CN100396786C - Multiple parameter micro sensor - Google Patents
Multiple parameter micro sensor Download PDFInfo
- Publication number
- CN100396786C CN100396786C CNB031411541A CN03141154A CN100396786C CN 100396786 C CN100396786 C CN 100396786C CN B031411541 A CNB031411541 A CN B031411541A CN 03141154 A CN03141154 A CN 03141154A CN 100396786 C CN100396786 C CN 100396786C
- Authority
- CN
- China
- Prior art keywords
- microelectrode
- electrode
- technology
- present
- reaction chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Abstract
The present invention relates to a sensor technology, particularly to a miniature biological sensor integrated technology. A multiparameter microsensor of the present invention is composed of a carrier material, a film microelectrode array, a miniature reaction chamber and a sampling microcavity, wherein the film microelectrode array is fixedly arranged on the surface of the carrier material; the film microelectrode array is composed of work electrodes and counter electrodes, the work electrodes and the counter electrodes are respectively provided with leading-out ends, and conducting leading wires are connected to the leading-out ends; a miniature reaction chamber is formed between the work electrodes and the counter electrodes, and is connected with the sampling microcavity. The present invention can detect a plurality of biochemical indexes in whole blood on application. The integrated sensor array is manufactured into disposable test bars. The production technology adopts an advanced micro electromechanical system (MEMES) technology. The reliability and the consistency of detection are ensured, and the production cost of test bars is reduced. The present invention adopts a simple effective enzyme fixing method, so that the present invention has the advantages of convenient test bar production, fast system response, high sensitivity, etc.
Description
Technical field
The present invention relates to sensor technology, particularly a kind of microbiosensor integrated technology is a kind of integrated strip of multiparameter micro sensor array and multi-parameter whole blood biochemistry detection micro-system thereof based on MEMS (micro electro mechanical system) (MEMS) technology.
Background technology
The research of microbiosensor integrated technology is the forward position and the hot issue of present international biosensor, has a wide range of applications and clear and definite industrialization prospect at medicine, health, food, environmental science.The design of microelectrode, technology, detection, background technology such as integrated have significant effects to the micro-system performance.The thick film technology that relies on silk screen printing at present is used to make one-parameter disposable sensor strip and measuring instrument has begun commercialization production, but the transmitter strip of this employing thick film technology is made consuming time, consumptive material, technology comparatively complicated and also at aspects such as time of response, sensitivity, stability not as membrane electrode based on advanced person's MEMS (micro electro mechanical system) (MEMS) manufacturing technology.The technique for fixing of biological enzyme has fundamental influence to performances such as time of response of transmitter, sensitivity, work-ing lifes in detection technique, at present the fixing means of biological enzyme has a lot, thus seek a kind of simply be easy to produce and make sensor array have preferably the enzyme fixing means of analytical performance is an indispensable gordian technique in the micro-system application and development.
Summary of the invention
The objective of the invention is to overcome deficiency of the prior art, produce the multiparameter micro sensor of fast, highly sensitive, long service life of a kind of time of response with MEMS (micro electro mechanical system) (MEMS) manufacturing technology.
Another object of the present invention is that this multiparameter micro sensor has fixed performance preferably to biological enzyme, and technology is simple.
For achieving the above object, technical solution of the present invention provides a kind of multiparameter micro sensor, is made up of solid support material, film microelectrode arrays, minisize reaction chamber and sample introduction microcavity, and it is installed with film microelectrode arrays in surfaces of carrier materials; Film microelectrode arrays is made up of working electrode and counter electrode, and each working electrode and counter electrode all have leading-out end, is connected with conductive lead wire on the leading-out end; The minisize reaction chamber is arranged between working electrode and counter electrode, and the minisize reaction chamber is connected with the sample introduction microcavity.
Described multiparameter micro sensor, there is the layer of metal nano particle on its described working electrode and counter electrode surface.
Described multiparameter micro sensor, the technology of its described film microelectrode arrays is made, and may further comprise the steps:
(1) pre-washing: at first solid support material is placed in the vitriol oil and potassium bichromate (25: the 1) mixing solutions and soaks, use deionized water rinsing again, till surfaces of carrier materials is hydrophilic, is placed in the baking oven at last and dries;
(2) film preparation: adopt Vacuum Coating method deposition chromium earlier, take out, again deposited gold;
(3) whirl coating, photoetching, development: on sol evenning machine, deposit negative photoresist, in baking oven, dry, on lithography machine, expose then, in developer for negative photoresist, develop again, then with negative glue scavenging solution flushing, oven dry again in baking oven at last;
(4) acid gilding: in iodine and potassiumiodide (1: 4) mixing solutions, soak, till removing the gold of electrode and corroding fully with outside part;
(5) corrosion chromium: in sodium hydroxide and potassium permanganate solution, soak, till removing the chromium of electrode and corroding fully with outside part;
(6) remove photoresist: adopt dried quarter or wet carving method to remove surperficial glued membrane;
(7) finish: obtain product.
Described multiparameter micro sensor, in the technology making step (1) of its described film microelectrode arrays, solid support material soak time 〉=6 hour in the vitriol oil and potassium bichromate (25: 1) mixing solutions; In 80 ℃ of baking ovens, toasted 1.5～2.5 hours.
Described multiparameter micro sensor, in the technology making step (2) of its described film microelectrode arrays, the vacuum plating condition is: vacuum tightness 10
-3Pa, 180 ℃ of temperature; Chromium deposition 190～210 dusts, deposition of gold 2980～3020 dusts.
Described multiparameter micro sensor, in the technology making step (3) of its described film microelectrode arrays, negative photoresist deposition 1.4～1.6 μ m, in 80 ℃ of baking ovens, dried by the fire 25～35 minutes, on lithography machine, exposed then 1～2 second, in developer for negative photoresist, developed again 1～2 minute, and then, in 180 ℃ of baking ovens, dried by the fire again 35～45 minutes at last with negative glue scavenging solution flushing 1～2 minute.
Described multiparameter micro sensor, in the technology making step (6) of its described film microelectrode arrays, do the corrosion of method employing at quarter reactive ion etching machine, its processing condition are: RF power is 50Watt, etching gas is 30ml/ minute a oxygen, operating air pressure is 4Pa, and self-bias is 50Volt, and etching time is 10～15 minutes.
Described multiparameter micro sensor, in the technology making step (6) of its described film microelectrode arrays, wet etching is placed on the HNO of being fuming to electrod-array exactly
3The middle immersion about 10～15 minutes taken out, and uses deionized water rinsing, till the glue of examining under a microscope the electrod-array surface has been removed.
Described multiparameter micro sensor, there is the layer of metal nano particle on its described microelectrode surface, is to adopt the method for electrochemical deposition to deposit one deck platinum black particle on microelectrode; Can adopt different electrochemical deposition conditions to assemble the metal nanoparticle of different specific surface areas.
Described multiparameter micro sensor is characterized in that there is the microelectrode of layer of metal nano particle on described surface, the mixing solutions that contains matrix solution and enzyme directly can be adsorbed in the metal nano-particle layer of porosity and looseness shape.
Described multiparameter micro sensor, the detection principle of its micro-system is to modify on the porous platinum black microelectrode array, different microelectrodes have adsorbed different biological enzymes and electron mediator simultaneously, when the oxydase on the working electrode that is fixed on separately respectively will be separately when substrate carries out oxygenizement, electron mediator is oxidized to oxydase with reductase enzyme, oxydase further carries out oxidation to its substrate again, and electron mediator is become go back ortho states, also ortho states electron mediator oxidation under low voltage on the working electrode of cumulative, its oxidation current is directly proportional with substrate to be measured.
Described multiparameter micro sensor, its described solid support material comprises glass, glass fibre and insulating polymeric material.
Described multiparameter micro sensor, its described insulating polymeric material are Resins, epoxy, poly-inferior acyl ammonia ester (PEO), ethene-to two benzoic ethers (PET).
Described multiparameter micro sensor, its described minisize reaction chamber, its function is the loss for moment diffusion that reduces reaction product and enzyme, but the kapillary that microcavity is led to by two ends constitutes and makes sample moment under the effect of capillary force be full of whole minisize reaction chamber.
Described multiparameter micro sensor, it links to each other with miniature instrument by the conductive lead wire on the film microelectrode arrays leading-out end, constitutes the Portable, multiple parameter whole blood biochemistry and detects micro-system.
Described multiparameter micro sensor, its described miniature instrument is the portable detector table, is provided with unique Detection of weak circuit.
The invention solves gordian techniquies such as immobilization, stability, encapsulation, multi-parameter detecting method and the multi-parameter sensor of design, technology, metal nanoparticle assembling, enzyme of micro-system and detection circuitry be integrated, utilize the present invention with the micromechanics manufacturing technology, electrochemical techniques, hyperchannel Detection of Weak Signals technology, digitizing and intellectualized technology are applied to the biochemical multiparameter check and analysis of micro whole blood sample.Micro-system has technical process weak point, low cost of manufacture, easy to use, advantages such as detection is rapid, good reproducibility, be suitable for family, clinical fast low creationization detection, diabetic subject and community medicine health care are had great importance, therefore, have the good commercial prospect.To socio-economic development, national human health and scientific and technological self-growth have great importance.
The present invention relatively has many advantages with at present domestic and international product, at first on using, can detect a plurality of biochemical indicators in the whole blood, once more because the production technique of disposable test strips adopts advanced MEMS (micro electro mechanical system) (MEMES) technology, the reliability and the consistence that detect had both been guaranteed, reduced the production cost of strip again, adopted the fixing means of simple and effective enzyme, made that the production of strip is more easy, and the response of system is fast, advantages such as sensitivity height.
Description of drawings
Fig. 1 multiparameter micro sensor of the present invention schema;
Fig. 2 multiparameter micro sensor of the present invention MEMS (micro electro mechanical system) (MEMS) process flow sheet;
Platinum black particle SEM figure on Fig. 3 multiparameter micro sensor of the present invention electrode;
Fig. 4 multiparameter micro sensor of the present invention different activities electrode surface cyclic voltammogram;
Fig. 5 multiparameter micro sensor of the present invention is to the response diagram of glucose solution;
Fig. 6 multiparameter micro sensor of the present invention is to the response diagram of lactic acid solution;
The linear relationship chart of the response of Fig. 7 multiparameter micro sensor of the present invention glucose and lactic acid solution.
Embodiment
Describe implementation of the present invention in detail in conjunction with example with reference to the accompanying drawings below:
Embodiment 1:
Fig. 1 represents the multiparameter micro sensor schema of the embodiment of the invention, mainly comprise with the lower section: electrode is made and is adopted MEMS (micro electro mechanical system) (MEMS) technology, and wherein working electrode adopts identical Precious Metals-Gold or platinum sputter or evaporation (10.0 * 26.0 * 1.0mm on glass or PET matrix of materials with counter electrode
3), at thin film work electrode 1 (0.8 * 0.6mm
2) and counter electrode 2 (1.0 * 8mm
2) go up and make SU8 glue insulation layer 6 (10 * 10 * 0.2mm
3), after exposure, can obtain reacting raceway groove 4 (10 * 1.5 * 0.2mm
3), around the working electrode that exposes, make SU8 reaction chamber 3 (0.8 * 0.6 * 0.02mm
3), on reaction raceway groove 4, paste one layer of polymeric as encapsulated layer 5 (10 * 4.0 * 0.2mm
3), form the sample introduction microcavity, add that contact conductor 7 formed a complete sensors strip.One end that will have lead-in wire during test inserts miniature instrument, constitutes the Portable, multiple parameter whole blood biochemistry and detects micro-system.
The detection principle of this micro-system is to modify on the porous platinum black microelectrode array, different microelectrodes have adsorbed different biological enzymes and electron mediator simultaneously, when the oxydase on the working electrode that is fixed on separately respectively will be separately when substrate carries out oxygenizement, electron mediator is oxidized to oxydase with reductase enzyme, oxydase further carries out oxidation to its substrate again, and electron mediator is become go back ortho states, also ortho states electron mediator oxidation under low voltage on the working electrode of cumulative, its oxidation current is directly proportional with substrate to be measured.
This miniature instrument is the portable detector table, is provided with unique Detection of weak circuit.
Embodiment 2:
Fig. 2 is the making membrane electrode array main technique schema that the present invention adopts MEMS (micro electro mechanical system) (MEMS) technology, comprises following step:
(1) pre-washing: at first solid support material sheet glass 9 is placed on to soak more than 6 hours in the vitriol oil and potassium bichromate (25: the 1) mixing solutions and takes out then, use deionized water rinsing, till glass sheet surface is hydrophilic, is placed at last in 80 ℃ of baking ovens and dried by the fire 2 hours.
(2) film preparation: in vacuum tightness is 10
-3Pa, when temperature is 180 ℃, adopt Vacuum Coating method to deposit 200 dust chromium (Cr) 8, take out and deposit 3000 dust gold (Au) 11 again.
(3) whirl coating, photoetching, development: deposition 1.5 μ negative photoresists 10 on sol evenning machine, baking is 30 minutes in 80 ℃ of baking ovens.Exposed 1.5 seconds on lithography machine then, development is 1 minute in developer for negative photoresist, then washes 1 minute with negative glue scavenging solution, dries by the fire 40 minutes in 180 ℃ of baking ovens at last.
(4) acid gilding (Au) 11: in iodine and potassiumiodide (1: 4) mixing solutions, soak, till removing the gold (Au) 11 of electrode and corroding fully with outside part.
(5) corrosion chromium (Cr) 8: in sodium hydroxide and potassium permanganate solution, soak, till removing the chromium (Cr) 8 of electrode and corroding fully with outside part.
(6) remove photoresist: adopt dried quarter or wet carving method to remove surperficial glued membrane, do the corrosion of method employing at quarter reactive ion etching machine, its processing condition are: RF power is 50Watt, etching gas is the oxygen of 30ml/min, operating air pressure is 4Pa, and self-bias is 50Volt, and etching time is 10min.Wet etching is placed on the HNO of being fuming to electrod-array exactly
3The middle immersion about 10 minutes taken out, and uses deionized water rinsing, till the glue of examining under a microscope the electrod-array surface has been removed.
Embodiment 3:
Fig. 3 is according to the present invention, thereby adopts the method for electrochemical deposition to deposit the SEM photo that one deck platinum black particle obtains the height ratio example electrode surface of porosity and looseness shape on microelectrode.Its method is that the microelectrode that at first will be deposited platinum black is connected with the lead-in wire of CHI660A electrochemical workstation working electrode, is connected simultaneously with the reference electrode lead-in wire with the counter electrode lead-in wire of workstation with platina silk electrode, at 24mMH
2PtCl
6, in the electrolyte solution that 2mM PbAC forms, adopt continuous current (100 μ A/cm
2) energising 120s.
Adopt different electrochemical deposition conditions to assemble the metal nanoparticle of different specific surface areas in order to obtain the porous active electrode surface on microelectrode array, metal nano-particle layer can firmly be adsorbed the mixing solutions of matrix solution and enzyme.
Fig. 4 is for increasing the specific surface area of electrode as can be seen effectively at the surface deposition platinum black of electrode in black front and back of platinum plating and the comparison enzyme-added and the not cyclic voltammogram of enzyme-added microelectrode, response current is obviously increased, even behind the fixing a certain amount of biological enzyme of absorption, electric current is also constant substantially, and illustrating that biomacromolecule is fixed on can be not influential to the transfer transport of micromolecular electron mediators such as the Tripotassium iron hexacyanide in the porous platinum black particle.
The test fluid of the cyclic voltammogram among Fig. 4 is the 1mM Tripotassium iron hexacyanide, the 10mM phosphate buffered saline buffer that basic phase solution is pH7.4; Sweep velocity is 100mV/sec.Reference electrode and working electrode are with a kind of electrode materials.
Embodiment 4:
Adopt the micro-operation instrument, to dripping the mixing solutions of glucose oxidase, the Tripotassium iron hexacyanide and basic solution mutually in the reaction chamber on the embodiment 3 gained microelectrodes respectively, Lactate Oxidase, the Tripotassium iron hexacyanide and the basic mixing solutions of solution mutually, these solution directly are adsorbed on the microelectrode of porosity and looseness shape.
Adopt the test of ampere method to the glucose of different concns and lactate detection gained response curve respectively as Fig. 5,6.Show among the figure that electric current increases rapidly, and reaches stable state in less than 60 seconds time, therefore, can be used for the rapid detection of whole blood when adding substrate on the transmitter strip.Fig. 7 be system to two kinds of substrate calibration curves, the result shows that the linear relationship of two kinds of substrates in certain concentration range is fairly good, and the sensitivity of response current is good, can satisfy the basic demand of whole blood rapid detection.
The function of minisize reaction chamber is the loss for moment diffusion that reduces reaction product and enzyme, but the kapillary that microcavity is led to by two ends constitutes and makes sample moment under the effect of capillary force be full of whole minisize reaction chamber.
The working method of native system can summarize as follows:
At first close miniature instrument power, new password board is put into slot.The new box multiparameter micro sensor of each use detects strip, must change new password board.Be inserted into the made multiparameter micro sensor of the present invention and detect strip, miniature instrument is opened (also can button open) automatically, when bleeding the symbol flicker, blood sample is close to the strip edge, blood also is full of whole minisize reaction chamber 3 rapidly by reaction raceway groove 4 automatically under the effect of capillary force, when hearing " B " one, the test beginning.Behind the certain hour, result's round in sequence is presented on the display screen of miniature instrument.
Claims (15)
1. method of making the microelectrode array of multiparameter micro sensor, wherein said multiparameter micro sensor is installed with film microelectrode arrays by surfaces of carrier materials; Film microelectrode arrays is made up of working electrode and counter electrode, and each working electrode and counter electrode all have leading-out end, is connected with conductive lead wire on the leading-out end; The minisize reaction chamber is arranged between working electrode and counter electrode, and the minisize reaction chamber is connected with the sample introduction microcavity; Said method comprising the steps of:
(1) pre-washing: at first solid support material is placed in the vitriol oil and the mixed potassium dichromate and soaks, use deionized water rinsing again, till surfaces of carrier materials is hydrophilic, is placed in the baking oven at last and dries;
(2) film preparation: adopt Vacuum Coating method deposition chromium earlier, take out, again deposited gold;
(3) whirl coating, photoetching, development: on sol evenning machine, deposit negative photoresist, in baking oven, dry, on lithography machine, expose then, in developer for negative photoresist, develop again, then with negative glue scavenging solution flushing, oven dry again in baking oven at last;
(4) acid gilding: in iodine and potassiumiodide mixing solutions, soak, till removing the gold of electrode and corroding fully with outside part;
(5) corrosion chromium: in sodium hydroxide and potassium permanganate solution, soak, till removing the chromium of electrode and corroding fully with outside part;
(6) remove photoresist: adopt dried quarter or wet carving method to remove surperficial glued membrane;
(7) finish: obtain product.
2. method according to claim 1 is characterized in that there is the layer of metal nano particle on described working electrode and counter electrode surface.
3. method according to claim 1, it is characterized in that, in the technology making step (1) of described film microelectrode arrays, the proportioning of the vitriol oil and mixed potassium dichromate is: 25: 1, and solid support material soak time 〉=6 hour in the vitriol oil and mixed potassium dichromate; In 80 ℃ of baking ovens, toasted 1.5～2.5 hours.
4. method according to claim 1 is characterized in that in the technology making step (2) of described film microelectrode arrays, the vacuum plating condition is: vacuum tightness 10
-3Pa, 180 ℃ of temperature; Chromium deposition 190～210 dusts, deposition of gold 2980～3020 dusts.
5. method according to claim 1, it is characterized in that, in the technology making step (3) of described film microelectrode arrays, negative photoresist deposition 1.4～1.6 μ m, in 80 ℃ of baking ovens, dried by the fire 25～35 minutes, on lithography machine, exposed then 1～2 second, in developer for negative photoresist, developed again 1～2 minute, then, in 180 ℃ of baking ovens, dried by the fire again 35～45 minutes at last with negative glue scavenging solution flushing 1～2 minute.
6. method according to claim 1 is characterized in that in the technology making step (4) of described film microelectrode arrays, the proportioning of iodine and potassiumiodide mixing solutions is 1: 4.
7. as method as described in the claim 3, it is characterized in that, in the technology making step (6) of described film microelectrode arrays, do the corrosion of method employing at quarter reactive ion etching machine, its processing condition are: RF power is 50Watt, and etching gas is 30ml/ minute a oxygen, and operating air pressure is 4Pa, self-bias is 50Volt, and etching time is 10～15 minutes.
8. as the method for claim 3, it is characterized in that in the technology making step (6) of described film microelectrode arrays, wet etching is placed on the HNO of being fuming to electrod-array exactly
3The middle immersion about 10～15 minutes taken out, and uses deionized water rinsing, till the glue of examining under a microscope the electrod-array surface has been removed.
9. method according to claim 1 is characterized in that there is the layer of metal nano particle on described microelectrode surface, is to adopt the method for electrochemical deposition to deposit one deck platinum black particle on microelectrode; Can adopt different electrochemical deposition conditions to assemble the metal nanoparticle of different specific surface areas.
10. as method as described in the claim 2, it is characterized in that there is the microelectrode of layer of metal nano particle on described surface, the mixing solutions that will contain matrix solution and enzyme directly is adsorbed in the metal nano-particle layer of porosity and looseness shape.
11. method according to claim 1, it is characterized in that, the detection principle of micro-system is to modify on the porous platinum black microelectrode array, different microelectrodes have adsorbed different biological enzymes and electron mediator simultaneously, when the oxydase on the working electrode that is fixed on separately respectively will be separately when substrate carries out oxygenizement, electron mediator is oxidized to oxydase with reductase enzyme, oxydase further carries out oxidation to its substrate again, and electron mediator is become go back ortho states, also ortho states electron mediator oxidation under low voltage on the working electrode of cumulative, its oxidation current is directly proportional with substrate to be measured.
12. method is characterized in that according to claim 1, described solid support material comprises glass, glass fibre and insulating polymeric material.
13., it is characterized in that described insulating polymeric material is Resins, epoxy, poly-inferior acyl ammonia ester PEO, ethene-to two benzoic ether PET as method as described in the claim 12.
14. method according to claim 1, it is characterized in that, described minisize reaction chamber, its function are the losses for moment diffusion that reduces reaction product and enzyme, but the kapillary that microcavity is led to by two ends constitutes and makes sample moment under the effect of capillary force be full of whole minisize reaction chamber.
15. method is characterized in that according to claim 1, links to each other with miniature instrument by the conductive lead wire on the film microelectrode arrays leading-out end, constitutes the Portable, multiple parameter whole blood biochemistry and detects micro-system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031411541A CN100396786C (en) | 2003-06-11 | 2003-06-11 | Multiple parameter micro sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031411541A CN100396786C (en) | 2003-06-11 | 2003-06-11 | Multiple parameter micro sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1566938A CN1566938A (en) | 2005-01-19 |
| CN100396786C true CN100396786C (en) | 2008-06-25 |
Family
ID=34470853
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB031411541A Expired - Lifetime CN100396786C (en) | 2003-06-11 | 2003-06-11 | Multiple parameter micro sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100396786C (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100575926C (en) * | 2005-12-01 | 2009-12-30 | 中国科学院电子学研究所 | The reflection type optical-fiber bio sensing device |
| CN100535649C (en) * | 2006-03-30 | 2009-09-02 | 中国科学院电子学研究所 | Microelectrode biosensing chip of 3D nanogap mesh array |
| CN103031246B (en) * | 2011-10-10 | 2014-11-05 | 中国科学院电子学研究所 | Microelectrode array chip for multi-parameter detection of nerve cells and preparation method thereof |
| CN102393414B (en) * | 2011-11-17 | 2014-02-12 | 江苏大学 | Microelectrode for measuring nitrogen and potassium of greenhouse crops, its measurement method of nitrogen and potassium |
| CN103487482B (en) * | 2013-09-11 | 2016-02-10 | 北京农业智能装备技术研究中心 | A kind of device and using method detecting dynamic ion flow signal |
| CN104502314A (en) * | 2014-12-18 | 2015-04-08 | 杭州香侬科技有限公司 | Biochemical sensor for coupling optical microcavity molecule |
| CN105136784B (en) * | 2015-07-27 | 2016-06-22 | 济南大学 | The preparation method of a kind of saccharide sensor device based on colorimetric analysis and application |
| CN106353387B (en) * | 2016-08-24 | 2019-11-29 | 三诺生物传感股份有限公司 | A kind of electrochemical test bar and the method for detecting a variety of determinands simultaneously |
| CN108152350A (en) * | 2017-12-19 | 2018-06-12 | 江南大学 | A kind of method that enzyme biologic sensor is prepared based on microelectrode array |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2564030B2 (en) * | 1990-09-28 | 1996-12-18 | 日本電信電話株式会社 | Method for producing carbon thin film electrode for electrochemical measurement |
| US5605662A (en) * | 1993-11-01 | 1997-02-25 | Nanogen, Inc. | Active programmable electronic devices for molecular biological analysis and diagnostics |
| US6203758B1 (en) * | 1997-11-10 | 2001-03-20 | Bio-Pixel Ltd. | Micro-circuit system with array of functionalized micro-electrodes |
| CN1290752A (en) * | 2000-10-10 | 2001-04-11 | 陆祖宏 | Compound micro path array chip and its preparing method |
| CN1330154A (en) * | 2000-06-27 | 2002-01-09 | 南京益来基因医学有限公司 | Cell microarray chip and its preparing process |
| CN1359002A (en) * | 2000-12-12 | 2002-07-17 | 索尼国际(欧洲)股份有限公司 | Selective chemical sensor based on nano granule assembly |
-
2003
- 2003-06-11 CN CNB031411541A patent/CN100396786C/en not_active Expired - Lifetime
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2564030B2 (en) * | 1990-09-28 | 1996-12-18 | 日本電信電話株式会社 | Method for producing carbon thin film electrode for electrochemical measurement |
| US5605662A (en) * | 1993-11-01 | 1997-02-25 | Nanogen, Inc. | Active programmable electronic devices for molecular biological analysis and diagnostics |
| US6203758B1 (en) * | 1997-11-10 | 2001-03-20 | Bio-Pixel Ltd. | Micro-circuit system with array of functionalized micro-electrodes |
| CN1330154A (en) * | 2000-06-27 | 2002-01-09 | 南京益来基因医学有限公司 | Cell microarray chip and its preparing process |
| CN1290752A (en) * | 2000-10-10 | 2001-04-11 | 陆祖宏 | Compound micro path array chip and its preparing method |
| CN1359002A (en) * | 2000-12-12 | 2002-07-17 | 索尼国际(欧洲)股份有限公司 | Selective chemical sensor based on nano granule assembly |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1566938A (en) | 2005-01-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101871912B (en) | Full-solid potassium ion sensor and preparation method thereof | |
| US10386322B2 (en) | Method for determining the concentration of an analyte in a liquid sample using small volume samples and fast test times | |
| JP3842989B2 (en) | Biosensor with chromatographic porous thin film | |
| US6491803B1 (en) | Test strip and biosensor incorporating with nanometer metal particles | |
| TW548095B (en) | Electrochemical electrode test piece and method for producing the same | |
| Maxwell et al. | based electroanalytical devices for accessible diagnostic testing | |
| KR100340174B1 (en) | Electrochemical Biosensor Test Strip, Fabrication Method Thereof and Electrochemical Biosensor | |
| Dungchai et al. | Electrochemical detection for paper-based microfluidics | |
| CN101852761B (en) | All-solid sodium ion selective electrode and preparation method thereof | |
| CN101074963B (en) | Electrode testing strip for inspecting cholesterine by electrochemical method and its production | |
| EP2414534B1 (en) | Electrochemical test device | |
| WO2019214363A1 (en) | Electrochemical sensor for enzyme-free glucose and detection method therefor | |
| JPWO2002097418A1 (en) | Biosensor | |
| CN109298053A (en) | A method of glucose is measured using AuNPs/AgNWs/PDMS ductile electrode | |
| CN102033087A (en) | Multi-analyte test strip with inline working electrodes and shared opposing counter/reference electrode | |
| CN112864324B (en) | Construction of organic grid electrochemical transistor biosensor | |
| CN101303357A (en) | Method for manufacturing rapid blood sugar test paper | |
| CN100396786C (en) | Multiple parameter micro sensor | |
| CN101929977A (en) | Enzyme bioelectrochemical sensing chip and preparation and using methods thereof | |
| CN101881749B (en) | All-solid state dissolved oxygen sensor and preparation method thereof | |
| CN101430336B (en) | Method for hemachrome or hematocrit detection by electro-chemistry method, and detection test piece thereof | |
| JP3259010B2 (en) | Enzyme electrode and measuring device using the same | |
| TWI329738B (en) | ||
| EP1225449B1 (en) | Non-enzymatic disposable electrode strip comprising a surfactant for detecting uric acid or hemoglobin; method for producing the same and its use | |
| US20230303806A1 (en) | Composite film, sensor element comprising said composite film, body fat percentage measuring device, and electrochemical cell device, and wearable measuring device comprising said sensor element |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20080625 |
|
| CX01 | Expiry of patent term |