CA2120390A1 - Method of Manufacturing Electron Source, Electron Source Manufactured by Said Method, and Image Forming Apparatus Using Said Electron Sources - Google Patents

Method of Manufacturing Electron Source, Electron Source Manufactured by Said Method, and Image Forming Apparatus Using Said Electron Sources

Info

Publication number
CA2120390A1
CA2120390A1 CA2120390A CA2120390A CA2120390A1 CA 2120390 A1 CA2120390 A1 CA 2120390A1 CA 2120390 A CA2120390 A CA 2120390A CA 2120390 A CA2120390 A CA 2120390A CA 2120390 A1 CA2120390 A1 CA 2120390A1
Authority
CA
Canada
Prior art keywords
electron
electron source
forming apparatus
sources
image forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA2120390A
Other languages
French (fr)
Other versions
CA2120390C (en
Inventor
Hidetoshi Suzuki
Yoshiyuki Osada
Ichiro Nomura
Takeo Ono
Hisaaki Kawade
Eiji Yamaguchi
Toshihiko Takeda
Hiroaki Toshima
Yasuhiro Hamamoto
Tatsuya Iwasaki
Aoji Isono
Noritake Suzuki
Yasuyuki Todokoro
Masahiro Okuda
Katsuhiko Shinjo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CA2120390A1 publication Critical patent/CA2120390A1/en
Application granted granted Critical
Publication of CA2120390C publication Critical patent/CA2120390C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/30Cold cathodes, e.g. field-emissive cathode
    • H01J1/316Cold cathodes, e.g. field-emissive cathode having an electric field parallel to the surface, e.g. thin film cathodes
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/22Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00Cathode ray tubes; Electron beam tubes
    • H01J31/08Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H01J31/123Flat display tubes
    • H01J31/125Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
    • H01J31/127Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/022Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/027Manufacture of electrodes or electrode systems of cold cathodes of thin film cathodes
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2300/00Aspects of the constitution of display devices
    • G09G2300/08Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
    • G09G2300/088Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements using a non-linear two-terminal element
    • G09G2300/0885Pixel comprising a non-linear two-terminal element alone in series with each display pixel element
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2310/00Command of the display device
    • G09G2310/06Details of flat display driving waveforms
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/30Cold cathodes
    • H01J2201/316Cold cathodes having an electric field parallel to the surface thereof, e.g. thin film cathodes
    • H01J2201/3165Surface conduction emission type cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/30Cold cathodes
    • H01J2201/319Circuit elements associated with the emitters by direct integration
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00Electron emission display panels, e.g. field emission display panels

Abstract

A method of manufacturing an electron source having a plurality of surface-conduction electron-emitting devices arranged on a substrate in row and column directions includes the forming of electron emission portions of the plurality of surface-conduction electron-emitting devices. The forming is carried out by supplying current through the plurality of surface-conduction electron-emitting devices upon dividing them into a plurality of groups. An image forming apparatus passes a current through a plurality of electron sources, which are formed on a substrate and arrayed in the form of a matrix, in dependence upon an image signal, and an image is formed by a light emission in response to electrons emitted from the plurality of electron sources.
CA002120390A 1993-04-05 1994-03-31 Method of manufacturing electron source, electron source manufactured by said method, and image forming apparatus using said electron sources Expired - Fee Related CA2120390C (en)

Applications Claiming Priority (12)

Application Number Priority Date Filing Date Title
JP7816493 1993-04-05
JP5-077900 1993-04-05
JP7790093 1993-04-05
JP5-100088 1993-04-05
JP5-100087 1993-04-05
JP10008793 1993-04-05
JP10008893 1993-04-05
JP5-078164 1993-04-05
JP27034393 1993-10-28
JP5-270343 1993-10-28
JP5549394A JP3205167B2 (en) 1993-04-05 1994-03-25 Method of manufacturing electron source and method of manufacturing image forming apparatus
JP6-055493 1994-03-25

Publications (2)

Publication Number Publication Date
CA2120390A1 true CA2120390A1 (en) 1994-10-06
CA2120390C CA2120390C (en) 1999-08-31

Family

ID=27550599

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002120390A Expired - Fee Related CA2120390C (en) 1993-04-05 1994-03-31 Method of manufacturing electron source, electron source manufactured by said method, and image forming apparatus using said electron sources

Country Status (10)

Country Link
US (1) US5593335A (en)
EP (4) EP0620581B1 (en)
JP (1) JP3205167B2 (en)
CN (2) CN1072388C (en)
AT (4) ATE405942T1 (en)
AU (1) AU681622B2 (en)
CA (1) CA2120390C (en)
DE (4) DE69435128D1 (en)
ES (1) ES2104218T3 (en)
PT (1) PT920047E (en)

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US5996488A (en) 1994-11-25 1999-12-07 Canon Kabushiki Kaisha Preparation of an electron source by offset printing electrodes having thickness less than 200 nm
JP3241251B2 (en) 1994-12-16 2001-12-25 キヤノン株式会社 Method of manufacturing electron-emitting device and method of manufacturing electron source substrate
JP3299096B2 (en) 1995-01-13 2002-07-08 キヤノン株式会社 Method of manufacturing electron source and image forming apparatus, and method of activating electron source
DE69606445T2 (en) 1995-03-13 2000-06-21 Canon Kk Method of manufacturing an electron-emitting device.
US6473063B1 (en) * 1995-05-30 2002-10-29 Canon Kabushiki Kaisha Electron source, image-forming apparatus comprising the same and method of driving such an image-forming apparatus
US6140985A (en) * 1995-06-05 2000-10-31 Canon Kabushiki Kaisha Image display apparatus
JPH09259753A (en) * 1996-01-16 1997-10-03 Canon Inc Electron generator, image forming device and manufacture and adjusting method therefor
US6231412B1 (en) * 1996-09-18 2001-05-15 Canon Kabushiki Kaisha Method of manufacturing and adjusting electron source array
JP3352385B2 (en) 1997-03-21 2002-12-03 キヤノン株式会社 Electron source substrate and method of manufacturing electronic device using the same
JP3087847B1 (en) 1998-03-31 2000-09-11 キヤノン株式会社 Method and apparatus for manufacturing electron source and method for manufacturing image forming apparatus
JP3087849B1 (en) * 1998-06-10 2000-09-11 キヤノン株式会社 Method of manufacturing electron source, apparatus for manufacturing the same, and method of manufacturing image forming apparatus
US6534924B1 (en) 1998-03-31 2003-03-18 Canon Kabushiki Kaisha Method and apparatus for manufacturing electron source, and method manufacturing image forming apparatus
JP3088102B1 (en) * 1998-05-01 2000-09-18 キヤノン株式会社 Method of manufacturing electron source and image forming apparatus
US6878028B1 (en) 1998-05-01 2005-04-12 Canon Kabushiki Kaisha Method of fabricating electron source and image forming apparatus
JP2000148081A (en) * 1998-09-04 2000-05-26 Canon Inc Electron source and image-forming device using the same
KR100472686B1 (en) * 1998-10-14 2005-03-08 캐논 가부시끼가이샤 Imaging device and method of manufacture thereof
JP2000243242A (en) * 1998-12-22 2000-09-08 Canon Inc Manufacture of electron source and image display device
JP2000311603A (en) 1999-02-23 2000-11-07 Canon Inc Manufacturing device and manufacture of electron source, electron source and image forming device
JP3518854B2 (en) * 1999-02-24 2004-04-12 キヤノン株式会社 Method for manufacturing electron source and image forming apparatus, and apparatus for manufacturing them
JP2000311639A (en) 1999-02-24 2000-11-07 Canon Inc Manufacture of electron source, manufacture of image forming device, manufacturing device for electron source and adjusting method for electron source
JP3472221B2 (en) * 1999-02-24 2003-12-02 キヤノン株式会社 Manufacturing method of electron source
JP3915400B2 (en) * 2000-11-28 2007-05-16 株式会社日立製作所 Image display device and driving method of image display device
JP2002245947A (en) * 2000-12-15 2002-08-30 Canon Inc Substrate with thin line, manufacturing method thereof, electron source substrate and image display device
KR20020057478A (en) * 2001-01-05 2002-07-11 엘지전자 주식회사 FED and method for measuring vacuum thereof, and method for automatic activaion of getter in FED
US6936854B2 (en) * 2001-05-10 2005-08-30 Canon Kabushiki Kaisha Optoelectronic substrate
JP3681121B2 (en) * 2001-06-15 2005-08-10 キヤノン株式会社 Driving circuit and display device
JP3647426B2 (en) * 2001-07-31 2005-05-11 キヤノン株式会社 Scanning circuit and image display device
JP3710441B2 (en) * 2001-09-07 2005-10-26 キヤノン株式会社 Electron source substrate and display device using the same
JP2003092061A (en) * 2001-09-17 2003-03-28 Canon Inc Voltage impressing device, manufacturing device and method of electron source
JP3902998B2 (en) 2001-10-26 2007-04-11 キヤノン株式会社 Electron source and image forming apparatus manufacturing method
JP2004003935A (en) * 2002-04-12 2004-01-08 Daicel Chem Ind Ltd Filler for optical isomer separation for simulated moving bed chromatography
JP3715967B2 (en) * 2002-06-26 2005-11-16 キヤノン株式会社 DRIVE DEVICE, DRIVE CIRCUIT, AND IMAGE DISPLAY DEVICE
JP4649121B2 (en) * 2004-05-18 2011-03-09 キヤノン株式会社 DRIVE DEVICE AND ELECTRON SOURCE MANUFACTURING METHOD
JP4544518B2 (en) * 2004-09-01 2010-09-15 キヤノン株式会社 Electric field excitation type light emitting device and image display device
JP5177954B2 (en) * 2006-01-30 2013-04-10 キヤノン株式会社 Field effect transistor
JP5294565B2 (en) * 2006-03-17 2013-09-18 キヤノン株式会社 Light emitting device and method for manufacturing light emitting device
JP5110803B2 (en) * 2006-03-17 2012-12-26 キヤノン株式会社 FIELD EFFECT TRANSISTOR USING OXIDE FILM FOR CHANNEL AND METHOD FOR MANUFACTURING THE SAME
JP4332545B2 (en) 2006-09-15 2009-09-16 キヤノン株式会社 Field effect transistor and manufacturing method thereof
JP5219529B2 (en) * 2008-01-23 2013-06-26 キヤノン株式会社 Field effect transistor and display device including the field effect transistor
JP2009206508A (en) * 2008-01-31 2009-09-10 Canon Inc Thin film transistor and display
JP2010244933A (en) * 2009-04-08 2010-10-28 Canon Inc Image display apparatus
US10522319B2 (en) * 2016-10-13 2019-12-31 Hitachi High-Technologies Corporation Electron beam apparatus
CN113488359A (en) * 2021-06-08 2021-10-08 电子科技大学 Preparation method of refrigeration type GaN electron source used in ultrahigh vacuum system

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Also Published As

Publication number Publication date
EP0620581B1 (en) 1997-07-09
JPH07176265A (en) 1995-07-14
JP3205167B2 (en) 2001-09-04
AU5927794A (en) 1994-10-06
ATE405942T1 (en) 2008-09-15
DE69420424T2 (en) 2000-04-13
EP0729168B1 (en) 1999-09-01
ATE184133T1 (en) 1999-09-15
EP0929091A1 (en) 1999-07-14
EP0920047B1 (en) 2003-09-03
ES2104218T3 (en) 1997-10-01
ATE249093T1 (en) 2003-09-15
CN1096398A (en) 1994-12-14
CN1201364C (en) 2005-05-11
AU681622B2 (en) 1997-09-04
DE69433117D1 (en) 2003-10-09
EP0920047A1 (en) 1999-06-02
DE69435128D1 (en) 2008-10-02
DE69404066D1 (en) 1997-08-14
DE69420424D1 (en) 1999-10-07
DE69404066T2 (en) 1998-01-15
EP0620581A3 (en) 1994-11-02
EP0620581A2 (en) 1994-10-19
EP0729168A2 (en) 1996-08-28
EP0929091B1 (en) 2008-08-20
CA2120390C (en) 1999-08-31
EP0729168A3 (en) 1997-01-08
CN1072388C (en) 2001-10-03
US5593335A (en) 1997-01-14
PT920047E (en) 2004-01-30
ATE155284T1 (en) 1997-07-15
CN1277450A (en) 2000-12-20

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Legal Events

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EEER Examination request
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Effective date: 20130402