CA2530065A1 - Semiconductor device including mosfet having band-engineered superlattice - Google Patents
Semiconductor device including mosfet having band-engineered superlattice Download PDFInfo
- Publication number
- CA2530065A1 CA2530065A1 CA002530065A CA2530065A CA2530065A1 CA 2530065 A1 CA2530065 A1 CA 2530065A1 CA 002530065 A CA002530065 A CA 002530065A CA 2530065 A CA2530065 A CA 2530065A CA 2530065 A1 CA2530065 A1 CA 2530065A1
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- CA
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- Prior art keywords
- semiconductor device
- semiconductor
- superlattice
- base
- base semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000004065 semiconductor Substances 0.000 title claims abstract 45
- 239000010410 layer Substances 0.000 claims abstract 19
- 239000002800 charge carrier Substances 0.000 claims abstract 6
- 239000002356 single layer Substances 0.000 claims abstract 4
- 239000000758 substrate Substances 0.000 claims abstract 4
- 239000013078 crystal Substances 0.000 claims abstract 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 2
- 239000001301 oxygen Substances 0.000 claims 2
- 229910052760 oxygen Inorganic materials 0.000 claims 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 239000002019 doping agent Substances 0.000 claims 1
- 229910052731 fluorine Inorganic materials 0.000 claims 1
- 239000011737 fluorine Substances 0.000 claims 1
- CSJDCSCTVDEHRN-UHFFFAOYSA-N methane;molecular oxygen Chemical compound C.O=O CSJDCSCTVDEHRN-UHFFFAOYSA-N 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1025—Channel region of field-effect devices
- H01L29/1029—Channel region of field-effect devices of field-effect transistors
- H01L29/1033—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure
- H01L29/1054—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure with a variation of the composition, e.g. channel with strained layer for increasing the mobility
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823807—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the channel structures, e.g. channel implants, halo or pocket implants, or channel materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/15—Structures with periodic or quasi periodic potential variation, e.g. multiple quantum wells, superlattices
- H01L29/151—Compositional structures
- H01L29/152—Compositional structures with quantum effects only in vertical direction, i.e. layered structures with quantum effects solely resulting from vertical potential variation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/15—Structures with periodic or quasi periodic potential variation, e.g. multiple quantum wells, superlattices
- H01L29/151—Compositional structures
- H01L29/152—Compositional structures with quantum effects only in vertical direction, i.e. layered structures with quantum effects solely resulting from vertical potential variation
- H01L29/155—Comprising only semiconductor materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7833—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's
Abstract
A semiconductor device includes a substrate, and at least one MOSFET adjacent the substrate. The MOSFET may include a superlattice channel that, in turn, includes a plurality of stacked groups of layers. The MOSFET may also include source and drain regions laterally adjacent the superlattice channel, and a gate overlying the superlattice channel for causing transport of charge carriers through the superlattice channel in a parallel direction relative to the stacked groups of layers. Each group of the superlattice channel may include a plurality of stacked base semiconductor monolayers defining a base semiconductor portion, and an energy band-modifying layer thereon. The energy-band modifying layer may include at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions so that the superlattice channel may have a higher charge carrier mobility in the parallel direction than would otherwise occur.
Claims (20)
1. ~A semiconductor device comprising:
a substrate; and at least one MOSFET adjacent said substrate and comprising a superlattice channel including a plurality of stacked groups of layers, and source and drain regions laterally adjacent said superlattice channel and a gate overlying said superlattice channel for causing transport of charge carriers through said superlattice channel in a parallel direction relative to the stacked groups of layers, each group of layers of said superlattice channel comprising a plurality of stacked base semiconductor monolayers defining a base semiconductor portion and an energy band-modifying layer thereon, said energy-band modifying layer comprising at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions so that said superlattice channel has a higher charge carrier mobility in the parallel direction than would otherwise be present.
a substrate; and at least one MOSFET adjacent said substrate and comprising a superlattice channel including a plurality of stacked groups of layers, and source and drain regions laterally adjacent said superlattice channel and a gate overlying said superlattice channel for causing transport of charge carriers through said superlattice channel in a parallel direction relative to the stacked groups of layers, each group of layers of said superlattice channel comprising a plurality of stacked base semiconductor monolayers defining a base semiconductor portion and an energy band-modifying layer thereon, said energy-band modifying layer comprising at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions so that said superlattice channel has a higher charge carrier mobility in the parallel direction than would otherwise be present.
2. ~A semiconductor device according to Claim 1 wherein said superlattice channel has a common energy band structure therein.
3. ~A semiconductor device according to Claim 1 wherein the charge carriers having the higher mobility comprise at least one of electrons and holes.
4. ~A semiconductor device according to Claim 1 wherein each base semiconductor portion comprises silicon.
5. ~A semiconductor device according to Claim 1 wherein each energy band-modifying layer comprises oxygen.
6. ~A semiconductor device according to Claim 1 wherein each energy band-modifying layer is a single monolayer thick.
7. ~A semiconductor device according to Claim 1 wherein each base semiconductor portion is less than eight monolayers thick.
8. ~A semiconductor device according to Claim 1 wherein each base semiconductor portion is two to six monolayers thick.
9. ~A semiconductor device according to Claim 1 wherein said superlattice further has a substantially direct energy bandgap.
10. ~A semiconductor device according to Claim 1 wherein said superlattice further comprises a base semiconductor cap layer on an uppermost group of layers.
11. ~A semiconductor device according to Claim 11 wherein said gate comprises a gate electrode layer and a gate dielectric layer between said gate electrode layer and said base semiconductor cap layer.
12. ~A semiconductor device according to Claim 1 wherein all of said base semiconductor portions are a same number of monolayers thick.
13. ~A semiconductor device according to Claim 1 wherein at least some of said base semiconductor portions are a different number of monolayers thick.
14. ~A semiconductor device according to Claim 1 wherein all of said base semiconductor portions are a different number of monolayers thick.
15. ~A semiconductor device according to Claim 1 wherein each non-semiconductor monolayer is thermally stable through deposition of a next layer.
16. ~A semiconductor device according to Claim 1 wherein each base semiconductor portion comprises a base semiconductor selected from the group consisting of Group IV
semiconductors, Group III-V semiconductors, and Group II-VI
semiconductors.
semiconductors, Group III-V semiconductors, and Group II-VI
semiconductors.
17. ~A semiconductor device according to Claim 1 wherein each energy band-modifying layer comprises a non-semiconductor selected from the group consisting of oxygen, nitrogen, fluorine, and carbon-oxygen.
18. ~A semiconductor device according to Claim 1 wherein the higher mobility results from a lower conductivity effective mass for the charge carriers in the parallel direction than would otherwise occur.
19. ~A semiconductor device according to Claim 18 wherein the lower conductivity effective mass is less than two-thirds the conductivity effective mass that would otherwise occur.
20. ~A semiconductor device according to Claim 1 wherein said superlattice further comprises at least one type of conductivity dopant therein.
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/603,696 US20040262594A1 (en) | 2003-06-26 | 2003-06-26 | Semiconductor structures having improved conductivity effective mass and methods for fabricating same |
US10/603,621 US20040266116A1 (en) | 2003-06-26 | 2003-06-26 | Methods of fabricating semiconductor structures having improved conductivity effective mass |
US10/603,621 | 2003-06-26 | ||
US10/603,696 | 2003-06-26 | ||
US10/647,069 US6897472B2 (en) | 2003-06-26 | 2003-08-22 | Semiconductor device including MOSFET having band-engineered superlattice |
US10/647,069 | 2003-08-22 | ||
PCT/US2004/020641 WO2005018005A1 (en) | 2003-06-26 | 2004-06-28 | Semiconductor device including mosfet having band-engineered superlattice |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2530065A1 true CA2530065A1 (en) | 2005-02-24 |
CA2530065C CA2530065C (en) | 2011-12-20 |
Family
ID=34119859
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA2530065A Expired - Fee Related CA2530065C (en) | 2003-06-26 | 2004-06-28 | Semiconductor device including mosfet having band-engineered superlattice |
Country Status (6)
Country | Link |
---|---|
US (13) | US7279699B2 (en) |
EP (1) | EP1644983B1 (en) |
JP (1) | JP2007521648A (en) |
AU (1) | AU2004300982B2 (en) |
CA (1) | CA2530065C (en) |
WO (1) | WO2005018005A1 (en) |
Families Citing this family (124)
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US7432524B2 (en) | 2008-10-07 |
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