CA2217018A1 - Method and apparatus for step and repeat exposures - Google Patents

Method and apparatus for step and repeat exposures

Info

Publication number
CA2217018A1
CA2217018A1 CA002217018A CA2217018A CA2217018A1 CA 2217018 A1 CA2217018 A1 CA 2217018A1 CA 002217018 A CA002217018 A CA 002217018A CA 2217018 A CA2217018 A CA 2217018A CA 2217018 A1 CA2217018 A1 CA 2217018A1
Authority
CA
Canada
Prior art keywords
substrate
illumination
provides
structures
less
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002217018A
Other languages
French (fr)
Other versions
CA2217018C (en
Inventor
Patrick R. Fleming
Eric J. Borchers
Andrew J. Ouderkirk
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Co
Original Assignee
Minnesota Mining And Manufacturing Company
Patrick R. Fleming
Eric J. Borchers
Andrew J. Ouderkirk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minnesota Mining And Manufacturing Company, Patrick R. Fleming, Eric J. Borchers, Andrew J. Ouderkirk filed Critical Minnesota Mining And Manufacturing Company
Publication of CA2217018A1 publication Critical patent/CA2217018A1/en
Application granted granted Critical
Publication of CA2217018C publication Critical patent/CA2217018C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks

Abstract

An excimer laser projection ablation system provides less than the necessary amount of illumination to a substrate to completely ablate a structure. The system then moves the substrate a distance less than the image field at the substrate and provides an additional level of illumination. The system continues to move the substrate and provides additional illumination until the structures are fully ablated. The method and system for performing an improved step and repeat process preferably are used to create uniform repeating structures or three-dimensional structures.
CA002217018A 1995-04-26 1996-03-29 Method and apparatus for step and repeat exposures Expired - Fee Related CA2217018C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US42930295A 1995-04-26 1995-04-26
US08/429,302 1995-04-26
PCT/US1996/004322 WO1996033839A1 (en) 1995-04-26 1996-03-29 Method and apparatus for step and repeat exposures

Publications (2)

Publication Number Publication Date
CA2217018A1 true CA2217018A1 (en) 1996-10-31
CA2217018C CA2217018C (en) 2006-10-17

Family

ID=23702662

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002217018A Expired - Fee Related CA2217018C (en) 1995-04-26 1996-03-29 Method and apparatus for step and repeat exposures

Country Status (8)

Country Link
US (1) US6285001B1 (en)
EP (1) EP0822881B1 (en)
JP (1) JP4180654B2 (en)
KR (1) KR19990007929A (en)
AU (1) AU5325596A (en)
CA (1) CA2217018C (en)
DE (1) DE69637994D1 (en)
WO (1) WO1996033839A1 (en)

Families Citing this family (119)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6555449B1 (en) * 1996-05-28 2003-04-29 Trustees Of Columbia University In The City Of New York Methods for producing uniform large-grained and grain boundary location manipulated polycrystalline thin film semiconductors using sequential lateral solidfication
US7128737B1 (en) * 1997-10-22 2006-10-31 Carl Zeiss Meditec Ag Object figuring device
EP1089880B1 (en) 1998-04-29 2004-02-11 3M Innovative Properties Company Receptor sheet for inkjet printing having an embossed surface
JP2000294523A (en) * 1999-04-01 2000-10-20 Sony Corp Semiconductor manufacturing apparatus and manufacture for semiconductor device
EP1043110B1 (en) * 1999-04-02 2006-08-23 Murata Manufacturing Co., Ltd. Laser method for machining through holes in a ceramic green sheet
US6540367B1 (en) 1999-04-07 2003-04-01 3M Innovative Properties Company Structured surface articles containing geometric structures with compound faces and methods for making same
DE19915715A1 (en) * 1999-04-08 2000-10-19 Ticona Gmbh Microstructured components
AU5175500A (en) 1999-06-01 2000-12-18 3M Innovative Properties Company Optically transmissive microembossed receptor media
WO2000073082A1 (en) 1999-06-01 2000-12-07 3M Innovative Properties Company Random microembossed receptor media
US8728610B2 (en) 2000-02-25 2014-05-20 3M Innovative Properties Company Compound mold and structured surface articles containing geometric structures with compound faces and method of making same
TW575786B (en) * 2000-03-14 2004-02-11 Takashi Nishi Exposure controlling photomask and production method thereof
US6830993B1 (en) * 2000-03-21 2004-12-14 The Trustees Of Columbia University In The City Of New York Surface planarization of thin silicon films during and after processing by the sequential lateral solidification method
US6462859B1 (en) 2000-10-04 2002-10-08 3M Innovative Properties Company Electromagnetically responsive particle assembly and methods and articles for manufacture and use
EP1259985A2 (en) * 2000-10-10 2002-11-27 The Trustees Of Columbia University In The City Of New York Method and apparatus for processing thin metal layers
AU2002235144A1 (en) * 2000-11-27 2002-06-03 The Trustees Of Columbia University In The City Of New York Process and mask projection system for laser crystallization processing of semiconductor film regions on a substrate
NL1016735C2 (en) * 2000-11-29 2002-05-31 Ocu Technologies B V Method for forming a nozzle in a member for an inkjet printhead, a nozzle member, an inkjet printhead provided with this nozzle member and an inkjet printer provided with such a printhead.
US20020164446A1 (en) 2001-01-17 2002-11-07 Zhiming Zhou Pressure sensitive adhesives with a fibrous reinforcing material
US6762124B2 (en) 2001-02-14 2004-07-13 Avery Dennison Corporation Method for patterning a multilayered conductor/substrate structure
JP2005525689A (en) * 2001-08-27 2005-08-25 ザ トラスティーズ オブ コロンビア ユニヴァーシティ イン ザ シティ オブ ニューヨーク Improving the uniformity of polycrystalline thin-film transistors by microstructure misalignment
US6881203B2 (en) 2001-09-05 2005-04-19 3M Innovative Properties Company Microneedle arrays and methods of manufacturing the same
US6908453B2 (en) 2002-01-15 2005-06-21 3M Innovative Properties Company Microneedle devices and methods of manufacture
US6897164B2 (en) * 2002-02-14 2005-05-24 3M Innovative Properties Company Aperture masks for circuit fabrication
US20030151118A1 (en) * 2002-02-14 2003-08-14 3M Innovative Properties Company Aperture masks for circuit fabrication
US6821348B2 (en) * 2002-02-14 2004-11-23 3M Innovative Properties Company In-line deposition processes for circuit fabrication
US6583936B1 (en) 2002-03-11 2003-06-24 Eastman Kodak Company Patterned roller for the micro-replication of complex lenses
AU2003220611A1 (en) * 2002-04-01 2003-10-20 The Trustees Of Columbia University In The City Of New York Method and system for providing a thin film
KR20120087197A (en) 2002-07-19 2012-08-06 쓰리엠 이노베이티브 프로퍼티즈 컴파니 Microneedle device, method of using microneedle device and method of delivering microneedle device
CN100459041C (en) * 2002-08-19 2009-02-04 纽约市哥伦比亚大学托管会 Process and system for laser crystallization processing of film regions on a substrate to minimize edge areas, and structure of such film regions
US7718517B2 (en) 2002-08-19 2010-05-18 Im James S Single-shot semiconductor processing system and method having various irradiation patterns
TWI325157B (en) * 2002-08-19 2010-05-21 Univ Columbia Process and system for laser crystallization processing of film regions on a substrate to provide substantial uniformity, and a structure of such film regions
JP5030382B2 (en) * 2002-08-19 2012-09-19 ザ トラスティーズ オブ コロンビア ユニヴァーシティ イン ザ シティ オブ ニューヨーク Laser crystallization process and system for processing film regions on a substrate so that these regions and their end regions are substantially uniform
US7030010B2 (en) * 2002-08-29 2006-04-18 Micron Technology, Inc. Methods for creating electrophoretically insulated vias in semiconductive substrates and resulting structures
WO2004075263A2 (en) 2003-02-19 2004-09-02 The Trustees Of Columbia University In The City Of New York System and process for processing a plurality of semiconductor thin films which are crystallized using sequential lateral solidification techniques
US7371452B2 (en) * 2003-04-28 2008-05-13 Eastman Kodak Company Conductive patterned sheet utilizing multi-layered conductive conduit channels
US8062734B2 (en) * 2003-04-28 2011-11-22 Eastman Kodak Company Article comprising conductive conduit channels
US20060110580A1 (en) * 2003-04-28 2006-05-25 Aylward Peter T Article comprising conductive conduit channels
US7001658B2 (en) * 2003-04-28 2006-02-21 Eastman Kodak Company Heat selective electrically conductive polymer sheet
US7138170B2 (en) * 2003-04-28 2006-11-21 Eastman Kodak Company Terminated conductive patterned sheet utilizing conductive conduits
WO2005029548A2 (en) * 2003-09-16 2005-03-31 The Trustees Of Columbia University In The City Of New York System and process for providing multiple beam sequential lateral solidification
WO2005029546A2 (en) 2003-09-16 2005-03-31 The Trustees Of Columbia University In The City Of New York Method and system for providing a continuous motion sequential lateral solidification for reducing or eliminating artifacts, and a mask for facilitating such artifact reduction/elimination
US7318866B2 (en) * 2003-09-16 2008-01-15 The Trustees Of Columbia University In The City Of New York Systems and methods for inducing crystallization of thin films using multiple optical paths
US7164152B2 (en) * 2003-09-16 2007-01-16 The Trustees Of Columbia University In The City Of New York Laser-irradiated thin films having variable thickness
WO2005029547A2 (en) 2003-09-16 2005-03-31 The Trustees Of Columbia University In The City Of New York Enhancing the width of polycrystalline grains with mask
US7364952B2 (en) 2003-09-16 2008-04-29 The Trustees Of Columbia University In The City Of New York Systems and methods for processing thin films
TWI351713B (en) 2003-09-16 2011-11-01 Univ Columbia Method and system for providing a single-scan, con
WO2005029550A2 (en) * 2003-09-16 2005-03-31 The Trustees Of Columbia University In The City Of New York Method and system for producing crystalline thin films with a uniform crystalline orientation
TWI359441B (en) 2003-09-16 2012-03-01 Univ Columbia Processes and systems for laser crystallization pr
US7311778B2 (en) 2003-09-19 2007-12-25 The Trustees Of Columbia University In The City Of New York Single scan irradiation for crystallization of thin films
US20050213914A1 (en) * 2004-03-23 2005-09-29 Motorola, Inc. High efficiency light guide
US7092163B2 (en) * 2004-07-22 2006-08-15 General Electric Company Light collimating and diffusing film and system for making the film
US7645337B2 (en) 2004-11-18 2010-01-12 The Trustees Of Columbia University In The City Of New York Systems and methods for creating crystallographic-orientation controlled poly-silicon films
US8221544B2 (en) 2005-04-06 2012-07-17 The Trustees Of Columbia University In The City Of New York Line scan sequential lateral solidification of thin films
US20060282399A1 (en) * 2005-05-09 2006-12-14 Richard Ackermann Digital sound recording personalized at a time and place remote from initial delivery to a retail customer
US8278590B2 (en) * 2005-05-27 2012-10-02 Resonetics, LLC Apparatus for minimizing a heat affected zone during laser micro-machining
GB0511132D0 (en) * 2005-06-01 2005-07-06 Plastic Logic Ltd Layer-selective laser ablation patterning
GB0518105D0 (en) * 2005-09-06 2005-10-12 Plastic Logic Ltd Step-and-repeat laser ablation of electronic devices
JP2007054992A (en) * 2005-08-23 2007-03-08 Sii Printek Inc Method and apparatus for manufacturing nozzle plate for inkjet head, nozzle plate for inkjet head, inkjet head, and inkjet recording apparatus
US7577396B2 (en) * 2005-09-21 2009-08-18 Oki Data Corporation Printing apparatus
JP2009518864A (en) 2005-12-05 2009-05-07 ザ トラスティーズ オブ コロンビア ユニヴァーシティ イン ザ シティ オブ ニューヨーク System and method for processing membranes and thin films
US20070235902A1 (en) * 2006-03-31 2007-10-11 3M Innovative Properties Company Microstructured tool and method of making same using laser ablation
US20070231541A1 (en) * 2006-03-31 2007-10-04 3M Innovative Properties Company Microstructured tool and method of making same using laser ablation
GB2438600B (en) * 2006-05-19 2008-07-09 Exitech Ltd Method for patterning thin films on moving substrates
GB2438601B (en) * 2006-05-24 2008-04-09 Exitech Ltd Method and unit for micro-structuring a moving substrate
US7807938B2 (en) * 2006-06-22 2010-10-05 Sabic Innovative Plastics Ip B.V. Mastering tools and systems and methods for forming a plurality of cells on the mastering tools
US8262381B2 (en) * 2006-06-22 2012-09-11 Sabic Innovative Plastics Ip B.V. Mastering tools and systems and methods for forming a cell on the mastering tools
US20080027199A1 (en) 2006-07-28 2008-01-31 3M Innovative Properties Company Shape memory polymer articles with a microstructured surface
US7951319B2 (en) * 2006-07-28 2011-05-31 3M Innovative Properties Company Methods for changing the shape of a surface of a shape memory polymer article
US7800825B2 (en) 2006-12-04 2010-09-21 3M Innovative Properties Company User interface including composite images that float
KR101386173B1 (en) * 2007-04-26 2014-04-29 삼성디스플레이 주식회사 Method for manufacturing lens forming master and method for thin film transistor substrate using the same
US20090041986A1 (en) * 2007-06-21 2009-02-12 3M Innovative Properties Company Method of making hierarchical articles
US20090114618A1 (en) * 2007-06-21 2009-05-07 3M Innovative Properties Company Method of making hierarchical articles
US20080315459A1 (en) * 2007-06-21 2008-12-25 3M Innovative Properties Company Articles and methods for replication of microstructures and nanofeatures
FI2165224T3 (en) 2007-07-11 2024-01-11 Thales Dis France Sas Sheeting with composite image that floats
US8614471B2 (en) 2007-09-21 2013-12-24 The Trustees Of Columbia University In The City Of New York Collections of laterally crystallized semiconductor islands for use in thin film transistors
US8415670B2 (en) 2007-09-25 2013-04-09 The Trustees Of Columbia University In The City Of New York Methods of producing high uniformity in thin film transistor devices fabricated on laterally crystallized thin films
US8498464B2 (en) * 2007-09-27 2013-07-30 Siemens Medical Solutions Usa, Inc. Intrinsic co-registration for modular multimodality medical imaging systems
US7985941B2 (en) 2007-11-16 2011-07-26 3M Innovative Properties Company Seamless laser ablated roll tooling
US8557040B2 (en) 2007-11-21 2013-10-15 The Trustees Of Columbia University In The City Of New York Systems and methods for preparation of epitaxially textured thick films
WO2009067688A1 (en) 2007-11-21 2009-05-28 The Trustees Of Columbia University In The City Of New York Systems and methods for preparing epitaxially textured polycrystalline films
US8012861B2 (en) 2007-11-21 2011-09-06 The Trustees Of Columbia University In The City Of New York Systems and methods for preparing epitaxially textured polycrystalline films
US8586285B2 (en) 2007-11-27 2013-11-19 3M Innovative Properties Company Methods for forming sheeting with a composite image that floats and a master tooling
US8569155B2 (en) 2008-02-29 2013-10-29 The Trustees Of Columbia University In The City Of New York Flash lamp annealing crystallization for large area thin films
GB0804955D0 (en) * 2008-03-18 2008-04-16 Rumsby Philip T Method and apparatus for laser processing the surface of a drum
EP2119527A1 (en) * 2008-05-16 2009-11-18 Kba-Giori S.A. Method and system for manufacturing intaglio printing plates for the production of security papers
KR20110094022A (en) 2008-11-14 2011-08-19 더 트러스티이스 오브 콜롬비아 유니버시티 인 더 시티 오브 뉴욕 Systems and methods for the crystallization of thin films
US20100128351A1 (en) * 2008-11-21 2010-05-27 3M Innovative Properties Company Curved sided cone structures for controlling gain and viewing angle in an optical film
US20100129617A1 (en) * 2008-11-21 2010-05-27 Corrigan Thomas R Laser ablation tooling via sparse patterned masks
US20100252961A1 (en) * 2009-04-06 2010-10-07 3M Innovative Properties Company Optical film replication on low thermal diffusivity tooling with conformal coating
US9291752B2 (en) 2013-08-19 2016-03-22 3M Innovative Properties Company Retroreflecting optical construction
WO2010120871A1 (en) 2009-04-15 2010-10-21 3M Innovative Properties Company Optical film for preventing optical coupling
TWI605276B (en) 2009-04-15 2017-11-11 ３Ｍ新設資產公司 Optical construction and display system incorporating same
BRPI1006654A2 (en) 2009-04-15 2016-02-10 3M Innovative Properties Co retroreflective optical constructions and optical films
CN102460244B (en) 2009-04-15 2014-11-19 3M创新有限公司 Lightguide with optical film containing voids and blacklight for display system
US20110070398A1 (en) * 2009-09-18 2011-03-24 3M Innovative Properties Company Laser ablation tooling via distributed patterned masks
US9646831B2 (en) 2009-11-03 2017-05-09 The Trustees Of Columbia University In The City Of New York Advanced excimer laser annealing for thin films
US8440581B2 (en) 2009-11-24 2013-05-14 The Trustees Of Columbia University In The City Of New York Systems and methods for non-periodic pulse sequential lateral solidification
US9087696B2 (en) 2009-11-03 2015-07-21 The Trustees Of Columbia University In The City Of New York Systems and methods for non-periodic pulse partial melt film processing
US20130004967A1 (en) 2009-11-23 2013-01-03 Halverson Kurt J Microwell array articles and methods of use
WO2011063313A1 (en) 2009-11-23 2011-05-26 3M Innovative Properties Company Carrier with flexible microassay device and methods of use
EP2523802A1 (en) 2010-01-13 2012-11-21 3M Innovative Properties Company Optical films with microstructured low refractive index nanovoided layers and methods therefor
US8917447B2 (en) * 2010-01-13 2014-12-23 3M Innovative Properties Company Microreplicated film for attachment to autostereoscopic display components
EP3495134B1 (en) 2010-04-15 2020-11-25 3M Innovative Properties Co. Retroreflective articles including optically active areas and optically inactive areas
WO2011129831A1 (en) 2010-04-15 2011-10-20 3M Innovative Properties Company Retroreflective articles including optically active areas and optically inactive areas
KR101954456B1 (en) 2010-04-15 2019-03-05 쓰리엠 이노베이티브 프로퍼티즈 캄파니 Retroreflective articles including optically active areas and optically inactive areas
US8538224B2 (en) 2010-04-22 2013-09-17 3M Innovative Properties Company OLED light extraction films having internal nanostructures and external microstructures
US8547015B2 (en) 2010-10-20 2013-10-01 3M Innovative Properties Company Light extraction films for organic light emitting devices (OLEDs)
US8469551B2 (en) 2010-10-20 2013-06-25 3M Innovative Properties Company Light extraction films for increasing pixelated OLED output with reduced blur
US8299708B2 (en) 2010-10-25 2012-10-30 Hewlett-Packard Development Company, L.P. Pixel structures
US20120195550A1 (en) * 2011-01-31 2012-08-02 Global Lighting Technology Inc. Method of making optical microstructure pattern on light guide plate, light guide plate thereof and imprinting mold
KR101985030B1 (en) 2011-05-25 2019-05-31 쓰리엠 이노베이티브 프로퍼티즈 컴파니 Light control film
US10071461B2 (en) 2014-04-03 2018-09-11 3M Innovative Properties Company Polishing pads and systems and methods of making and using the same
CN107003531B (en) 2014-11-19 2019-11-29 通快激光与系统工程有限公司 System for asymmetrical optical beam shaping
DE102014116957A1 (en) 2014-11-19 2016-05-19 Trumpf Laser- Und Systemtechnik Gmbh Optical system for beam shaping
DE102014116958B9 (en) 2014-11-19 2017-10-05 Trumpf Laser- Und Systemtechnik Gmbh Optical system for beam shaping of a laser beam, laser processing system, method for material processing and use of a common elongated focus zone for laser material processing
TWI769988B (en) 2015-10-07 2022-07-11 美商3M新設資產公司 Polishing pads and systems and methods of making and using the same
WO2017200964A1 (en) 2016-05-19 2017-11-23 3M Innovative Properties Company Compressible multilayer articles and method of making thereof
US10195713B2 (en) 2016-08-11 2019-02-05 3M Innovative Properties Company Lapping pads and systems and methods of making and using the same
CN110300662A (en) 2017-02-20 2019-10-01 3M创新有限公司 Micro-structural elastomer film and preparation method thereof
EP3983836A4 (en) 2019-06-12 2023-06-28 3M Innovative Properties Company High transmission light control films with asymmetric light output

Family Cites Families (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5064989B1 (en) 1957-06-27 1996-10-29 Jerome H Lemelson Surface shaping and finishing apparatus and method
CH572798A5 (en) * 1974-01-14 1976-02-27 Lasag Sa Conical holes produced by laser beam - using diaphragm with apertures of different dia. and driven by stepper motor
DE3145278C2 (en) * 1981-11-14 1985-02-14 Schott-Zwiesel-Glaswerke Ag, 8372 Zwiesel Method for the contactless removal of material from the surface of a glass object and device for carrying out the method
US4508749A (en) 1983-12-27 1985-04-02 International Business Machines Corporation Patterning of polyimide films with ultraviolet light
US4822975A (en) * 1984-01-30 1989-04-18 Canon Kabushiki Kaisha Method and apparatus for scanning exposure
US5171965A (en) * 1984-02-01 1992-12-15 Canon Kabushiki Kaisha Exposure method and apparatus
US5262718A (en) 1985-08-05 1993-11-16 Raychem Limited Anisotropically electrically conductive article
US4856513A (en) 1987-03-09 1989-08-15 Summit Technology, Inc. Laser reprofiling systems and methods
US4752668A (en) 1986-04-28 1988-06-21 Rosenfield Michael G System for laser removal of excess material from a semiconductor wafer
US4842784A (en) 1986-07-30 1989-06-27 Miyama Kogyo Kabushiki Kaisha Method of manufacturing a climbing step with embedded reflection plate
US4786358A (en) 1986-08-08 1988-11-22 Semiconductor Energy Laboratory Co., Ltd. Method for forming a pattern of a film on a substrate with a laser beam
JPS6384789A (en) 1986-09-26 1988-04-15 Semiconductor Energy Lab Co Ltd Light working method
US5179262A (en) 1986-10-14 1993-01-12 Allergan, Inc. Manufacture of ophthalmic lenses by excimer laser
US4842782A (en) 1986-10-14 1989-06-27 Allergan, Inc. Manufacture of ophthalmic lenses by excimer laser
US5053171A (en) 1986-10-14 1991-10-01 Allergan, Inc. Manufacture of ophthalmic lenses by excimer laser
EP0328325B1 (en) 1988-02-05 1994-09-21 Raychem Limited Laminar polymeric sheet
JPH01245993A (en) 1988-03-27 1989-10-02 Semiconductor Energy Lab Co Ltd Thin film working device
JPH02167164A (en) * 1988-06-09 1990-06-27 Lri Lp Carving instrument for
WO1990003662A1 (en) 1988-09-30 1990-04-05 Raychem Limited Hybrid microchip bonding article
US4909818A (en) 1988-11-16 1990-03-20 Jones William F System and process for making diffractive contact
US4894115A (en) * 1989-02-14 1990-01-16 General Electric Company Laser beam scanning method for forming via holes in polymer materials
GB8916133D0 (en) 1989-07-14 1989-08-31 Raychem Ltd Laser machining
CA2021110A1 (en) * 1989-09-05 1991-03-06 Colloptics, Inc. Laser shaping with an area patterning mask
US5018164A (en) 1989-09-12 1991-05-21 Hughes Aircraft Company Excimer laser ablation method and apparatus for microcircuit fabrication
US5066357A (en) * 1990-01-11 1991-11-19 Hewlett-Packard Company Method for making flexible circuit card with laser-contoured vias and machined capacitors
US5223693A (en) 1990-04-28 1993-06-29 Mitsubishi Denki Kabushiki Kaisha Optical machining apparatus
US5170191A (en) 1990-05-18 1992-12-08 Bausch & Lomb Incorporated Target domain profiling of target optical surfaces using excimer laser photoablation
US5240553A (en) 1990-05-18 1993-08-31 Bausch & Lomb Incorporated One and two dimensional target domain profiling of target optical surfaces using excimer laser photoablation
US5061342A (en) 1990-05-18 1991-10-29 Bausch & Lomb Incorporated Target domain profiling of target optical surfaces using excimer laser photoablation
NL9002036A (en) * 1990-09-17 1992-04-16 Philips Nv DEVICE AND METHOD FOR APPLYING MARKING MARKS TO AN ARTICLE WITH ELECTROMAGNETIC RADIATION, AND APPLYING MARKING WITH OBJECTS.
US5362940A (en) * 1990-11-09 1994-11-08 Litel Instruments Use of Fresnel zone plates for material processing
US5160823A (en) * 1991-01-03 1992-11-03 Hutchinson Technology, Inc. Moving mask laser imaging
DE69210858T2 (en) 1991-02-21 1996-11-28 Hewlett Packard Co Photo-removal method of at least one stepped opening which penetrates a polymeric material and a nozzle plate which has a stepped opening
FR2679477B1 (en) 1991-07-26 1995-11-17 Aerospatiale LASER BEAM CUTTING METHOD OF A MATERIAL COVERING A SUBSTRATE AND DEVICES FOR IMPLEMENTING SAME.
IE912667A1 (en) * 1991-07-29 1993-02-10 Trinity College Dublin Laser Profiling of Lens Edge
US5368900A (en) * 1991-11-04 1994-11-29 Motorola, Inc. Multistep laser ablation method for making optical waveguide reflector
US5208818A (en) * 1991-12-12 1993-05-04 Creo Products Inc. Laser system for recording data patterns on a planar substrate
FR2692067A1 (en) * 1992-06-05 1993-12-10 Laser Int Sa Prodn. of components from photo-transformable materials - having a mechanical device to vary light spot area, for rapid prototyping of industrial components
US5514850A (en) * 1992-06-30 1996-05-07 Sharp Kabushiki Kaisha Defect compensation method for smoothing a surface of a transparent plate with an ArF excimer laser beam
US5257706A (en) 1992-09-29 1993-11-02 Bausch & Lomb Incorporated Method of cleaning laser ablation debris
JP3211525B2 (en) 1993-04-22 2001-09-25 オムロン株式会社 Thin material mesh, its manufacturing method and its manufacturing apparatus
US5461212A (en) * 1993-06-04 1995-10-24 Summit Technology, Inc. Astigmatic laser ablation of surfaces
CN1125411A (en) * 1993-06-11 1996-06-26 博士伦公司 Method of minimizing diffraction groove formation on laser etched surfaces
US6263096B1 (en) 1999-06-23 2001-07-17 The Board Of Trustees Of The University Of Illinois Multilevel domain decomposition method for fast reprojection of images

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KR19990007929A (en) 1999-01-25
US6285001B1 (en) 2001-09-04
WO1996033839A1 (en) 1996-10-31
JPH11504264A (en) 1999-04-20
DE69637994D1 (en) 2009-09-24
AU5325596A (en) 1996-11-18
CA2217018C (en) 2006-10-17
JP4180654B2 (en) 2008-11-12
EP0822881A1 (en) 1998-02-11
EP0822881B1 (en) 2009-08-12

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