CA2302607A1 - Intelligent pressure regulator - Google Patents

Intelligent pressure regulator Download PDF

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Publication number
CA2302607A1
CA2302607A1 CA 2302607 CA2302607A CA2302607A1 CA 2302607 A1 CA2302607 A1 CA 2302607A1 CA 2302607 CA2302607 CA 2302607 CA 2302607 A CA2302607 A CA 2302607A CA 2302607 A1 CA2302607 A1 CA 2302607A1
Authority
CA
Canada
Prior art keywords
pressure
fluid
throttling element
regulator
pressure regulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA 2302607
Other languages
French (fr)
Other versions
CA2302607C (en
Inventor
Paul R. Adams
Karl J. Gabel
Daniel G. Roper
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fisher Controls International LLC
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to CA 2668314 priority Critical patent/CA2668314C/en
Priority to CA 2668315 priority patent/CA2668315C/en
Publication of CA2302607A1 publication Critical patent/CA2302607A1/en
Application granted granted Critical
Publication of CA2302607C publication Critical patent/CA2302607C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00Control of fluid pressure
    • G05D16/20Control of fluid pressure characterised by the use of electric means
    • G05D16/2093Control of fluid pressure characterised by the use of electric means with combination of electric and non-electric auxiliary power
    • G05D16/2095Control of fluid pressure characterised by the use of electric means with combination of electric and non-electric auxiliary power using membranes within the main valve
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/7722Line condition change responsive valves
    • Y10T137/7758Pilot or servo controlled
    • Y10T137/7761Electrically actuated valve
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/7722Line condition change responsive valves
    • Y10T137/7758Pilot or servo controlled
    • Y10T137/7762Fluid pressure type
    • Y10T137/7769Single acting fluid servo
    • Y10T137/777Spring biased
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/7722Line condition change responsive valves
    • Y10T137/7781With separate connected fluid reactor surface
    • Y10T137/7793With opening bias [e.g., pressure regulator]
    • Y10T137/7797Bias variable during operation
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/7722Line condition change responsive valves
    • Y10T137/7781With separate connected fluid reactor surface
    • Y10T137/7793With opening bias [e.g., pressure regulator]
    • Y10T137/7822Reactor surface closes chamber
    • Y10T137/7823Valve head in inlet chamber
    • Y10T137/7825Rectilinear valve stem rigid with reactor surface

Abstract

An intelligent pressure regulator for maintaining a fluid in a process at a predetermined pressure includes an electronic controller which enhances regulator performance and provides self-diagnostics and communications capabilites. The electronic controller includes a pressure sensor which provides a signal indicating the pressure of the fluid being controlled, an adjusting pressure for adjusting the position of a throttling element; and a PID controller which receives the signal indicating the pressure of the fluid being controlled and applies the adjusting pressure to the actuator in response to the signal.

Claims (20)

1. A self adjusting pressure regulator for maintaining a fluid at a desired pressure comprising:
a body defining a fluid flow passage;
a throttling element movable within the flow passage for selectively restricting fluid flow through the flow passage;
a pre-set actuator coupled to the throttling member that applies a pre-set force to the throttling member, the pre-set force corresponding to an estimated force required to position the throttling member to achieving the desired pressure;
a pressure sensor that provides an indication of the sensed pressure of the fluid to be maintained at a desired pressure; and an adjustable actuator coupled to the pressure sensor and adapted to apply a force to the throttling element, the adjustable actuator providing a force to the throttling element that varies with the difference between the sensed pressure and the desired pressure such that the throttling member is moved to reduce any difference between the sensed pressure and the desired pressure.
2. The self adjusting pressure regulator of claim 1 wherein the pre-set actuator comprises a spring.
3. The self adjusting pressure regulator of claim 1 wherein the adjustable actuator comprises a current to pressure converter that receives an electrical signal corresponding to the difference between the sensed pressure and the desired pressure and provides an output pneumatic pressure and wherein the throttling element is configured such that the output pneumatic pressure exerts a force on the throttling element.
4. The self adjusting regulator of claim 1 further comprising a communications circuit for providing a communication signal to external communication devices, wherein the communications signal corresponds to the difference between the sensed pressure and the desired pressure.
5. A pressure regulator for maintaining a fluid in a process at a predetermined pressure comprising:
a body defining fluid inlet, a fluid outlet, and a fluid flow passage in fluid connection with the inlet and the outlet;
a throttling element moveable within the flow passage for selectively restricting fluid flow through the flow passage;
an actuator coupled to the throttling element for selectively moving the throttling element, the actuator having a control side and a reference side;
a reference load coupled to the reference side of the actuator for biasing the throttling element to a predetermined reference position;

a feedback line for applying pressure from the fluid in the process to the control side of the actuator for moving the actuator against the reference load to position the throttling element within the flow passage;
a pressure sensor which provides a signal indicating the pressure of the fluid in the process;
a controller which receives the signal indicating the pressure of the fluid and outputs an adjustment signal representing an adjustment to the throttling element in response to the difference between the sensed pressure and the predetermined level; and an adjusting mechanism for further positioning the throttling element in response to the adjustment signal output by the controller.
6. The pressure regulator of claim 5 wherein the feedback line applies pressure from the fluid in the process downstream of the regulator
7. The pressure regulator of claim 5 wherein the actuator comprises a diaphragm.
8. The pressure regulator of claim 7 wherein the adjusting mechanism comprises a current to pressure converter which provides pneumatic pressure to the reference side of the actuator in response to the controller.
9. The pressure regulator of claim 5 wherein the reference load comprises a spring.
10. An electronic controller for a pressure regulator that uses the pressure of a fluid in a process to position a throttling element to restrict fluid flow through the pressure regulator, the electronic controller comprising:
a pressure sensor which provides a signal indicating the pressure of the fluid being controlled;
a processor which receives the signal indicating the pressure of the fluid being controlled and outputs a signal representing an adjustment to the throttling element in response to the difference between the sensed pressure and a predetermined pressure level; and an adjusting mechanism coupled to the processor and adapted to apply a force to the throttling element for adjusting the position of the throttling element in response to the signal output by the processor.
11. The electronic controller of claim 10 wherein the adjustment mechanism comprises a current to pressure converter that provides an output pneumatic pressure to the pressure regulator, wherein the pneumatic pressure from the controller results in an adjustment of the position of the throttling element
12. The electronic controller of claim 10 further comprising a power supply for powering the processor, wherein the power supply comprises a generator which uses the fluid in the process as an energy source.
13. The electronic controller of claim 10 wherein the electronic controller further comprises a memory structure, wherein the controller is adapted to store digital data concerning the operation of the pressure regulator in the memory structure, and wherein the controller includes a communications circuit for communication at least some of the stored digital data to devices external to the electronic controller.
14. A method for compensating for offset in a pressure regulator which uses the pressure of a fluid to position a throttling element to restrict flow of the fluid through the pressure regulator, the method comprising the acts of:
determining the pressure of the fluid being controlled;
calculating an error value by comparing the pressure of the fluid being controlled to a desired predetermined pressure level;
converting the error value to an adjusting pressure;
repositioning the throttling element by applying the adjusting pressure in addition to the pressure of the fluid being controlled to the throttling element.
15. An electronic controller for a pressure regulator that uses the pressure of a fluid being controlled to position a throttling element to restrict flow of the fluid through the pressure regulator, the electronic controller comprising:
means for sensing the pressure of the fluid being controlled;
means for determining the difference between the pressure of the fluid being controlled and a predetermined pressure level; and means for adjusting the position of the throttling element to eliminate the difference between the pressure of the fluid being controlled and the predetermined level.
16. A self adjusting pressure regulator comprising:
a body defining a fluid flow passage;
a throttling element movable within the flow passage for selectively restricting fluid flow through the flow passage;
a diaphragm coupled to the throttling element for selectively moving the throttling element, the diaphragm having a control side and a reference side;
an spring load coupled to the reference side of the diaphragm for biasing the diaphragm, and thus the throttling element, at a predetermined bias position;
a feedback line adapted to apply pressure from the fluid in the process to the control side of the diaphragm for moving the diaphragm, and thus the throttling element, to position the throttling element at a position corresponding to the pressure from the fluid;
a pressure sensor that provides an electrical signal indicative of the sensed pressure of the fluid;
an electronic controller that receives the electrical signal indicative of the sensed pressure of the fluid and compares that signal with an electrical signal indicative of a desired fluid pressure, the electronic controller generating an electrical error signal that varies with the difference between the electrical signal indicative of the sensed pressure and the electrical signal indicative of the desired fluid pressure; and a current to pressure transducer having an input adapted to receive the electrical error signal and an output adapted to provide a variable pneumatic pressure to the reference side of the diaphragm, wherein the variable pneumatic pressure provided by the current to pressure transducer varies with the electrical signal.
17. The self adjusting pressure regulator of claim 16 wherein the electronic controller includes a communications circuit and a memory, and wherein the controller is adapted to receive through the communications circuit an electrical signal representing the desired fluid pressure and to store a digital representation of that electrical signal in the memory.
18. The self adjusting pressure regulator of claim 16 further comprising a power source for supplying electrical power to the electronic controller and the current to pressure transducer.
19. The self adjusting pressure regulator of claim 18 wherein the power source comprises a solar panel and a battery system energized by the solar panel.
20. The pressure regulator of claim 16 wherein the pressure regulator further defines an input port in fluid connection with the fluid passage and an output port in fluid connection with the passage, wherein the input port is adapted to receive fluid at a pressure greater than the pressure of the fluid at the outlet port, and wherein the feedback line applies pressure from the outlet port to the control side of the diaphragm.
CA 2302607 1997-09-22 1998-09-10 Intelligent pressure regulator Expired - Lifetime CA2302607C (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CA 2668314 CA2668314C (en) 1997-09-22 1998-09-10 Intelligent pressure regulator
CA 2668315 CA2668315C (en) 1997-09-22 1998-09-10 Intelligent pressure regulator

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/934,943 1997-09-22
US08/934,943 US6056008A (en) 1997-09-22 1997-09-22 Intelligent pressure regulator
PCT/US1998/018928 WO1999015942A1 (en) 1997-09-22 1998-09-10 Intelligent pressure regulator

Related Child Applications (2)

Application Number Title Priority Date Filing Date
CA 2668315 Division CA2668315C (en) 1997-09-22 1998-09-10 Intelligent pressure regulator
CA 2668314 Division CA2668314C (en) 1997-09-22 1998-09-10 Intelligent pressure regulator

Publications (2)

Publication Number Publication Date
CA2302607A1 true CA2302607A1 (en) 1999-04-01
CA2302607C CA2302607C (en) 2010-07-20

Family

ID=25466313

Family Applications (3)

Application Number Title Priority Date Filing Date
CA 2302607 Expired - Lifetime CA2302607C (en) 1997-09-22 1998-09-10 Intelligent pressure regulator
CA 2668315 Expired - Lifetime CA2668315C (en) 1997-09-22 1998-09-10 Intelligent pressure regulator
CA 2668314 Expired - Lifetime CA2668314C (en) 1997-09-22 1998-09-10 Intelligent pressure regulator

Family Applications After (2)

Application Number Title Priority Date Filing Date
CA 2668315 Expired - Lifetime CA2668315C (en) 1997-09-22 1998-09-10 Intelligent pressure regulator
CA 2668314 Expired - Lifetime CA2668314C (en) 1997-09-22 1998-09-10 Intelligent pressure regulator

Country Status (10)

Country Link
US (2) US6056008A (en)
EP (1) EP1015950B1 (en)
JP (2) JP2001517821A (en)
CN (1) CN1147767C (en)
AT (1) ATE256883T1 (en)
AU (1) AU9478198A (en)
BR (1) BR9812378C1 (en)
CA (3) CA2302607C (en)
DE (1) DE69820653T2 (en)
WO (1) WO1999015942A1 (en)

Families Citing this family (159)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW539918B (en) * 1997-05-27 2003-07-01 Tokyo Electron Ltd Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process
US6056008A (en) * 1997-09-22 2000-05-02 Fisher Controls International, Inc. Intelligent pressure regulator
US6216728B1 (en) * 1998-03-13 2001-04-17 Ce Nuclear Power Llc Tunable anticipatory output response valve control
AU3674699A (en) * 1998-04-30 1999-11-16 Eugene Fourie A leakage detector, a latching solenoid, a flow meter, and liquid dispensing apparatus including same
NL1010815C2 (en) * 1998-12-15 2000-06-19 Chrompack Int Bv Apparatus and method for controlling the pressure of a gas flow.
US6269838B1 (en) * 1998-12-22 2001-08-07 Raymond Dexter Woodworth Rotary servovalve and control system
US6539315B1 (en) 1999-06-29 2003-03-25 Fisher Controls International, Inc. Regulator flow measurement apparatus
US7064671B2 (en) * 2000-06-23 2006-06-20 Fisher Controls International Llc Low power regulator system and method
US6895351B2 (en) * 1999-06-29 2005-05-17 Fisher Controls International Llc Regulator flow measurement apparatus
WO2001004718A1 (en) * 1999-07-09 2001-01-18 Tescom Corporation Electronic controlled pressure regulator system
EP1234322A2 (en) * 1999-11-02 2002-08-28 Tokyo Electron Limited Method and apparatus for supercritical processing of multiple workpieces
US6748960B1 (en) 1999-11-02 2004-06-15 Tokyo Electron Limited Apparatus for supercritical processing of multiple workpieces
DE10024441A1 (en) * 2000-05-19 2001-11-22 Hecht Gmbh Valve arrangement
KR100750018B1 (en) * 2000-07-26 2007-08-16 동경 엘렉트론 주식회사 High pressure processing chamber for semiconductor substrate
US7061595B2 (en) * 2000-08-02 2006-06-13 Honeywell International Inc. Miniaturized flow controller with closed loop regulation
US20020189543A1 (en) * 2001-04-10 2002-12-19 Biberger Maximilian A. High pressure processing chamber for semiconductor substrate including flow enhancing features
US6830061B2 (en) * 2001-04-27 2004-12-14 Fisher Controls International Llc Intelligent regulator with input/output capabilities
US7505818B1 (en) * 2001-09-07 2009-03-17 Siemens Energy & Automation, Inc. Converter method, system and apparatus
US6866061B2 (en) 2001-09-24 2005-03-15 Hydrogenics Corporation Back pressure valve with dynamic pressure control
US6725876B2 (en) * 2001-10-15 2004-04-27 Woodward Governor Company Control valve with integrated electro-hydraulic actuator
DE10154352B4 (en) * 2001-11-06 2015-09-17 Asco Numatics Gmbh Dosing device for dosing a flowing medium
DE50108787D1 (en) * 2001-11-23 2006-04-13 Siemens Ag Method for continuously controlling a position of a control valve
US6725167B2 (en) 2002-01-16 2004-04-20 Fisher Controls International Llc Flow measurement module and method
CA2474021A1 (en) * 2002-01-29 2003-08-07 Sit La Precisa S.P.A. A valve unit for modulating the delivery pressure of a gas
CA2416861A1 (en) 2002-02-01 2003-08-01 The Or Group,Inc. Reversed air mattress
AU2003215238A1 (en) * 2002-02-15 2003-09-09 Supercritical Systems Inc. Pressure enchanced diaphragm valve
DE10212806A1 (en) * 2002-03-22 2003-10-02 Zahnradfabrik Friedrichshafen Pressure control valve
US6986361B2 (en) * 2002-04-23 2006-01-17 Mendoza Michael J Compressed air flow controller
US6678584B2 (en) * 2002-05-03 2004-01-13 Fisher Controls International Llc Method and apparatus for performing diagnostics in a control loop of a control valve
US20040046670A1 (en) * 2002-09-05 2004-03-11 Adams Paul R. Gas blanket management system and method
US6722642B1 (en) 2002-11-06 2004-04-20 Tokyo Electron Limited High pressure compatible vacuum chuck for semiconductor wafer including lift mechanism
EP1574924A4 (en) * 2002-12-19 2006-07-26 Fujikin Kk Method for closing fluid passage, water hammerless valve and water hammerless closing device
AT6303U3 (en) 2003-03-21 2004-01-26 Avl List Gmbh METHOD FOR CONTINUOUSLY MEASURING DYNAMIC LIQUID CONSUMPTION, AND PRESSURE REGULATOR AND DEVICE FOR CONTINUOUSLY MEASURING DYNAMIC LIQUID CONSUMPTION
US6929026B1 (en) * 2003-03-28 2005-08-16 Joseph Wilfred Arlinghaus, Jr. Sanitary liquid pressure regulator
US6772784B1 (en) 2003-04-11 2004-08-10 Mac Valves, Inc. Proportional pressure regulator having positive and negative pressure delivery capability
US7270137B2 (en) * 2003-04-28 2007-09-18 Tokyo Electron Limited Apparatus and method of securing a workpiece during high-pressure processing
US20050034660A1 (en) * 2003-08-11 2005-02-17 Supercritical Systems, Inc. Alignment means for chamber closure to reduce wear on surfaces
US20050087235A1 (en) * 2003-10-22 2005-04-28 Skorpik James R. Sensor assembly, system including RFID sensor assemblies, and method
US8540493B2 (en) 2003-12-08 2013-09-24 Sta-Rite Industries, Llc Pump control system and method
US20050150552A1 (en) * 2004-01-06 2005-07-14 Randy Forshey Device, method, and system for controlling fluid flow
JP4406292B2 (en) * 2004-01-20 2010-01-27 株式会社フジキン Water hammerless opening method of fluid passage and water hammerless opening device using the same
US20050221243A1 (en) * 2004-03-31 2005-10-06 Najewicz David J Enhanced burner performance gas range system and method
US7250374B2 (en) * 2004-06-30 2007-07-31 Tokyo Electron Limited System and method for processing a substrate using supercritical carbon dioxide processing
US7874808B2 (en) 2004-08-26 2011-01-25 Pentair Water Pool And Spa, Inc. Variable speed pumping system and method
US8019479B2 (en) 2004-08-26 2011-09-13 Pentair Water Pool And Spa, Inc. Control algorithm of variable speed pumping system
US8602745B2 (en) 2004-08-26 2013-12-10 Pentair Water Pool And Spa, Inc. Anti-entrapment and anti-dead head function
US7845913B2 (en) 2004-08-26 2010-12-07 Pentair Water Pool And Spa, Inc. Flow control
US8469675B2 (en) 2004-08-26 2013-06-25 Pentair Water Pool And Spa, Inc. Priming protection
US7854597B2 (en) 2004-08-26 2010-12-21 Pentair Water Pool And Spa, Inc. Pumping system with two way communication
US8480373B2 (en) 2004-08-26 2013-07-09 Pentair Water Pool And Spa, Inc. Filter loading
US7686589B2 (en) 2004-08-26 2010-03-30 Pentair Water Pool And Spa, Inc. Pumping system with power optimization
US20060065288A1 (en) * 2004-09-30 2006-03-30 Darko Babic Supercritical fluid processing system having a coating on internal members and a method of using
ITMI20042116A1 (en) * 2004-11-04 2005-02-04 Bavelloni Z Spa PNEUMATIC DEVICE FOR THE CONTINUOUS CHANGE OF COMPRESSED AIR PRESSURE
US20060130966A1 (en) * 2004-12-20 2006-06-22 Darko Babic Method and system for flowing a supercritical fluid in a high pressure processing system
US20060134332A1 (en) * 2004-12-22 2006-06-22 Darko Babic Precompressed coating of internal members in a supercritical fluid processing system
US7434590B2 (en) * 2004-12-22 2008-10-14 Tokyo Electron Limited Method and apparatus for clamping a substrate in a high pressure processing system
US7140393B2 (en) * 2004-12-22 2006-11-28 Tokyo Electron Limited Non-contact shuttle valve for flow diversion in high pressure systems
US20060135047A1 (en) * 2004-12-22 2006-06-22 Alexei Sheydayi Method and apparatus for clamping a substrate in a high pressure processing system
US7435447B2 (en) * 2005-02-15 2008-10-14 Tokyo Electron Limited Method and system for determining flow conditions in a high pressure processing system
US7767145B2 (en) 2005-03-28 2010-08-03 Toyko Electron Limited High pressure fourier transform infrared cell
US7789971B2 (en) 2005-05-13 2010-09-07 Tokyo Electron Limited Treatment of substrate using functionalizing agent in supercritical carbon dioxide
US7524383B2 (en) * 2005-05-25 2009-04-28 Tokyo Electron Limited Method and system for passivating a processing chamber
GB0518637D0 (en) 2005-09-13 2005-10-19 Itw Ltd Back pressure regulator
US7828527B2 (en) * 2005-09-13 2010-11-09 Illinois Tool Works Inc. Paint circulating system and method
DE102005049061B3 (en) * 2005-10-13 2007-03-29 Samson Ag Pneumatic positioner position control device for use in process automation, has pneumatic bypass booster that is switched and adjusted such that bypass booster operates with small changes of signals of position controller-reference value
US7431015B2 (en) * 2006-01-31 2008-10-07 Honeywell International Inc. Fuel metering system proportional bypass valve error compensation system and method
DE502007004999D1 (en) * 2006-04-12 2010-10-21 Grieshaber Vega Kg TRANSMIT RECEIVER FOR WIRELESS TRANSMISSION OF FIELD DEVICE SIGNALS
US7953501B2 (en) * 2006-09-25 2011-05-31 Fisher-Rosemount Systems, Inc. Industrial process control loop monitor
DE102007017274A1 (en) * 2007-04-12 2008-10-30 BSH Bosch und Siemens Hausgeräte GmbH Method for detecting the position of a closure element in a water switch
US8091582B2 (en) 2007-04-13 2012-01-10 Cla-Val Co. System and method for hydraulically managing fluid pressure downstream from a main valve between set points
US20080251130A1 (en) * 2007-04-13 2008-10-16 Cla-Val Co. System and method for hydraulically managing fluid pressure downstream from a main valve
DE102007037696B3 (en) * 2007-08-09 2009-01-22 Samson Ag Anti-surge protection device for pneumatic actuator, has position controller pneumatically controlling actuating drive, where two control signals are respectively produced by pressures of actuating drive and controller
DE102007037922B3 (en) * 2007-08-10 2008-12-04 Siemens Ag Arrangement for pressure control in one of fluid flowing through line, has valve, which is arranged controllable in line, where pressure is controlled by valve
US20100071787A1 (en) * 2007-10-29 2010-03-25 Cla-Val Co. System, including a variable orifice assembly, for hydraulically managing pressure in a fluid distribution system between pressure set points
CL2008000317A1 (en) 2008-02-01 2008-03-28 Servicios Asoc A M Limitada PILOT FOR PRESSURE REGULATING VALVE THAT HAS A COMMUNICATION PIPE, BETWEEN THE VALVE CHAMBER AND A HIGH PRESSURE SOURCE, WHICH IS INTERRUPTED BY A CLOSING ELEMENT WITH ELECTRIC OPERATION.
US8040664B2 (en) 2008-05-30 2011-10-18 Itron, Inc. Meter with integrated high current switch
US9708942B2 (en) 2010-03-19 2017-07-18 Eaton Corporation Rocker arm assembly and components therefor
US9038586B2 (en) 2010-03-19 2015-05-26 Eaton Corporation Rocker assembly having improved durability
US8327750B2 (en) * 2008-07-22 2012-12-11 Eaton Corporation Valvetrain oil control system and oil control valve
US9284859B2 (en) 2010-03-19 2016-03-15 Eaton Corporation Systems, methods, and devices for valve stem position sensing
US10415439B2 (en) 2008-07-22 2019-09-17 Eaton Intelligent Power Limited Development of a switching roller finger follower for cylinder deactivation in internal combustion engines
US20190309663A9 (en) 2008-07-22 2019-10-10 Eaton Corporation Development of a switching roller finger follower for cylinder deactivation in internal combustion engines
US9581058B2 (en) 2010-08-13 2017-02-28 Eaton Corporation Development of a switching roller finger follower for cylinder deactivation in internal combustion engines
US9016252B2 (en) 2008-07-22 2015-04-28 Eaton Corporation System to diagnose variable valve actuation malfunctions by monitoring fluid pressure in a hydraulic lash adjuster gallery
US9291075B2 (en) 2008-07-22 2016-03-22 Eaton Corporation System to diagnose variable valve actuation malfunctions by monitoring fluid pressure in a control gallery
US9938865B2 (en) 2008-07-22 2018-04-10 Eaton Corporation Development of a switching roller finger follower for cylinder deactivation in internal combustion engines
US9228454B2 (en) 2010-03-19 2016-01-05 Eaton Coporation Systems, methods and devices for rocker arm position sensing
US8985074B2 (en) 2010-03-19 2015-03-24 Eaton Corporation Sensing and control of a variable valve actuation system
US7922833B2 (en) 2008-08-05 2011-04-12 Kennametal Inc. Gas regulator for thermal energy machining
WO2010042406A1 (en) 2008-10-06 2010-04-15 Pentair Water Pool And Spa, Inc. Method of operating a safety vacuum release system
US8564233B2 (en) 2009-06-09 2013-10-22 Sta-Rite Industries, Llc Safety system and method for pump and motor
US9556874B2 (en) 2009-06-09 2017-01-31 Pentair Flow Technologies, Llc Method of controlling a pump and motor
WO2010146469A2 (en) * 2009-06-17 2010-12-23 Jason Lall Electronic pressure regulator
US9194261B2 (en) 2011-03-18 2015-11-24 Eaton Corporation Custom VVA rocker arms for left hand and right hand orientations
US10087790B2 (en) 2009-07-22 2018-10-02 Eaton Corporation Cylinder head arrangement for variable valve actuation rocker arm assemblies
US11181013B2 (en) 2009-07-22 2021-11-23 Eaton Intelligent Power Limited Cylinder head arrangement for variable valve actuation rocker arm assemblies
IT1395402B1 (en) * 2009-07-24 2012-09-14 Sacmi CONTINUOUS OVEN
DE102009039515A1 (en) * 2009-08-31 2011-03-03 Vcs Medical Technology Gmbh Vacuum therapy device
US20110074601A1 (en) * 2009-09-30 2011-03-31 Itron, Inc. Utility meter with flow rate sensitivity shut off
US8890711B2 (en) * 2009-09-30 2014-11-18 Itron, Inc. Safety utility reconnect
US20110074600A1 (en) * 2009-09-30 2011-03-31 Itron, Inc. Utility remote disconnect from a meter reading system
US8493232B2 (en) * 2009-09-30 2013-07-23 Itron, Inc. Gas shut-off valve with feedback
US8967590B2 (en) * 2010-03-02 2015-03-03 Westlock Controls Corporation Micro-power generator for valve control applications
GB2491789B (en) * 2010-03-18 2016-10-05 Onesubsea Ip Uk Ltd Control and supply unit
US9885258B2 (en) 2010-03-19 2018-02-06 Eaton Corporation Latch interface for a valve actuating device
US9874122B2 (en) 2010-03-19 2018-01-23 Eaton Corporation Rocker assembly having improved durability
US8301275B2 (en) * 2010-06-04 2012-10-30 Sti Srl Modified proportional integral derivative controller
US9441453B2 (en) * 2010-08-04 2016-09-13 Safoco, Inc. Safety valve control system and method of use
US9345335B2 (en) * 2010-09-27 2016-05-24 Gualtiero G. Giori Pressure control and feedback system for an adjustable foam support apparatus
JP5463500B2 (en) * 2010-10-28 2014-04-09 ジヤトコ株式会社 Hydraulic control device
MX344350B (en) 2010-12-08 2016-12-13 Pentair Water Pool & Spa Inc Discharge vacuum relief valve for safety vacuum release system.
US20120234396A1 (en) * 2011-03-17 2012-09-20 Cameron International Corporation Pressure regulator with improved deadband
US8760103B2 (en) 2011-09-30 2014-06-24 Honeywell International Inc. Actuator power control circuit having fail-safe bypass switching
US8905064B2 (en) 2011-10-03 2014-12-09 Seik Oh Flow regulator for infusion pump and method of manufacturing the same
US9981529B2 (en) 2011-10-21 2018-05-29 Honeywell International Inc. Actuator having a test mode
US8749182B2 (en) 2011-11-08 2014-06-10 Honeywell International Inc. Actuator having an adjustable auxiliary output
US8588983B2 (en) 2011-11-09 2013-11-19 Honeywell International Inc. Actuator with diagnostics
US9041319B2 (en) 2011-11-09 2015-05-26 Honeywell International Inc. Actuator having an address selector
US10113762B2 (en) 2011-11-09 2018-10-30 Honeywell International Inc. Actuator having an adjustable running time
US8922140B2 (en) 2011-11-09 2014-12-30 Honeywell International Inc. Dual potentiometer address and direction selection for an actuator
EP3699718A1 (en) * 2011-12-29 2020-08-26 Schneider Electric Buildings, LLC Valve flow control optimization via customization of an intelligent actuator
US9546652B2 (en) * 2012-03-28 2017-01-17 Imo Industries, Inc. System and method for monitoring and control of cavitation in positive displacement pumps
US9092019B2 (en) * 2012-04-20 2015-07-28 Fisher Controls International Llc Methods and apparatus for analyzing effects of friction on process control devices
US9255578B2 (en) * 2012-07-31 2016-02-09 Fisher-Rosemount Systems, Inc. Systems and methods to monitor pump cavitation
US8833384B2 (en) 2012-08-06 2014-09-16 Schneider Electric Buildings, Llc Advanced valve actuation system with integral freeze protection
US9534795B2 (en) 2012-10-05 2017-01-03 Schneider Electric Buildings, Llc Advanced valve actuator with remote location flow reset
US9194791B2 (en) * 2012-10-18 2015-11-24 Caterpillar Inc. System for determining coefficients of seal friction
US9885360B2 (en) 2012-10-25 2018-02-06 Pentair Flow Technologies, Llc Battery backup sump pump systems and methods
US9005423B2 (en) 2012-12-04 2015-04-14 Itron, Inc. Pipeline communications
US10295080B2 (en) 2012-12-11 2019-05-21 Schneider Electric Buildings, Llc Fast attachment open end direct mount damper and valve actuator
USD750670S1 (en) 2013-02-22 2016-03-01 Eaton Corporation Rocker arm
US9709998B2 (en) 2013-03-14 2017-07-18 Marshall Excelsior Co. Pressure regulator
WO2014143922A1 (en) 2013-03-15 2014-09-18 Schneider Electric Buildings, Llc Advanced valve actuator with true flow feedback
US10007239B2 (en) 2013-03-15 2018-06-26 Schneider Electric Buildings Llc Advanced valve actuator with integral energy metering
US9423050B2 (en) * 2013-04-09 2016-08-23 Fisher Controls International Llc Intelligent actuator and method of monitoring actuator health and integrity
US9106171B2 (en) 2013-05-17 2015-08-11 Honeywell International Inc. Power supply compensation for an actuator
US9477237B2 (en) * 2013-06-03 2016-10-25 Tescom Corporation Pilot operated gas regulator with diaphragm protection
CN203982186U (en) * 2013-06-03 2014-12-03 泰思康公司 A kind of diagnostic device for control system
US10203706B2 (en) 2013-06-03 2019-02-12 Tescom Corporation Method and apparatus for conditional control of an electronic pressure regulator
US9624947B2 (en) * 2014-01-28 2017-04-18 Tescom Corporation Electronic controller with integral vent valve
DE112015000034T5 (en) 2014-03-03 2015-11-19 Eaton Corporation Valve operating device and method for its production
US9541467B2 (en) * 2014-06-10 2017-01-10 Star Envirotech, Inc. Automatic pressure-adjusting leak detecting apparatus and method
US10845781B2 (en) * 2015-03-23 2020-11-24 Fisher Controls International Llc Integrated process controller with loop and valve control capability
US11401938B2 (en) 2016-04-10 2022-08-02 Franklin Electric Co., Inc. Motor drive system and method
US10409298B2 (en) * 2017-04-27 2019-09-10 Marotta Controls, Inc. Electronically controlled regulator
US9977433B1 (en) 2017-05-05 2018-05-22 Hayward Industries, Inc. Automatic pool cleaner traction correction
US10940447B2 (en) * 2017-06-30 2021-03-09 Pulsair Systems, Inc. Control circuit for stopping the flow of fluid in a primary circuit, and related methods and devices
US10915954B2 (en) * 2017-12-26 2021-02-09 Chicago Mercantile Exchange Inc. Integration application utilizing a communications protocol
US11294406B2 (en) 2018-09-05 2022-04-05 Natural Gas Solutions North America, Llc Determining diaphragm life on a pressure regulator
MX2021004078A (en) 2018-10-12 2021-09-14 Bray Int Inc Smart valve with integrated electronics.
US11624453B2 (en) 2018-12-06 2023-04-11 Bray International, Inc. Smart valve adaptor with integrated electronics
EP3745007A1 (en) * 2019-05-29 2020-12-02 Microtecnica S.r.l. Pressure relief valve
KR102622920B1 (en) * 2019-09-20 2024-01-10 한국전력공사 Test device for pressure relief device
US11275393B2 (en) * 2019-11-07 2022-03-15 Pittway Sarl Air spring pressure regulating valve
US11938574B2 (en) 2021-01-22 2024-03-26 Illinois Tool Works Inc. Gas surge prevention using improved flow regulators in welding-type systems
US11801482B2 (en) 2021-02-17 2023-10-31 Illinois Tool Works Inc. Mixing fluids in welding-type equipment
US11920536B1 (en) 2021-05-17 2024-03-05 Gary Schultz Fuel pump with electronic controlled pressure regulation and failure mitigation
BR102021011549A2 (en) * 2021-06-14 2022-12-27 Petróleo Brasileiro S.A. - Petrobras MICROMETRIC VALVE ACTUATOR DEVICE FOR GAS PRESSURE CONTROL
EP4318169A1 (en) * 2022-08-06 2024-02-07 Fluigent Method for pressure regulation in a fluidic system

Family Cites Families (61)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2881792A (en) * 1952-03-07 1959-04-14 Spence Paulsen Regulating-valve means
US2975976A (en) * 1957-05-31 1961-03-21 Vapor Heating Corp Electro pneumatic temperature control system
US3225785A (en) * 1963-03-01 1965-12-28 Cons Electrodynamics Corp Servo-system for fluid flow regulating valves
US3890992A (en) * 1973-09-27 1975-06-24 Gulde Regelarmaturen Kg Method and apparatus for safeguarding pipe-lines against an inadmissibly high internal compressive load by a control valve with a pneumatic drive
JPS5224326A (en) * 1975-08-20 1977-02-23 Tokico Ltd Air pressure control device
US4029122A (en) * 1976-03-11 1977-06-14 Westinghouse Electric Corporation Apparatus and method for determining friction forces in position modulated valves
US4084539A (en) * 1976-09-24 1978-04-18 Copar Corporation Voltage to air pressure transducer
JPS5454330A (en) * 1977-10-11 1979-04-28 Tokico Ltd Pilot valve
JPS61125715A (en) * 1984-11-26 1986-06-13 Matsushita Electric Works Ltd Method for detecting hole mark position on multi-layer printing wiring board
JPS61173319A (en) * 1985-01-26 1986-08-05 Shoketsu Kinzoku Kogyo Co Ltd Regulator for fluid
JPH0658608B2 (en) * 1985-08-16 1994-08-03 トキコ株式会社 Adjustment method of pressure regulator controller
JPS62217313A (en) * 1986-03-19 1987-09-24 Yuken Kogyo Kk Control circuit for proportional electromagnetic type fluid control valve
JPH0750418B2 (en) * 1986-07-15 1995-05-31 黒田精工株式会社 Pneumatic Regulator
JPS6320603A (en) * 1986-07-15 1988-01-28 Tlv Co Ltd Automatic set reduction valve
JPS6330675A (en) * 1986-07-22 1988-02-09 Smc Corp Vacuum pressure regulator
JPS63189914A (en) * 1987-02-02 1988-08-05 Tlv Co Ltd Pressure regulating device for self adjusting valve
JPH0518581Y2 (en) * 1987-05-30 1993-05-18
JPS63312584A (en) * 1987-06-15 1988-12-21 Kubota Ltd Flow control device for valve
JPS63316110A (en) * 1987-06-19 1988-12-23 Hitachi Metals Ltd Pilot type gas governor using digital valve
JPH0618010B2 (en) * 1987-10-20 1994-03-09 帝国ピストンリング株式会社 Automatic pressure regulator
US4893646A (en) * 1988-04-28 1990-01-16 Tektronix, Inc. Fluid pressure regulator
JPH0620164Y2 (en) * 1988-06-16 1994-05-25 株式会社テイエルブイ Automatic pressure controller
JPH022718A (en) * 1988-06-17 1990-01-08 Matsushita Electric Ind Co Ltd Phase locked loop circuit
JPH0210412A (en) * 1988-06-29 1990-01-16 Suido Kiko Kk Electrically driving method for reducing valve and its pilot valve adjusting mechanism
US5109692A (en) * 1988-08-25 1992-05-05 Fisher Controls International Inc. Diagnostic apparatus and method for fluid control valves
US5197328A (en) * 1988-08-25 1993-03-30 Fisher Controls International, Inc. Diagnostic apparatus and method for fluid control valves
JPH02123406A (en) * 1988-11-02 1990-05-10 Fushiman Kk Pressure control valve
JPH02143611A (en) * 1988-11-25 1990-06-01 Toshiba Corp Digital/analog converter
US5047965A (en) * 1989-01-05 1991-09-10 Zlokovitz Robert J Microprocessor controlled gas pressure regulator
JPH02266405A (en) * 1989-04-06 1990-10-31 Yoshitake Seisakusho:Kk Remote control system for set pressure of pressure control valve
JPH0310213A (en) * 1989-06-07 1991-01-17 Fujitsu Ltd Manufacture of liquid crystal display device
US5251148A (en) * 1990-06-01 1993-10-05 Valtek, Inc. Integrated process control valve
US5163463A (en) * 1990-07-19 1992-11-17 Fisher Controls International, Inc. Mechanical flexure for motion amplification and transducer with same
JPH0519866A (en) * 1991-07-11 1993-01-29 Fuji Electric Co Ltd Light-to-air pressure conversion device
DE4124154C2 (en) * 1991-07-20 1995-11-02 Oeko Patent Finanz Ag Sanitary fitting
US5245333A (en) * 1991-09-25 1993-09-14 Rosemount Inc. Three wire low power transmitter
JPH05296201A (en) * 1992-04-22 1993-11-09 Yamatake Honeywell Co Ltd Positioner
US5253669A (en) * 1992-04-23 1993-10-19 Span Instruments, Inc. Controlling process gas flow
DE4218320A1 (en) * 1992-06-03 1993-12-09 Siemens Ag Method and device for testing a valve driven by a medium
GB9212122D0 (en) * 1992-06-09 1992-07-22 Technolog Ltd Water supply pressure control apparatus
US5439021A (en) * 1992-09-09 1995-08-08 Fisher Controls International, Inc. Electro-pneumatic converter
MX9306169A (en) * 1992-10-05 1995-01-31 Fisher Controls Int CALIBRATION OF THE ELECTRO-PNEUMATIC CONVERTER.
CA2107519C (en) * 1992-10-05 2002-04-09 Stephen George Seberger Communication system and method
JPH06131056A (en) * 1992-10-22 1994-05-13 Tanaka Seisakusho Kk Automatic pressure reducing valve
US5469877A (en) * 1993-08-04 1995-11-28 Fairchild Industrial Products Company Electric to pneumatic transducer
DE4326343A1 (en) * 1993-08-05 1995-02-09 Honeywell Ag Diganose system for control and shut-off valves
US5549137A (en) * 1993-08-25 1996-08-27 Rosemount Inc. Valve positioner with pressure feedback, dynamic correction and diagnostics
JPH07174255A (en) * 1993-12-20 1995-07-11 Toru Yoshida Pilot type motor-operated valve
IT1265319B1 (en) * 1993-12-22 1996-10-31 Nuovo Pignone Spa IMPROVED CONTROL SYSTEM FOR THE ACTUATOR OF A PNEUMATIC VALVE
US5434774A (en) * 1994-03-02 1995-07-18 Fisher Controls International, Inc. Interface apparatus for two-wire communication in process control loops
FR2718859B1 (en) * 1994-04-18 1996-08-14 Robert Schegerin Optimized pneumatic pressure regulator with electronic correction.
US5431182A (en) * 1994-04-20 1995-07-11 Rosemount, Inc. Smart valve positioner
US5427350A (en) * 1994-05-31 1995-06-27 Rinkewich; Isaac Electrically-operated control valve and water distribution system including same
DE4431463C2 (en) * 1994-09-03 1997-10-16 Honeywell Ag Compact controller for a control valve
DE69515096T2 (en) * 1994-10-18 2000-07-20 Neles Controls Oy Helsinki Method and device for determining a fault in a control valve arrangement in a control loop
JP3552767B2 (en) * 1994-12-08 2004-08-11 財団法人日本ガス機器検査協会 Fluid pressure automatic control system
US5499647A (en) * 1995-01-12 1996-03-19 Mac Valves, Inc. Method and valve assembly for controlling a pilot signal
US5526838A (en) * 1995-01-12 1996-06-18 Mac Valves, Inc. Method and valve assembly for controlling a pilot signal
US5687098A (en) * 1995-10-30 1997-11-11 Fisher Controls International, Inc. Device data acquisition
WO1997018452A2 (en) * 1995-11-14 1997-05-22 Siemens Aktiengesellschaft Process for testing the operation of fittings
US6056008A (en) * 1997-09-22 2000-05-02 Fisher Controls International, Inc. Intelligent pressure regulator

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