelf component 141b and shelf component 141a are the member that has the shape of L font roughly and have a plurality of (being three in the present embodiment) jut on the face of FOUP80 side equally.As Fig. 3 and shown in Figure 4, shelf component 141b is adapted to and makes its length direction and X-direction almost parallel.
In addition, near the sidewall of substrate processing unit 200 sides second loading part 160, being provided with can be along the baffle plate 161 of arrow A R4 direction (roughly Z-direction: with reference to Fig. 9) lifting.When open baffle 161, the peristome of the inner space of formation connection loading and unloading portion 100 and the inner space of substrate processing unit 200.
Therefore, when on a pair of shelf component 141b, being mounted with FOUP80, second switching mechanism 180 of substrate processing unit 200 is opened the lid 83 of FOUP80, the transport mechanism 190 of substrate processing unit 200 takes out untreatment base from FOUP80 simultaneously, and via the peristome that forms because of open baffle 161, and with untreatment base conveyance in substrate processing unit 200.
On the other hand, after the cleaning that end is carried out substrate in substrate processing unit 200, drying etc. are handled, open baffle 161, transport mechanism 190 is by the peristome substrate conveyance in FOUP80 of will finishing dealing with, and second switching mechanism 180 is closed the lid 83 of FOUP80.
The lift 170 of second loading part 160 is to make the FOUP80 that is loaded on a pair of shelf component 141b, the lifting unit of lifting between " loaded " position (solid line position of Fig. 4) and retreating position (the chain-dotted line position of Fig. 4).As shown in Figure 4, lift 170 is provided in the top of a pair of shelf component 141b, and has lifting arm 171.
Lifting arm 171 can be controlled the flange 82 (handle part) that is formed on the FOUP80 top, also can remove its gripping state simultaneously.In addition, lifting arm 171 can pass through driving mechanism (omitting diagram) along vertical (Z-direction) lifting.
Thus, second loading part 160 can on one side be controlled flange 82 by lifting arm 171, makes to substrate processing unit 200 supplying substrates on one side and makes that the FOUP80 of sky rises to retreating position (the chain-dotted line position of Fig. 4).
Therefore, and then carrying manipulator 130b can be handed off to the FOUP80 that deposits untreatment base the processing of the " loaded " position of second loading part 160, carries out receiving from second loading part 160 processing of the FOUP80 of the sky that rises to retreating position.That is, carrying manipulator 130b is only made a round trip between the shelf array 140 and second loading part 160, just can carry out the transposing operation of the FOUP80 that deposits substrate and empty FOUP80.Its result can further improve the disposal ability of the processing of carrying out in loading and unloading portion 100.
The 3rd loading part 150 is used to carry out the mapping (mapping) that the number that leaves the substrate in the FOUP80 that moves into from load port 10 in is confirmed etc. to be handled, and is configured in the position that is viewed as load port 10 sides from shelf array 140.That is, be provided in the reverse side of second loading part 160 in the middle of the 3rd loading part 150 across shelf array 140.
In addition, be equipped with first switching mechanism 185 of the lid 83 that opens and closes FOUP80 at the 3rd loading part 150.As shown in figure 10, first switching mechanism 185 has the hardware configuration same with second switching mechanism 180.Therefore, when the sticking department 181 of first switching mechanism 185 with lid 83 tablings the time to arrow A R2, when the AR3 direction moves, basket 81 inner spaces that are loaded in the FOUP80 on second loading part 160 are by open or sealed.
Shelf component 141c and shelf component 141a, 141b have roughly the shape of L font and the member of jut, and so that the mode of its length direction and X-direction approximate horizontal is installed (with reference to Fig. 3 and Fig. 4).And then as shown in Figure 3, the 3rd loading part 150 has the counting device 187 that the number that leaves inner substrate in is counted.
Therefore, when being mounted with FOUP80 on a pair of shelf component 141c, switching mechanism is opened the lid 83 of FOUP80, and 187 pairs of numbers that leave the substrate of FOUP80 inside in of counting device are counted simultaneously.Like this, the 3rd loading part 150 is used as the judging part that the situation of depositing that leaves the substrate in the FOUP80 in is judged.
As shown in Figure 4, the lift 170 of the 3rd loading part 150 is the lifting units that are provided in the top of a pair of shelf component 141c, has the hardware configuration same with the lift 170 of second loading part 160.That is, the lift 170 of second loading part 160 makes the FOUP80 that is loaded on a pair of shelf component 141c, lifting between " loaded " position (solid line position of Fig. 4) and retreating position (the chain-dotted line position of Fig. 4).
Thus, the 3rd loading part 150 can be controlled flange 82 by lifting arm 171, can make the FOUP80 that finishes the mapping processing rise to retreating position (the chain-dotted line position of Fig. 4) simultaneously.
Therefore, carrying manipulator 130a can be and then be handed off to the processing of the " loaded " position of the 3rd loading part 150 with the FOUP80 that does not also implement to shine upon processing, carries out from the 3rd loading part 150 and receives the processing of implementing to shine upon processing and rising to the FOUP80 of retreating position.That is, carrying manipulator 130a is only made a round trip between the shelf array 140 and second loading part 160, just can carry out and finish to shine upon FOUP80 that handles and the alternately operating of also implementing the FOUP80 of mapping processing.Its result can further improve the disposal ability of the processing of carrying out in loading and unloading portion 100.
Here, in only being provided with the loading and unloading portion in the past of an open portion, mapping is handled usually and is carried out in being located at second loading part 160 of substrate processing unit 200 sides.That is, in second loading part 160, carry out substrate delivery/reception is handled to the processing and the mapping of substrate board treatment 200.
Therefore, when only being provided with an open portion, the substrate that leaves in the FOUP80 is moved into before the substrate processing unit 200, need sometimes its conveyance between second loading part 160 and shelf array 140, and the waste of generation conveyance operation.
In addition, in mapping was handled, the transport mechanism of substrate processing unit 200 sides (omitting diagram) can't be moved into substrate processing unit 200 from second loading part 160 with substrate.Therefore, can produce so improper: the disposal ability of the processing of carrying out in loading and unloading portion 100 is subjected to the restriction of the processing speed in second loading part 160.
To this, in the loading and unloading portion 100 of present embodiment, can carry out synchronously handling by processing and mapping that the second and the 3rd loading part 160,150 is moved into substrate processing unit 200 with substrate.In addition, need before substrate is moved into substrate processing unit 200, not make FOUP80 back and forth conveyance between the shelf array 140 and second loading part 160, thereby can reduce the processing latency in second loading part 160 as loading and unloading portion in the past.Therefore, can further improve the disposal ability of the conveyance in the loading and unloading portion 100.
1.3. the substrate board treatment advantage of first execution mode
As mentioned above, in the loading and unloading portion 100 of the substrate board treatment 1 of first execution mode, middle across shelf array 140, dispose carrying manipulator (first conveying unit) 130a in load port (first loading part) 10 sides, and dispose carrying manipulator (second conveying unit) 130b in substrate board treatment 200 sides.Thus, when visiting same ccontaining shelf, two carrying manipulator 130a, 130b can mutually noninterfere ground carry out the conveyance of FOUP80 synchronously.
Therefore, can further improve the disposal ability of the conveyance of carrying out in loading and unloading portion 100 and the disposal ability of substrate board treatment 1.In addition, can need not to consider the interference on the space of carrying manipulator 130a, 130b and set the action of each carrying manipulator 130a, 130b.
In addition, loading and unloading portion 100 has two loading parts (the second and the 3rd loading part 160,150), and the mapping of carrying out synchronously in the 3rd loading part 150 is handled and the processing to substrate processing unit 200 handing-over substrates in second loading part 160.That is, second loading part 160 does not need to resemble to be carried out mapping in the past the loading and unloading portion and handles, and as long as carry out the handing-over of substrate, thereby can reduce the processing latency that resembles in the past installing at second loading part 160.Therefore, can further improve the disposal ability of the conveyance in loading and unloading portion 100 and the disposal ability of substrate board treatment 1.
(second execution mode)
2. second execution mode
Next, describe at second execution mode of the present invention.Substrate board treatment in second execution mode is compared with the substrate board treatment 1 in first execution mode, makes substrate in accordance with regulations the directed portion of direction orientation except loading and unloading portion 500 also has, and other are all identical with first execution mode.In addition, in the following description, to the identical structural element of structural element in the substrate board treatment of first execution mode, attached with prosign.
2.1. the structure of substrate board treatment
Fig. 1 is the stereogram of all structures of the substrate board treatment 400 in the expression present embodiment.Substrate board treatment 400 is the devices that carry out following processing substrate successively, promptly, to leave one group of a plurality of substrate among the FOUP (frontopening unified pod: front open type unified standard case) 80 (Lot: group) take out, and these a plurality of substrates are used the etch processes of soups such as fluoric acid and use the flushing processing etc. of pure water in from FOUP.As shown in Figure 1, substrate board treatment 400 mainly has: load port 10, loading and unloading portion 500, substrate processing unit 200.In addition, in Fig. 1 and later each accompanying drawing,, be provided with the Z axle and be vertical, be the XYZ orthogonal coordinate system of horizontal plane with the XY plane according to the needs of the direction relations of wanting clear and definite these structures.
Load port (first loading part) the 10th, the carrying device of mounting substrate processing unit 400 outsides (for example, the loading stage of AGV (Automatic Guided Vehicle: automatic guided vehicle)), the FOUP80 that there joins from the operator of substrate board treatment 400.As shown in Figure 1, load port 10 is arranged side by side with loading and unloading portion 500, and is mounted with a plurality of (being 4 in the present embodiment) FOUP80 on its loading surface 10a simultaneously.
In addition, as Fig. 1 and shown in Figure 7, the side at load port 10 sides of loading and unloading portion 500 is provided with a plurality of (being 4 in the present embodiment) baffle plate 11.If open baffle 11, the then peristome of the inner space of the space outerpace of formation connection substrate board treatment 400 and loading and unloading portion 500.
Therefore, the carrying manipulator 130a of loading and unloading portion 500 (with reference to Fig. 7 and Fig. 8) can carry out conveyance to FOUP80 by this peristome between the inner space of load port 10 and loading and unloading portion 500.That is, deposit the FOUP80 of untreatment base to 500 conveyances of loading and unloading portion from load port 10.In addition, with depositing the FOUP80 of the substrate of handling by substrate processing unit 200 of finishing dealing with, be handed off to load port 10 from loading and unloading portion 500.
The FOUP80 that loading and unloading portion 500 will be loaded on the load port 10 temporarily is contained in its inside, is used as the FOUP80 that will deposit substrate simultaneously and uses to the ccontaining conveyance of the receptacle unit that substrate processing unit 200 top-cross connect.As shown in Figure 1, loading and unloading portion 500 is configured in the position that is clipped between load port 10 and the substrate processing unit 200.
In addition, substrate processing unit 200 has and is used for second switching mechanism 180 and the transport mechanism 190 that between second loading part 160 and substrate processing unit 200 substrate are joined.As Fig. 3 and shown in Figure 9, these second switching mechanisms 180 and transport mechanism 190 are provided near the baffle plate 161 of loading and unloading portion 500.
Fig. 9 is second switching mechanism 180 of substrate processing unit 200 and the end view of transport mechanism 190.In addition, Figure 10 is the end view of second switching mechanism 180.The inside of substrate processing unit 200 has dipper that stores soup and the rinsing bowl that stores pure water, by with substrate storage in these dippers and rinsing bowl, substrate is implemented the processing substrate of regulation.
As Fig. 9 and shown in Figure 10, second switching mechanism 180 mainly has sticking department 181 and lifting unit 182.Sticking department 181 can with lid 83 tablings of FOUP80.In addition, sticking department 181 is installed in the end of movable part 182b.When the cylinder 182a of lifting unit 182 made movable part 182b along the motion of arrow A R2 direction (being roughly Z-direction) advance and retreat, sticking department 181 was along arrow A R2 direction lifting (with reference to Fig. 9).And then sticking department 181 can move (with reference to Figure 10) along arrow A R3 direction (Y direction) by horizontal mobile mechanism (omitting diagram).
Therefore, if sticking department 181 moves along arrow A R2, AR3 direction with the state with lid 83 tablings, basket 81 inner spaces that then are loaded in the FOUP80 on second loading part 160 are by open or sealed.
Transport mechanism 190 mainly has support portion 191 and advance and retreat portion 192.Transport mechanism 190,, is carried out taking out of of substrate to this FOUP80 and moves into processing when the lid 83 that is loaded in the FOUP80 on second loading part 160 is opened by in open at baffle plate 161.
Support portion 191 mainly has a plurality of (being 25 or 13 in the present embodiment) support arm 191a and installation component 191b.Each support arm 191a when horizontal direction (roughly Y direction) is extended along vertical (roughly Z-direction) with uniformly-spaced configuration, and support with the interarea of substrate and the mode of XY plane almost parallel.In addition, the end of substrate processing unit 200 sides of each support arm 191a is installed on the installation component 191b that vertical is extended.
In addition, the downside end of installation component 191b is arranged on the movable carriage 192a of advance and retreat portion 192.As shown in Figure 9, advance and retreat portion 192 has three carriages ( movable carriage 192a, 192b and analog bracket 192c), and each carriage sets by the order of 192a, 192b, 192c from top to bottom.And then the analog bracket 192c of advance and retreat portion 192 is installed in axle and is supported on the rotating shaft 194 on the base station 193, can be that rotate at the center with axle center 194c and make advance and retreat portion 192.
Thus, advance and retreat portion 192 is by making movable carriage 192b with respect to the analog bracket 192c motion of advancing and retreat, and makes 192a with respect to the movable carriage 192b motion of advancing and retreat simultaneously, thereby support portion 191 is moved between solid line position and dotted line position.Therefore, leave the untreatment base of basket 81 inside of FOUP80 in, by the support portion 191 of transport mechanism 190 support on one side, move in the substrate processing unit 200 on one side.In addition, in substrate processing unit 200, implemented the substrate of finishing dealing with of processing substrate, Yi Bian supported by support portion 191, Yi Bian take out of from substrate processing unit 200, and be stored in the basket 81 of FOUP80.
Like this, be handed off to the substrate of substrate processing unit 200 from loading and unloading portion 500, by being stored in these dippers, the rinsing bowl, and implement as processing substrate that clean etc. is stipulated by the transport mechanism 190 of substrate processing unit 200.In addition, with the substrate of having finished predetermined processing by transport mechanism 190 from substrate processing unit 200 conveyances to loading and unloading portion 500.
Control unit 50 shown in Figure 1 has: memory 51, and its stored program and variable CPU52, it is carried out according to the control that is stored in the program in the memory 51.In addition, the controlling object of the baffle plate 11 of loading and unloading portion 500, carrying manipulator 130 and lift 170 (with reference to Fig. 7) etc. is not electrically connected with control unit 50 by there being illustrated holding wire.Therefore, CPU52 makes these controlling object carry out work with predetermined timing according to the program that is stored in the memory 51.
2.2. the structure of loading and unloading portion
Fig. 7 and Fig. 8 are respectively the vertical view and the front views of the loading and unloading portion 500 in the present embodiment.Fig. 5 is the cutaway view of shelf component 141a and FOUP80.Fig. 6 is near the vertical view the shelf component 141a.Here, be elaborated at the loading and unloading portion 500 that uses as the ccontaining conveyance of receptacle unit.
As Fig. 7 and shown in Figure 8, loading and unloading portion 500 mainly has three carrying manipulators 130 (130a, 130b), 530, shelf array 140, two loading parts (the second and the 3rd loading part 160,150), directed portion 510.
In addition, as shown in Figure 7, each element that is configured in the loading and unloading portion 500 disposes along horizontal direction (roughly X-direction) respectively, and lines up 3 row.That is, begin several first row from load port 10 sides, be equipped with carrying manipulator (first conveying unit) 130a, the 3rd loading part (judging part) 150.In addition, in secondary series, be equipped with shelf array 140, directed portion 510, carrying manipulator 530.And then, in the 3rd row, be equipped with carrying manipulator (second conveying unit) 130b, second loading part 160.
Shelf array 140 is holding parts of ccontaining a plurality of (being 14 in the present embodiment) FOUP80.That is, in shelf array 140, not only be equipped with the FOUP80 of ccontaining untreatment base, also be equipped with the FOUP80 that takes out the sky behind the substrate.As Fig. 7 and shown in Figure 8, shelf array 140 is that a plurality of shelf are carried out the array that two-dimentional orientation forms along vertical (Z-direction) and horizontal direction (X-direction).
A plurality of shelf have a pair of shelf component 141a separately.As Fig. 5 and shown in Figure 6, each shelf component 141a has the roughly shape of L font, and is installed on the corresponding frame 145 with the length direction of each shelf component 141a and the mode of Y direction almost parallel.In addition, on the face of the side of the loading FOUP80 of shelf component 141a, be provided with and be located at the hole portion 85 corresponding juts 142 of the bottom of FOUP80.Therefore, be entrenched in the hole portion 85 of FOUP80, FOUP80 stably can be remained on the shelf component 141a by jut 142 with a pair of shelf component 141a.
Like this, in the present embodiment, a pair of shelf component 141a uses as the ccontaining shelf of ccontaining FOUP80, in addition, the zone that is clipped between a pair of shelf component 141a is used as the accommodation space 141 of ccontaining FOUP80.
In addition, between two shelf component 141a that constitute ccontaining shelf, be formed with the bigger peristome 146 of size than the leading section 139 of carrying manipulator 130 (130a, 130b).And as shown in Figure 8, each peristome 146 disposes along vertical (Z-direction).
Therefore, while the leading section 139 of carrying manipulator 130 passes through these peristomes 146 in the lifting of the inside of shelf array 140.That is, be included in each peristome 146 of a plurality of ccontaining shelf in the shelf array 140, becoming can be by the portion that passes through of leading section 139 in vertical.
As shown in Figure 7, carrying manipulator 130a, 130b are configured in load port 10 sides when shelf array 140 is observed and the FOUP conveying unit of substrate processing unit 200 sides respectively.That is, be provided in the position of the reverse side of carrying manipulator (second conveying unit) 130b in the middle of carrying manipulator (first conveying unit) 130a across shelf array 140.
The leading section 139 of carrying manipulator 130 is the holding elements that keep FOUP80 from downside, has the shape that roughly is triangle.Near each summit of the upper surface side of leading section 139, be provided with jut 139a.In addition, in the bottom of FOUP80, be provided with corresponding three the hole portions 87 of jut 139a (with reference to Fig. 7: because illustrated pass is fastened two in only having put down in writing three).In addition, leading section 139 is installed on the arm 138a via the rotating shaft 134b that is provided with Z axle almost parallel ground, thereby can be that the center is rotated with rotating shaft 134b.Therefore, Yi Bian carrying manipulator 130 makes leading section 139 rotations, Yi Bian, come the stable FOUP80 of maintenance by three jut 139a being fitted in the upward corresponding hole of the FOUP80 portion 86.
And then arm 138a is via being installed on the arm 138b with the rotating shaft 134c of Z axle almost parallel ground setting, and arm 138b is installed on the fixed station 136 via rotating shaft 134a.In addition, fixed station 136 liftably is arranged on the pillar 131 that vertical (Z-direction) is extended.And then pillar 131 can slide along the guide rail 132 that extends to level (X-direction) direction.
Thus, carrying manipulator 130 (130a, 130b) makes the FOUP80 that is maintained on the leading section 139 move in the horizontal direction along shelf array 140, makes its lifting on vertical simultaneously.Thus, carrying manipulator 130a conveyance FOUP80 between ccontaining shelf, load port 10 and the 3rd loading part 150 of shelf array 140.In addition, carrying manipulator 130b conveyance FOUP80 between the ccontaining shelf of shelf array 140 and second loading part 160.
Carrying manipulator 130a carry out the FOUP80 that will move into from load port 10 processing from load port 10 conveyances to shelf array 140, from the processing of load port 10 conveyances to the three loading parts 150, from 1 50 conveyances of the 3rd loading part to shelf array 140 processing, will leave FOUP80 in the shelf array 140 in to the processing of load port 10 conveyances.
In addition, with carrying manipulator 130b carry out with leave FOUP80 in the shelf array 140 processing in from 140 conveyances of shelf array to second loading part 160, from of the processing of the 3rd loading part 150 to 140 conveyances of shelf array.
Like this, be relative to the configuration across shelf array 140 in the middle of carrying manipulator 130a, the 130b, and can almost carrying out a plurality of conveyances processing simultaneously, thereby can improve loading and unloading portion 500 disposal ability on the whole.In addition, when visiting same ccontaining shelf, the conveyance of FOUP80 is carried out on carrying manipulator 130a, 130b mutually noninterfere spatially ground.Therefore, can need not to consider the interference of carrying manipulator 130a, 130b and the action of setting each manipulator.
And then, in the present embodiment, the conveyance of the FOUP80 that carries out between load port 10 and substrate processing unit 200 is not to be carried out by the conveying unit that load port 10 has, but is carried out by two carrying manipulator 130a, 130b of loading and unloading portion 500.Therefore, in the present embodiment, when the substrate processing unit 200 conveyance FOUP80, any one carrying manipulator 130a, 130b do not need to keep out of the way yet, thereby can carry out the conveyance of FOUP80 efficiently from load port 10.
In addition, the conveyance of the FOUP80 that carries out between each ccontaining shelf of carrying manipulator 130 (130a, 130b) and shelf array 140 is carried out in the following way.Promptly, with FOUP80 when carrying manipulator 130 is handed off to ccontaining shelf, at first, the leading section 139 of mobile carrying manipulator 130 makes the height and position (Z-direction position) of the bottom 88 that is contained in the FOUP80 in the ccontaining shelf higher than the height and position of shelf component 141a (141b, 141c) top 143 (with reference to Fig. 7).Secondly, leading section 139 is descended, thereby make the jut 142 of a pair of shelf component 141a (141b, 141c) be fitted to the hole portion 85 of FOUP80.
And, by leading section 139 is descended, make FOUP80 be loaded in a pair of shelf component 141a (141b, 141c) top 143 on, the jut 139a by making leading section 139 separates from hole portion 87 simultaneously, finishes FOUP80 is handed off to from carrying manipulator 130 processing of ccontaining shelf.
On the other hand, FOUP80 when ccontaining shelf are handed off to carrying manipulator 130, at first, is moved to the below that is loaded in the FOUP80 in the ccontaining shelf with the leading section 139 of carrying manipulator 130.Next, leading section 139 is risen, thereby make the jut 139a of leading section 139 be embedded into the hole portion 87 of FOUP80.
And, further rising by making leading section 139, FOUP80 is kept by leading section 139, and, separate from hole portion 85 by jut 142, and end is handed off to FOUP80 the processing of carrying manipulator 130 from ccontaining shelf.
In addition, carry out between carrying manipulator 130 and ccontaining shelf in the process of conveyance of FOUP80, FOUP80 is moved to the top of shelf component 141a (141b, 141c).Therefore, the height setting with accommodation space 141 becomes higher than the height of FOUP80.
Second loading part 160 is used to substrate processing unit 200 for the substrate delivery/reception that will leave in the FOUP80, and as shown in Figure 7, during from 140 observations of shelf array, it is configured in substrate processing unit 200 sides.
Shelf component 141b and shelf component 141a are the member that has the shape of L font roughly and have a plurality of (being three in the present embodiment) jut on the face of FOUP80 side equally.As Fig. 7 and shown in Figure 8, shelf component 141b is adapted to and makes its length direction and X-direction almost parallel.
In addition, near the sidewall of substrate processing unit 200 sides second loading part 160, being provided with can be along the baffle plate 161 of arrow A R4 direction (roughly Z-direction: with reference to Fig. 9) lifting.When open baffle 161, the peristome of the inner space of formation connection loading and unloading portion 500 and the inner space of substrate processing unit 200.
Therefore, when on a pair of shelf component 141b, being mounted with FOUP80, second switching mechanism 180 of substrate processing unit 200 is opened the lid 83 of FOUP80, the transport mechanism 190 of substrate processing unit 200 takes out untreatment base from FOUP80 simultaneously, and via the peristome that forms because of open baffle 161, and with untreatment base conveyance in substrate processing unit 200.
On the other hand, after the cleaning that end is carried out substrate in substrate processing unit 200, drying etc. are handled, open baffle 161, with substrate conveyance in FOUP80 of finishing dealing with, second switching mechanism 180 is closed the lid 83 of FOUP80 to transport mechanism 190 by peristome.
The lift 170 of second loading part 160 is to make the FOUP80 that is loaded on a pair of shelf component 141b, the lifting unit of lifting between " loaded " position (solid line position of Fig. 8) and retreating position (the chain-dotted line position of Fig. 8).As shown in Figure 8, lift 170 is provided in the top of a pair of shelf component 141b, and has lifting arm 171.
Lifting arm 171 can be controlled the flange 82 (handle part) that is formed on the FOUP80 top, also can remove its gripping state simultaneously.In addition, lifting arm 171 can pass through driving mechanism (omitting diagram) along vertical (Z-direction) lifting.
Thus, second loading part 160 can on one side be controlled flange 82 by lifting arm 171, makes to substrate processing unit 200 supplying substrates on one side and makes that the FOUP80 of sky rises to retreating position (the chain-dotted line position of Fig. 8).
Therefore, and then carrying manipulator 130b can be handed off to the FOUP80 that deposits untreatment base the processing of the " loaded " position of second loading part 160, carries out receiving from second loading part 160 processing of the FOUP80 of the sky that rises to retreating position.That is, carrying manipulator 130b is only made a round trip between the shelf array 140 and second loading part 160, just can carry out the transposing operation of the FOUP80 that deposits substrate and empty FOUP80.Its result can further improve the disposal ability of the processing of carrying out in loading and unloading portion 500.
The 3rd loading part 150 is used to carry out the mapping that the number that leaves the substrate in the FOUP80 that moves into from load port 10 in etc. is confirmed etc. to be handled, and is configured in the position that is viewed as load port 10 sides from shelf array 140.That is, be provided in the opposition side of second loading part 160 in the middle of the 3rd loading part 150 across shelf array 140.
In addition, be equipped with first switching mechanism 185 of the lid 83 that opens and closes FOUP80 at the 3rd loading part 150.As shown in figure 10, first switching mechanism 185 has the hardware configuration same with second switching mechanism 180.Therefore, when the sticking department 181 of first switching mechanism 185 with lid 83 tablings the time to arrow A R2, when the AR3 direction moves, basket 81 inner spaces that are loaded in the FOUP80 on second loading part 160 are by open or sealed.
Shelf component 141c and shelf component 141a, 141b have roughly the shape of L font and the member of jut, and so that the mode of its length direction and X-direction approximate horizontal is installed (with reference to Fig. 7 and Fig. 8).And then as shown in Figure 7, the 3rd loading part 150 has the counting device 187 that the number that leaves inner substrate in is counted.
Therefore, when being mounted with FOUP80 on a pair of shelf component 141c, first switching mechanism 185 is opened the lid 83 of FOUP80, and 187 pairs of numbers that leave the substrate of FOUP80 inside in of counting device are counted simultaneously.Like this, the 3rd loading part 150 is used as the judging part that the situation of depositing that leaves the substrate in the FOUP80 in is judged.
As shown in Figure 8, the lift 170 of the 3rd loading part 150 is the lifting units that are provided in the top of a pair of shelf component 141c, has the hardware configuration same with the lift 170 of second loading part 160.That is, the lift 170 of second loading part 160 makes the FOUP80 that is loaded on a pair of shelf component 141c, lifting between " loaded " position (solid line position of Fig. 8) and retreating position (the chain-dotted line position of Fig. 8).
Thus, the 3rd loading part 150 can be controlled flange 82 by lifting arm 171, can make the FOUP80 that finishes the mapping processing rise to retreating position (the chain-dotted line position of Fig. 8) simultaneously.
Therefore, carrying manipulator 130a can be and then be handed off to the processing of the " loaded " position of the 3rd loading part 1 50 with the FOUP80 that does not also implement to shine upon processing, receives the processing of implementing to shine upon processing and rising to the FOUP80 of retreating position and carry out from the 3rd loading part 150.That is, carrying manipulator 130a is only made a round trip between the shelf array 140 and second loading part 160, just can carry out and finish to shine upon FOUP80 that handles and the transposing operation of also implementing the FOUP80 of mapping processing.Its result can further improve the disposal ability of the processing of carrying out in loading and unloading portion 500.
Here, in only being provided with the loading and unloading portion in the past of an open portion, mapping is handled usually and is carried out in being located at second loading part 160 of substrate processing unit 200 sides.That is, in second loading part 160, carry out substrate delivery/reception is handled to the processing and the mapping of substrate board treatment 200.
Therefore, when only being provided with an open portion, the substrate that leaves in the FOUP80 is moved into before the substrate processing unit 200, need sometimes its conveyance between second loading part 160 and shelf array 140, and the waste of generation conveyance operation.
In addition, in mapping was handled, the transport mechanism of substrate processing unit 200 sides (omitting diagram) can't be moved into substrate processing unit 200 from second loading part 160 with substrate.Therefore, can produce so improper: carry out the restriction that the disposal ability of handling is subjected to the processing speed in second loading part 160 in loading and unloading portion 500.
To this, in the loading and unloading portion 500 of present embodiment, can carry out synchronously handling by processing and mapping that the second and the 3rd loading part 160,150 is moved into substrate processing unit 200 with substrate.In addition, need before substrate is moved into substrate processing unit 200, not make FOUP80 back and forth conveyance between the shelf array 140 and second loading part 160, thereby can reduce the processing latency in second loading part 160 as loading and unloading portion in the past.Therefore, can further improve the disposal ability of the conveyance in the loading and unloading portion 500.
In addition, as shown in Figure 7, carrying manipulator (the 3rd conveying unit) 530 be provided on the extending direction on the X-direction of shelf array 140, be clipped in the zone (that is secondary series) between the second and the 3rd loading part 160,150.In addition, to be adapted to its height and position (Z-direction position) probably identical with the " loaded " position (solid line position of Fig. 8) of FOUP80 in the second and the 3rd loading part 160,150 for carrying manipulator 530.
Carrying manipulator 530 has lifting platform 536, and arm 538b is installed on this lifting platform 536 by the rotating shaft 534a with the configuration of Z axle almost parallel.Arm 538a is installed on this arm 538b by rotating shaft 534c, and is used for the leading section 539 of conveyance substrate one by one, is arranged on this arm 538a by rotating shaft 534b.
First switching mechanism 185 of the 3rd loading part 150 is opened after the lid 83 that is loaded in the FOUP80 on the 3rd loading part 150, by contactless detecting element (omitting diagram), the inspection of the substrate in FOUP80 side is gone out the directed face of substrate and the position of breach.Next, the leading section 539 of carrying manipulator 530 takes out substrate one by one from FOUP80, and to 510 conveyances of directed portion.In addition, after directed portion 510 finished the directional process of substrates, the leading section 539 of carrying manipulator 530 took out substrate and to the FOUP80 conveyance one by one from directed portion 510.
Orientation portion 510 implements the adjustment part of directional process, so-called single sheet type to every substrate.As shown in Figure 7, it is located in the shelf array 140 adjacent to carrying manipulator 530.In addition, directed portion 510 is set in the mode that its height and position becomes with the roughly the same height of carrying manipulator 530.Here, this orientation portion 510 adjusts the position of rotation of substrate based on the position of directional plane (Orientation flat: below, be called " directed face ") and breach.At this moment, make substrate rotation based on the result that detects of contactless detecting element, and make the crystal orientation of substrate point to prescribed direction, thereby finish directional process by the attitude of adjusting substrate.
Like this, the directional process of carrying out in loading and unloading portion 500 is that the substrate that takes out from the FOUP80 that is loaded in the 3rd loading part 150 and move in the directed portion 510 is carried out.That is, when carrying out directional process, do not load FOUP80 at second loading part 160.
Thus, in loading and unloading portion 500, can carry out following processing synchronously: from of the processing of second loading part 160 to substrate processing unit 200 handing-over substrates; Between the 3rd loading part 150 and directed portion 510, join the processing of substrate one by one; And the directional process of in directed portion 510, carrying out.Therefore, can be suppressed at the reduction of carrying out the disposal ability of handling in the loading and unloading portion 500, also can in loading and unloading portion 500, carry out directional process simultaneously.
In addition, directed portion 510 can examine directed face and the breach that side goes out substrate by contactless detecting element, thereby compares the generation that can suppress the foreign matter particulate more with batch processing formula adjustment part.Carry out directional process when therefore, the processing that can suppress substrate of directed portion 510 is bad.
2.3. the advantage of the substrate board treatment of second execution mode
As mentioned above, in the loading and unloading portion 500 of the substrate board treatment 400 of second execution mode, middle across shelf array 140, dispose carrying manipulator (first conveying unit) 130a in load port (first loading part) 10 sides, and dispose carrying manipulator (second conveying unit) 130b in substrate board treatment 200 sides.Thus, when visiting same ccontaining shelf, two carrying manipulator 130a, 130b can mutually noninterfere ground carry out the conveyance of FOUP80 synchronously.
Therefore, can further improve the disposal ability of the conveyance of carrying out in loading and unloading portion 500 and the disposal ability of substrate board treatment 400.In addition, can need not to consider the interference on the space of carrying manipulator 130a, 130b and set the action of each carrying manipulator 130a, 130b.
In addition, loading and unloading portion 500 has two loading parts (the second and the 3rd loading part 160,150), and the mapping of carrying out synchronously in the 3rd loading part 150 is handled and the processing to substrate processing unit 200 handing-over substrates in second loading part 160.That is, second loading part 160 need not resemble to be carried out mapping in the past the loading and unloading portion and handles, and as long as carry out the handing-over of substrate, thereby can reduce the processing latency that resembles in the past installing at second loading part 160.Therefore, can further improve the disposal ability of the conveyance in loading and unloading portion 500 and the disposal ability of substrate board treatment 400.
In addition, in loading and unloading portion 500, can carry out processing and directional process synchronously to substrate processing unit 200 handing-over substrates.Therefore, the reduction of loading and unloading portion 500 disposal ability on the whole can be suppressed as much as possible, directional process can be carried out simultaneously.
And then, because directed portion 510 examines directed face and the breach that side goes out substrate by contactless detecting element, therefore can suppress the processing of substrate and carry out directional process bad the time.

Claims (11)

1. substrate board treatment, it is handled substrate, it is characterized in that, has:
Substrate processing unit, it is used for substrate is handled;
The ccontaining conveyance of receptacle unit, itself and aforesaid substrate processing unit are arranged side by side, and the receptacle of substrate is deposited in ccontaining and conveyance;
First loading part, itself and the ccontaining conveyance of above-mentioned receptacle unit are arranged side by side, and are used to load above-mentioned receptacle,
The ccontaining conveyance of above-mentioned receptacle unit has:
A plurality of shelf, it keeps above-mentioned receptacle;
Second loading part, it is configured between aforesaid substrate processing unit and the above-mentioned a plurality of shelf, and loads receptacle;
Switching mechanism, it opens and closes the open-close lid that is loaded in the receptacle on above-mentioned second loading part;
First conveying unit, it visits above-mentioned a plurality of shelf in the direction side shifting of above-mentioned a plurality of shelf at above-mentioned a plurality of shelf from an above-mentioned direction side, thus, conveyance receptacle between above-mentioned first loading part and above-mentioned a plurality of shelf;
Second conveying unit, it visits above-mentioned a plurality of shelf in above-mentioned a plurality of shelf another direction side shifting at above-mentioned a plurality of shelf from above-mentioned another direction side, thus, conveyance receptacle between above-mentioned a plurality of shelf and above-mentioned second loading part.
2. substrate board treatment as claimed in claim 1 is characterized in that, above-mentioned first conveying unit is configured between above-mentioned first loading part and the above-mentioned a plurality of shelf, and from a direction side of above-mentioned a plurality of shelf to above-mentioned a plurality of shelf conveyance receptacles.
3. substrate board treatment as claimed in claim 2 is characterized in that, above-mentioned second conveying unit is configured between aforesaid substrate processing unit and the above-mentioned a plurality of shelf, simultaneously from another direction sides of above-mentioned a plurality of shelf to above-mentioned a plurality of shelf conveyance receptacles.
4. substrate board treatment as claimed in claim 3 is characterized in that,
Above-mentioned first conveying unit and second conveying unit have the holding element that keeps receptacle from the downside of receptacle,
Above-mentioned a plurality of shelf have and are used to make above-mentioned holding element along the portion that passes through that vertical is passed through.
5. substrate board treatment as claimed in claim 4 is characterized in that, the ccontaining conveyance of above-mentioned receptacle unit further has:
The 3rd loading part, it is configured in an opposite side with above-mentioned second loading part across above-mentioned a plurality of shelf, is used to load receptacle;
Judging part is judged the situation of depositing that is contained in the substrate in the receptacle that is loaded on above-mentioned the 3rd loading part.
6. substrate board treatment as claimed in claim 5 is characterized in that, above-mentioned first conveying unit is carried out the conveyance of receptacle between above-mentioned judging part and above-mentioned first loading part.
7. substrate board treatment as claimed in claim 6 is characterized in that, the ccontaining conveyance of above-mentioned receptacle unit further has:
Orientation portion, it adjusts the position of substrate;
The 3rd conveying unit, it takes out substrate one by one from the receptacle that is loaded in above-mentioned judging part, and to above-mentioned directed portion conveyance substrate, simultaneously the substrate that will adjust the position in above-mentioned directed portion one by one conveyance to the receptacle that is loaded in above-mentioned judging part.
8. substrate board treatment as claimed in claim 1 is characterized in that, along vertical and the above-mentioned a plurality of shelf of horizontal direction two-dimensional arrangements.
9. substrate board treatment as claimed in claim 1 is characterized in that, the ccontaining conveyance of above-mentioned receptacle unit further has elevating mechanism, and this elevating mechanism keeps being loaded in the receptacle of above-mentioned second loading part, makes its lifting simultaneously.
10. substrate board treatment as claimed in claim 5 is characterized in that, above-mentioned judging part has:
Switching mechanism, its switching is positioned at the open-close lid of the receptacle of above-mentioned judging part;
Counting device, it is counted the number that leaves the substrate in the receptacle in, and this receptacle is in the state that is opened by above-mentioned switching mechanism.
11. substrate board treatment as claimed in claim 1 is characterized in that, the aforesaid substrate processing unit has transport mechanism, and this transport mechanism carries out taking out of of substrate to the receptacle that is loaded in above-mentioned second loading part and moves into.
CNB2006100069568A 2005-01-28 2006-01-26 Substrate processing apparatus Active CN100413047C (en)

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Families Citing this family (7)

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Publication number Priority date Publication date Assignee Title
JP2009049232A (en) * 2007-08-21 2009-03-05 Dainippon Screen Mfg Co Ltd Substrate processing equipment
JP5338335B2 (en) * 2008-08-13 2013-11-13 東京エレクトロン株式会社 Opening / closing device and probe device of transfer container
CN103003916A (en) * 2010-05-07 2013-03-27 纳米半导体(株) Integrated semiconductor-processing apparatus
JP5722092B2 (en) * 2011-03-18 2015-05-20 株式会社Screenホールディングス Substrate processing equipment
JP6562803B2 (en) * 2015-09-30 2019-08-21 株式会社Screenホールディングス Substrate processing system
JP6601360B2 (en) * 2016-09-30 2019-11-06 株式会社ダイフク Goods transport equipment
CN107681019A (en) * 2017-09-19 2018-02-09 中建材浚鑫科技有限公司 The feeding and blanking device for spreading or annealing for solar cell

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2210996A (en) * 1987-10-09 1989-06-21 Plessey Co Plc Contents verification apparatus
US5980183A (en) * 1997-04-14 1999-11-09 Asyst Technologies, Inc. Integrated intrabay buffer, delivery, and stocker system
US6478532B1 (en) * 1999-11-30 2002-11-12 Asyst Technologies, Inc. Wafer orienting and reading mechanism
US6540466B2 (en) * 1996-12-11 2003-04-01 Applied Materials, Inc. Compact apparatus and method for storing and loading semiconductor wafer carriers
CN1534726A (en) * 2003-03-28 2004-10-06 大日本屏影象制造株式会社 Substrate processor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2210996A (en) * 1987-10-09 1989-06-21 Plessey Co Plc Contents verification apparatus
US6540466B2 (en) * 1996-12-11 2003-04-01 Applied Materials, Inc. Compact apparatus and method for storing and loading semiconductor wafer carriers
US5980183A (en) * 1997-04-14 1999-11-09 Asyst Technologies, Inc. Integrated intrabay buffer, delivery, and stocker system
US6478532B1 (en) * 1999-11-30 2002-11-12 Asyst Technologies, Inc. Wafer orienting and reading mechanism
CN1534726A (en) * 2003-03-28 2004-10-06 大日本屏影象制造株式会社 Substrate processor

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