CA2506728A1 - Thermal ink jet with chemical vapor deposited nozzle plate - Google Patents
Thermal ink jet with chemical vapor deposited nozzle plate Download PDFInfo
- Publication number
- CA2506728A1 CA2506728A1 CA002506728A CA2506728A CA2506728A1 CA 2506728 A1 CA2506728 A1 CA 2506728A1 CA 002506728 A CA002506728 A CA 002506728A CA 2506728 A CA2506728 A CA 2506728A CA 2506728 A1 CA2506728 A1 CA 2506728A1
- Authority
- CA
- Canada
- Prior art keywords
- heater element
- printhead
- bubble
- forming liquid
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims abstract 37
- 238000005229 chemical vapour deposition Methods 0.000 claims abstract 17
- 238000009835 boiling Methods 0.000 claims abstract 12
- 238000000034 method Methods 0.000 claims 17
- 239000000758 substrate Substances 0.000 claims 15
- 238000010438 heat treatment Methods 0.000 claims 10
- 239000011343 solid material Substances 0.000 claims 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 6
- 239000011248 coating agent Substances 0.000 claims 4
- 238000000576 coating method Methods 0.000 claims 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims 3
- 230000000737 periodic effect Effects 0.000 claims 3
- 235000012239 silicon dioxide Nutrition 0.000 claims 3
- 239000000377 silicon dioxide Substances 0.000 claims 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 3
- 239000011253 protective coating Substances 0.000 claims 2
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
- B41J2/1404—Geometrical characteristics
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J11/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
- B41J11/0095—Detecting means for copy material, e.g. for detecting or sensing presence of copy material or its leading or trailing end
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14088—Structure of heating means
- B41J2/14112—Resistive element
- B41J2/1412—Shape
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/1433—Structure of nozzle plates
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/145—Arrangement thereof
- B41J2/155—Arrangement thereof for line printing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
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- B41J2/16—Production of nozzles
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
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- B41J2/1603—Production of bubble jet print heads of the front shooter type
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B41J2/135—Nozzles
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- B41J2/162—Manufacturing of the nozzle plates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1635—Manufacturing processes dividing the wafer into individual chips
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J13/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, specially adapted for supporting or handling copy material in short lengths, e.g. sheets
- B41J13/10—Sheet holders, retainers, movable guides, or stationary guides
- B41J13/103—Sheet holders, retainers, movable guides, or stationary guides for the sheet feeding section
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14475—Structure thereof only for on-demand ink jet heads characterised by nozzle shapes or number of orifices per chamber
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14491—Electrical connection
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/20—Modules
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
- Y10T29/49083—Heater type
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
- Y10T29/49085—Thermally variable
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Abstract
There is disclosed an ink jet printhead which comprises a plurality of nozzl es and one or more heater elements (10) corresponding to each nozzle. Each heat er element (10) is configured to heat a bubble forming liquid (11) in the printhead to a temperature above its boiling point to form a gas bubble (12) therein. The generation of the bubble (12) causes the ejection of a drop of an ejectable liquid (such as ink) through the respective corresponding nozzle (3), to effect printing.The printhead has a structure that is formed by chemical vapor deposition (CVD) on which the nozzles are incorporated.</SDOA B>
Claims (50)
1. ~An ink jet printhead comprising:
a structure that is formed by chemical vapor deposition (CVD);
a plurality of nozzles incorporated on the structure; and at least one respective heater element corresponding to each nozzle, wherein each heater element is arranged for being in thermal contact with a bubble forming liquid, and each heater element is configured to heat at least part of the bubble forming liquid to a temperature above its boiling point to form a gas bubble therein thereby to cause the ejection of a drop of the bubble forming liquid through the nozzle corresponding to that heater element.
a structure that is formed by chemical vapor deposition (CVD);
a plurality of nozzles incorporated on the structure; and at least one respective heater element corresponding to each nozzle, wherein each heater element is arranged for being in thermal contact with a bubble forming liquid, and each heater element is configured to heat at least part of the bubble forming liquid to a temperature above its boiling point to form a gas bubble therein thereby to cause the ejection of a drop of the bubble forming liquid through the nozzle corresponding to that heater element.
2. ~The printhead of claim 1 being configured to support the bubble forming liquid in thermal contact with the at least one corresponding heater element, and to support the bubble forming liquid adjacent each nozzle.
3. ~The printhead of claim 1 being configured to print on a page and to be a page-width printhead.
4. ~The printhead of claim 1 wherein the CVD is of silicon nitride.
5. ~The printhead of claim 1 wherein the CVD is of silicon dioxide.
6. ~The printhead of claim 1 wherein the CVD is of oxi-nitride.
7. ~The printhead of claim 1 wherein each heater element is in the form of a suspended beam, that is suspended over at least a portion of the bubble forming liquid so as to be in thermal contact therewith.
8. ~The printhead of claim 1 wherein each heater element is configured such that an actuation energy of less than 500 nanojoules (nJ) is required to be applied to that heater element to heat that heater element sufficiently to form a said bubble in the bubble forming liquid thereby to cause the ejection of said drop.
9. ~The printhead of claim 1 configured to receive a supply of the bubble forming liquid at an ambient temperature, wherein each heater element is configured such that the energy required to be applied thereto to heat said part of the bubble forming liquid to cause the ejection of said drop is less than the energy required to heat a volume of said ejectable liquid equal to the volume of the said drop, from a temperature equal to said ambient temperature to said boiling point.
10. ~The printhead of claim 1 comprising a substrate having a substrate surface, wherein each nozzle has a nozzle aperture opening through the substrate surface, and wherein the areal density of the nozzles relative to the substrate surface exceeds 10,000 nozzles per square cm of substrate surface.
11. ~The printhead of claim 1 wherein each heater element has two opposite sides and is configured such that said gas bubble formed by that heater element is formed at both of said sides.
12. ~The printhead of claim 1 wherein the bubble which each heater element is configured to form is collapsible and has a point of collapse, and wherein each heater element is configured such that the point of collapse of a bubble formed thereby is spaced from that heater element.
13. ~The printhead of claim 1 comprising a structure being less than 10 microns thick, wherein the nozzles are incorporated in the structure.
14. ~The printhead of claim 1 comprising a plurality of nozzle chambers each corresponding to a respective nozzle, and a plurality of said heater elements being disposed within each chamber, the heater elements within each chamber being formed on different respective layers.
15. ~The printhead of claim 1 wherein each heater element is formed of solid material more than 90% of which, by atomic proportion, is constituted by at least one periodic element having an atomic number below 50.
16. ~The printhead of claim 1 wherein each heater element includes solid material and is configured for a mass of less than 10 nanograms of the solid material of that heater element to be heated to a temperature above the boiling point of the bubble forming liquid thereby to heat at least part of the bubble forming liquid to a temperature above said boiling point to cause the ejection of a said drop.
17. ~The printhead of claim 1 wherein each heater element is substantially covered by a conformal protective coating, the coating of each heater element having been applied substantially to all sides of the heater element simultaneously such that the coating is seamless.
18. ~A printer system incorporating a printhead, the printhead comprising:
a structure that is formed by chemical vapor deposition (CVD);
a plurality of nozzles incorporated on the structure; and at least one respective heater element corresponding to each nozzle, wherein each heater element is arranged for being in thermal contact with a bubble forming liquid, and each heater element is configured to heat at least part of the bubble forming liquid to a temperature above its boiling point to form a gas bubble~
therein thereby to cause the ejection of a drop of the bubble forming liquid through the nozzle corresponding to that heater element.
a structure that is formed by chemical vapor deposition (CVD);
a plurality of nozzles incorporated on the structure; and at least one respective heater element corresponding to each nozzle, wherein each heater element is arranged for being in thermal contact with a bubble forming liquid, and each heater element is configured to heat at least part of the bubble forming liquid to a temperature above its boiling point to form a gas bubble~
therein thereby to cause the ejection of a drop of the bubble forming liquid through the nozzle corresponding to that heater element.
19. ~The system of claim 18 being configured to support the bubble forming liquid in thermal contact with the at least one corresponding heater element, and to support the bubble forming liquid adjacent each nozzle.
20. ~The system of claim 18 being configured to print on a page and to be a page-width printhead.
46~
46~
21. ~The system of claim 18 wherein the CVD is of silicon nitride.
22. ~The system of claim 18 wherein the CVD is of silicon dioxide.
23. ~The system of claim 18 wherein the CVD is of oxi-nitride.
24. ~The system of claim 18 wherein each heater element is in the form of a suspended beam, that is suspended over at least a portion of the bubble forming liquid so as to be in thermal contact therewith.
25. ~The system of claim 18 wherein each heater element is configured such that an actuation energy of less than 500 nanojoules (nJ) is required to be applied to that heater element to heat that heater element sufficiently to form a said bubble in the bubble forming liquid thereby to cause the ejection of said drop.
26. ~The system of claim 18, wherein the printhead is configured to receive a supply of the bubble forming liquid at an ambient temperature, and wherein each heater element is configured such that the energy required to be applied thereto to heat said part of the bubble forming liquid to cause the ejection of said drop is less than the energy required to heat a volume of said ejectable liquid equal to the volume of the said drop, from a temperature equal to said ambient temperature to said boiling point.
27. ~The system of claim 18 comprising a substrate having a substrate surface, wherein each nozzle has a nozzle aperture opening through the substrate surface, and wherein the areal density of the nozzles relative to the substrate surface exceeds 10,000 nozzles per square cm of substrate surface.
28. The system of claim 18 wherein each heater element has two opposite sides and is configured such that said gas bubble formed by that heater element is formed at both of said sides.
29. The system of claim 18 wherein the bubble which each heater element is configured to form is collapsible and has a point of collapse, and wherein each heater element is configured such that the point of collapse of a bubble formed thereby is spaced from that heater element.
30. ~The system of claim 18 comprising a structure being less than 10 microns thick, wherein the nozzles are incorporated in the structure.
31. ~The system of claim 18 comprising a plurality of nozzle chambers each corresponding to a respective nozzle, and a plurality of said heater elements being disposed within each chamber, the heater elements within each chamber being formed on different respective layers.
32. ~The system of claim 18 wherein each heater element is formed of solid material more than 90% of which, by atomic proportion, is constituted by at least one periodic element having an atomic number below 50.
33. ~The system of claim 18 wherein each heater element includes solid material and is configured for a mass of less than 10 nanograms of the solid material of that heater element to be heated to a temperature above the boiling point of the bubble forming liquid thereby to heat at least part of the bubble forming liquid to a temperature above said boiling point to cause the ejection of a said drop.
34. ~The system of claim 18 wherein each heater element is substantially covered by a conformal protective coating, the coating of each heater element having been applied substantially to all sides of the heater element simultaneously such that the coating is seamless.
35. ~A method of ejecting a drop of an ejectable liquid from a printhead, the printhead comprising a plurality of nozzles and at least one respective heater element corresponding to each nozzle, the method comprising the steps of:
providing the printhead, including forming a structure by chemical vapor deposition (CVD), which structure defines nozzle apertures each forming part of a respective nozzle;
heating at least one heater element corresponding to a nozzle so as to heat at least part of a bubble forming liquid which is in thermal contact with the at least one heated heater element to a temperature above the boiling point of the bubble forming liquid;
generating a gas bubble in the bubble forming liquid by said step of heating;
and causing the drop of the bubble forming liquid to be ejected through the nozzle corresponding to the at least one heated heater element by said step of generating a gas bubble.
providing the printhead, including forming a structure by chemical vapor deposition (CVD), which structure defines nozzle apertures each forming part of a respective nozzle;
heating at least one heater element corresponding to a nozzle so as to heat at least part of a bubble forming liquid which is in thermal contact with the at least one heated heater element to a temperature above the boiling point of the bubble forming liquid;
generating a gas bubble in the bubble forming liquid by said step of heating;
and causing the drop of the bubble forming liquid to be ejected through the nozzle corresponding to the at least one heated heater element by said step of generating a gas bubble.
36. ~The method of claim 35 comprising, before said step of heating, the steps of:
disposing the bubble forming liquid in thermal contact with the heater elements.
disposing the bubble forming liquid in thermal contact with the heater elements.
37. ~The method of claim 35 wherein the step of providing the printhead comprises forming the structure by CVD of silicon nitride.
38. ~The method of claim 35 wherein the step of providing the printhead comprises forming the structure by CVD of silicon dioxide.
39. ~The method of claim 35 wherein the step of providing the printhead comprises forming the structure by CVD of oxi-nitride.
40. ~The method of claim 35 wherein each heater element is in the form of a suspended beam, the method further comprising, prior to the step of heating at least one heater element, the step of disposing the bubble forming liquid such that the heater elements are positioned above, and in thermal contact with, at least a portion of the bubble forming liquid.
41. ~The method of claim 35 wherein the step of heating a heating element having at least one heater element is effected by applying an actuation energy of less than 500nJ to each heater element to be heated.
42. ~The method of claim 35, comprising, prior to the step of heating at least one heater element, the step of receiving a supply of the bubble forming liquid, at an ambient temperature, to the printhead, wherein the step of heating is effected by applying heat energy to each such heater element, wherein said applied heat energy is less than the energy required to heat a volume of said bubble forming liquid equal to the volume of said drop, from a temperature equal to said ambient temperature to said boiling point.
43. The method of claim 35 wherein, in the step of providing the printhead, the printhead includes a substrate having a substrate surface, and each nozzle has a nozzle aperture opening through the substrate surface wherein the areal density of the nozzles relative to the substrate surface exceeds 10,000 nozzles per square cm of substrate surface.
44. The method of claim 35 wherein each heater element has two opposite sides and wherein, in the step of generating gas bubble, the bubble is generated at both of said sides of each heated heater element.
45. The method of claim 35 wherein, in the step of generating gas bubble, the generated bubble is collapsible and has a point of collapse, and is generated such that the point of collapse is spaced from the at least one heated heater element.
46. The method of claim 35 wherein, in the step of providing the printhead, the printhead has a structure which is less that 10 microns thick and which incorporates said nozzles.
47. The method of claim 35 wherein the printhead has a plurality of nozzle chambers each chamber corresponding to a respective nozzle and wherein the step of providing the printhead includes forming a plurality of heater elements in each chamber, such that the heater elements in each chamber are formed on different respective layers to one another.
48. The method of claim 35 wherein, in the step of providing the printhead, each heater element is formed of solid material more than 90% of which, by atomic proportion, is constituted by at least one periodic element having an atomic number below 50.
49. The method of claim 35 wherein each heater element includes solid material and wherein the step of heating at least one heater element includes heating a mass of less than
50 nanograms of the solid material of each such heater element to a temperature above the boiling point of the bubble forming liquid.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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US10/302,668 | 2002-11-23 | ||
US10/302,668 US7152958B2 (en) | 2002-11-23 | 2002-11-23 | Thermal ink jet with chemical vapor deposited nozzle plate |
PCT/AU2003/001513 WO2004048107A1 (en) | 2002-11-23 | 2003-11-17 | Thermal ink jet with chemical vapor deposited nozzle plate |
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CA2506728A1 true CA2506728A1 (en) | 2004-06-10 |
CA2506728C CA2506728C (en) | 2010-08-24 |
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CA2506728A Expired - Fee Related CA2506728C (en) | 2002-11-23 | 2003-11-17 | Thermal ink jet with chemical vapor deposited nozzle plate |
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US (21) | US7152958B2 (en) |
EP (1) | EP1567350B1 (en) |
JP (1) | JP2006507154A (en) |
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CA (1) | CA2506728C (en) |
IL (1) | IL168613A (en) |
WO (1) | WO2004048107A1 (en) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7527357B2 (en) | 1997-07-15 | 2009-05-05 | Silverbrook Research Pty Ltd | Inkjet nozzle array with individual feed channel for each nozzle |
US6557977B1 (en) * | 1997-07-15 | 2003-05-06 | Silverbrook Research Pty Ltd | Shape memory alloy ink jet printing mechanism |
US7152958B2 (en) * | 2002-11-23 | 2006-12-26 | Silverbrook Research Pty Ltd | Thermal ink jet with chemical vapor deposited nozzle plate |
GB0316934D0 (en) * | 2003-07-19 | 2003-08-27 | Xaar Technology Ltd | Method of manufacturing a component for droplet deposition apparatus |
US7052122B2 (en) * | 2004-02-19 | 2006-05-30 | Dimatix, Inc. | Printhead |
US7213908B2 (en) * | 2004-08-04 | 2007-05-08 | Eastman Kodak Company | Fluid ejector having an anisotropic surface chamber etch |
CN100393519C (en) * | 2005-07-27 | 2008-06-11 | 国际联合科技股份有限公司 | Method for making through-hole and jetting plate of ink-jetting printing head device |
JP4816070B2 (en) * | 2005-12-27 | 2011-11-16 | ブラザー工業株式会社 | Inkjet head manufacturing method |
US7658977B2 (en) | 2007-10-24 | 2010-02-09 | Silverbrook Research Pty Ltd | Method of fabricating inkjet printhead having planar nozzle plate |
JP4645668B2 (en) * | 2008-03-24 | 2011-03-09 | セイコーエプソン株式会社 | Method for manufacturing ink jet recording head |
KR100974948B1 (en) * | 2008-09-04 | 2010-08-10 | 삼성전기주식회사 | Method for Manufacturing Ink-jet Head |
US7952599B2 (en) * | 2009-05-29 | 2011-05-31 | Xerox Corporation | Heating element incorporating an array of transistor micro-heaters for digital image marking |
US8323993B2 (en) * | 2009-07-27 | 2012-12-04 | Zamtec Limited | Method of fabricating inkjet printhead assembly having backside electrical connections |
WO2011056682A1 (en) | 2009-10-27 | 2011-05-12 | The University Of British Columbia | Reverse head group lipids, lipid particle compositions comprising reverse headgroup lipids, and methods for the delivery of nucleic acids |
ES2544078T3 (en) | 2010-08-27 | 2015-08-27 | 3M Innovative Properties Company | Protective coating composition |
US8313183B2 (en) | 2010-11-05 | 2012-11-20 | Xerox Corporation | Immersed high surface area heater for a solid ink reservoir |
US10500850B2 (en) * | 2014-10-29 | 2019-12-10 | Hewlett-Packard Development Company, L.P. | Fluid ejection device |
WO2020013822A1 (en) * | 2018-07-11 | 2020-01-16 | Hewlett-Packard Development Company, L.P. | Annealing devices including thermal heaters |
Family Cites Families (96)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE349676B (en) | 1971-01-11 | 1972-10-02 | N Stemme | |
JPS5557477A (en) | 1978-10-26 | 1980-04-28 | Canon Inc | Recording media discharge recording device by thermal energy |
FR2479610A1 (en) | 1980-03-28 | 1981-10-02 | Cgr Ultrasonic | LINEAR EBONING CIRCUIT OF VOLTAGE PULSES WITH ADJUSTABLE THRESHOLD CONDITION AND ECHOGRAPHER COMPRISING SUCH A DEVICE |
JPH064324B2 (en) * | 1984-06-11 | 1994-01-19 | キヤノン株式会社 | Liquid jet recording head |
JPS6294347A (en) * | 1985-10-22 | 1987-04-30 | Ricoh Seiki Kk | Thermal ink jet printing head |
US4965594A (en) * | 1986-02-28 | 1990-10-23 | Canon Kabushiki Kaisha | Liquid jet recording head with laminated heat resistive layers on a support member |
JPH0729431B2 (en) * | 1986-03-04 | 1995-04-05 | キヤノン株式会社 | How to make a liquid jet recording head |
US4894664A (en) * | 1986-04-28 | 1990-01-16 | Hewlett-Packard Company | Monolithic thermal ink jet printhead with integral nozzle and ink feed |
EP0244214B1 (en) * | 1986-04-28 | 1991-07-10 | Hewlett-Packard Company | Thermal ink jet printhead |
DE3717294C2 (en) * | 1986-06-10 | 1995-01-26 | Seiko Epson Corp | Ink jet recording head |
US4786357A (en) * | 1987-11-27 | 1988-11-22 | Xerox Corporation | Thermal ink jet printhead and fabrication method therefor |
DE3826808A1 (en) * | 1988-08-06 | 1990-02-22 | Hoechst Ag | METHOD FOR THE PRODUCTION OF FLUORINATED CARBONIC ACID FLUORIDES |
EP0383019B1 (en) * | 1989-01-13 | 1997-11-05 | Canon Kabushiki Kaisha | Ink jet recording head, ink jet recording apparatus and wiping method therefor |
JP2849109B2 (en) * | 1989-03-01 | 1999-01-20 | キヤノン株式会社 | Method of manufacturing liquid jet recording head and liquid jet recording head manufactured by the method |
US6019457A (en) * | 1991-01-30 | 2000-02-01 | Canon Information Systems Research Australia Pty Ltd. | Ink jet print device and print head or print apparatus using the same |
AU657930B2 (en) | 1991-01-30 | 1995-03-30 | Canon Kabushiki Kaisha | Nozzle structures for bubblejet print devices |
US5359504A (en) * | 1991-04-03 | 1994-10-25 | Kabushiki Kaisha Toshiba | Magnetic disk apparatus |
EP0925933B1 (en) * | 1991-04-20 | 2002-12-11 | Canon Kabushiki Kaisha | Substrate for recording head, recording head and method for producing same |
JPH05124200A (en) * | 1991-11-06 | 1993-05-21 | Fuji Xerox Co Ltd | Ink jet head and its manufacture |
JPH05131636A (en) | 1991-11-11 | 1993-05-28 | Canon Inc | Liquid jet recording head and production thereof |
US5331642A (en) * | 1992-09-01 | 1994-07-19 | International Business Machines Corporation | Management of FDDI physical link errors |
JPH06188108A (en) | 1992-12-21 | 1994-07-08 | Canon Inc | Manufacture of thin-film resistor, attachment-repellent plate for film deposition equipment and film deposition equipment |
JPH0778412A (en) * | 1993-07-13 | 1995-03-20 | Sony Corp | Device and method for recording/reproducing and device and method for reproducing |
JP3157964B2 (en) | 1993-08-30 | 2001-04-23 | キヤノン株式会社 | INK JET PRINT HEAD, INK JET PRINTING APPARATUS HAVING THE PRINT HEAD |
CA2160393C (en) * | 1994-12-30 | 1999-05-04 | Anwar Elwalid | Method for integrated congestion control in networks |
US5466079A (en) * | 1995-01-27 | 1995-11-14 | Hewlett-Packard Company | Apparatus for detecting media leading edge and method for substantially eliminating pick skew in a media handling subsystem |
US5992769A (en) | 1995-06-09 | 1999-11-30 | The Regents Of The University Of Michigan | Microchannel system for fluid delivery |
CA2181206C (en) * | 1995-07-24 | 2001-03-13 | Anwar Elwalid | A method for admission control and routing by allocating network resources in network nodes |
JPH0948121A (en) * | 1995-08-07 | 1997-02-18 | Canon Inc | Printing head |
US6190492B1 (en) * | 1995-10-06 | 2001-02-20 | Lexmark International, Inc. | Direct nozzle plate to chip attachment |
US6003977A (en) * | 1996-02-07 | 1999-12-21 | Hewlett-Packard Company | Bubble valving for ink-jet printheads |
US5706041A (en) | 1996-03-04 | 1998-01-06 | Xerox Corporation | Thermal ink-jet printhead with a suspended heating element in each ejector |
GB9608816D0 (en) * | 1996-04-30 | 1996-07-03 | British Telecomm | Allocating communication traffic |
JPH1017803A (en) * | 1996-07-08 | 1998-01-20 | Fuji Xerox Co Ltd | Ink jet recording ink and ink jet recording method |
US5761809A (en) * | 1996-08-29 | 1998-06-09 | Xerox Corporation | Process for substituting haloalkylated polymers with unsaturated ester, ether, and alkylcarboxymethylene groups |
US6183067B1 (en) | 1997-01-21 | 2001-02-06 | Agilent Technologies | Inkjet printhead and fabrication method for integrating an actuator and firing chamber |
US6295409B1 (en) * | 1997-03-31 | 2001-09-25 | Kabushiki Kaisha Toshiba | Disk apparatus |
JP3372821B2 (en) * | 1997-04-15 | 2003-02-04 | キヤノン株式会社 | Ink jet device, temperature estimation method and control method for ink jet head for the device |
US7337532B2 (en) | 1997-07-15 | 2008-03-04 | Silverbrook Research Pty Ltd | Method of manufacturing micro-electromechanical device having motion-transmitting structure |
US6264849B1 (en) * | 1997-07-15 | 2001-07-24 | Silverbrook Research Pty Ltd | Method of manufacture of a bend actuator direct ink supply ink jet printer |
US6557977B1 (en) * | 1997-07-15 | 2003-05-06 | Silverbrook Research Pty Ltd | Shape memory alloy ink jet printing mechanism |
US6180427B1 (en) * | 1997-07-15 | 2001-01-30 | Silverbrook Research Pty. Ltd. | Method of manufacture of a thermally actuated ink jet including a tapered heater element |
US6241905B1 (en) * | 1997-07-15 | 2001-06-05 | Silverbrook Research Pty Ltd | Method of manufacture of a curling calyx thermoelastic ink jet printer |
US6178147B1 (en) * | 1997-08-22 | 2001-01-23 | Sony Corporation | Recording method, recording apparatus, reproducing method and reproducing apparatus |
US6155675A (en) * | 1997-08-28 | 2000-12-05 | Hewlett-Packard Company | Printhead structure and method for producing the same |
US6219311B1 (en) * | 1997-09-05 | 2001-04-17 | Sony Corporation | Disc recording method and device, and disc like recording medium |
US6322201B1 (en) | 1997-10-22 | 2001-11-27 | Hewlett-Packard Company | Printhead with a fluid channel therethrough |
US6164757A (en) * | 1997-10-30 | 2000-12-26 | Eastman Kodak Company | Apparatus for printing proof image and producing lithographic plate |
US6331259B1 (en) | 1997-12-05 | 2001-12-18 | Canon Kabushiki Kaisha | Method for manufacturing ink jet recording heads |
US6055344A (en) * | 1998-02-18 | 2000-04-25 | Hewlett-Packard Company | Fabrication of a total internal reflection optical switch with vertical fluid fill-holes |
US6272117B1 (en) * | 1998-02-20 | 2001-08-07 | Gwcom, Inc. | Digital sensing multi access protocol |
US6204182B1 (en) * | 1998-03-02 | 2001-03-20 | Hewlett-Packard Company | In-situ fluid jet orifice |
US6126277A (en) | 1998-04-29 | 2000-10-03 | Hewlett-Packard Company | Non-kogating, low turn on energy thin film structure for very low drop volume thermal ink jet pens |
US6076912A (en) * | 1998-06-03 | 2000-06-20 | Lexmark International, Inc. | Thermally conductive, corrosion resistant printhead structure |
CA2242191A1 (en) * | 1998-06-30 | 1999-12-30 | Northern Telecom Limited | A large scale communications network having a fully meshed optical core transport network |
ITTO980592A1 (en) * | 1998-07-06 | 2000-01-06 | Olivetti Lexikon Spa | INKJET PRINTING HEAD WITH LARGE SILICON PLATE AND RELATED MANUFACTURING PROCESS |
WO2000023279A1 (en) | 1998-10-16 | 2000-04-27 | Silverbrook Research Pty. Limited | Improvements relating to inkjet printers |
JP2000127397A (en) | 1998-10-28 | 2000-05-09 | Casio Comput Co Ltd | Thermal ink jet head |
JP3762172B2 (en) | 1998-12-03 | 2006-04-05 | キヤノン株式会社 | LIQUID DISCHARGE HEAD, HEAD CARTRIDGE WITH LIQUID DISCHARGE HEAD, LIQUID DISCHARGE DEVICE, AND METHOD FOR PRODUCING THE LIQUID DISCHARGE HEAD |
US6721271B1 (en) * | 1999-02-04 | 2004-04-13 | Nortel Networks Limited | Rate-controlled multi-class high-capacity packet switch |
US6400863B1 (en) * | 1999-06-11 | 2002-06-04 | General Instrument | Monitoring system for a hybrid fiber cable network |
US6299294B1 (en) | 1999-07-29 | 2001-10-09 | Hewlett-Packard Company | High efficiency printhead containing a novel oxynitride-based resistor system |
US6721315B1 (en) * | 1999-09-30 | 2004-04-13 | Alcatel | Control architecture in optical burst-switched networks |
US6296344B1 (en) * | 1999-12-22 | 2001-10-02 | Eastman Kodak Company | Method for replenishing coatings on printhead nozzle plate |
US6282192B1 (en) * | 2000-01-27 | 2001-08-28 | Cisco Technology, Inc. | PSTN fallback using dial on demand routing scheme |
US20020063924A1 (en) * | 2000-03-02 | 2002-05-30 | Kimbrough Mahlon D. | Fiber to the home (FTTH) multimedia access system with reflection PON |
US6409316B1 (en) | 2000-03-28 | 2002-06-25 | Xerox Corporation | Thermal ink jet printhead with crosslinked polymer layer |
US6674717B1 (en) * | 2000-03-30 | 2004-01-06 | Network Physics, Inc. | Method for reducing packet loss and increasing internet flow by feedback control |
WO2001074592A1 (en) * | 2000-03-31 | 2001-10-11 | Fujitsu Limited | Multiple-nozzle ink-jet head and method of manufacture thereof |
US6482574B1 (en) | 2000-04-20 | 2002-11-19 | Hewlett-Packard Co. | Droplet plate architecture in ink-jet printheads |
US20020018263A1 (en) * | 2000-06-08 | 2002-02-14 | An Ge | Scalable WDM optical IP router architecture |
FR2811588B1 (en) | 2000-07-13 | 2002-10-11 | Centre Nat Rech Scient | THERMAL INJECTION AND DOSING HEAD, MANUFACTURING METHOD THEREOF, AND FUNCTIONALIZATION OR ADDRESSING SYSTEM COMPRISING THE SAME |
US7215887B2 (en) * | 2000-08-15 | 2007-05-08 | Lockheed Martin Corporation | Method and apparatus for infrared data communication |
US6622373B1 (en) * | 2000-08-28 | 2003-09-23 | Xiang Zheng Tu | High efficiency monolithic thermal ink jet print head |
US6842424B1 (en) * | 2000-09-05 | 2005-01-11 | Microsoft Corporation | Methods and systems for alleviating network congestion |
US6561627B2 (en) | 2000-11-30 | 2003-05-13 | Eastman Kodak Company | Thermal actuator |
KR100506079B1 (en) | 2000-12-05 | 2005-08-04 | 삼성전자주식회사 | Bubble-jet type inkjet print head |
EP1215048B1 (en) * | 2000-12-15 | 2007-06-06 | Samsung Electronics Co. Ltd. | Bubble-jet type ink-jet printhead and manufacturing method thereof |
KR100506082B1 (en) | 2000-12-18 | 2005-08-04 | 삼성전자주식회사 | Method for manufacturing ink-jet print head having semispherical ink chamber |
US6382782B1 (en) * | 2000-12-29 | 2002-05-07 | Eastman Kodak Company | CMOS/MEMS integrated ink jet print head with oxide based lateral flow nozzle architecture and method of forming same |
JP2002355977A (en) * | 2001-02-08 | 2002-12-10 | Canon Inc | Liquid repellent member, ink jet head comprising it, their manufacturing methods and method for supplying ink |
US7013084B2 (en) * | 2001-02-28 | 2006-03-14 | Lambda Opticalsystems Corporation | Multi-tiered control architecture for adaptive optical networks, and methods and apparatus therefor |
US6595622B2 (en) * | 2001-03-29 | 2003-07-22 | Fuji Photo Film Co., Ltd. | Ink jet printhead with thick substrate providing reduced warpage |
US7965729B2 (en) * | 2001-05-23 | 2011-06-21 | Polytechnic University | Transferring data such as files |
US20020180201A1 (en) * | 2001-06-01 | 2002-12-05 | Nye Theodore W. | Vehicle occupant safety system with an electric motor driven pretensioner |
US20020186433A1 (en) * | 2001-06-12 | 2002-12-12 | Manav Mishra | Routing and switching in a hybrid network |
US7631242B2 (en) * | 2001-06-22 | 2009-12-08 | Broadcom Corporation | System, method and computer program product for mitigating burst noise in a communications system |
US7089478B2 (en) * | 2001-06-22 | 2006-08-08 | Broadcom Corporation | FEC block reconstruction system, method and computer program product for mitigating burst noise in a communications system |
US20030039007A1 (en) * | 2001-08-15 | 2003-02-27 | Nayna Networks, Inc. (A Delaware Corporation) | Method and system for route control and redundancy for optical network switching applications |
KR100395529B1 (en) * | 2001-10-30 | 2003-08-25 | 삼성전자주식회사 | Ink-jet print head and method for manufacturing the same |
US6543879B1 (en) * | 2001-10-31 | 2003-04-08 | Hewlett-Packard Company | Inkjet printhead assembly having very high nozzle packing density |
JP4373655B2 (en) * | 2002-09-19 | 2009-11-25 | 株式会社エヌ・ティ・ティ・ドコモ | Packet communication terminal, packet communication system, and packet communication method |
US6669333B1 (en) | 2002-11-23 | 2003-12-30 | Silverbrook Research Pty Ltd | Stacked heater elements in a thermal ink jet printhead |
US7152958B2 (en) * | 2002-11-23 | 2006-12-26 | Silverbrook Research Pty Ltd | Thermal ink jet with chemical vapor deposited nozzle plate |
US6692108B1 (en) * | 2002-11-23 | 2004-02-17 | Silverbrook Research Pty Ltd. | High efficiency thermal ink jet printhead |
US7334876B2 (en) * | 2002-11-23 | 2008-02-26 | Silverbrook Research Pty Ltd | Printhead heaters with small surface area |
-
2002
- 2002-11-23 US US10/302,668 patent/US7152958B2/en not_active Expired - Lifetime
-
2003
- 2003-11-17 JP JP2004554056A patent/JP2006507154A/en active Pending
- 2003-11-17 WO PCT/AU2003/001513 patent/WO2004048107A1/en active Application Filing
- 2003-11-17 US US10/534,804 patent/US7322686B2/en active Active
- 2003-11-17 KR KR1020057009003A patent/KR20050086751A/en not_active Application Discontinuation
- 2003-11-17 CN CNB2003801038824A patent/CN100386203C/en not_active Expired - Fee Related
- 2003-11-17 AU AU2003275798A patent/AU2003275798B2/en not_active Ceased
- 2003-11-17 EP EP03811692A patent/EP1567350B1/en not_active Expired - Lifetime
- 2003-11-17 CA CA2506728A patent/CA2506728C/en not_active Expired - Fee Related
-
2004
- 2004-02-17 US US10/778,139 patent/US7188419B2/en not_active Expired - Fee Related
- 2004-02-17 US US10/778,065 patent/US7168166B2/en not_active Expired - Lifetime
- 2004-02-17 US US10/778,091 patent/US7222943B2/en not_active Expired - Lifetime
-
2005
- 2005-03-16 US US11/080,969 patent/US7195338B2/en not_active Expired - Fee Related
- 2005-03-16 US US11/080,497 patent/US7252775B2/en not_active Expired - Lifetime
- 2005-05-16 IL IL168613A patent/IL168613A/en active IP Right Grant
-
2007
- 2007-02-15 US US11/706,304 patent/US7469995B2/en not_active Expired - Fee Related
- 2007-02-15 US US11/706,321 patent/US7587822B2/en not_active Expired - Fee Related
- 2007-02-15 US US11/706,324 patent/US7631427B2/en not_active Expired - Fee Related
- 2007-02-15 US US11/706,326 patent/US7587823B2/en not_active Expired - Fee Related
- 2007-07-01 US US11/772,239 patent/US7658472B2/en not_active Expired - Fee Related
- 2007-12-12 US US11/955,028 patent/US7562966B2/en not_active Expired - Fee Related
-
2008
- 2008-11-23 US US12/276,362 patent/US7669972B2/en not_active Expired - Fee Related
-
2009
- 2009-06-10 US US12/482,422 patent/US7922294B2/en not_active Expired - Fee Related
- 2009-08-17 US US12/542,664 patent/US7946026B2/en not_active Expired - Fee Related
- 2009-08-17 US US12/542,612 patent/US20090300915A1/en not_active Abandoned
- 2009-11-19 US US12/622,229 patent/US8006384B2/en not_active Expired - Fee Related
-
2010
- 2010-01-20 US US12/690,838 patent/US7984971B2/en not_active Expired - Fee Related
- 2010-02-11 US US12/704,504 patent/US7950776B2/en not_active Expired - Fee Related
-
2011
- 2011-04-28 US US13/095,855 patent/US20110197443A1/en not_active Abandoned
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