CA2316843A1 - Piezoelectric transducer - Google Patents
Piezoelectric transducer Download PDFInfo
- Publication number
- CA2316843A1 CA2316843A1 CA002316843A CA2316843A CA2316843A1 CA 2316843 A1 CA2316843 A1 CA 2316843A1 CA 002316843 A CA002316843 A CA 002316843A CA 2316843 A CA2316843 A CA 2316843A CA 2316843 A1 CA2316843 A1 CA 2316843A1
- Authority
- CA
- Canada
- Prior art keywords
- piezoelectric layer
- electrodes
- transmitter
- transducer element
- cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims 5
- 239000000758 substrate Substances 0.000 claims 5
- 238000007789 sealing Methods 0.000 claims 2
- 239000002033 PVDF binder Substances 0.000 claims 1
- 229910052738 indium Inorganic materials 0.000 claims 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/41—Detecting, measuring or recording for evaluating the immune or lymphatic systems
- A61B5/413—Monitoring transplanted tissue or organ, e.g. for possible rejection reactions after a transplant
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/0002—Remote monitoring of patients using telemetry, e.g. transmission of vital signals via a communication network
- A61B5/0031—Implanted circuitry
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/05—Detecting, measuring or recording for diagnosis by means of electric currents or magnetic fields; Measuring using microwaves or radio waves
- A61B5/053—Measuring electrical impedance or conductance of a portion of the body
- A61B5/0535—Impedance plethysmography
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/72—Devices for measuring pulsing fluid flows
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/302—Sensors
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/02—Details of sensors specially adapted for in-vivo measurements
- A61B2562/028—Microscale sensors, e.g. electromechanical sensors [MEMS]
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N1/00—Electrotherapy; Circuits therefor
- A61N1/18—Applying electric currents by contact electrodes
- A61N1/32—Applying electric currents by contact electrodes alternating or intermittent currents
- A61N1/36—Applying electric currents by contact electrodes alternating or intermittent currents for stimulation
- A61N1/372—Arrangements in connection with the implantation of stimulators
- A61N1/37211—Means for communicating with stimulators
- A61N1/37252—Details of algorithms or data aspects of communication system, e.g. handshaking, transmitting specific data or segmenting data
- A61N1/37288—Communication to several implantable medical devices within one patient
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S310/00—Electrical generator or motor structure
- Y10S310/80—Piezoelectric polymers, e.g. PVDF
Abstract
A miniature piezoelectric transducer element is provided, comprising: (a) a cell element having a cavity (3); (b) a flexible piezoelectric layer (2) attached to the cell member, the piezoelectric element layer (2) having an external surface and at internal surface, the piezoelectric layer featuring such dimensions so as to enable fluctuations thereof at its resonance frequency upon impinging of an external acoustic wave; and (c) a first electrode (8) attached to the external surface and a second electrode (6) attached to the internal surface of the piezoelectric layer. At least one of the electrodes may be specifically shaped so as to provide a maximal electrical output wherein the electrical output may be current, voltage or power. A preferred shape of the electrodes includes two cores interconnected by a connecting member. The transducer element may function as a transmitter. When used as a transmitter, the electrodes are electrically connected to an electrical circuit including a switching element for modulating the reflected acoustic wave by controllably changing the mechanical impedance of the piezoelectric layer according in the frequency of an electrical message signal arriving from an electronic member, such as a sensor. Third and fourth electrodes may be attached to the piezoelectric layer and the electrical circuit, such that the switching element alternately connects the electrodes in parallel and anti-parallel electrical connections so as to controllably change the mechanical impedance of the piezoelectric layer.
Claims (45)
1. A transducer element, comprising:
(a) a cell member having a cavity;
(b) a substantially flexible piezoelectric layer being peripherally attached to said cell member so as to isolate said cavity from its surroundings, and such that a central portion of said flexible piezoelectric layer being non-supported and freely floats over said cavity, said piezoelectric layer having an external surface and an internal surface, said piezoelectric layer featuring such dimensions so as to enable fluctuations thereof in-and-out of said cavity at its resonance frequency upon impinging of an external acoustic field;
and (c) a first electrode attached to said external surface and a second electrode attached to said internal surface.
(a) a cell member having a cavity;
(b) a substantially flexible piezoelectric layer being peripherally attached to said cell member so as to isolate said cavity from its surroundings, and such that a central portion of said flexible piezoelectric layer being non-supported and freely floats over said cavity, said piezoelectric layer having an external surface and an internal surface, said piezoelectric layer featuring such dimensions so as to enable fluctuations thereof in-and-out of said cavity at its resonance frequency upon impinging of an external acoustic field;
and (c) a first electrode attached to said external surface and a second electrode attached to said internal surface.
2. The transducer element of claim 1, wherein said cavity is etched into a substrate.
3. The transducer element of claim 2, wherein said substrate includes an electrically insulating layer and an electrically conducting layer.
4. The transducer element of claim 3, wherein said first electrode is integrally made with a substantially thin electrically conducting layer disposed on said substrate.
5. The transducer of claim 4, wherein said substantially thin electrically conducting layer is connected to said substrate by means of a sealing connection.
6. The transducer element of claim 3, wherein said electrically insulating layer is made of silicon.
7. The transducer element of claim 3, wherein said electrically insulating layer is made of a polymeric material.
8. The transducer element of claim 5, wherein said sealing connection is made of indium.
9. The transducer element of claim 1, wherein said piezoelectric layer is made of PVDF.
10. The transducer element of claim 1. wherein said cavity is circular in cross section.
11. The transducer element of claim 1, wherein said cavity is hexagonal in cross section.
12. The transducer element of claim 2, wherein said substrate includes a plurality of cell members.
13. The transducer element of claim 1, wherein at least one of said first and second electrodes is specifically shaped so as to provide a maximal electrical output.
14. The transducer element of claim 13, wherein said electrical output is current.
15. The transducer element of claim 13, wherein said electrical output is voltage.
16. The transducer element of claim 13, wherein said electrical output is power.
17. The transducer element of claim 13, wherein at least one of said electrodes features first and second electrode portions interconnected by a connecting member.
18. The transducer element of claim 1, wherein said cavity includes gas.
19. The transducer element of claim 18, wherein said gas is of substantially low pressure.
20. The transducer element of claim 19, wherein said transducer element is used as a transmitter.
21. The transducer element of claim 19, further including a switching element electrically connected thereto so as to controllably change the mechanical impedance of said piezoelectric layer.
22. A transmitter element, comprising:
(a) a cell element having a cavity;
(b) a substantially flexible piezoelectric layer being peripherally attached to said cell member so as to isolate said cavity from its surroundings, and such that a central portion of said flexible piezoelectric layer being non-supported and freely floats over said cavity, said piezoelectric layer having an external surface and an internal surface, said piezoelectric layer featuring such dimensions so as to enable fluctuations thereof in-and-out of said cavity at its resonance frequency upon impinging of an external acoustic field;
and (c) a first electrode attached to said external surface and a second electrode attached to said internal surface, said electrodes being electrically connected to an electrical circuit including a switching element for controllably changing the mechanical impedance of said piezoelectric layer.
(a) a cell element having a cavity;
(b) a substantially flexible piezoelectric layer being peripherally attached to said cell member so as to isolate said cavity from its surroundings, and such that a central portion of said flexible piezoelectric layer being non-supported and freely floats over said cavity, said piezoelectric layer having an external surface and an internal surface, said piezoelectric layer featuring such dimensions so as to enable fluctuations thereof in-and-out of said cavity at its resonance frequency upon impinging of an external acoustic field;
and (c) a first electrode attached to said external surface and a second electrode attached to said internal surface, said electrodes being electrically connected to an electrical circuit including a switching element for controllably changing the mechanical impedance of said piezoelectric layer.
23. The transmitter element of claim 22, wherein the switching frequency of said switching element equals the frequency of an electrical message signal arriving from an electronic member.
24. The transmitter element of claim 23, wherein said electronic member is a sensor.
25. The transmitter element of claim 22, wherein said switching element is for modulating a reflected acoustic wave according to a message signal arriving from an electronic component.
26. The transmitter element of claim 22, further including a third electrode attached so said external surface and a fourth electrode attached to said internal surface.
27. The transmitter element of claim 26, wherein said switching element alternately connects said electrodes in parallel and anti-parallel connections, thereby controllably changing the mechanical impedance of said piezoelectric layer.
28. The transmitter element of claim 26, wherein said electrodes are electrically interconnected by means of a substantially built-in anti-parallel connection.
29. The transmitter element of claim 26, wherein said electrodes are electrically interconnected by means of a substantially built-in parallel connection.
30. The transmitter element of claim 26, wherein said switching element is an on/off switch.
31. The transmitter element of claim 26, wherein said piezoelectric layer includes first and second portions having opposite polarities.
32. The transmitter element of claim 22, wherein said transmitter element includes two cell members.
33. The transmitter element of claim 32, wherein said two cell members are electrically interconnected by means of a substantially built-in parallel connection.
34. The transmitter element of claim 32, wherein said two cell members are electrically interconnected by means of a substantially built-in anti-parallel connection.
35. The transmitter element of claim 32, wherein said switching element alternately connects said cell members in parallel and anti-parallel connections.
36. The transmitter element of claim 32, wherein said cell members have piezoelectric layers of opposite polarities.
37. The transmitter element of claim 22, wherein said cavity is covered by a two-ply piezoelectric layer including an upper layer disposed on a lower layer.
38. The transmitter element of claim 37, wherein said upper and lower layers feature opposite polarities.
39. The transmitter element of claim 37, further including an insulating layer disposed between said upper and lower layers.
40. A method of transmitting an acoustic information, comprising:
(a) providing a substantially flexible piezoelectric layer having first and second electrodes attached thereto, said piezoelectric layer being attached to a cell member, said electrodes being electrical connected to an electrical circuit including a switching element;
(b) providing an acoustic wave for impinging on said piezoelectric layer, said acoustic wave having a reflected portion; and (c) modulating said reflected portion of said acoustic wave by controlling the mechanical impedance of said piezoelectric layer, said controlling being effected by switching said switching element at a frequency which equals the frequency of a message signal arriving from an electronic component.
(a) providing a substantially flexible piezoelectric layer having first and second electrodes attached thereto, said piezoelectric layer being attached to a cell member, said electrodes being electrical connected to an electrical circuit including a switching element;
(b) providing an acoustic wave for impinging on said piezoelectric layer, said acoustic wave having a reflected portion; and (c) modulating said reflected portion of said acoustic wave by controlling the mechanical impedance of said piezoelectric layer, said controlling being effected by switching said switching element at a frequency which equals the frequency of a message signal arriving from an electronic component.
41. The method of claim 40, wherein said electronic component is a sensor.
42. The method of claim 40, further comprising:
(a) providing third and fourth electrodes attached to said piezoelectric layer, said third and fourth electrodes being electrically connected to said electrical circuit; and (b) changing the electrical connections between said electrodes by means of said switching element so as to change the mechanical impedance of said piezoelectric layer.
(a) providing third and fourth electrodes attached to said piezoelectric layer, said third and fourth electrodes being electrically connected to said electrical circuit; and (b) changing the electrical connections between said electrodes by means of said switching element so as to change the mechanical impedance of said piezoelectric layer.
43. The method of claim 40, wherein said first and second electrodes are attached to a first cell member and said third and fourth electrodes are attached to a second cell member.
44. The method of claim 40, wherein said electronic component is a resistor.
45. The transducer element of claim 1, wherein said transducer is used as a sensor.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/000,553 US6140740A (en) | 1997-12-30 | 1997-12-30 | Piezoelectric transducer |
US09/000,553 | 1997-12-30 | ||
PCT/US1998/027669 WO1999034453A1 (en) | 1997-12-30 | 1998-12-28 | Piezoelectric transducer |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2316843A1 true CA2316843A1 (en) | 1999-07-08 |
CA2316843C CA2316843C (en) | 2010-09-21 |
Family
ID=21692008
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA2316843A Expired - Fee Related CA2316843C (en) | 1997-12-30 | 1998-12-28 | Piezoelectric transducer |
Country Status (8)
Country | Link |
---|---|
US (3) | US6140740A (en) |
EP (1) | EP1042822B1 (en) |
JP (1) | JP4288388B2 (en) |
AT (1) | ATE469441T1 (en) |
AU (1) | AU2450099A (en) |
CA (1) | CA2316843C (en) |
DE (1) | DE69841689D1 (en) |
WO (1) | WO1999034453A1 (en) |
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- 1997-12-30 US US09/000,553 patent/US6140740A/en not_active Expired - Lifetime
-
1998
- 1998-12-28 JP JP2000526980A patent/JP4288388B2/en not_active Expired - Fee Related
- 1998-12-28 DE DE69841689T patent/DE69841689D1/en not_active Expired - Lifetime
- 1998-12-28 AU AU24500/99A patent/AU2450099A/en not_active Abandoned
- 1998-12-28 AT AT98966753T patent/ATE469441T1/en not_active IP Right Cessation
- 1998-12-28 CA CA2316843A patent/CA2316843C/en not_active Expired - Fee Related
- 1998-12-28 WO PCT/US1998/027669 patent/WO1999034453A1/en active Application Filing
- 1998-12-28 EP EP98966753A patent/EP1042822B1/en not_active Expired - Lifetime
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2000
- 2000-10-20 US US09/691,887 patent/US6504286B1/en not_active Expired - Lifetime
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2002
- 2002-09-06 US US10/235,968 patent/US6720709B2/en not_active Expired - Fee Related
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WO1999034453A1 (en) | 1999-07-08 |
US6140740A (en) | 2000-10-31 |
EP1042822A4 (en) | 2006-09-13 |
ATE469441T1 (en) | 2010-06-15 |
US20030006673A1 (en) | 2003-01-09 |
EP1042822A1 (en) | 2000-10-11 |
US6504286B1 (en) | 2003-01-07 |
DE69841689D1 (en) | 2010-07-08 |
CA2316843C (en) | 2010-09-21 |
AU2450099A (en) | 1999-07-19 |
JP2002528887A (en) | 2002-09-03 |
JP4288388B2 (en) | 2009-07-01 |
US6720709B2 (en) | 2004-04-13 |
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