CA2436207A1 - Method of manufacturing microneedle structures using soft lithography and photolithography - Google Patents
Method of manufacturing microneedle structures using soft lithography and photolithography Download PDFInfo
- Publication number
- CA2436207A1 CA2436207A1 CA002436207A CA2436207A CA2436207A1 CA 2436207 A1 CA2436207 A1 CA 2436207A1 CA 002436207 A CA002436207 A CA 002436207A CA 2436207 A CA2436207 A CA 2436207A CA 2436207 A1 CA2436207 A1 CA 2436207A1
- Authority
- CA
- Canada
- Prior art keywords
- micromold
- photolithography
- soft lithography
- manufacturing
- structures
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/14—Devices for taking samples of blood ; Measuring characteristics of blood in vivo, e.g. gas concentration within the blood, pH-value of blood
- A61B5/1405—Devices for taking blood samples
- A61B5/1411—Devices for taking blood samples by percutaneous method, e.g. by lancet
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/145—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue
- A61B5/14507—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue specially adapted for measuring characteristics of body fluids other than blood
- A61B5/1451—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue specially adapted for measuring characteristics of body fluids other than blood for interstitial fluid
- A61B5/14514—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue specially adapted for measuring characteristics of body fluids other than blood for interstitial fluid using means for aiding extraction of interstitial fluid, e.g. microneedles or suction
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/15—Devices for taking samples of blood
- A61B5/150007—Details
- A61B5/150015—Source of blood
- A61B5/150022—Source of blood for capillary blood or interstitial fluid
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/15—Devices for taking samples of blood
- A61B5/150007—Details
- A61B5/150206—Construction or design features not otherwise provided for; manufacturing or production; packages; sterilisation of piercing element, piercing device or sampling device
- A61B5/150274—Manufacture or production processes or steps for blood sampling devices
- A61B5/150282—Manufacture or production processes or steps for blood sampling devices for piercing elements, e.g. blade, lancet, canula, needle
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/15—Devices for taking samples of blood
- A61B5/150007—Details
- A61B5/150374—Details of piercing elements or protective means for preventing accidental injuries by such piercing elements
- A61B5/150381—Design of piercing elements
- A61B5/150412—Pointed piercing elements, e.g. needles, lancets for piercing the skin
- A61B5/150419—Pointed piercing elements, e.g. needles, lancets for piercing the skin comprising means for capillary action
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/15—Devices for taking samples of blood
- A61B5/150977—Arrays of piercing elements for simultaneous piercing
- A61B5/150984—Microneedles or microblades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00111—Tips, pillars, i.e. raised structures
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
- A61M2037/0038—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles having a channel at the side surface
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
- A61M2037/0053—Methods for producing microneedles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/05—Microfluidics
- B81B2201/055—Microneedles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/03—Processes for manufacturing substrate-free structures
- B81C2201/034—Moulding
Abstract
A method for manufacturing microneedle structures is disclosed using soft lithography and photolithography, in which micromold structures made of a photoresist material or PDMS are created. The micromold manufacturing occurs quite quickly, using inexpensive materials and processes. Once the molds are available, using moldable materials such as polymers, microneedle arrays can be molded or embossed in relatively fast procedures. In some cases a sacrificial layer is provided between the forming micromold and its substrate layer, for ease of separation. The microneedles themselves can be solid projections, hollow "microtubes," or shallow "microcups." Electrodes can be formed on the microneedle arrays, including individual electrodes per hollow microtube.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/808,534 | 2001-03-14 | ||
US09/808,534 US6663820B2 (en) | 2001-03-14 | 2001-03-14 | Method of manufacturing microneedle structures using soft lithography and photolithography |
PCT/US2002/007543 WO2002072189A2 (en) | 2001-03-14 | 2002-03-13 | Method of manufacturing microneedle structures using soft lithography and photolithography |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2436207A1 true CA2436207A1 (en) | 2002-09-19 |
CA2436207C CA2436207C (en) | 2008-12-02 |
Family
ID=25199058
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002436207A Expired - Lifetime CA2436207C (en) | 2001-03-14 | 2002-03-13 | Method of manufacturing microneedle structures using soft lithography and photolithography |
Country Status (8)
Country | Link |
---|---|
US (2) | US6663820B2 (en) |
EP (1) | EP1377338B9 (en) |
JP (1) | JP4778669B2 (en) |
AT (1) | ATE403465T1 (en) |
CA (1) | CA2436207C (en) |
DE (1) | DE60228065D1 (en) |
ES (1) | ES2311615T3 (en) |
WO (1) | WO2002072189A2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8383027B2 (en) | 2008-03-12 | 2013-02-26 | Fujifilm Corporation | Method of fabricating a template for a concave array mold, a concave array mold and a needle array sheet |
Families Citing this family (246)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6503231B1 (en) * | 1998-06-10 | 2003-01-07 | Georgia Tech Research Corporation | Microneedle device for transport of molecules across tissue |
US6743211B1 (en) * | 1999-11-23 | 2004-06-01 | Georgia Tech Research Corporation | Devices and methods for enhanced microneedle penetration of biological barriers |
US6611707B1 (en) | 1999-06-04 | 2003-08-26 | Georgia Tech Research Corporation | Microneedle drug delivery device |
US6256533B1 (en) * | 1999-06-09 | 2001-07-03 | The Procter & Gamble Company | Apparatus and method for using an intracutaneous microneedle array |
US7108681B2 (en) * | 2000-10-16 | 2006-09-19 | Corium International, Inc. | Microstructures for delivering a composition cutaneously to skin |
US7131987B2 (en) * | 2000-10-16 | 2006-11-07 | Corium International, Inc. | Microstructures and method for treating and conditioning skin which cause less irritation during exfoliation |
US7828827B2 (en) * | 2002-05-24 | 2010-11-09 | Corium International, Inc. | Method of exfoliation of skin using closely-packed microstructures |
US9302903B2 (en) * | 2000-12-14 | 2016-04-05 | Georgia Tech Research Corporation | Microneedle devices and production thereof |
US6663820B2 (en) * | 2001-03-14 | 2003-12-16 | The Procter & Gamble Company | Method of manufacturing microneedle structures using soft lithography and photolithography |
US6753067B2 (en) * | 2001-04-23 | 2004-06-22 | Sipix Imaging, Inc. | Microcup compositions having improved flexure resistance and release properties |
US6591124B2 (en) | 2001-05-11 | 2003-07-08 | The Procter & Gamble Company | Portable interstitial fluid monitoring system |
US6793632B2 (en) * | 2001-06-12 | 2004-09-21 | Lifescan, Inc. | Percutaneous biological fluid constituent sampling and measurement devices and methods |
US6881203B2 (en) * | 2001-09-05 | 2005-04-19 | 3M Innovative Properties Company | Microneedle arrays and methods of manufacturing the same |
US20040087992A1 (en) * | 2002-08-09 | 2004-05-06 | Vladimir Gartstein | Microstructures for delivering a composition cutaneously to skin using rotatable structures |
US20030059344A1 (en) * | 2001-09-24 | 2003-03-27 | Brady Michael D. | Pin plate for use in array printing and method for making the pin plate |
US7146221B2 (en) * | 2001-11-16 | 2006-12-05 | The Regents Of The University Of California | Flexible electrode array for artifical vision |
EP1463560B1 (en) * | 2001-12-19 | 2009-02-11 | ALZA Corporation | Reservoir housing having a conductive region integrally formed therein |
US6908453B2 (en) * | 2002-01-15 | 2005-06-21 | 3M Innovative Properties Company | Microneedle devices and methods of manufacture |
US6743242B2 (en) * | 2002-02-13 | 2004-06-01 | Qi-Zhao Guo | Dual-use suturing device for suturing wound induced from celioscope surgery |
US6716754B2 (en) * | 2002-03-12 | 2004-04-06 | Micron Technology, Inc. | Methods of forming patterns and molds for semiconductor constructions |
US20030186405A1 (en) * | 2002-04-01 | 2003-10-02 | The Ohio State University Research Foundation | Micro/nano-embossing process and useful applications thereof |
US7060192B2 (en) * | 2002-05-09 | 2006-06-13 | Lifescan, Inc. | Methods of fabricating physiological sample collection devices |
US7125510B2 (en) * | 2002-05-15 | 2006-10-24 | Zhili Huang | Microstructure fabrication and microsystem integration |
AU2003251831B2 (en) | 2002-07-19 | 2009-06-11 | 3M Innovative Properties Company | Microneedle devices and microneedle delivery apparatus |
US6805809B2 (en) * | 2002-08-28 | 2004-10-19 | Board Of Trustees Of University Of Illinois | Decal transfer microfabrication |
US6946362B2 (en) * | 2002-09-06 | 2005-09-20 | Hewlett-Packard Development Company, L.P. | Method and apparatus for forming high surface area material films and membranes |
WO2004096896A2 (en) * | 2002-09-06 | 2004-11-11 | Hansford Derek J | Microfabrication of polymer microparticles |
IL152912A0 (en) * | 2002-11-18 | 2003-06-24 | Nanopass Ltd | Micro needle systems |
WO2004113584A1 (en) * | 2002-12-23 | 2004-12-29 | Pirelli Pneumatici S.P.A. | Method dor producing coated metal wire |
KR100563330B1 (en) * | 2003-01-16 | 2006-03-22 | 포스트마이크로 주식회사 | Method for manufacturing of polymer micro needle array with liga process |
EP1443344A1 (en) * | 2003-01-29 | 2004-08-04 | Heptagon Oy | Manufacturing micro-structured elements |
US7578954B2 (en) * | 2003-02-24 | 2009-08-25 | Corium International, Inc. | Method for manufacturing microstructures having multiple microelements with through-holes |
US7377840B2 (en) | 2004-07-21 | 2008-05-27 | Neopad Technologies Corporation | Methods for producing in-situ grooves in chemical mechanical planarization (CMP) pads, and novel CMP pad designs |
US7415299B2 (en) * | 2003-04-18 | 2008-08-19 | The Regents Of The University Of California | Monitoring method and/or apparatus |
US20060025717A1 (en) * | 2003-04-18 | 2006-02-02 | The Regents Of The University Of California | Method for forming hollow out-of-plane microneedles and devices formed hereby |
US6808646B1 (en) * | 2003-04-29 | 2004-10-26 | Hewlett-Packard Development Company, L.P. | Method of replicating a high resolution three-dimensional imprint pattern on a compliant media of arbitrary size |
CN1321706C (en) * | 2003-05-29 | 2007-06-20 | 财团法人工业技术研究院 | Numerical group style micro-needle soft substrate structure and its manufacture |
US7572405B2 (en) * | 2003-06-02 | 2009-08-11 | Corium International Inc. | Method for manufacturing microstructures having hollow microelements using fluidic jets during a molding operation |
US6921670B2 (en) * | 2003-06-24 | 2005-07-26 | Hewlett-Packard Development Company, Lp. | Nanostructure fabrication using microbial mandrel |
WO2005004729A1 (en) * | 2003-06-30 | 2005-01-20 | Alza Corporation | Method for coating skin piercing microprojections |
US20050011858A1 (en) * | 2003-07-16 | 2005-01-20 | Industrial Technology Research Institute | Method for fabricating a hollow micro-needle array |
WO2005025748A1 (en) * | 2003-09-17 | 2005-03-24 | Nanocomms Patents Limited | Microstructure devices and their production |
US8353861B2 (en) * | 2003-09-18 | 2013-01-15 | Texmac, Inc. | Applicator for applying functional substances into human skin |
EP1694731B1 (en) | 2003-09-23 | 2012-03-28 | University Of North Carolina At Chapel Hill | Photocurable perfluoropolyethers for use as novel materials in microfluidic devices |
US7753888B2 (en) * | 2003-11-21 | 2010-07-13 | The Regents Of The University Of California | Method and/or apparatus for puncturing a surface for extraction, in situ analysis, and/or substance delivery using microneedles |
JP6067954B2 (en) | 2003-12-19 | 2017-01-25 | ザ ユニバーシティ オブ ノース カロライナ アット チャペル ヒルThe University Of North Carolina At Chapel Hill | Nano-sized article and nano-sized article manufactured by a method for producing a separation structure using soft lithography or imprint lithography |
US9040090B2 (en) | 2003-12-19 | 2015-05-26 | The University Of North Carolina At Chapel Hill | Isolated and fixed micro and nano structures and methods thereof |
US8017145B2 (en) * | 2003-12-22 | 2011-09-13 | Conopco, Inc. | Exfoliating personal care wipe article containing an array of projections |
GB0402131D0 (en) | 2004-01-30 | 2004-03-03 | Isis Innovation | Delivery method |
WO2005082593A1 (en) * | 2004-02-17 | 2005-09-09 | Avery Dennison Corporation | Method of making microneedles |
US20070191761A1 (en) * | 2004-02-23 | 2007-08-16 | 3M Innovative Properties Company | Method of molding for microneedle arrays |
ATE490567T1 (en) * | 2004-03-08 | 2010-12-15 | Univ Illinois | MICROFLUIDIC ELECTROCHEMICAL REACTORS |
WO2005094526A2 (en) | 2004-03-24 | 2005-10-13 | Corium International, Inc. | Transdermal delivery device |
US20050221112A1 (en) * | 2004-03-31 | 2005-10-06 | Daewoong Suh | Microtools for package substrate patterning |
JP2008507114A (en) * | 2004-04-27 | 2008-03-06 | ザ ボード オブ トラスティーズ オブ ザ ユニヴァーシティー オブ イリノイ | Composite patterning device for soft lithography |
TWI246929B (en) * | 2004-07-16 | 2006-01-11 | Ind Tech Res Inst | Microneedle array device and its fabrication method |
EP1786580B1 (en) | 2004-08-16 | 2010-12-01 | Functional Microstructures Limited | Method of producing a microneedle or microimplant |
US7662545B2 (en) * | 2004-10-14 | 2010-02-16 | The Board Of Trustees Of The University Of Illinois | Decal transfer lithography |
US7627938B2 (en) * | 2004-10-15 | 2009-12-08 | Board Of Regents, The Univeristy Of Texas System | Tapered hollow metallic microneedle array assembly and method of making and using the same |
CN102358015A (en) | 2004-12-07 | 2012-02-22 | 3M创新有限公司 | Method of molding a microneedle |
US7288327B2 (en) * | 2004-12-16 | 2007-10-30 | Xerox Corporation | Plated structures or components |
US7691298B2 (en) * | 2005-01-21 | 2010-04-06 | Wisconsin Alumni Research Foundation | Plastic cantilevers for force microscopy |
JP4793806B2 (en) * | 2005-03-22 | 2011-10-12 | Tti・エルビュー株式会社 | Iontophoresis device |
CA2602259A1 (en) * | 2005-03-29 | 2006-10-05 | Arkal Medical, Inc. | Devices, systems, methods and tools for continuous glucose monitoring |
JP5020080B2 (en) * | 2005-05-13 | 2012-09-05 | 久光製薬株式会社 | Manufacturing method of medical equipment |
JP2006341089A (en) * | 2005-05-13 | 2006-12-21 | Fujikura Ltd | Instrument for carrying medicinal material and manufacturing method of the same |
US7442029B2 (en) * | 2005-05-16 | 2008-10-28 | Asml Netherlands B.V. | Imprint lithography |
JP4646705B2 (en) * | 2005-06-03 | 2011-03-09 | アルプス電気株式会社 | Mold manufacturing method and molded product manufacturing method |
AU2006261899B2 (en) | 2005-06-27 | 2012-05-10 | Kindeva Drug Delivery L.P. | Microneedle cartridge assembly and method of applying |
US20070078414A1 (en) * | 2005-08-05 | 2007-04-05 | Mcallister Devin V | Methods and devices for delivering agents across biological barriers |
EP1922364A4 (en) | 2005-08-09 | 2010-04-21 | Univ North Carolina | Methods and materials for fabricating microfluidic devices |
JP4795356B2 (en) * | 2005-08-30 | 2011-10-19 | 独立行政法人理化学研究所 | Fine pattern forming method |
US10548659B2 (en) | 2006-01-17 | 2020-02-04 | Ulthera, Inc. | High pressure pre-burst for improved fluid delivery |
US8518069B2 (en) | 2005-09-07 | 2013-08-27 | Cabochon Aesthetics, Inc. | Dissection handpiece and method for reducing the appearance of cellulite |
US9011473B2 (en) | 2005-09-07 | 2015-04-21 | Ulthera, Inc. | Dissection handpiece and method for reducing the appearance of cellulite |
US9486274B2 (en) | 2005-09-07 | 2016-11-08 | Ulthera, Inc. | Dissection handpiece and method for reducing the appearance of cellulite |
US9358033B2 (en) * | 2005-09-07 | 2016-06-07 | Ulthera, Inc. | Fluid-jet dissection system and method for reducing the appearance of cellulite |
WO2007032446A1 (en) | 2005-09-15 | 2007-03-22 | Tti Ellebeau, Inc. | Rod type iontophoresis device |
US20070078376A1 (en) * | 2005-09-30 | 2007-04-05 | Smith Gregory A | Functionalized microneedles transdermal drug delivery systems, devices, and methods |
US20070093789A1 (en) * | 2005-09-30 | 2007-04-26 | Transcutaneous Technologies Inc. | Iontophoresis apparatus and method for delivery of angiogenic factors to enhance healing of injured tissue |
US20080262416A1 (en) * | 2005-11-18 | 2008-10-23 | Duan Daniel C | Microneedle Arrays and Methods of Preparing Same |
US7885793B2 (en) | 2007-05-22 | 2011-02-08 | International Business Machines Corporation | Method and system for developing a conceptual model to facilitate generating a business-aligned information technology solution |
EP1962942A1 (en) * | 2005-12-21 | 2008-09-03 | 3M Innovative Properties Company | Microneedle devices |
KR101157966B1 (en) * | 2005-12-29 | 2012-06-25 | 엘지디스플레이 주식회사 | Method for fabricating liquid crystal display |
EP1965856A2 (en) | 2005-12-30 | 2008-09-10 | Tti Ellebeau, Inc. | Iontophoretic systems, devices, and methods of delivery of active agents to biological interface |
SG134178A1 (en) * | 2006-01-09 | 2007-08-29 | Agency Science Tech & Res | Microstructure formation technique |
US7658728B2 (en) * | 2006-01-10 | 2010-02-09 | Yuzhakov Vadim V | Microneedle array, patch, and applicator for transdermal drug delivery |
US9339641B2 (en) | 2006-01-17 | 2016-05-17 | Emkinetics, Inc. | Method and apparatus for transdermal stimulation over the palmar and plantar surfaces |
US9610459B2 (en) | 2009-07-24 | 2017-04-04 | Emkinetics, Inc. | Cooling systems and methods for conductive coils |
WO2011053607A1 (en) | 2009-10-26 | 2011-05-05 | Emkinetics, Inc. | Method and apparatus for electromagnetic stimulation of nerve, muscle, and body tissues |
US7699819B2 (en) | 2006-02-21 | 2010-04-20 | The Hong Kong University Of Science And Technology | Molecular sieve and zeolite microneedles and preparation thereof |
US20100233350A1 (en) * | 2006-03-15 | 2010-09-16 | Boston Scientific Scimed, Inc. | Drug delivery composition and methods of making same using nanofabrication |
US20110107473A1 (en) * | 2006-03-15 | 2011-05-05 | Wisconsin Alumni Research Foundation | Diamond-like carbon coated nanoprobes |
US20080142709A1 (en) * | 2006-03-21 | 2008-06-19 | Anirudha Vishwanath Sumant | MONOLITHIC ta-C NANOPROBES AND ta-C COATED NANOPROBES |
US20090131959A1 (en) * | 2006-04-20 | 2009-05-21 | Liquidia Technologies Inc. | Biological Vessel Flow Control Devices and Methods |
KR101416512B1 (en) | 2006-05-18 | 2014-07-08 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | Microstructure, micromachine, and manufacturing method of microstructure and micromachine |
JP2007331095A (en) * | 2006-05-18 | 2007-12-27 | Semiconductor Energy Lab Co Ltd | Microstructure, micro machine, semiconductor device, and manufacturing method of the microstructure and the micro machine |
US20080063866A1 (en) * | 2006-05-26 | 2008-03-13 | Georgia Tech Research Corporation | Method for Making Electrically Conductive Three-Dimensional Structures |
US20070276318A1 (en) * | 2006-05-26 | 2007-11-29 | Mit, Llp | Iontosonic-microneedle applicator apparatus and methods |
US20070282246A1 (en) * | 2006-06-05 | 2007-12-06 | Mit, Llp | Iontosonic-microneedle biosensor apparatus and methods |
KR100857521B1 (en) * | 2006-06-13 | 2008-09-08 | 엘지디스플레이 주식회사 | Manufacturing apparatus and method thereof for TFT |
KR100827620B1 (en) * | 2006-07-10 | 2008-05-07 | 삼성전기주식회사 | Method for manufacturing printed circuit board using imprint technology |
US8012566B2 (en) * | 2006-07-12 | 2011-09-06 | Hewlett-Packard Development Company, L.P. | Microneedles formed by electroplating and selectively releasing temperature sensitive layers |
KR100791363B1 (en) * | 2006-07-12 | 2008-01-03 | 한국과학기술원 | Fabrication method of microfluidic devices |
KR100781702B1 (en) * | 2006-07-21 | 2007-12-03 | 연세대학교 산학협력단 | A hollow type microneedle and methods for preparing it |
JP2008029710A (en) * | 2006-07-31 | 2008-02-14 | Hamamatsu Kagaku Gijutsu Kenkyu Shinkokai | Microneedle type patch and its manufacturing method |
US20080058726A1 (en) * | 2006-08-30 | 2008-03-06 | Arvind Jina | Methods and Apparatus Incorporating a Surface Penetration Device |
US20080097352A1 (en) * | 2006-09-12 | 2008-04-24 | Beck Patricia A | Methods of fabricating microneedles with bio-sensory functionality |
JP4888011B2 (en) * | 2006-09-28 | 2012-02-29 | 凸版印刷株式会社 | Needle-like body and manufacturing method thereof |
JP4888018B2 (en) * | 2006-09-29 | 2012-02-29 | 凸版印刷株式会社 | Needle-like body manufacturing method and needle-like body |
US9005102B2 (en) | 2006-10-02 | 2015-04-14 | Emkinetics, Inc. | Method and apparatus for electrical stimulation therapy |
US11224742B2 (en) | 2006-10-02 | 2022-01-18 | Emkinetics, Inc. | Methods and devices for performing electrical stimulation to treat various conditions |
US10786669B2 (en) | 2006-10-02 | 2020-09-29 | Emkinetics, Inc. | Method and apparatus for transdermal stimulation over the palmar and plantar surfaces |
WO2008042902A2 (en) | 2006-10-02 | 2008-04-10 | Emkinetics, Inc. | Method and apparatus for magnetic induction therapy |
JP5023671B2 (en) * | 2006-11-22 | 2012-09-12 | 凸版印刷株式会社 | Manufacturing method of needle-shaped body |
KR100790899B1 (en) * | 2006-12-01 | 2008-01-03 | 삼성전자주식회사 | Template with alignment mark and manufacturing method for the same |
JP5383497B2 (en) * | 2006-12-01 | 2014-01-08 | Tti・エルビュー株式会社 | System and device for powering and / or controlling a device, for example a transdermal delivery device |
US8877074B2 (en) * | 2006-12-15 | 2014-11-04 | The Regents Of The University Of California | Methods of manufacturing microdevices in laminates, lead frames, packages, and printed circuit boards |
TW200829215A (en) * | 2007-01-03 | 2008-07-16 | Univ Nat Chiao Tung | Micro probe array and manufacturing method of the trans-print mold thereof |
EP2121111B1 (en) | 2007-01-22 | 2018-03-14 | Corium International, Inc. | Applicators for microneedle arrays |
US7713196B2 (en) | 2007-03-09 | 2010-05-11 | Nellcor Puritan Bennett Llc | Method for evaluating skin hydration and fluid compartmentalization |
US8560059B2 (en) * | 2007-03-09 | 2013-10-15 | Covidien Lp | System and methods for optical sensing and drug delivery using microneedles |
EP2146689B1 (en) | 2007-04-16 | 2020-08-12 | Corium, Inc. | Solvent-cast microneedle arrays containing active |
US8911749B2 (en) | 2007-04-16 | 2014-12-16 | Corium International, Inc. | Vaccine delivery via microneedle arrays |
JP2009039171A (en) * | 2007-08-06 | 2009-02-26 | Dai Ichi Kasei Kk | Fine needle-shaped projection, its mold, and its manufacturing method |
JP5205016B2 (en) * | 2007-09-04 | 2013-06-05 | 凸版印刷株式会社 | Needle-like body, needle-like body manufacturing method |
WO2009040548A1 (en) * | 2007-09-28 | 2009-04-02 | The Queen's University Of Belfast | Delivery device and method |
US8439940B2 (en) | 2010-12-22 | 2013-05-14 | Cabochon Aesthetics, Inc. | Dissection handpiece with aspiration means for reducing the appearance of cellulite |
US8378046B2 (en) | 2007-10-19 | 2013-02-19 | 3M Innovative Properties Company | High refractive index pressure-sensitive adhesives |
US8309650B2 (en) | 2007-10-30 | 2012-11-13 | 3M Innovative Properties Company | High refractive index adhesives |
WO2009059089A1 (en) * | 2007-11-01 | 2009-05-07 | 3M Innovative Properties Company | Method for replicating master molds |
EP2231257A4 (en) | 2007-12-24 | 2013-11-06 | Univ Queensland | Coating method |
CA2749347C (en) * | 2008-02-07 | 2018-03-27 | The University Of Queensland | Patch production |
KR101457528B1 (en) * | 2008-05-15 | 2014-11-04 | 삼성디스플레이 주식회사 | Method of manufacturing imprint substrate and method of imprinting |
AU2009249610B2 (en) * | 2008-05-21 | 2014-01-16 | Theraject, Inc. | Method of manufacturing solid solution perforator patches and uses thereof |
JP2010009729A (en) * | 2008-06-30 | 2010-01-14 | Toshiba Corp | Imprint stamper, method of manufacturing imprint stamper, magnetic recording medium, method of manufacturing magnetic recording medium and magnetic disk apparatus |
US20100028604A1 (en) * | 2008-08-01 | 2010-02-04 | The Ohio State University | Hierarchical structures for superhydrophobic surfaces and methods of making |
WO2010078323A1 (en) * | 2008-12-29 | 2010-07-08 | Sung-Yun Kwon | Method of manufacturing solid solution peforator patches and uses thereof |
US9238309B2 (en) | 2009-02-17 | 2016-01-19 | The Board Of Trustees Of The University Of Illinois | Methods for fabricating microstructures |
JP2012517910A (en) * | 2009-02-17 | 2012-08-09 | ザ ボード オブ トラスティーズ オブ ザ ユニヴァーシティー オブ イリノイ | Microstructured superhydrophobic material with flexibility |
US8465812B2 (en) | 2009-03-23 | 2013-06-18 | The Boeing Company | Durable transparent intelligent coatings for polymeric transparencies |
US8814954B2 (en) * | 2009-05-08 | 2014-08-26 | Hoowaki, Llc | Method of manufacturing products having a metal surface |
US20100323248A1 (en) * | 2009-06-17 | 2010-12-23 | Battelle Energy Alliance, Llc | Structures having one or more super-hydrophobic surfaces and methods of forming same |
US8147704B2 (en) * | 2009-07-10 | 2012-04-03 | Korea University Research And Business Foundation | Wide area stamp for antireflective surface |
KR101261466B1 (en) * | 2009-07-17 | 2013-05-10 | 한국전자통신연구원 | The method for manufacturing hallow micro needle structures |
CA2768835A1 (en) * | 2009-07-23 | 2011-01-27 | Emkinetics, Inc. | Method and apparatus for magnetic induction therapy |
US11096708B2 (en) | 2009-08-07 | 2021-08-24 | Ulthera, Inc. | Devices and methods for performing subcutaneous surgery |
US9358064B2 (en) | 2009-08-07 | 2016-06-07 | Ulthera, Inc. | Handpiece and methods for performing subcutaneous surgery |
US8834423B2 (en) | 2009-10-23 | 2014-09-16 | University of Pittsburgh—of the Commonwealth System of Higher Education | Dissolvable microneedle arrays for transdermal delivery to human skin |
KR101666214B1 (en) * | 2009-11-05 | 2016-10-14 | 삼성디스플레이 주식회사 | Anisotropic conductive film, method of manufacturing the same and display apparatus having the same |
IT1397018B1 (en) * | 2009-11-12 | 2012-12-20 | St Microelectronics Rousset | PROCEDURE FOR THE REALIZATION OF A MICROAGHI DEVICE, IN PARTICULAR FOR SENSORY USE |
US8741163B2 (en) * | 2009-12-29 | 2014-06-03 | Werner Suedes | Method for producing a composite body having a self-supporting surface |
AU2011246879C1 (en) | 2010-04-28 | 2016-03-24 | Sorrento Therapeutics, Inc. | Device for delivery of rheumatoid arthritis medication |
AU2011311255B2 (en) | 2010-04-28 | 2015-10-08 | Sorrento Therapeutics, Inc. | Method for increasing permeability of an epithelial barrier |
AU2011288209C1 (en) * | 2010-04-28 | 2016-03-24 | Kimberly-Clark Worldwide, Inc. | Injection molded microneedle array and method for forming the microneedle array |
CN102985131B (en) | 2010-04-28 | 2016-06-29 | 金伯利-克拉克环球有限公司 | For delivering the medical treatment device of siRNA |
ES2719595T3 (en) | 2010-05-04 | 2019-07-11 | Corium Int Inc | Method and device for transdermal administration of parathyroid hormone using a microprojection matrix |
US8588884B2 (en) | 2010-05-28 | 2013-11-19 | Emkinetics, Inc. | Microneedle electrode |
US9943673B2 (en) | 2010-07-14 | 2018-04-17 | Vaxxas Pty Limited | Patch applying apparatus |
US9168679B2 (en) * | 2010-07-16 | 2015-10-27 | Northwestern University | Programmable soft lithography: solvent-assisted nanoscale embossing |
TWI486304B (en) * | 2010-08-13 | 2015-06-01 | Nat Univ Tsing Hua | Set of nano/micro structured objects capable of interlocking each other and structured object thereof |
WO2012026973A2 (en) | 2010-08-23 | 2012-03-01 | Carnegie Mellon University | Micro-fiber arrays with tip coating and transfer method for preparing same |
TWI415730B (en) * | 2011-02-17 | 2013-11-21 | The system of masking | |
CN102745644B (en) * | 2011-04-22 | 2015-06-24 | 国家纳米科学中心 | Method for acquiring micro-nano structure by using high-voltage electrospinning die overturning on material surface |
EP2718766A1 (en) * | 2011-06-08 | 2014-04-16 | 3M Innovative Properties Company | Photoresists containing polymer-tethered nanoparticles |
US8875356B2 (en) | 2011-10-06 | 2014-11-04 | Intercontinental Great Brands Llc | Mechanical and adhesive based reclosable fasteners |
EP2765927B1 (en) * | 2011-10-12 | 2021-02-24 | Vaxxas Pty Limited | Delivery device |
WO2013061208A1 (en) | 2011-10-27 | 2013-05-02 | Kimberly-Clark Worldwide, Inc. | Transdermal delivery of high viscosity bioactive agents |
US20170246439A9 (en) | 2011-10-27 | 2017-08-31 | Kimberly-Clark Worldwide, Inc. | Increased Bioavailability of Transdermally Delivered Agents |
BR112014009712A2 (en) | 2011-10-27 | 2017-04-18 | Kimberly Clark Co | implantable devices for the administration of bioactive agents |
US10272233B2 (en) | 2012-03-16 | 2019-04-30 | National University Of Singapore | Method to fabricate polymeric microneedles |
MX370579B (en) | 2012-05-01 | 2019-12-17 | Univ Pittsburgh Commonwealth Sys Higher Education | Tip-loaded microneedle arrays for transdermal insertion. |
MX2014015365A (en) | 2012-06-15 | 2015-05-11 | Univ Washington Ct Commerciali | Microstructure-based wound closure devices. |
JP5593355B2 (en) * | 2012-07-23 | 2014-09-24 | 凸版印刷株式会社 | Needle-like body and method for producing needle-like body |
KR20220038832A (en) | 2012-12-14 | 2022-03-29 | 민데라 코포레이션 | Methods and devices for detection and acquisition of biomarkers |
US10821276B2 (en) * | 2012-12-14 | 2020-11-03 | The Trustees Of Columbia University In The City Of New York | System and method to locally deliver therapeutic agent to inner ear |
CN102988039A (en) * | 2012-12-17 | 2013-03-27 | 中国科学院半导体研究所 | Manufacture method microneedle array-based skin dry electrode |
US11052231B2 (en) | 2012-12-21 | 2021-07-06 | Corium, Inc. | Microarray for delivery of therapeutic agent and methods of use |
RU2674083C2 (en) | 2013-03-12 | 2018-12-04 | Кориум Интернэшнл, Инк. | Microprojection applicators |
ES2761580T3 (en) | 2013-03-15 | 2020-05-20 | Corium Inc | Microarrays for therapeutic agent delivery, methods of use and manufacturing methods |
EP2968116A1 (en) | 2013-03-15 | 2016-01-20 | Corium International, Inc. | Microarray with polymer-free microstructures, methods of making, and methods of use |
AU2014233695A1 (en) | 2013-03-15 | 2015-10-01 | Corium International, Inc. | Microarray for delivery of therapeutic agent and methods of use |
WO2014150285A2 (en) | 2013-03-15 | 2014-09-25 | Corium International, Inc. | Multiple impact microprojection applicators and methods of use |
US9250357B2 (en) | 2013-03-15 | 2016-02-02 | Johnson & Johnson Vision Care, Inc. | Silicone-containing contact lens having reduced amount of silicon on the surface |
CN103231518B (en) * | 2013-03-22 | 2015-03-11 | 南京航空航天大学 | Polydimethylsiloxane array micropore film preparation method |
US10500386B2 (en) | 2013-07-30 | 2019-12-10 | Asti Corporation | Microneedle array manufacturing method |
US10840400B2 (en) * | 2013-08-29 | 2020-11-17 | Taiwan Semiconductor Manufacturing Co., Ltd. | Photovoltaic device with back reflector |
EP3036758A4 (en) | 2013-09-13 | 2017-06-14 | University of Utah Research Foundation | Micro-molded electrodes, arrays, and methods of making the same |
KR101741668B1 (en) * | 2013-11-27 | 2017-05-31 | 부산대학교 산학협력단 | Fabrication Methods of Micromeshes |
CN103767704B (en) * | 2014-01-20 | 2015-08-26 | 上海交通大学 | Dry electrode of a kind of standard for EEG measuring and preparation method thereof |
US9212045B1 (en) | 2014-07-31 | 2015-12-15 | Infineon Technologies Ag | Micro mechanical structure and method for fabricating the same |
WO2016036866A1 (en) | 2014-09-04 | 2016-03-10 | Corium International, Inc. | Microstructure array, methods of making, and methods of use |
JP5967595B2 (en) * | 2014-09-08 | 2016-08-10 | 株式会社かいわ | Puncture device |
WO2016039333A1 (en) * | 2014-09-08 | 2016-03-17 | 株式会社かいわ | Puncture device |
EP3216483B1 (en) | 2014-11-07 | 2019-03-20 | Toppan Printing Co., Ltd. | Needle assembly for transdermal administration and method for manufacturing same |
JP6906885B2 (en) | 2014-11-14 | 2021-07-21 | ロレアル | Microneedle sheet to reduce wrinkles |
JPWO2016084701A1 (en) * | 2014-11-28 | 2017-09-07 | テルモ株式会社 | Microneedle device |
EP3253440B1 (en) | 2015-02-02 | 2022-12-21 | Vaxxas Pty Limited | Microprojection array applicator |
US20180029288A1 (en) * | 2015-02-16 | 2018-02-01 | Basf Se | Process for producing structured polymer surfaces |
US10441768B2 (en) | 2015-03-18 | 2019-10-15 | University of Pittsburgh—of the Commonwealth System of Higher Education | Bioactive components conjugated to substrates of microneedle arrays |
US10857093B2 (en) | 2015-06-29 | 2020-12-08 | Corium, Inc. | Microarray for delivery of therapeutic agent, methods of use, and methods of making |
US10098574B1 (en) | 2015-07-07 | 2018-10-16 | Verily Life Sciences Llc | Porous microneedles through sacrificial sugar incorporation, analyte detection system, and method for intradermal optode nanosensor implantation |
US11103259B2 (en) | 2015-09-18 | 2021-08-31 | Vaxxas Pty Limited | Microprojection arrays with microprojections having large surface area profiles |
US11684763B2 (en) | 2015-10-16 | 2023-06-27 | University of Pittsburgh—of the Commonwealth System of Higher Education | Multi-component bio-active drug delivery and controlled release to the skin by microneedle array devices |
WO2017120322A1 (en) | 2016-01-05 | 2017-07-13 | University Of Pittsburgh-Of The Commonwealth System Of Higher Education | Skin microenvironment targeted delivery for promoting immune and other responses |
KR102543162B1 (en) | 2016-03-01 | 2023-06-15 | 키토테크 메디컬 인코포레이티드 | Microstructure-based systems, apparatus, and methods for wound closure |
US11906463B2 (en) | 2016-08-22 | 2024-02-20 | Ramot At Tel-Aviv University Ltd. | Methods and systems for detecting bioanalytes |
CA3034348A1 (en) * | 2016-08-22 | 2018-03-01 | Ramot At Tel-Aviv University Ltd. | Method and system for subcutaneous sensing |
JP7114094B2 (en) * | 2016-12-22 | 2022-08-08 | オハイオ・ステイト・イノベーション・ファウンデーション | Interpenetrating microstructures for nanochannel-based cargo delivery |
EP3576833A1 (en) * | 2017-01-31 | 2019-12-11 | SABIC Global Technologies B.V. | Using film to provide a preform for micro injection molding process |
DK3606760T3 (en) | 2017-03-31 | 2023-11-06 | Vaxxas Pty Ltd | ARRANGEMENT AND PROCEDURE FOR COATING SURFACES |
WO2018227246A1 (en) | 2017-06-13 | 2018-12-20 | Vaxxas Pty Limited | Quality control of substrate coatings |
EP3661587A4 (en) | 2017-08-04 | 2021-06-09 | Vaxxas Pty Limited | Compact high mechanical energy storage and low trigger force actuator for the delivery of microprojection array patches (map) |
CN107994099B (en) * | 2017-11-23 | 2019-08-09 | 西北工业大学 | Based on two-dimentional gallium selenide material field effect transistor preparation method |
KR102139335B1 (en) * | 2017-11-24 | 2020-07-29 | 주식회사 엘지생활건강 | Method and Apparatus for Manufacturing Microneedle Containing Coatings on Needle Tip |
EP3494875A1 (en) * | 2017-12-11 | 2019-06-12 | ETH Zurich | Sensor device for detecting an electrical signal |
US11844919B2 (en) | 2018-01-03 | 2023-12-19 | The Trustees Of Columbia University In The City Of New York | Microneedle for local delivery of therapeutic agent |
US10980448B2 (en) * | 2018-05-16 | 2021-04-20 | International Business Machines Corporation | Electrically functional polymer microneedle array |
JP7398606B2 (en) * | 2018-06-25 | 2023-12-15 | コリウム ファーマ ソリューションズ, インコーポレイテッド | Hybrid methods of forming microstructure array molds, methods of making microstructure arrays, and methods of use |
WO2020069567A1 (en) * | 2018-10-02 | 2020-04-09 | WearOptimo Pty Ltd | Electrode arrangement |
KR102175312B1 (en) * | 2018-10-08 | 2020-11-06 | 연세대학교 산학협력단 | Microstructure for transdermal delivery |
US11528808B2 (en) | 2018-12-03 | 2022-12-13 | X Display Company Technology Limited | Printing components to substrate posts |
US11482979B2 (en) | 2018-12-03 | 2022-10-25 | X Display Company Technology Limited | Printing components over substrate post edges |
CN110193097A (en) * | 2019-03-19 | 2019-09-03 | 厦门理工学院 | A kind of three-dimensional osteocyte active vaccination method, three-dimensional osteocyte active vaccination bracket and preparation method thereof |
CN110026616A (en) * | 2019-05-27 | 2019-07-19 | 吉林大学 | A kind of efficient forming machine tool in micro structure array surface and manufacturing process |
WO2020257548A1 (en) * | 2019-06-21 | 2020-12-24 | Microneedles Inc | Microneedle patch and fabrication device for production of multilayered microneedles |
KR20220065022A (en) * | 2019-09-20 | 2022-05-19 | 내셔널 사이언스 앤드 테크놀로지 디벨로프먼트 에이전시 | Microneedle production method |
WO2021066755A2 (en) * | 2019-09-30 | 2021-04-08 | National Science And Technology Development Agency | Manufacturing process of high density microneedles |
CN112038776B (en) * | 2020-09-09 | 2022-02-15 | 哈尔滨工业大学 | Preparation method of stretchable elastic cross metamaterial |
CN112373061B (en) * | 2020-10-13 | 2022-04-29 | 航天特种材料及工艺技术研究所 | Composite material member and manufacturing method thereof |
US20230363943A1 (en) * | 2020-10-19 | 2023-11-16 | Raico International Llc | Surgical Instruments For A Trabeculotomy Procedure |
JP2023551537A (en) * | 2020-11-30 | 2023-12-08 | ミンデラ コーポレーション | Microneedle devices and methods and skin disease assays |
CN114660140B (en) | 2020-12-23 | 2024-02-23 | 北京京东方技术开发有限公司 | Biological detection device, biological chip, microelectrode structure and preparation method thereof |
CN112897455A (en) * | 2021-01-20 | 2021-06-04 | 西安应用光学研究所 | Method for preparing continuous curved surface three-dimensional microstructure based on ICP (inductively coupled plasma) etching |
CN112794277A (en) * | 2021-03-05 | 2021-05-14 | 深圳清华大学研究院 | Large-scale ultra-smooth device and processing and manufacturing method thereof |
CN113069683B (en) * | 2021-04-07 | 2022-11-22 | 中国人民解放军军事科学院军事医学研究院 | Preparation method of soluble microneedle patch for wound repair |
CN113460950B (en) * | 2021-07-02 | 2024-04-02 | 杭州电子科技大学温州研究院有限公司 | Flexible wearable heart electrode for cardiovascular disease monitoring and preparation method thereof |
CA3226577A1 (en) | 2021-07-07 | 2023-01-12 | The Regents Of The University Of California | Wearable, non-intrusive microneedle sensor |
CN113927896A (en) * | 2021-09-08 | 2022-01-14 | 兰州大学 | PDMS microneedle secondary motherboard transfer process based on 3D printing technology |
CN113777145A (en) * | 2021-09-14 | 2021-12-10 | 北京大学 | Method for manufacturing micro-needle biosensor |
CN113788453B (en) * | 2021-09-14 | 2023-06-30 | 深圳清华大学研究院 | Super-slide island pushing device and super-slide island processing method |
US11957346B2 (en) | 2022-02-18 | 2024-04-16 | Kitotech Medical, Inc. | Force modulating deep skin staples and instruments |
CN114748779A (en) * | 2022-04-01 | 2022-07-15 | 杭州恒升医学科技有限公司 | Microneedle and manufacturing process thereof |
CN114768080B (en) * | 2022-04-19 | 2024-03-15 | 沈燕萍 | Multichannel microneedle and manufacturing method thereof |
CN115227956A (en) * | 2022-07-26 | 2022-10-25 | 空芯微医疗科技(上海)有限责任公司 | Preparation method of hollow microneedle |
CN117867499A (en) * | 2022-09-30 | 2024-04-12 | 西安交通大学 | Coating structure with strong stability |
Family Cites Families (143)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1770632A (en) * | 1928-07-02 | 1930-07-15 | Arthur E Smith | Ampul syringe |
NL200971A (en) | 1954-10-04 | |||
US3964482A (en) | 1971-05-17 | 1976-06-22 | Alza Corporation | Drug delivery device |
DE2319591C2 (en) | 1973-04-18 | 1982-02-25 | Kirchner & Wilhelm, 7000 Stuttgart | Medical apparatus |
FR2232331B1 (en) | 1973-06-06 | 1978-03-24 | Guerin A Ets | |
AT347283B (en) | 1975-03-07 | 1978-12-27 | Collo Gmbh | FOAM BODY FOR CLEANING, SCRUBBING AND / OR POLISHING PURPOSES AND THE LIKE. |
US4180232A (en) | 1977-01-13 | 1979-12-25 | Hardigg James S | Truss panel mold |
US4381963A (en) | 1980-07-30 | 1983-05-03 | The University Of Rochester | Micro fabrication molding process |
US4585991A (en) | 1982-06-03 | 1986-04-29 | Texas Instruments Incorporated | Solid state multiprobe testing apparatus |
FR2535602B1 (en) | 1982-11-05 | 1986-06-13 | Stallergenes Lab | SCARIFIER DEVICE |
US4708716A (en) | 1983-08-18 | 1987-11-24 | Drug Delivery Systems Inc. | Transdermal drug applicator |
US5591123A (en) | 1983-08-18 | 1997-01-07 | Drug Delivery Systems Inc. | Programmable control mounting system for transdermal drug applicator |
US4583982A (en) | 1984-08-24 | 1986-04-22 | Vlock D G | Fluid dispenser |
US5135477A (en) | 1984-10-29 | 1992-08-04 | Medtronic, Inc. | Iontophoretic drug delivery |
US4784737A (en) | 1986-04-18 | 1988-11-15 | The United States Department Of Energy | Electromicroinjection of particles into living cells |
US4837049A (en) | 1986-06-17 | 1989-06-06 | Alfred E. Mann Foundation For Scientific Research | Method of making an electrode array |
US5362307A (en) | 1989-01-24 | 1994-11-08 | The Regents Of The University Of California | Method for the iontophoretic non-invasive-determination of the in vivo concentration level of an inorganic or organic substance |
US5198192A (en) | 1988-05-18 | 1993-03-30 | Inax Corporation | Apparatus for detecting ingredient in urine, a toilet stool equipped with a urine detecting device and a room for urine detecting facility |
GB2221394B (en) | 1988-08-05 | 1992-03-04 | Eilert Eilertsen | An injection device |
SU1667864A1 (en) | 1989-03-23 | 1991-08-07 | Опытный завод энергетического машиностроения | Electrostimulation device |
US5134079A (en) | 1989-03-27 | 1992-07-28 | International Technidyne Corp. | Fluid sample collection and delivery system and methods particularly adapted for body fluid sampling |
US5531675A (en) | 1989-05-10 | 1996-07-02 | Yoo; Tae W. | Micro-acupuncture needle for a finger of a hand |
CA2016900A1 (en) | 1989-07-06 | 1991-01-06 | Ronald J. Filipski | Tines structure in clinical applicator |
EP0429842B1 (en) | 1989-10-27 | 1996-08-28 | Korea Research Institute Of Chemical Technology | Device for the transdermal administration of protein or peptide drug |
US5215088A (en) | 1989-11-07 | 1993-06-01 | The University Of Utah | Three-dimensional electrode device |
US5697901A (en) | 1989-12-14 | 1997-12-16 | Elof Eriksson | Gene delivery by microneedle injection |
US5162043A (en) | 1990-03-30 | 1992-11-10 | Alza Corporation | Iontophoretic delivery device |
US5527288A (en) | 1990-12-13 | 1996-06-18 | Elan Medical Technologies Limited | Intradermal drug delivery device and method for intradermal delivery of drugs |
TW279133B (en) | 1990-12-13 | 1996-06-21 | Elan Med Tech | |
US5279544A (en) | 1990-12-13 | 1994-01-18 | Sil Medics Ltd. | Transdermal or interdermal drug delivery devices |
US5156591A (en) | 1990-12-13 | 1992-10-20 | S. I. Scientific Innovations Ltd. | Skin electrode construction and transdermal drug delivery device utilizing same |
US5158073A (en) | 1990-12-18 | 1992-10-27 | Bukowski Voytek Z | Acupressure foot massage mat |
US5312456A (en) | 1991-01-31 | 1994-05-17 | Carnegie Mellon University | Micromechanical barb and method for making the same |
TW273531B (en) | 1991-08-14 | 1996-04-01 | Chicopee | Textile-like apertured plastic films |
US5256360A (en) | 1992-03-25 | 1993-10-26 | Panasonic Technologies, Inc. | Method of manufacturing a precision micro-filter |
IE930532A1 (en) | 1993-07-19 | 1995-01-25 | Elan Med Tech | Liquid material dispenser and valve |
US5318557A (en) | 1992-07-13 | 1994-06-07 | Elan Medical Technologies Limited | Medication administering device |
US5250067A (en) | 1992-11-30 | 1993-10-05 | Ala Gelfer | Body treatment pad having a multiple number of sharpened skin-penetration protuberances |
US5383512A (en) | 1993-01-27 | 1995-01-24 | Midwest Research Institute | Method for fabricating a substrate having spaced apart microcapillaries thereon |
IE68890B1 (en) | 1993-04-08 | 1996-07-24 | Elan Med Tech | Intradermal delivery device |
US5728089A (en) | 1993-06-04 | 1998-03-17 | The Regents Of The University Of California | Microfabricated structure to be used in surgery |
US5320600A (en) | 1993-06-14 | 1994-06-14 | Lambert Wm S | Plural content container for simultaneous ejection |
CA2132277C (en) | 1993-10-22 | 2005-05-10 | Giorgio Cirelli | Injection device |
US5536263A (en) | 1994-03-30 | 1996-07-16 | Lectec Corporation | Non-occulusive adhesive patch for applying medication to the skin |
CA2149836C (en) | 1994-05-23 | 1999-07-06 | Sang Bae Choi | Perforating device for dermal administration |
KR0134151B1 (en) | 1994-05-23 | 1998-04-14 | 이형도 | Insulin patch |
FR2720003B1 (en) | 1994-05-23 | 1998-06-26 | Samsung Electro Mech | Device used to incise the skin for transcutaneous medication. |
US5512219A (en) | 1994-06-03 | 1996-04-30 | Reflexite Corporation | Method of casting a microstructure sheet having an array of prism elements using a reusable polycarbonate mold |
US5591139A (en) | 1994-06-06 | 1997-01-07 | The Regents Of The University Of California | IC-processed microneedles |
US5487726A (en) | 1994-06-16 | 1996-01-30 | Ryder International Corporation | Vaccine applicator system |
US5771890A (en) | 1994-06-24 | 1998-06-30 | Cygnus, Inc. | Device and method for sampling of substances using alternating polarity |
US5498235A (en) | 1994-09-30 | 1996-03-12 | Becton Dickinson And Company | Iontophoresis assembly including patch/controller attachment |
US5551953A (en) | 1994-10-31 | 1996-09-03 | Alza Corporation | Electrotransport system with remote telemetry link |
IE72524B1 (en) | 1994-11-04 | 1997-04-23 | Elan Med Tech | Analyte-controlled liquid delivery device and analyte monitor |
US6120488A (en) | 1994-11-28 | 2000-09-19 | The Procter & Gamble Company | Absorbent articles having cuffs and topsheet with skin care composition(s) disposed thereon |
CA2205444A1 (en) | 1994-12-09 | 1996-06-13 | Novartis Ag | Transdermal system |
AU5869796A (en) | 1995-05-22 | 1996-12-11 | Ned A. Godshall | Micromechanical patch for enhancing the delivery of compound s through the skin |
AU5740496A (en) | 1995-05-22 | 1996-12-11 | General Hospital Corporation, The | Micromechanical device and method for enhancing delivery of compounds through the skin |
DE19525607A1 (en) | 1995-07-14 | 1997-01-16 | Boehringer Ingelheim Kg | Transcorneal drug delivery system |
JP2713255B2 (en) | 1995-08-11 | 1998-02-16 | 日本電気株式会社 | Leachate suction device |
IE77523B1 (en) | 1995-09-11 | 1997-12-17 | Elan Med Tech | Medicament delivery device |
US5735273A (en) | 1995-09-12 | 1998-04-07 | Cygnus, Inc. | Chemical signal-impermeable mask |
US5645977A (en) | 1995-09-22 | 1997-07-08 | Industrial Technology Research Institute | Method of making molds for manufacturing multiple-lead microstructures |
US5658515A (en) | 1995-09-25 | 1997-08-19 | Lee; Abraham P. | Polymer micromold and fabrication process |
JPH09215755A (en) | 1996-02-09 | 1997-08-19 | Poritoronikusu:Kk | Skin contact treating implement |
US5948488A (en) | 1996-04-30 | 1999-09-07 | 3M Innovative Properties Company | Glittering cube-corner article |
DE69719761T2 (en) | 1996-06-18 | 2003-12-18 | Alza Corp | DEVICE FOR IMPROVING THE TRANSDERMAL ADMINISTRATION OF MEDICINAL PRODUCTS OR THE DETECTION OF BODY LIQUIDS |
DE19624578A1 (en) | 1996-06-20 | 1998-01-08 | Nancy L Divers | Skin care device |
CA2259437C (en) | 1996-07-03 | 2006-12-05 | Altea Technologies, Inc. | Multiple mechanical microporation of skin or mucosa |
WO1998011937A1 (en) | 1996-09-17 | 1998-03-26 | Deka Products Limited Partnership | System for delivery of drugs by transport |
US5873849A (en) | 1997-04-24 | 1999-02-23 | Ichor Medical Systems, Inc. | Electrodes and electrode arrays for generating electroporation inducing electrical fields |
US5928207A (en) * | 1997-06-30 | 1999-07-27 | The Regents Of The University Of California | Microneedle with isotropically etched tip, and method of fabricating such a device |
US6216034B1 (en) | 1997-08-01 | 2001-04-10 | Genetronics, Inc. | Method of programming an array of needle electrodes for electroporation therapy of tissue |
US6241701B1 (en) | 1997-08-01 | 2001-06-05 | Genetronics, Inc. | Apparatus for electroporation mediated delivery of drugs and genes |
US6055453A (en) | 1997-08-01 | 2000-04-25 | Genetronics, Inc. | Apparatus for addressing needle array electrodes for electroporation therapy |
US6047208A (en) | 1997-08-27 | 2000-04-04 | Becton, Dickinson And Company | Iontophoretic controller |
US20010023324A1 (en) | 1997-11-03 | 2001-09-20 | Allan Pronovost | Glucose detector and method for diagnosing diabetes |
US5938684A (en) | 1997-12-09 | 1999-08-17 | Sierra Self Healing Products, Inc. | Accupressure device for therapeutic relief |
US6918901B1 (en) | 1997-12-10 | 2005-07-19 | Felix Theeuwes | Device and method for enhancing transdermal agent flux |
ATE221400T1 (en) | 1997-12-11 | 2002-08-15 | Alza Corp | DEVICE FOR INCREASE THE TRANSDERMAL FLOW OF ACTIVE INGREDIENTS |
CN1206004C (en) | 1997-12-11 | 2005-06-15 | 阿尔扎有限公司 | Device for enhancing transdermal agent flux |
PT1037686E (en) | 1997-12-11 | 2005-10-31 | Alza Corp | APPARATUS FOR POTENTIATING THE FLOW OF TRANSDERMMIC AGENT |
US6135990A (en) | 1997-12-17 | 2000-10-24 | University Of South Florida | Electroporation device and method |
US6778853B1 (en) | 1997-12-17 | 2004-08-17 | University Of South Florida | Electroporation device |
US6024553A (en) | 1997-12-22 | 2000-02-15 | Mcneil-Ppc, Inc. | Apparatus for supporting a starting web during formation of the apertured web |
US6106751A (en) | 1998-03-18 | 2000-08-22 | The Regents Of The University Of California | Method for fabricating needles via conformal deposition in two-piece molds |
US6091975A (en) | 1998-04-01 | 2000-07-18 | Alza Corporation | Minimally invasive detecting device |
JP2002528699A (en) * | 1998-05-22 | 2002-09-03 | カリフォルニア インスティチュート オブ テクノロジー | Microfabricated cell sorter |
WO1999064580A1 (en) | 1998-06-10 | 1999-12-16 | Georgia Tech Research Corporation | Microneedle devices and methods of manufacture and use thereof |
US6503231B1 (en) | 1998-06-10 | 2003-01-07 | Georgia Tech Research Corporation | Microneedle device for transport of molecules across tissue |
GB9815820D0 (en) | 1998-07-22 | 1998-09-16 | Secr Defence | Improvements relating to micro-machining |
GB9815819D0 (en) | 1998-07-22 | 1998-09-16 | Secr Defence | Transferring materials into cells and a microneedle array |
CN1315877A (en) | 1998-08-31 | 2001-10-03 | 强生消费者公司 | Electrotransport device comprising blades |
US6036659A (en) | 1998-10-09 | 2000-03-14 | Flexsite Diagnostics, Inc. | Collection device for biological samples and methods of use |
US6038465A (en) | 1998-10-13 | 2000-03-14 | Agilent Technologies, Inc. | Telemedicine patient platform |
US6611706B2 (en) | 1998-11-09 | 2003-08-26 | Transpharma Ltd. | Monopolar and bipolar current application for transdermal drug delivery and analyte extraction |
EP1003078A3 (en) | 1998-11-17 | 2001-11-07 | Corning Incorporated | Replicating a nanoscale pattern |
JP2002532165A (en) | 1998-12-18 | 2002-10-02 | メドトロニック ミニメド インコーポレイテッド | Insert set with micro-piercing member for use with a medical device and method of using such insert set |
JP2000194142A (en) * | 1998-12-25 | 2000-07-14 | Fujitsu Ltd | Pattern forming method and production of semiconductor device |
JP2000232095A (en) * | 1999-02-12 | 2000-08-22 | Nippon Telegr & Teleph Corp <Ntt> | Formation method for fine pattern of semiconductor surface |
US6689103B1 (en) | 1999-05-07 | 2004-02-10 | Scimed Life System, Inc. | Injection array apparatus and method |
JP2000323461A (en) * | 1999-05-11 | 2000-11-24 | Nec Corp | Fine pattern forming device, its manufacture, and method of forming the same |
NO311797B1 (en) * | 1999-05-12 | 2002-01-28 | Thin Film Electronics Asa | Methods for patterning polymer films and using the methods |
JP4114761B2 (en) * | 1999-05-14 | 2008-07-09 | 国立大学法人群馬大学 | STAMPER FOR INFORMATION RECORDING DISC, ITS MANUFACTURING METHOD, INFORMATION RECORDING DISC, AND INFORMATION RECORDING DISK MANUFACTURING METHOD |
US6611707B1 (en) | 1999-06-04 | 2003-08-26 | Georgia Tech Research Corporation | Microneedle drug delivery device |
EP1187653B1 (en) | 1999-06-04 | 2010-03-31 | Georgia Tech Research Corporation | Devices for enhanced microneedle penetration of biological barriers |
US6743211B1 (en) * | 1999-11-23 | 2004-06-01 | Georgia Tech Research Corporation | Devices and methods for enhanced microneedle penetration of biological barriers |
US6256533B1 (en) | 1999-06-09 | 2001-07-03 | The Procter & Gamble Company | Apparatus and method for using an intracutaneous microneedle array |
US6379324B1 (en) | 1999-06-09 | 2002-04-30 | The Procter & Gamble Company | Intracutaneous microneedle array apparatus |
US6312612B1 (en) | 1999-06-09 | 2001-11-06 | The Procter & Gamble Company | Apparatus and method for manufacturing an intracutaneous microneedle array |
DE19927359A1 (en) * | 1999-06-16 | 2000-12-21 | Creavis Tech & Innovation Gmbh | Electrophoretic displays made of light-scattering carrier materials |
WO2001008242A1 (en) * | 1999-07-21 | 2001-02-01 | E Ink Corporation | Preferred methods for producing electrical circuit elements used to control an electronic display |
US6623457B1 (en) | 1999-09-22 | 2003-09-23 | Becton, Dickinson And Company | Method and apparatus for the transdermal administration of a substance |
US6835184B1 (en) | 1999-09-24 | 2004-12-28 | Becton, Dickinson And Company | Method and device for abrading skin |
US6355054B1 (en) | 1999-11-05 | 2002-03-12 | Ceramoptec Industries, Inc. | Laser system for improved transbarrier therapeutic radiation delivery |
US6511463B1 (en) | 1999-11-18 | 2003-01-28 | Jds Uniphase Corporation | Methods of fabricating microneedle arrays using sacrificial molds |
DE60024312T2 (en) | 1999-12-10 | 2006-08-17 | Alza Corp., Mountain View | Transdermal drug delivery of macromolecular agents and device therefor |
JP4312407B2 (en) | 1999-12-10 | 2009-08-12 | アルザ・コーポレーション | Skin treatment device for sustained transdermal drug delivery |
CA2394171A1 (en) | 1999-12-16 | 2001-06-21 | Alza Corporation | Device for enhancing transdermal flux of sampled agents |
US6406638B1 (en) * | 2000-01-06 | 2002-06-18 | The Regents Of The University Of California | Method of forming vertical, hollow needles within a semiconductor substrate, and needles formed thereby |
US6375627B1 (en) | 2000-03-02 | 2002-04-23 | Agilent Technologies, Inc. | Physiological fluid extraction with rapid analysis |
US6558361B1 (en) | 2000-03-09 | 2003-05-06 | Nanopass Ltd. | Systems and methods for the transport of fluids through a biological barrier and production techniques for such systems |
US6629949B1 (en) | 2000-05-08 | 2003-10-07 | Sterling Medivations, Inc. | Micro infusion drug delivery device |
US6565532B1 (en) | 2000-07-12 | 2003-05-20 | The Procter & Gamble Company | Microneedle apparatus used for marking skin and for dispensing semi-permanent subcutaneous makeup |
US6537242B1 (en) | 2000-06-06 | 2003-03-25 | Becton, Dickinson And Company | Method and apparatus for enhancing penetration of a member for the intradermal sampling or administration of a substance |
US6494830B1 (en) | 2000-06-22 | 2002-12-17 | Guidance Interactive Technologies, Inc. | Handheld controller for monitoring/using medical parameters |
US6603987B2 (en) | 2000-07-11 | 2003-08-05 | Bayer Corporation | Hollow microneedle patch |
US6440096B1 (en) | 2000-07-14 | 2002-08-27 | Becton, Dickinson And Co. | Microdevice and method of manufacturing a microdevice |
GB0017999D0 (en) | 2000-07-21 | 2000-09-13 | Smithkline Beecham Biolog | Novel device |
US6533949B1 (en) * | 2000-08-28 | 2003-03-18 | Nanopass Ltd. | Microneedle structure and production method therefor |
US7108681B2 (en) | 2000-10-16 | 2006-09-19 | Corium International, Inc. | Microstructures for delivering a composition cutaneously to skin |
US7131987B2 (en) | 2000-10-16 | 2006-11-07 | Corium International, Inc. | Microstructures and method for treating and conditioning skin which cause less irritation during exfoliation |
US6533884B1 (en) | 2000-11-03 | 2003-03-18 | Printpack Illinois, Inc. | Method and system for extrusion embossing |
US6591133B1 (en) | 2000-11-27 | 2003-07-08 | Microlin Llc | Apparatus and methods for fluid delivery using electroactive needles and implantable electrochemical delivery devices |
US9302903B2 (en) * | 2000-12-14 | 2016-04-05 | Georgia Tech Research Corporation | Microneedle devices and production thereof |
EP1364396A4 (en) * | 2001-02-05 | 2005-08-31 | Becton Dickinson Co | Microprotrusion array and methods of making a microprotrusion |
JP3696513B2 (en) * | 2001-02-19 | 2005-09-21 | 住友精密工業株式会社 | Manufacturing method of needle-shaped body |
US6663820B2 (en) | 2001-03-14 | 2003-12-16 | The Procter & Gamble Company | Method of manufacturing microneedle structures using soft lithography and photolithography |
US6591124B2 (en) | 2001-05-11 | 2003-07-08 | The Procter & Gamble Company | Portable interstitial fluid monitoring system |
US6767341B2 (en) | 2001-06-13 | 2004-07-27 | Abbott Laboratories | Microneedles for minimally invasive drug delivery |
US6881203B2 (en) | 2001-09-05 | 2005-04-19 | 3M Innovative Properties Company | Microneedle arrays and methods of manufacturing the same |
CA2460673A1 (en) | 2001-09-14 | 2003-03-27 | The Procter & Gamble Company | Method of exfoliation of skin using closely-packed microstructures and apparatus therefor |
AU2002333636A1 (en) | 2001-09-14 | 2003-04-01 | The Procter And Gamble Company | Microstructures for delivering a composition cutaneously to skin using rotatable structures |
-
2001
- 2001-03-14 US US09/808,534 patent/US6663820B2/en not_active Expired - Lifetime
-
2002
- 2002-03-13 EP EP02750607A patent/EP1377338B9/en not_active Expired - Lifetime
- 2002-03-13 WO PCT/US2002/007543 patent/WO2002072189A2/en active Application Filing
- 2002-03-13 DE DE60228065T patent/DE60228065D1/en not_active Expired - Lifetime
- 2002-03-13 ES ES02750607T patent/ES2311615T3/en not_active Expired - Lifetime
- 2002-03-13 CA CA002436207A patent/CA2436207C/en not_active Expired - Lifetime
- 2002-03-13 AT AT02750607T patent/ATE403465T1/en not_active IP Right Cessation
- 2002-03-13 JP JP2002571146A patent/JP4778669B2/en not_active Expired - Lifetime
-
2003
- 2003-12-03 US US10/727,124 patent/US7763203B2/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8383027B2 (en) | 2008-03-12 | 2013-02-26 | Fujifilm Corporation | Method of fabricating a template for a concave array mold, a concave array mold and a needle array sheet |
Also Published As
Publication number | Publication date |
---|---|
US7763203B2 (en) | 2010-07-27 |
WO2002072189A2 (en) | 2002-09-19 |
US20020133129A1 (en) | 2002-09-19 |
EP1377338A2 (en) | 2004-01-07 |
EP1377338B9 (en) | 2008-11-05 |
EP1377338B1 (en) | 2008-08-06 |
WO2002072189A3 (en) | 2003-03-20 |
ATE403465T1 (en) | 2008-08-15 |
US6663820B2 (en) | 2003-12-16 |
ES2311615T3 (en) | 2009-02-16 |
DE60228065D1 (en) | 2008-09-18 |
JP2004526581A (en) | 2004-09-02 |
CA2436207C (en) | 2008-12-02 |
JP4778669B2 (en) | 2011-09-21 |
US20040146611A1 (en) | 2004-07-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CA2436207A1 (en) | Method of manufacturing microneedle structures using soft lithography and photolithography | |
Mata et al. | Fabrication of multi-layer SU-8 microstructures | |
CN102448692B (en) | Methods for fabricating microstructures | |
Goral et al. | Hot embossing of plastic microfluidic devices using poly (dimethylsiloxane) molds | |
US8250729B2 (en) | 3D fabrication of needle tip geometry and knife blade | |
Yi et al. | Simple and reliable fabrication of bioinspired mushroom-shaped micropillars with precisely controlled tip geometries | |
US6951119B1 (en) | Method for producing micromechanical and micro-optic components consisting of glass-type materials | |
WO2002096796A3 (en) | Membrane for micro-electro-mechanical switch, and methods of making and using it | |
Huang et al. | Different fabrication methods of out-of-plane polymer hollow needle arrays and their variations | |
JP2014076378A (en) | Integrated microneedle array, composition comprising the microneedle array, and system | |
WO2002064193A3 (en) | Microneedle devices and production thereof | |
WO2008156977A3 (en) | Methods of fabricating nanostructures by use of thin films of self-assembling of diblock copolymers, and devices resulting from those methods | |
WO2005005046A3 (en) | Fluidic mems device | |
KR20070084015A (en) | Decal transfer lithography | |
US20090120904A1 (en) | Method and device for manufacturing structure having pattern, and method for manufacturing mold | |
KR20150053303A (en) | Fabrication method of replication mold, fine structures using the same and its applications thereof. | |
Govindaraju et al. | Reinforcement of PDMS masters using SU-8 truss structures | |
US20130174973A1 (en) | Microfluidic devices and methods of manufacturing | |
KR20220164497A (en) | Laminates with optical microstructures for ophthalmic lens integration | |
Tung et al. | A single-layer PDMS-on-silicon hybrid microactuator with multi-axis out-of-plane motion capabilities-part II: fabrication and characterization | |
Park et al. | High-aspect-ratio tapered structures using an integrated lens technique | |
Meyer et al. | Micropatterned biocompatible materials with applications for cell cultivation | |
EP1553049A3 (en) | Method for manufacturing moulded micromechanical structures | |
Choi et al. | 3-D patterned microstructures using inclined UV exposure and metal transfer micromolding | |
TWI252520B (en) | Reversal micro/nano imprinting process without residual layer of resist |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request | ||
MKEX | Expiry |
Effective date: 20220314 |