CA2183163A1 - Coating method and coating apparatus - Google Patents
Coating method and coating apparatusInfo
- Publication number
- CA2183163A1 CA2183163A1 CA002183163A CA2183163A CA2183163A1 CA 2183163 A1 CA2183163 A1 CA 2183163A1 CA 002183163 A CA002183163 A CA 002183163A CA 2183163 A CA2183163 A CA 2183163A CA 2183163 A1 CA2183163 A1 CA 2183163A1
- Authority
- CA
- Canada
- Prior art keywords
- coating liquid
- coating
- substrate
- discharge slot
- liquid discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
- B05C9/02—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material to surfaces by single means not covered by groups B05C1/00 - B05C7/00, whether or not also using other means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S118/00—Coating apparatus
- Y10S118/02—Bead coater
Abstract
The present invention relates to coating methods and coating apparatus suitable for the stable production of coatings on the flat surface of sheet substrates, and methods for manufacturing coated sheet products such as color filters.
An embodiment of the coating method according to the present invention is a coating method wherein a coating liquid feeder supplies coating liquid to a coating liquid applicator having a coating liquid discharge slot, with at least either the coating liquid applicator or a substrate to be coated being moved relatively one to the other to form a coating with a predetermined thickness on the substrate, comprising the steps of: keeping at rest the substrate at a position where the start-of-coating line of the substrate is in register with the coating liquid discharge slot of the coating liquid applicator; commencing discharge of the coating liquid through the coating liquid discharge slot; forming a coating liquid bead which is in contact with both an exit aperture portion of the coating liquid discharge slot and the start-of-coating line of the substrate; and subsequently commencing movement of at least either the coating liquid feeder or the substrate relatively one to the other.
A coating method of this embodiment makes it possible to accurately determine the start-of-coating line and form a high accuracy coating, because by this method, after discharge of the coating liquid starts while the substrate to be coated is still at rest in register with the coating liquid discharge slot and the formation of the coating liquid bead is assured, the substrate is moved relatively to the coating liquid discharge slot while rendering the coating liquid bead stable.
An embodiment of the coating method according to the present invention is a coating method wherein a coating liquid feeder supplies coating liquid to a coating liquid applicator having a coating liquid discharge slot, with at least either the coating liquid applicator or a substrate to be coated being moved relatively one to the other to form a coating with a predetermined thickness on the substrate, comprising the steps of: keeping at rest the substrate at a position where the start-of-coating line of the substrate is in register with the coating liquid discharge slot of the coating liquid applicator; commencing discharge of the coating liquid through the coating liquid discharge slot; forming a coating liquid bead which is in contact with both an exit aperture portion of the coating liquid discharge slot and the start-of-coating line of the substrate; and subsequently commencing movement of at least either the coating liquid feeder or the substrate relatively one to the other.
A coating method of this embodiment makes it possible to accurately determine the start-of-coating line and form a high accuracy coating, because by this method, after discharge of the coating liquid starts while the substrate to be coated is still at rest in register with the coating liquid discharge slot and the formation of the coating liquid bead is assured, the substrate is moved relatively to the coating liquid discharge slot while rendering the coating liquid bead stable.
Applications Claiming Priority (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6/328241 | 1994-12-28 | ||
JP32824194 | 1994-12-28 | ||
JP32908894A JP3561998B2 (en) | 1994-12-28 | 1994-12-28 | Single-wafer coating method and apparatus |
JP6/328242 | 1994-12-28 | ||
JP6/329088 | 1994-12-28 | ||
JP32824294 | 1994-12-28 | ||
JP7/61359 | 1995-03-20 | ||
JP6135995 | 1995-03-20 | ||
PCT/JP1995/002741 WO1996020045A1 (en) | 1994-12-28 | 1995-12-27 | Coating method and coating apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2183163A1 true CA2183163A1 (en) | 1996-10-04 |
CA2183163C CA2183163C (en) | 2006-08-08 |
Family
ID=27464036
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002183163A Expired - Fee Related CA2183163C (en) | 1994-12-28 | 1995-12-27 | Coating method and coating apparatus |
Country Status (8)
Country | Link |
---|---|
US (1) | US6139639A (en) |
EP (1) | EP0761317B1 (en) |
KR (1) | KR100369571B1 (en) |
CN (1) | CN1080143C (en) |
CA (1) | CA2183163C (en) |
DE (1) | DE69527353T2 (en) |
TW (1) | TW484463U (en) |
WO (1) | WO1996020045A1 (en) |
Families Citing this family (86)
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US6632292B1 (en) | 1998-03-13 | 2003-10-14 | Semitool, Inc. | Selective treatment of microelectronic workpiece surfaces |
US20050217707A1 (en) * | 1998-03-13 | 2005-10-06 | Aegerter Brian K | Selective processing of microelectronic workpiece surfaces |
US6197481B1 (en) * | 1998-09-17 | 2001-03-06 | Taiwan Semiconductor Manufacturing Company | Wafer alignment marks protected by photoresist |
US6407009B1 (en) | 1998-11-12 | 2002-06-18 | Advanced Micro Devices, Inc. | Methods of manufacture of uniform spin-on films |
US6530340B2 (en) | 1998-11-12 | 2003-03-11 | Advanced Micro Devices, Inc. | Apparatus for manufacturing planar spin-on films |
US6317642B1 (en) * | 1998-11-12 | 2001-11-13 | Advanced Micro Devices, Inc. | Apparatus and methods for uniform scan dispensing of spin-on materials |
US6287636B1 (en) * | 1998-11-25 | 2001-09-11 | Canon Kabushiki Kaisha | Coating apparatus and method utilizing a diluent and a method for producing a color filter substrate |
ES2274611T3 (en) * | 1998-12-17 | 2007-05-16 | Guardian Industries Corp. | DEVICE AND PROCEDURE FOR COATING A FLAT SUBSTRATE. |
US6324440B1 (en) * | 1998-12-29 | 2001-11-27 | Lek Technologies, Llc | Apparatus for fabricating surface structures |
US6969682B2 (en) * | 1999-01-22 | 2005-11-29 | Semitool, Inc. | Single workpiece processing system |
US7217325B2 (en) * | 1999-01-22 | 2007-05-15 | Semitool, Inc. | System for processing a workpiece |
TW471015B (en) * | 1999-10-26 | 2002-01-01 | Tokyo Electron Ltd | Solution processing apparatus |
DE10063216B8 (en) * | 1999-12-20 | 2013-05-16 | Mitsubishi Paper Mills Limited | Apparatus for processing photosensitive material |
US6544590B1 (en) * | 2000-01-17 | 2003-04-08 | Canon Kabushiki Kaisha | Liquid coating method, apparatus and film-forming method for producing the same employing excess coating removing unit having absorbent fabric on porous structure |
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TWI285563B (en) * | 2002-01-24 | 2007-08-21 | Three Bond Co Ltd | Material coating device |
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KR100997572B1 (en) * | 2002-07-18 | 2010-11-30 | 다이니폰 인사츠 가부시키가이샤 | Die head for coating, coating device |
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US7078355B2 (en) * | 2003-12-29 | 2006-07-18 | Asml Holding N.V. | Method and system of coating polymer solution on surface of a substrate |
JP4490797B2 (en) * | 2004-01-23 | 2010-06-30 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
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KR100780718B1 (en) | 2004-12-28 | 2007-12-26 | 엘지.필립스 엘시디 주식회사 | Slit coater having apparatus of supplying coating fluid |
CN100400172C (en) * | 2004-12-30 | 2008-07-09 | 刘大佼 | Die set for coextrusion coat, and method for coextrusion coating two kinds of coats |
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KR100700181B1 (en) | 2004-12-31 | 2007-03-27 | 엘지.필립스 엘시디 주식회사 | Slit coater having standby unit of nozzle and method of coating using thereof |
JP4001187B2 (en) * | 2005-07-08 | 2007-10-31 | 株式会社村田製作所 | Method and apparatus for forming external electrode of electronic component |
KR101182514B1 (en) * | 2005-11-28 | 2012-09-12 | 엘지디스플레이 주식회사 | Baker For Vacuum Dry and Method for vacuum drying and baking |
KR100703651B1 (en) * | 2005-11-30 | 2007-04-06 | 주식회사 아이피에스 | Apparatus for depositing thin film on wafer |
JP4884871B2 (en) * | 2006-07-27 | 2012-02-29 | 東京エレクトロン株式会社 | Coating method and coating apparatus |
CN100448551C (en) * | 2006-08-18 | 2009-01-07 | 青岛美露亚工艺品有限公司 | Automatic coating device of artificial pearl small ball |
KR100824748B1 (en) * | 2006-12-29 | 2008-04-24 | 세메스 주식회사 | Operation method of substrate processing apparatus |
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US10566534B2 (en) | 2015-10-12 | 2020-02-18 | Universal Display Corporation | Apparatus and method to deliver organic material via organic vapor-jet printing (OVJP) |
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IT202100013085A1 (en) * | 2021-05-20 | 2022-11-20 | Cefla Soc Cooperativa | APPARATUS AND METHOD FOR PAINTING PANELS BY ROLLER, PREFERABLE PHOTOVOLTAIC PANELS |
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CN114950792A (en) * | 2022-07-05 | 2022-08-30 | 安徽省久久门窗有限公司 | Surface spraying equipment is used in production of intelligence aluminum alloy door frame |
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1995
- 1995-12-27 KR KR1019960704741A patent/KR100369571B1/en not_active IP Right Cessation
- 1995-12-27 CN CN95192822A patent/CN1080143C/en not_active Expired - Lifetime
- 1995-12-27 WO PCT/JP1995/002741 patent/WO1996020045A1/en active IP Right Grant
- 1995-12-27 US US08/700,421 patent/US6139639A/en not_active Expired - Lifetime
- 1995-12-27 DE DE69527353T patent/DE69527353T2/en not_active Expired - Lifetime
- 1995-12-27 EP EP95942298A patent/EP0761317B1/en not_active Expired - Lifetime
- 1995-12-27 CA CA002183163A patent/CA2183163C/en not_active Expired - Fee Related
- 1995-12-30 TW TW087219356U patent/TW484463U/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0761317B1 (en) | 2002-07-10 |
KR100369571B1 (en) | 2003-04-10 |
CA2183163C (en) | 2006-08-08 |
DE69527353T2 (en) | 2003-01-30 |
EP0761317A4 (en) | 1997-11-12 |
CN1147215A (en) | 1997-04-09 |
WO1996020045A1 (en) | 1996-07-04 |
TW484463U (en) | 2002-04-21 |
US6139639A (en) | 2000-10-31 |
CN1080143C (en) | 2002-03-06 |
KR970701099A (en) | 1997-03-17 |
DE69527353D1 (en) | 2002-08-14 |
EP0761317A1 (en) | 1997-03-12 |
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