CA2288468A1 - Methods and apparatus for depositing scintillator material on radiation imager - Google Patents

Methods and apparatus for depositing scintillator material on radiation imager Download PDF

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Publication number
CA2288468A1
CA2288468A1 CA002288468A CA2288468A CA2288468A1 CA 2288468 A1 CA2288468 A1 CA 2288468A1 CA 002288468 A CA002288468 A CA 002288468A CA 2288468 A CA2288468 A CA 2288468A CA 2288468 A1 CA2288468 A1 CA 2288468A1
Authority
CA
Canada
Prior art keywords
scintillator material
detector array
array
methods
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002288468A
Other languages
French (fr)
Other versions
CA2288468C (en
Inventor
Reinhold Franz Wirth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of CA2288468A1 publication Critical patent/CA2288468A1/en
Application granted granted Critical
Publication of CA2288468C publication Critical patent/CA2288468C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0232—Optical elements or arrangements associated with the device
    • H01L31/02322—Optical elements or arrangements associated with the device comprising luminescent members, e.g. fluorescent sheets upon the device

Abstract

An apparatus to align the deposition of scintillator material on a radiation detector array includes a cover mask assembly configured to be positively positioned on a detector array and underlying pallet assembly to provide proper alignment of the mask with the array so that the active portion of the detector array may be coated with scintillator material without having the scintillator material on the adhesive and electrical contact portion of the detector array. An adhesive rim is disposed around the periphery of the active portion of the array and sized to provide the desired precise alignment of the mask over the detector array and form a seal with the array substrate and the pallet assembly to prevent migration of the scintillator material beyond the active area to be coated.
CA002288468A 1998-11-19 1999-11-04 Methods and apparatus for depositing scintillator material on radiation imager Expired - Fee Related CA2288468C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/195,656 1998-11-19
US09/195,656 US6146489A (en) 1998-11-19 1998-11-19 Method and apparatus for depositing scintillator material on radiation imager

Publications (2)

Publication Number Publication Date
CA2288468A1 true CA2288468A1 (en) 2000-05-19
CA2288468C CA2288468C (en) 2006-10-17

Family

ID=22722225

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002288468A Expired - Fee Related CA2288468C (en) 1998-11-19 1999-11-04 Methods and apparatus for depositing scintillator material on radiation imager

Country Status (5)

Country Link
US (1) US6146489A (en)
EP (1) EP1003226B1 (en)
JP (1) JP2000180556A (en)
CA (1) CA2288468C (en)
DE (1) DE69927228T2 (en)

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JP4440563B2 (en) * 2002-06-03 2010-03-24 三星モバイルディスプレイ株式會社 Mask frame assembly for thin film deposition of organic electroluminescent devices
US6926840B2 (en) * 2002-12-31 2005-08-09 Eastman Kodak Company Flexible frame for mounting a deposition mask
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WO2005072858A1 (en) 2004-01-26 2005-08-11 President And Fellows Of Harvard College Fluid delivery system and method
US8030057B2 (en) * 2004-01-26 2011-10-04 President And Fellows Of Harvard College Fluid delivery system and method
US7164140B2 (en) * 2004-03-31 2007-01-16 Fuji Photo Film Co., Ltd. Stimulable phosphor panel and method of producing stimulable phosphor panel
JP4266898B2 (en) * 2004-08-10 2009-05-20 キヤノン株式会社 Radiation detection apparatus, manufacturing method thereof, and radiation imaging system
KR100708654B1 (en) * 2004-11-18 2007-04-18 삼성에스디아이 주식회사 Mask assembly and mask frame assembly using the same
AU2006236410B2 (en) 2005-04-19 2012-11-01 President And Fellows Of Harvard College Fluidic structures including meandering and wide channels
US7608837B2 (en) * 2006-11-24 2009-10-27 Tower Semiconductor Ltd. High resolution integrated X-ray CMOS image sensor
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US8105499B2 (en) * 2008-07-14 2012-01-31 International Business Macines Corporation Transmission electron microscopy sample etching fixture
US8591829B2 (en) 2008-12-18 2013-11-26 Opko Diagnostics, Llc Reagent storage in microfluidic systems and related articles and methods
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JP6243898B2 (en) * 2012-04-19 2017-12-06 インテヴァック インコーポレイテッド Double mask device for solar cell manufacturing
US10679883B2 (en) * 2012-04-19 2020-06-09 Intevac, Inc. Wafer plate and mask arrangement for substrate fabrication
TWI518832B (en) 2012-04-26 2016-01-21 因特瓦克公司 System architecture for vacuum processing
US10062600B2 (en) 2012-04-26 2018-08-28 Intevac, Inc. System and method for bi-facial processing of substrates
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JP6100045B2 (en) * 2013-03-19 2017-03-22 キヤノン株式会社 Radiation detection apparatus, radiation detection system, and method of manufacturing radiation detection apparatus
US9490153B2 (en) 2013-07-26 2016-11-08 Varian Semiconductor Equipment Associates, Inc. Mechanical alignment of substrates to a mask
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JPH09297181A (en) * 1996-05-07 1997-11-18 Canon Inc Radiation image pick-up device
FR2758630B1 (en) * 1997-01-21 1999-04-09 Thomson Tubes Electroniques PROCESS FOR SEALING A SOLID STATE RADIATION DETECTOR AND DETECTOR OBTAINED THEREBY

Also Published As

Publication number Publication date
CA2288468C (en) 2006-10-17
DE69927228D1 (en) 2005-10-20
EP1003226A3 (en) 2000-06-07
DE69927228T2 (en) 2006-06-29
EP1003226B1 (en) 2005-09-14
EP1003226A2 (en) 2000-05-24
US6146489A (en) 2000-11-14
JP2000180556A (en) 2000-06-30

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