CA2448697A1 - Method of making a passivated surface - Google Patents

Method of making a passivated surface Download PDF

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Publication number
CA2448697A1
CA2448697A1 CA002448697A CA2448697A CA2448697A1 CA 2448697 A1 CA2448697 A1 CA 2448697A1 CA 002448697 A CA002448697 A CA 002448697A CA 2448697 A CA2448697 A CA 2448697A CA 2448697 A1 CA2448697 A1 CA 2448697A1
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CA
Canada
Prior art keywords
silicon
reactive gas
product
metal surface
group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002448697A
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French (fr)
Other versions
CA2448697C (en
Inventor
Tracey Jacksier
Robert Benesch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
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Individual
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Priority claimed from US10/157,466 external-priority patent/US20030017359A1/en
Application filed by Individual filed Critical Individual
Publication of CA2448697A1 publication Critical patent/CA2448697A1/en
Application granted granted Critical
Publication of CA2448697C publication Critical patent/CA2448697C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C1/00—Pressure vessels, e.g. gas cylinder, gas tank, replaceable cartridge
    • F17C1/10—Pressure vessels, e.g. gas cylinder, gas tank, replaceable cartridge with provision for protection against corrosion, e.g. due to gaseous acid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C3/00—Vessels not under pressure
    • F17C3/12—Vessels not under pressure with provision for protection against corrosion, e.g. due to gaseous acid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/10—Composition for standardization, calibration, simulation, stabilization, preparation or preservation; processes of use in preparation for chemical testing
    • Y10T436/100833—Simulative of a gaseous composition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/15—Inorganic acid or base [e.g., hcl, sulfuric acid, etc. ]
    • Y10T436/156666—Sulfur containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/18—Sulfur containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/18—Sulfur containing
    • Y10T436/182—Organic or sulfhydryl containing [e.g., mercaptan, hydrogen, sulfide, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/18—Sulfur containing
    • Y10T436/182—Organic or sulfhydryl containing [e.g., mercaptan, hydrogen, sulfide, etc.]
    • Y10T436/184—Only hydrogen sulfide
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/18—Sulfur containing
    • Y10T436/186—Sulfur dioxide
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/18—Sulfur containing
    • Y10T436/188—Total or elemental sulfur

Abstract

Methods of passivating a metal surface are described, the methods comprising the step of i) exposing the metal surface ti a silicon-containing passivatio n material; ii) evacuating the metal surface, iii) exposing the treated surfac e to a gas composition having a concentration of reactive gas that is greater than an intended reactive gas concentration of gas to be transported by the metal surface; iv) evacuating the metal surface to remove substantially all of the gas composition to enable maintenance of an increased shelf-life, low concentration reactive gas at an intended concentration; and v) exposing the metal surface to the reactive gas at the intended reactive gas concentration . Manufactured products, high stability fluids, and methods of making same are also described.

Claims (21)

1. A manufactured product comprising a gas having an extended shelf-life, the product comprising:
a) a container having an internal space and a clean and passivated internal metal surface;
b) a composition comprising a reactive gas contained within the internal space and in contact with the clean passivated internal metal surface, the reactive gas having a concentration that is substantially maintained; and c) the clean and passivated internal metal surface comprising:
1) the reaction product of a silicon-containing material and an oxygen-containing material, and
2) an effective amount of the reactive gas to form the passivated internal metal surface, the effective amount being many times the intended concentration of reactive gas that is substantially maintained.

2. The product of claim 1 wherein said reactive gas is selected from the group consisting of nitrous oxide, nitric oxide, hydrogen chloride, chlorine, boron trichloride, and acid gases that will not react with a silicon-containing material.
3. The product of claim 2 wherein said acid gas is selected from the group consisting of carbondisulfide, carbonylsulfide, and compounds within formula (I):

Y-S-X (I) wherein S is sulfur, and X and Y are the same or different and are independently selected from the group consisting of hydrogen, alkyl, aryl, oxygen, hydroxyl, amino and aminosilane.
4. The product of claim 1 wherein said passivated internal surface is a passivated metal.
5. The product of claim 4 wherein said metal is selected from the group consisting of aluminum, aluminum alloys, steel, iron and combinations thereof.
6. The product of claim 1 wherein said silicon-containing material is selected from the group consisting of compounds within the general formula:

SiR1R2R3R4 wherein R1, R2, R3, and R4 are independently selected from the group consisting of hydrogen, halogen, alkyl, aryl, amine, halogenated alkyl, and halogenated aryl.
7. The product of claim 6 wherein said compound is a methyl-containing silane.
8. The product of claim 7 wherein said methyl-containing silane is selected from the group consisting of methylsilane, dimethylsilane, trimethylsilane and tetramethylsilane.
9. The product of claim 1 wherein the composition has a reactive gas concentration of about 1000 ppb and which does not vary by more than +/- 10 percent.
10. The product of claim 1 wherein the composition has a reactive gas concentration of about 500 ppb and does not vary by more than +/-15 percent.
11. The product of claim 1 wherein the composition has a reactive gas concentration of about 100 ppb and does not vary by more than +/-20 percent.
12. The product of claim 1 wherein the composition comprises a single reactive gas mixed with a gas selected from the group consisting of an inert gas, a hydrocarbon gas, and mixtures thereof.
13. A method of making the manufactured product of claim 1 from a clean container, the method comprising the steps of:
i) exposing an internal metal surface of a container to a first fluid composition comprising a silicon-containing compound for a time sufficient to allow at least some of the silicon-containing compound to react with an oxygen-containing compound present to form a silicon-treated surface on at least some of the internal metal surface, the silicon-containing compound selected from the group consisting of compounds within the general formula:

SiR1R2R3R4 wherein R1, R2, R3, and R4 are the same or different and are independently selected from the group consisting of hydrogen, halogen, alkyl, aryl, amine, halogenated alkyl, and halogenated aryl;
ii) evacuating the container for a time sufficient to remove substantially all silicon-containing compound that has not reacted with the oxygen-containing compound to form the silicon-treated surface;
iii) exposing the silicon-treated surface to a second fluid composition, the second fluid composition comprising a reactive gas having a concentration that is greater than an intended reactive gas concentration of the manufactured product;
iv) evacuating the container for a time sufficient to remove substantially all of the second fluid composition, thus forming said passivated internal metal surface in the container; and v) filling the container with a third fluid composition having the intended reactive gas concentration for the manufactured product.
14. The method of claim 13 wherein the silicon-containing compound is selected from the group consisting of silane and a methyl-containing silane.
15. The method of claim 14 wherein said methyl-containing silane is selected from the group consisting of methylsilane, dimethylsilane, trimethylsilane and tetramethylsilane.
16. The method of claim 13 wherein the second fluid composition has a concentration of reactive gas at least 10 times the intended reactive gas concentration.
17. The method of claim 13 wherein steps i) and ii) are repeated prior to step iii).
18. The method of claim 13 wherein the composition of the silicon-containing gas used in step iii) ranges from about 100 ppm to 100 percent.
19. The method of claim 13 wherein during step i) the first fluid composition is heated to a temperature of not more than 74°C.
20. The method of claim 13 wherein during step iii) the second fluid composition is heated to a temperature of not more than 74°C.
21. A method of making a device having a passivated metal surface, the method comprising the steps of:
i) exposing a metal surface to a silicon-containing compound selected from the group consisting of compounds within the general formula:

SiR1R2R3R4 wherein R1, R2, R3, and R4 are independently selected from the group consisting of hydrogen, halogen, amine, alkyl, aryl, halogenated alkyl, and halogenated aryl, for a time sufficient to form a silicon treated surface on at least some of the metal surface;
ii) evacuating the metal surface for a time sufficient to remove silicon-containing material that has not reacted with oxygen-containing compounds to form a silicon-treated surface;
iii) exposing the silicon-treated surface to a gas composition, the gas composition having a concentration of reactive gas that is greater than an intended reactive gas concentration of gas to be transported by the metal surface; and iv) evacuating the silicon-treated surface for a time sufficient to remove substantially all of said gas composition and thus form a passivated metal surface. A
CA2448697A 2001-07-17 2002-07-15 Method of making a passivated surface Expired - Fee Related CA2448697C (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US30601401P 2001-07-17 2001-07-17
US60/306,014 2001-07-17
US10/157,466 US20030017359A1 (en) 2001-07-17 2002-05-29 Increased stability low concentration gases, products comprising same, and methods of making same
US10/157,466 2002-05-29
PCT/IB2002/002770 WO2003008664A2 (en) 2001-07-17 2002-07-15 Method of making a passivated surface

Publications (2)

Publication Number Publication Date
CA2448697A1 true CA2448697A1 (en) 2003-01-30
CA2448697C CA2448697C (en) 2012-09-25

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ID=26854161

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2448697A Expired - Fee Related CA2448697C (en) 2001-07-17 2002-07-15 Method of making a passivated surface

Country Status (10)

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US (3) US7794841B2 (en)
EP (1) EP1412551B1 (en)
JP (1) JP2004536227A (en)
KR (1) KR20040030684A (en)
CN (1) CN1223701C (en)
AT (1) ATE500350T1 (en)
AU (1) AU2002317422A1 (en)
CA (1) CA2448697C (en)
DE (1) DE60239339D1 (en)
WO (1) WO2003008664A2 (en)

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