CA2322363A1 - Method of forming chromium coated copper for printed circuit boards - Google Patents

Method of forming chromium coated copper for printed circuit boards Download PDF

Info

Publication number
CA2322363A1
CA2322363A1 CA002322363A CA2322363A CA2322363A1 CA 2322363 A1 CA2322363 A1 CA 2322363A1 CA 002322363 A CA002322363 A CA 002322363A CA 2322363 A CA2322363 A CA 2322363A CA 2322363 A1 CA2322363 A1 CA 2322363A1
Authority
CA
Canada
Prior art keywords
printed circuit
circuit boards
coated copper
nickel
chromium coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002322363A
Other languages
French (fr)
Other versions
CA2322363C (en
Inventor
Jiangtao Wang
John Callahan
Dan Lillie
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gould Electronics Inc
Original Assignee
Ga Tek Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ga Tek Inc filed Critical Ga Tek Inc
Publication of CA2322363A1 publication Critical patent/CA2322363A1/en
Application granted granted Critical
Publication of CA2322363C publication Critical patent/CA2322363C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/16—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
    • H05K1/167—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor incorporating printed resistors
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025—Metallic sublayers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
    • C23C28/3225—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only with at least one zinc-based layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
    • C23C28/3455—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer with a refractory ceramic layer, e.g. refractory metal oxide, ZrO2, rare earth oxides or a thermal barrier system comprising at least one refractory oxide layer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/388—Improvement of the adhesion between the insulating substrate and the metal by the use of a metallic or inorganic thin film adhesion layer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01—Dielectrics
    • H05K2201/0137—Materials
    • H05K2201/0179—Thin film deposited insulating layer, e.g. inorganic layer for printed capacitor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0302—Properties and characteristics in general
    • H05K2201/0317—Thin film conductor layer; Thin film passive component
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0332—Structure of the conductor
    • H05K2201/0335—Layered conductors or foils
    • H05K2201/0355—Metal foils
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/03—Metal processing
    • H05K2203/0361—Stripping a part of an upper metal layer to expose a lower metal layer, e.g. by etching or using a laser
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/382—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
    • H05K3/384—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal by plating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12431—Foil or filament smaller than 6 mils
    • Y10T428/12438—Composite

Abstract

A method of applying a metal onto a copper layer, comprising the steps of:
stabilizing a surface of a copper layer by applying a stabilization layer thereto, the stabilization layer comprised of zinc oxide, chromium oxide, nickel, nickel oxide or a combination thereof and having a thickness of between about 5.ANG. and about 70.ANG.; and vapor depositing a metal selected from the group consisting of aluminum, nickel, chromium, copper, iron, indium, zinc, tantalum, tin, vanadium, tungsten, zirconium, molybdenum and alloys thereof onto the stabilized surface of the copper layer, and a sheet material formed thereby.
CA002322363A 2000-02-08 2000-10-05 Method of forming chromium coated copper for printed circuit boards Expired - Fee Related CA2322363C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/500,192 2000-02-08
US09/500,192 US6489034B1 (en) 2000-02-08 2000-02-08 Method of forming chromium coated copper for printed circuit boards

Publications (2)

Publication Number Publication Date
CA2322363A1 true CA2322363A1 (en) 2001-08-08
CA2322363C CA2322363C (en) 2004-09-14

Family

ID=23988414

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002322363A Expired - Fee Related CA2322363C (en) 2000-02-08 2000-10-05 Method of forming chromium coated copper for printed circuit boards

Country Status (8)

Country Link
US (1) US6489034B1 (en)
EP (1) EP1123988B1 (en)
JP (1) JP3311338B2 (en)
KR (1) KR100352280B1 (en)
CN (1) CN1280448C (en)
CA (1) CA2322363C (en)
DE (1) DE60039407D1 (en)
TW (1) TW593756B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1415021A1 (en) * 2001-08-09 2004-05-06 Nikko Materials USA, Inc. Copper on invar composite and method of making

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1261241A1 (en) * 2001-05-17 2002-11-27 Shipley Co. L.L.C. Resistor and printed wiring board embedding those resistor
GB2393189B (en) 2001-07-19 2005-06-15 Trikon Holdings Ltd Depositing a tantalum film
JP4379854B2 (en) * 2001-10-30 2009-12-09 日鉱金属株式会社 Surface treated copper foil
JP2004040073A (en) * 2002-01-11 2004-02-05 Shipley Co Llc Resistor structure
US6824880B1 (en) 2003-05-15 2004-11-30 Ga-Tek, Inc. Process for improving adhesion of resistive foil to laminating materials
KR100593741B1 (en) * 2004-08-02 2006-06-30 도레이새한 주식회사 Laminated Structure for Flexible Circuit Boards Using Copper Ternary Compound as Tie Layer
US20060086620A1 (en) * 2004-10-21 2006-04-27 Chase Lee A Textured decorative plating on plastic components
CA2674646A1 (en) * 2005-09-08 2008-05-08 John C. Bilello Amorphous metal film and process for applying same
JP5479668B2 (en) * 2006-12-26 2014-04-23 古河電気工業株式会社 Surface treated copper foil
US8303792B1 (en) 2007-08-29 2012-11-06 Magnecomp Corporation High strength electrodeposited suspension conductors
WO2009063764A1 (en) * 2007-11-14 2009-05-22 Nippon Mining & Metals Co., Ltd. Copper foil including resistive film layer
US8749342B2 (en) * 2008-10-14 2014-06-10 Jx Nippon Mining & Metals Corporation Metal foil with electric resistance film and method of producing the same
KR20110117255A (en) 2009-03-25 2011-10-26 제이엑스 닛코 닛세키 킨조쿠 가부시키가이샤 Metal foil with electric resistance film and production method therefor
ES2338627B1 (en) * 2009-08-28 2011-06-08 Zanini Auto Grup S.A. TREATMENT OF PARTS WITH METALIZED FINISHING ZONES OF DIFFERENTIATED ASPECT.
JP5346408B2 (en) 2011-03-28 2013-11-20 Ｊｘ日鉱日石金属株式会社 Metal foil provided with electric resistance film and method for manufacturing the same
JP2012201980A (en) 2011-03-28 2012-10-22 Jx Nippon Mining & Metals Corp Metal foil with electric resistive layer and method for producing the same
EP2693852A4 (en) 2011-03-31 2014-09-03 Jx Nippon Mining & Metals Corp Metal foil provided with electrically resistive layer, and board for printed circuit using said metal foil
TWI745566B (en) * 2017-03-29 2021-11-11 美商康寧公司 Substrate coating apparatus and methods

Family Cites Families (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2662957A (en) 1949-10-29 1953-12-15 Eisler Paul Electrical resistor or semiconductor
BE503299A (en) 1949-10-29
US3368919A (en) 1964-07-29 1968-02-13 Sylvania Electric Prod Composite protective coat for thin film devices
US3489656A (en) 1964-11-09 1970-01-13 Western Electric Co Method of producing an integrated circuit containing multilayer tantalum compounds
US3621442A (en) 1968-11-07 1971-11-16 Allen Bradley Co Terminal connection of electronic devices
US3742120A (en) 1970-10-28 1973-06-26 Us Navy Single layer self-destruct circuit produced by co-deposition of tungstic oxide and aluminum
US3864825A (en) 1972-06-12 1975-02-11 Microsystems Int Ltd Method of making thin-film microelectronic resistors
FR2210881B1 (en) 1972-12-14 1976-04-23 Honeywell Bull
US3857683A (en) 1973-07-27 1974-12-31 Mica Corp Printed circuit board material incorporating binary alloys
US4164607A (en) 1977-04-04 1979-08-14 General Dynamics Corporation Electronics Division Thin film resistor having a thin layer of resistive metal of a nickel, chromium, gold alloy
US4203025A (en) 1977-08-19 1980-05-13 Hitachi, Ltd. Thick-film thermal printing head
DE2833919C2 (en) 1978-08-02 1982-06-09 Siemens AG, 1000 Berlin und 8000 München Process for the production of electrical layer circuits on plastic foils
JPS587077A (en) 1981-07-02 1983-01-14 東急建設株式会社 Mounting method for sash
JPS5895301A (en) 1981-12-01 1983-06-06 Matsushita Electric Ind Co Ltd Laser total reflector
DE3151630C2 (en) 1981-12-28 1986-07-03 Endress U. Hauser Gmbh U. Co, 7867 Maulburg Humidity sensor and process for its manufacture
US4396900A (en) 1982-03-08 1983-08-02 The United States Of America As Represented By The Secretary Of The Navy Thin film microstrip circuits
JPS5916084A (en) 1982-07-19 1984-01-27 Nitto Electric Ind Co Ltd Input tablet
JPS60119784A (en) 1983-12-01 1985-06-27 Kanegafuchi Chem Ind Co Ltd Manufacture of insulation metal base plate and device utilizing thereof
JPS6135973A (en) 1984-07-30 1986-02-20 Hitachi Ltd Thermal head
US4892776A (en) 1987-09-02 1990-01-09 Ohmega Electronics, Inc. Circuit board material and electroplating bath for the production thereof
US5243320A (en) 1988-02-26 1993-09-07 Gould Inc. Resistive metal layers and method for making same
US5038132A (en) 1989-12-22 1991-08-06 Texas Instruments Incorporated Dual function circuit board, a resistor element therefor, and a circuit embodying the element
US5039570A (en) 1990-04-12 1991-08-13 Planar Circuit Technologies, Inc. Resistive laminate for printed circuit boards, method and apparatus for forming the same
US5172473A (en) 1990-05-07 1992-12-22 International Business Machines Corporation Method of making cone electrical contact
CA2086512A1 (en) 1990-07-02 1992-01-03 Chung-Yao Chao Rinsing of copper foil after anti-tarnish treatment
JP2932397B2 (en) * 1990-11-14 1999-08-09 日本真空技術株式会社 Printed circuit board manufacturing method
JP2794968B2 (en) 1991-02-22 1998-09-10 富士ゼロックス株式会社 Communication device
JP2537108B2 (en) 1991-03-14 1996-09-25 日本電解株式会社 Copper foil for printed circuit and method of manufacturing the same
US5128008A (en) 1991-04-10 1992-07-07 International Business Machines Corporation Method of forming a microelectronic package having a copper substrate
JP2755058B2 (en) * 1991-11-14 1998-05-20 日立化成工業株式会社 Metal foil for printed wiring board, method of manufacturing the same, and method of manufacturing wiring board using the metal foil
TW230290B (en) * 1991-11-15 1994-09-11 Nikko Guruder Foreer Kk
JPH0787270B2 (en) 1992-02-19 1995-09-20 日鉱グールド・フォイル株式会社 Copper foil for printed circuit and manufacturing method thereof
JPH05275817A (en) * 1992-07-17 1993-10-22 Japan Energy Corp Manufacture of copper foil
JP2717911B2 (en) * 1992-11-19 1998-02-25 日鉱グールド・フォイル株式会社 Copper foil for printed circuit and manufacturing method thereof
US5552234A (en) * 1993-03-29 1996-09-03 Japan Energy Corporation Copper foil for printed circuits
WO1995003168A1 (en) 1993-07-21 1995-02-02 Ohmega Electronics, Inc. Circuit board material with barrier layer
TW326423B (en) 1993-08-06 1998-02-11 Gould Inc Metallic foil with adhesion promoting layer
JP3329572B2 (en) * 1994-04-15 2002-09-30 福田金属箔粉工業株式会社 Copper foil for printed circuit and surface treatment method thereof
TW289900B (en) 1994-04-22 1996-11-01 Gould Electronics Inc
JP3527786B2 (en) 1995-03-01 2004-05-17 株式会社日立グローバルストレージテクノロジーズ Multilayer magnetoresistive film and magnetic head
US5863666A (en) 1997-08-07 1999-01-26 Gould Electronics Inc. High performance flexible laminate
US5885436A (en) * 1997-08-06 1999-03-23 Gould Electronics Inc. Adhesion enhancement for metal foil
US5908544A (en) 1997-09-04 1999-06-01 Gould Electronics, Inc. Zinc-chromium stabilizer containing a hydrogen inhibiting additive
US6132589A (en) * 1998-09-10 2000-10-17 Ga-Tek Inc. Treated copper foil and process for making treated copper foil

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1415021A1 (en) * 2001-08-09 2004-05-06 Nikko Materials USA, Inc. Copper on invar composite and method of making
EP1415021A4 (en) * 2001-08-09 2005-03-09 Nikko Materials Usa Inc Copper on invar composite and method of making

Also Published As

Publication number Publication date
DE60039407D1 (en) 2008-08-21
CN1315591A (en) 2001-10-03
EP1123988A1 (en) 2001-08-16
EP1123988B1 (en) 2008-07-09
JP2001220689A (en) 2001-08-14
TW593756B (en) 2004-06-21
JP3311338B2 (en) 2002-08-05
US6489034B1 (en) 2002-12-03
CN1280448C (en) 2006-10-18
KR20010077901A (en) 2001-08-20
KR100352280B1 (en) 2002-09-12
CA2322363C (en) 2004-09-14

Similar Documents

Publication Publication Date Title
CA2322363A1 (en) Method of forming chromium coated copper for printed circuit boards
EP1005260A3 (en) Formation of thin film capacitors
WO2004108618A3 (en) Appliance with coated transparency
EP1449891A4 (en) Coating composition for forming titanium oxide film, process for forming titanium oxide film and metal substrate coated with titanium oxide film
CA2352929A1 (en) Method of forming chromium coated copper for printed circuit boards
EP1050603A4 (en) Surface treated steel sheet having excellent corrosion resistance and method for producing the same
RU2003113013A (en) METAL COATING (OPTIONS) AND METHOD FOR ITS APPLICATION
CA2242619A1 (en) Process for applying protective and decorative coating on an article
BR0115221A (en) Low melting brazing product
WO2002075791A3 (en) Metal gate stack with etch stop layer improved through implantation of metallic atoms
EP1288325A4 (en) Galvannealed sheet steel and method for production thereof
CA2267492A1 (en) Formation of thin film resistors
CA2298278A1 (en) Composite film and process for its manufacture
CA2091090A1 (en) Nickel-chromium corrosion coating and process for producing it
WO2002031218B1 (en) Sputter targets
EP0738790A4 (en) Galvanized steel sheet and process for producing the same
CA2437990A1 (en) Zinc-base plated steel sheet and method for manufacturing same
CA2104058A1 (en) Organic Composite Coated Steel Plates Having Improved Corrosion Resistance in As-Worked State
CA2266814A1 (en) Erosion resistant coating
WO2002067278A3 (en) Electrolytic capacitors and method for making them
WO2004053203A3 (en) Method for the electrolytic deposition of magnesium or magnesium-zinc on galvanised sheet metal
TW340078B (en) Process of manufacturing rion-copper substrate coating welding containing metal-mesh intermediate layers
WO2005045102A3 (en) Coating of substrates
KR20170038108A (en) Method of metal coating and coating produced thereby
AU2003261992A1 (en) Resin-coated metal plate and drawn can using the same

Legal Events

Date Code Title Description
EEER Examination request
MKLA Lapsed