CA2536145A1 - Separable modulator - Google Patents

Separable modulator Download PDF

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Publication number
CA2536145A1
CA2536145A1 CA002536145A CA2536145A CA2536145A1 CA 2536145 A1 CA2536145 A1 CA 2536145A1 CA 002536145 A CA002536145 A CA 002536145A CA 2536145 A CA2536145 A CA 2536145A CA 2536145 A1 CA2536145 A1 CA 2536145A1
Authority
CA
Canada
Prior art keywords
mirror
forming
electrode
modulator
supports
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002536145A
Other languages
French (fr)
Other versions
CA2536145C (en
Inventor
Jeffrey B. Sampsell
Mark W. Miles
Clarence Chui
Manish Kothari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qualcomm MEMS Technologies Inc
Original Assignee
Idc, Llc
Jeffrey B. Sampsell
Mark W. Miles
Clarence Chui
Manish Kothari
Iridigm Display Cororation
Qualcomm Mems Technologies, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Idc, Llc, Jeffrey B. Sampsell, Mark W. Miles, Clarence Chui, Manish Kothari, Iridigm Display Cororation, Qualcomm Mems Technologies, Inc. filed Critical Idc, Llc
Publication of CA2536145A1 publication Critical patent/CA2536145A1/en
Application granted granted Critical
Publication of CA2536145C publication Critical patent/CA2536145C/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/137—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering
    • G02F1/13725—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering based on guest-host interaction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12104—Mirror; Reflectors or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/216—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference using liquid crystals, e.g. liquid crystal Fabry-Perot filters
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/03—Function characteristic scattering
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/3433—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
    • G09G3/3466—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices based on interferometric effect

Abstract

A separable modulator architecture is disclosed. The modulator has a mirror suspended from a flexible layer over a cavity. The flexible layer also forms supports and support posts for the mirror. An alternative separable modulator architecture has a mirror suspended over a cavity. The modulator is supported by supports and support posts. The support posts comprise a flexible layer over support post plugs. A bus structure may be formed upon the flexible layer arranged over the support posts.

Claims (33)

1. A light modulator, comprising:
a mirror having first and second surfaces suspended over a cavity arranged under the first surface;
supports attached to the second surface of the mirror;
support posts suspending the minor over the cavity by the supports, the support posts and supports being formed from a same layer of material; and an electrode and an optical stack positioned opposite the first surface across the cavity from the mirror such that activation of the electrode causes the mirror to move towards the electrode, changing dimension and interference properties of the cavity.
2. The light modulator of claim 1, the modulator comprising a bus structure attached to the support posts adjacent to the second surface of the mirror.
3. The light modulator of claim 1, the modulator comprising a landing pad arranged upon the electrode and optical stack.
4. The light modulator of claim 3, the landing pad being arranged underneath the mirror.
5. The light modulator of claim 3, the landing pad being arranged so as to contact the supports.
6. A light modulator, comprising:
a mirror having first and second surfaces suspended over a cavity arranged under the first surface;
supports attached to the second surface of the mirror;
support posts suspending the mirror over the cavity by the supports, the support posts having support post plugs; and an electrode and an optical stack positioned opposite the first surface across the cavity from the mirror such that activation of the electrode causes the mirror to move towards the electrode, changing dimension and interference properties of the cavity.
7. The light modulator of claim 6, the modulator comprising a bus structure attached to the support posts adjacent to the second surface of the mirror.
8. The light modulator of claim 6, the modulator comprising a landing pad arranged upon the electrode and optical stack.
9. The light modulator of claim 8, the landing pad arranged underneath the mirror.
10. The light modulator of claim 8, the landing pad arranged so as to contact the supports.
11. A light modulator, comprising:
a mirror having first and second surfaces suspended over a cavity arranged under the first surface;
supports attached to the second surface of the mirror;
support posts suspending the mirror over the cavity by the supports;
a bus structure attached to the support posts adjacent to the second surface of the mirror; and an electrode and an optical stack positioned opposite the first surface across the cavity from the mirror such that activation of the electrode causes the mirror to move towards the electrode, changing dimension and interference properties of the cavity.
12. The modulator of claim 11, the support posts being formed from a same layer as the supports.
13. The modulator of claim 11, the support posts being formed by support post plugs.
14. The modulator of claim 11, the modulator comprising a landing pad arranged upon the electrode and optical stack.
15. An array of light modulators, comprising:
at least three modulators arranged so as to form one resulting picture element;

each modulator comprising a mirror suspended over a cavity by supports, the supports formed such that each modulator corresponding to each color assumes a quiescent state corresponding to a cavity with a different dimension.
16. A method of manufacturing a light modulator, the method comprising:
forming an electrode and optical stack on the back of a transparent substrate;
depositing a first sacrificial layer upon the electrode and optical stack;
forming mirrors on the first sacrificial layer;
depositing a second sacrificial layer upon the mirrors;
forming post holes adjacent to the mirrors;
using a planarization layer to form support post plugs;
depositing a flexible layer on the support post plugs and forming attachments between the flexible layer and the mirror; and removing the first and second sacrificial layers.
17. The method of claim 16, the method comprising forming bus structures on the flexible layer arranged over the support post plugs.
18. The method of claim 16, forming attachments further comprising forming supports of predetermined mechanical properties such that the mirror assumes a quiescent state at a predetermined vertical position from the electrode and optical stack.
19. The method of claim 16, forming attachments further comprising forming supports with predetermined physical restraints that cause the mirror to move to a predetermined position relative to the electrode and optical stack upon application of a constant voltage.
20. The method of claim 16, the method comprising forming a landing pad array upon the electrode and optical stack.
21. The method of claim 20, forming a landing pad further comprising forming landing pads of varying thicknesses to control an amount of movement of the mirror.
22. The method of claim 16, depositing a first sacrificial layer further comprising depositing three thicknesses of the first sacrificial layer, the thickness deposited for a modulator being dependent upon a color designation of that modulator.
23. A method of manufacturing a light modulator, the method comprising:
forming an electrode and optical stack on the back of a transparent substrate;
depositing a first sacrificial layer upon the electrode and optical stack;
forming mirrors on the first sacrificial layer;
depositing a second sacrificial layer upon the mirrors;
forming post holes adjacent to the mirrors;
depositing a flexible layer on the second sacrificial layer such that attachments between the flexible layer and the mirror are formed and the flexible layer fills the post holes forming support posts; and removing the first and second sacrificial layers.
24. The method of claim 23, the method comprising forming bus structures on the support posts.
25. The method of claim 23, depositing the flexible layer further comprising depositing the flexible layer and patterning and etching it to provide supports of predetermined mechanical properties such that the mirror assumes a quiescent state at a predetermined vertical position from the electrode and optical stack.
26. The method of claim 23, forming attachments further comprising depositing the flexible layer and patterning and etching it to form supports of predetermined physical restraints that cause the mirror to move to a predetermined position relative to the electrode and optical stack upon application of a constant voltage.
27. The method of claim 23, the method comprising forming a landing pad array upon the electrode and optical stack.
28. The method of claim 27, forming a landing pad array further comprising forming landing pads of varying thicknesses to control an amount of movement of the minor.
29. The method of claim 23, depositing a first sacrificial layer further comprising depositing three thicknesses of the first sacrificial layer, the thickness deposited for a modulator being dependent upon a color designation of that modulator.
30. A method of manufacturing a light modulator, the method comprising:
forming a mirror over a first sacrificial layer attached to a flexible layer over a second sacrificial layer and having support posts;
depositing a third sacrificial layer over the flexible layer;
forming bus structures in a conductive layer on top of the third sacrificial layer arranged over the support posts; and removing the sacrificial layers.
31. The method of claim 30, forming a mirror comprising forming a mirror having support posts comprised of a portion of the flexible layer.
32. The method of claim 30, forming a mirror comprising forming a mirror having support post plugs.
33. The method of claim 30, the method comprising forming a landing pad under the first sacrificial layer.
CA2536145A 2003-08-19 2004-08-12 Separable modulator Expired - Fee Related CA2536145C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/644,312 US7460291B2 (en) 1994-05-05 2003-08-19 Separable modulator
US10/644,312 2003-08-19
PCT/US2004/026458 WO2005019899A1 (en) 2003-08-19 2004-08-12 Separable modulator

Publications (2)

Publication Number Publication Date
CA2536145A1 true CA2536145A1 (en) 2005-03-03
CA2536145C CA2536145C (en) 2012-04-03

Family

ID=34216394

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2536145A Expired - Fee Related CA2536145C (en) 2003-08-19 2004-08-12 Separable modulator

Country Status (12)

Country Link
US (4) US7460291B2 (en)
EP (1) EP1656579A1 (en)
JP (1) JP4468307B2 (en)
KR (1) KR20060098362A (en)
CN (1) CN1853130A (en)
AU (1) AU2004266407A1 (en)
BR (1) BRPI0413664A (en)
CA (1) CA2536145C (en)
IL (1) IL173672A0 (en)
RU (1) RU2351969C2 (en)
TW (1) TWI358550B (en)
WO (1) WO2005019899A1 (en)

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