CA2405176A1 - Process for preparing carbon nanotubes - Google Patents

Process for preparing carbon nanotubes Download PDF

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Publication number
CA2405176A1
CA2405176A1 CA002405176A CA2405176A CA2405176A1 CA 2405176 A1 CA2405176 A1 CA 2405176A1 CA 002405176 A CA002405176 A CA 002405176A CA 2405176 A CA2405176 A CA 2405176A CA 2405176 A1 CA2405176 A1 CA 2405176A1
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CA
Canada
Prior art keywords
carbon
substrate
catalyst
carbon nanotubes
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002405176A
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French (fr)
Other versions
CA2405176C (en
Inventor
Jean-Pol Dodelet
Barry Stansfield
Oliver Smiljanic
Tarik Dellero
Sylvain Desilets
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Minister of National Defence of Canada
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Individual
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Publication of CA2405176A1 publication Critical patent/CA2405176A1/en
Application granted granted Critical
Publication of CA2405176C publication Critical patent/CA2405176C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/16—Preparation
    • C01B32/162—Preparation characterised by catalysts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122—Incoherent waves
    • B01J19/126—Microwaves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C23C16/0281—Deposition of sub-layers, e.g. to promote the adhesion of the main coating of metallic sub-layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4418—Methods for making free-standing articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
    • B01J2219/0809—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes employing two or more electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
    • B01J2219/0824—Details relating to the shape of the electrodes
    • B01J2219/0826—Details relating to the shape of the electrodes essentially linear
    • B01J2219/0828—Wires
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
    • B01J2219/0824—Details relating to the shape of the electrodes
    • B01J2219/0826—Details relating to the shape of the electrodes essentially linear
    • B01J2219/083—Details relating to the shape of the electrodes essentially linear cylindrical
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
    • B01J2219/0837—Details relating to the material of the electrodes
    • B01J2219/0841—Metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0873—Materials to be treated
    • B01J2219/0875—Gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0873—Materials to be treated
    • B01J2219/0892—Materials to be treated involving catalytically active material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0894—Processes carried out in the presence of a plasma

Abstract

Carbon nanotubes are formed on carbon paper by first depositing a metal catalyst on the carbon paper, and passing a feedstock gas containing a source of carbon over the substrate while applying an electrical current thereto to heat the substrate sufficiently to generate a reaction between the catalyst and the feedstock gas. Alternatively, inert gas under pressure is passed through a tubular metal cathode while passing an electric current through the cathode to produce a plasma of fine catalyst particles which are deposited on a porous carbon substrate, and a feedstock gas containing a source of carbon is passed over the substrate to cause a reaction between the catalyst and the carbon source resulting in the formation of carbon nanotubes.
CA002405176A 2000-05-11 2001-05-10 Process for preparing carbon nanotubes Expired - Fee Related CA2405176C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US20339800P 2000-05-11 2000-05-11
US60/203,398 2000-05-11
PCT/CA2001/000658 WO2001085612A2 (en) 2000-05-11 2001-05-10 Process for preparing carbon nanotubes

Publications (2)

Publication Number Publication Date
CA2405176A1 true CA2405176A1 (en) 2001-11-15
CA2405176C CA2405176C (en) 2009-02-03

Family

ID=22753826

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002405176A Expired - Fee Related CA2405176C (en) 2000-05-11 2001-05-10 Process for preparing carbon nanotubes

Country Status (4)

Country Link
US (1) US7056479B2 (en)
AU (1) AU2001258109A1 (en)
CA (1) CA2405176C (en)
WO (1) WO2001085612A2 (en)

Families Citing this family (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT407754B (en) * 1999-09-29 2001-06-25 Electrovac METHOD AND DEVICE FOR PRODUCING A NANOTUBE LAYER ON A SUBSTRATE
EP1365991B1 (en) * 2001-02-26 2004-09-08 Nanolight International Ltd. Method for forming a coating film, consisting of carbon nanotubes, on the surface of a substrate
AUPR421701A0 (en) * 2001-04-04 2001-05-17 Commonwealth Scientific And Industrial Research Organisation Process and apparatus for the production of carbon nanotubes
US20060165914A1 (en) * 2002-04-03 2006-07-27 John Abrahamson Continuous method for producing inorganic nanotubes
US20030198588A1 (en) * 2002-04-17 2003-10-23 Showa Denko K.K. Vapor grown carbon fiber and method for producing the same
US6887451B2 (en) * 2002-04-30 2005-05-03 Her Majesty The Queen In Right Of Canada, As Represented By The Minister Of National Defence Of Her Majesty's Canadian Government Process for preparing carbon nanotubes
DE10219643B4 (en) * 2002-05-02 2010-04-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Process for the preparation of catalysts
EP1361437A1 (en) * 2002-05-07 2003-11-12 Centre National De La Recherche Scientifique (Cnrs) A novel biological cancer marker and methods for determining the cancerous or non-cancerous phenotype of cells
US7465362B2 (en) * 2002-05-08 2008-12-16 Btu International, Inc. Plasma-assisted nitrogen surface-treatment
US7560657B2 (en) * 2002-05-08 2009-07-14 Btu International Inc. Plasma-assisted processing in a manufacturing line
US7498066B2 (en) * 2002-05-08 2009-03-03 Btu International Inc. Plasma-assisted enhanced coating
US7494904B2 (en) * 2002-05-08 2009-02-24 Btu International, Inc. Plasma-assisted doping
US20060062930A1 (en) * 2002-05-08 2006-03-23 Devendra Kumar Plasma-assisted carburizing
AU2003230267A1 (en) * 2002-05-08 2003-11-11 Dana Corporation Plasma-assisted enhanced coating
CA2584508A1 (en) 2002-05-09 2003-11-09 Institut National De La Recherche Scientifique Method for producing single-wall carbon nanotubes
KR100759547B1 (en) 2002-07-29 2007-09-18 삼성에스디아이 주식회사 Carbon nanotube for fuel cell, method for preparing the same and fuel cell using the carbon nanotube
US20040167014A1 (en) * 2002-11-13 2004-08-26 The Regents Of The Univ. Of California, Office Of Technology Transfer, University Of California Nanostructured proton exchange membrane fuel cells
US7189940B2 (en) * 2002-12-04 2007-03-13 Btu International Inc. Plasma-assisted melting
GB2399092B (en) * 2003-03-03 2005-02-16 Morgan Crucible Co Nanotube and/or nanofibre synthesis
FR2857379A1 (en) * 2003-07-09 2005-01-14 Inanov CATALYTIC AND DIRECTIONAL GROWTH OF INDIVIDUAL CARBON NANOTUBES, APPLICATIONS TO COLD ELECTRON SOURCES
JP2007515364A (en) * 2003-10-16 2007-06-14 ザ ユニバーシティ オブ アクロン Carbon nanotubes on carbon nanofiber substrate
WO2005061382A1 (en) * 2003-12-24 2005-07-07 Nanometrix Inc. Continuous production of carbon nanotubes
WO2006047765A1 (en) * 2004-10-27 2006-05-04 Pacific Fuel Cell Corp. Methanol resistant cathodic catalyst for direct methanol fuel cells
KR100656985B1 (en) * 2004-11-02 2006-12-13 한국에너지기술연구원 Nano-filter media production process and device
US20060115409A1 (en) * 2004-11-26 2006-06-01 Yuan-Yao Li Method for producing carbon nanotube
US8206624B2 (en) * 2004-11-26 2012-06-26 National Chung Cheng University Method for producing carbon nanotube
WO2006099593A2 (en) * 2005-03-15 2006-09-21 Pacific Fuel Cell Corp. Carbon based electrocatalysts for fuel cells
GB0515170D0 (en) * 2005-07-22 2005-08-31 Boc Group Plc Method and apparatus for the production of nanostructures
JP5021744B2 (en) 2006-09-05 2012-09-12 エアバス オペレーションズ リミティド Method of manufacturing composite material by growth of reinforcing material layer and related equipment
GB0617459D0 (en) * 2006-09-05 2006-10-18 Airbus Uk Ltd Method of manufacturing composite material
JP5526457B2 (en) * 2006-12-01 2014-06-18 富士通株式会社 Carbon elongated structure bundle, method for producing the same, and electronic device
US8092778B2 (en) 2007-01-24 2012-01-10 Eden Energy Ltd. Method for producing a hydrogen enriched fuel and carbon nanotubes using microwave assisted methane decomposition on catalyst
US8021448B2 (en) 2007-01-25 2011-09-20 Eden Energy Ltd. Method and system for producing a hydrogen enriched fuel using microwave assisted methane plasma decomposition on catalyst
KR100801470B1 (en) * 2007-02-15 2008-02-12 한국에너지기술연구원 Direct synthesis of carbon nanotubes on graphite paper and manufacturing method of platinum nano catalyst supported on carbon nanotube by chemical vapor deposition and its platinum nano catalyst
KR101391925B1 (en) * 2007-02-28 2014-05-07 페어차일드코리아반도체 주식회사 Semiconductor package and semiconductor package mold for fabricating the same
EP2125212A2 (en) 2007-03-23 2009-12-02 Lydall, Inc. Substrate for carrying catalytic particles
US8475698B2 (en) * 2007-08-17 2013-07-02 The United States Of America, As Represented By The Secretary Of The Navy Methods of making carbon nanopipes and ductwork with nanometric walls
US9725314B2 (en) 2008-03-03 2017-08-08 Performancy Polymer Solutions, Inc. Continuous process for the production of carbon nanofiber reinforced continuous fiber preforms and composites made therefrom
EP2406794B1 (en) * 2009-03-13 2014-08-06 Oxazogen, Inc. Optical power limiting polymeric matrix
US8227386B2 (en) 2009-08-18 2012-07-24 GM Global Technology Operations LLC Nanographene layers and particles and lubricants incorporating the same
WO2012173960A1 (en) 2011-06-13 2012-12-20 University Of Dayton Receptor-catalyst growth process for carbon nanotubes
US8916067B2 (en) 2011-10-19 2014-12-23 The Aerospace Corporation Carbonaceous nano-scaled materials having highly functionalized surface
GB201321440D0 (en) * 2013-12-05 2014-01-22 Q Flo Ltd Process
EP3089940B1 (en) 2013-12-30 2019-07-10 Indian Oil Corporation Limited Process for simultaneous production of carbon nanotube and a product gas from crude oil and its products

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5105123A (en) * 1988-10-27 1992-04-14 Battelle Memorial Institute Hollow electrode plasma excitation source
JP3363759B2 (en) * 1997-11-07 2003-01-08 キヤノン株式会社 Carbon nanotube device and method of manufacturing the same
EP1059266A3 (en) * 1999-06-11 2000-12-20 Iljin Nanotech Co., Ltd. Mass synthesis method of high purity carbon nanotubes vertically aligned over large-size substrate using thermal chemical vapor deposition
US6887451B2 (en) * 2002-04-30 2005-05-03 Her Majesty The Queen In Right Of Canada, As Represented By The Minister Of National Defence Of Her Majesty's Canadian Government Process for preparing carbon nanotubes

Also Published As

Publication number Publication date
US7056479B2 (en) 2006-06-06
AU2001258109A1 (en) 2001-11-20
CA2405176C (en) 2009-02-03
WO2001085612A3 (en) 2002-04-25
WO2001085612A2 (en) 2001-11-15
US20030111334A1 (en) 2003-06-19

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