CA2084946A1 - Resonant mirror and method of manufacture - Google Patents

Resonant mirror and method of manufacture

Info

Publication number
CA2084946A1
CA2084946A1 CA002084946A CA2084946A CA2084946A1 CA 2084946 A1 CA2084946 A1 CA 2084946A1 CA 002084946 A CA002084946 A CA 002084946A CA 2084946 A CA2084946 A CA 2084946A CA 2084946 A1 CA2084946 A1 CA 2084946A1
Authority
CA
Canada
Prior art keywords
mirror
manufacture
resonant mirror
top surface
supporting elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002084946A
Other languages
French (fr)
Other versions
CA2084946C (en
Inventor
William E. Nelson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
William E. Nelson
Texas Instruments Incorporated
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by William E. Nelson, Texas Instruments Incorporated filed Critical William E. Nelson
Publication of CA2084946A1 publication Critical patent/CA2084946A1/en
Application granted granted Critical
Publication of CA2084946C publication Critical patent/CA2084946C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Abstract

A resonant mirror is disclosed which comprises a deflectable mirror (16) generally planar with the top surface of a substrate. The mirror is suspended adjacent the top surface by at least two supporting elements (20).
At least one supporting element is displaced from an edge of the mirror. The supporting elements (20), being collinear, define an axis of rotation (24) about which the mirror may oscillate to steer incident light through an angle.
CA002084946A 1991-12-20 1992-12-09 Resonant mirror and method of manufacture Expired - Fee Related CA2084946C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/811,407 US5233456A (en) 1991-12-20 1991-12-20 Resonant mirror and method of manufacture
US811,407 1991-12-20

Publications (2)

Publication Number Publication Date
CA2084946A1 true CA2084946A1 (en) 1993-06-21
CA2084946C CA2084946C (en) 2003-03-18

Family

ID=25206466

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002084946A Expired - Fee Related CA2084946C (en) 1991-12-20 1992-12-09 Resonant mirror and method of manufacture

Country Status (5)

Country Link
US (1) US5233456A (en)
JP (1) JP3203277B2 (en)
KR (1) KR100253105B1 (en)
CA (1) CA2084946C (en)
TW (1) TW221526B (en)

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JPH0651231A (en) 1994-02-25
US5233456A (en) 1993-08-03

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