CA2077463A1 - System and method for precision cleaning by jet spray - Google Patents

System and method for precision cleaning by jet spray

Info

Publication number
CA2077463A1
CA2077463A1 CA2077463A CA2077463A CA2077463A1 CA 2077463 A1 CA2077463 A1 CA 2077463A1 CA 2077463 A CA2077463 A CA 2077463A CA 2077463 A CA2077463 A CA 2077463A CA 2077463 A1 CA2077463 A1 CA 2077463A1
Authority
CA
Canada
Prior art keywords
cleaning
snow
jet spray
precision
cleaned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA2077463A
Other languages
French (fr)
Other versions
CA2077463C (en
Inventor
Ronald V. Peterson
Wilfred Krone-Schmidt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rave N P Inc
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25086821&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=CA2077463(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of CA2077463A1 publication Critical patent/CA2077463A1/en
Application granted granted Critical
Publication of CA2077463C publication Critical patent/CA2077463C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02Cleaning by the force of jets, e.g. blowing-out cavities
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24CABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C7/00Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24CABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B24C1/003Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods using material which dissolves or changes phase after the treatment, e.g. ice, CO2
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24CABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C3/00Abrasive blasting machines or devices; Plants
    • B24C3/32Abrasive blasting machines or devices; Plants designed for abrasive blasting of particular work, e.g. the internal surfaces of cylinder blocks
    • B24C3/322Abrasive blasting machines or devices; Plants designed for abrasive blasting of particular work, e.g. the internal surfaces of cylinder blocks for electrical components
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/26Cleaning or polishing of the conductive pattern

Abstract

A system and method for precision cleaning of contaminants from the surface of a substrate, such as delicate surfaces or precision parts, utilizing streams of carbon dioxide snow or other cleaning gas. The system includes an enclosed or sealed cleaning container in which at least one jet spray device is housed for directing a stream of cleaning snow against the surface to be cleaned. During cleaning, the cleaning container holding the substrate to be cleaned is maintained under a vacuum or, optionally, at ambient pressure, filled with a clean dry gas. The dislodged contaminants and spent snow are removed from the cleaning zone and disposed of or recycled. Cleaning is accomplished by pulsed application of the cleaning snow in combination with intermittent or continuous heating of the surface so that the surface is at an elevated temperature prior to and during each application of cleaning snow. The jet spray devices which are utilized in the system are oriented so that the cleaning snow streams contact planar surfaces at grazing angles of 5 to 45 degrees.
When non-planar parts are being cleaned, the jet spray devices are adjusted to provide an angle of about 45 to 90 degrees. Monitoring of the cleanliness of the parts is accomplished during the cleaning process, by a light scatter method or by a particle monitor and residual gas analysis of the exhaust gas or other analysis of the exhaust gas. The system is particularly useful in removing contaminants from the delicate surfaces or precision parts which are utilized in precision optical and electronic devices.
CA002077463A 1991-10-01 1992-09-03 System and method for precision cleaning by jet spray Expired - Lifetime CA2077463C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US769,894 1991-10-01
US07/769,894 US5315793A (en) 1991-10-01 1991-10-01 System for precision cleaning by jet spray

Publications (2)

Publication Number Publication Date
CA2077463A1 true CA2077463A1 (en) 1993-04-02
CA2077463C CA2077463C (en) 1999-04-20

Family

ID=25086821

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002077463A Expired - Lifetime CA2077463C (en) 1991-10-01 1992-09-03 System and method for precision cleaning by jet spray

Country Status (7)

Country Link
US (1) US5315793A (en)
EP (1) EP0535680B2 (en)
JP (1) JP2765787B2 (en)
KR (1) KR930007526A (en)
CA (1) CA2077463C (en)
DE (1) DE69209957T3 (en)
TW (1) TW203565B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110216095A (en) * 2019-05-22 2019-09-10 重庆北崎包装制品有限公司 A kind of intelligence machine cleaning equipment

Families Citing this family (158)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69328683D1 (en) * 1992-06-22 2000-06-21 Minnesota Mining & Mfg METHOD AND DEVICE FOR REMOVING WASTE MATERIALS FROM OPTICAL FLOPPY DISK MEDIA
US5354384A (en) * 1993-04-30 1994-10-11 Hughes Aircraft Company Method for cleaning surface by heating and a stream of snow
FR2706138B1 (en) * 1993-06-08 1995-08-11 Gagneraud Pere Fils Entr Method and device for pickling solid heat-resistant materials.
US5868878A (en) * 1993-08-27 1999-02-09 Hughes Electronics Corporation Heat treatment by plasma electron heating and solid/gas jet cooling
US5514024A (en) * 1993-11-08 1996-05-07 Ford Motor Company Nozzle for enhanced mixing in CO2 cleaning system
US5483563A (en) * 1994-03-29 1996-01-09 Teledyne Industries, Inc. Cleaning process for enhancing the bond integrity of multi-layered zirconium and zirconium alloy tubing
US5651723A (en) * 1994-04-13 1997-07-29 Viratec Thin Films, Inc. Method and apparatus for cleaning substrates in preparation for deposition of thin film coatings
US5931721A (en) * 1994-11-07 1999-08-03 Sumitomo Heavy Industries, Ltd. Aerosol surface processing
JP3200528B2 (en) * 1995-01-19 2001-08-20 三菱電機株式会社 Post-treatment method for dry etching
DE19615333A1 (en) * 1995-07-24 1997-01-30 Hewlett Packard Co Gas analyser partic. for human breath - incorporates an in-situ system using carbon di:oxide snow for cleaning optical surfaces and thus allowing the analysis chamber to remain closed
DE69614627T2 (en) * 1995-09-25 2001-12-06 Eco Snow Systems Inc System and method for polishing soft metal surfaces using CO2 snow
US5846338A (en) * 1996-01-11 1998-12-08 Asyst Technologies, Inc. Method for dry cleaning clean room containers
US5616067A (en) * 1996-01-16 1997-04-01 Ford Motor Company CO2 nozzle and method for cleaning pressure-sensitive surfaces
US5922138A (en) * 1996-08-12 1999-07-13 Tokyo Electron Limited Liquid treatment method and apparatus
US5810942A (en) * 1996-09-11 1998-09-22 Fsi International, Inc. Aerodynamic aerosol chamber
US5766061A (en) * 1996-10-04 1998-06-16 Eco-Snow Systems, Inc. Wafer cassette cleaning using carbon dioxide jet spray
DE19640945A1 (en) * 1996-10-04 1998-04-16 Polygram Manufacturing & Distr Method and device for mechanically removing a foreign matter coating from a base material
US5853962A (en) * 1996-10-04 1998-12-29 Eco-Snow Systems, Inc. Photoresist and redeposition removal using carbon dioxide jet spray
US5989355A (en) * 1997-02-26 1999-11-23 Eco-Snow Systems, Inc. Apparatus for cleaning and testing precision components of hard drives and the like
JP3183214B2 (en) * 1997-05-26 2001-07-09 日本電気株式会社 Cleaning method and cleaning device
US5961732A (en) * 1997-06-11 1999-10-05 Fsi International, Inc Treating substrates by producing and controlling a cryogenic aerosol
US6036786A (en) * 1997-06-11 2000-03-14 Fsi International Inc. Eliminating stiction with the use of cryogenic aerosol
JP3932618B2 (en) * 1997-09-30 2007-06-20 ソニー株式会社 Chemical treatment equipment
US6391005B1 (en) 1998-03-30 2002-05-21 Agilent Technologies, Inc. Apparatus and method for penetration with shaft having a sensor for sensing penetration depth
US6572457B2 (en) 1998-09-09 2003-06-03 Applied Surface Technologies System and method for controlling humidity in a cryogenic aerosol spray cleaning system
US6460552B1 (en) * 1998-10-05 2002-10-08 Lorimer D'arcy H. Method and apparatus for cleaning flat workpieces
US6740247B1 (en) 1999-02-05 2004-05-25 Massachusetts Institute Of Technology HF vapor phase wafer cleaning and oxide etching
AT411233B (en) * 1999-05-07 2003-11-25 Berndorf Band Ges M B H DEVICE WITH AT LEAST ONE ENDLESS STEEL TAPE AND METHOD FOR THERMALLY PUTTING PLASTIC MEASURES
US6500351B1 (en) 1999-05-24 2002-12-31 Maxtor Corporation Process for producing magnetic recording head poles utilizing sputtered materials and a recording head made thereby
US6505557B2 (en) * 1999-07-22 2003-01-14 Ted Desaulniers Process temperature control system for rotary process machinery
JP3413131B2 (en) * 1999-10-04 2003-06-03 キヤノン株式会社 Optical apparatus and device manufacturing method
US6530823B1 (en) 2000-08-10 2003-03-11 Nanoclean Technologies Inc Methods for cleaning surfaces substantially free of contaminants
US6719613B2 (en) * 2000-08-10 2004-04-13 Nanoclean Technologies, Inc. Methods for cleaning surfaces substantially free of contaminants utilizing filtered carbon dioxide
US6543462B1 (en) 2000-08-10 2003-04-08 Nano Clean Technologies, Inc. Apparatus for cleaning surfaces substantially free of contaminants
US6500758B1 (en) * 2000-09-12 2002-12-31 Eco-Snow Systems, Inc. Method for selective metal film layer removal using carbon dioxide jet spray
US8641644B2 (en) 2000-11-21 2014-02-04 Sanofi-Aventis Deutschland Gmbh Blood testing apparatus having a rotatable cartridge with multiple lancing elements and testing means
KR100421038B1 (en) * 2001-03-28 2004-03-03 삼성전자주식회사 Cleaning apparatus for removing contaminants from surface and cleaning method using the same
US7238622B2 (en) * 2001-04-17 2007-07-03 California Institute Of Technology Wafer bonded virtual substrate and method for forming the same
CA2482258A1 (en) 2001-04-17 2002-10-24 California Institute Of Technology A method of using a germanium layer transfer to si for photovoltaic applications and heterostructure made thereby
US20050026432A1 (en) * 2001-04-17 2005-02-03 Atwater Harry A. Wafer bonded epitaxial templates for silicon heterostructures
US6656017B2 (en) * 2001-04-24 2003-12-02 David P. Jackson Method and apparatus for creating an open cell micro-environment for treating a substrate with an impingement spray
DE60238119D1 (en) 2001-06-12 2010-12-09 Pelikan Technologies Inc ELECTRIC ACTUATOR ELEMENT FOR A LANZETTE
US9427532B2 (en) 2001-06-12 2016-08-30 Sanofi-Aventis Deutschland Gmbh Tissue penetration device
US7316700B2 (en) 2001-06-12 2008-01-08 Pelikan Technologies, Inc. Self optimizing lancing device with adaptation means to temporal variations in cutaneous properties
US7749174B2 (en) 2001-06-12 2010-07-06 Pelikan Technologies, Inc. Method and apparatus for lancet launching device intergrated onto a blood-sampling cartridge
US9795747B2 (en) 2010-06-02 2017-10-24 Sanofi-Aventis Deutschland Gmbh Methods and apparatus for lancet actuation
US9226699B2 (en) 2002-04-19 2016-01-05 Sanofi-Aventis Deutschland Gmbh Body fluid sampling module with a continuous compression tissue interface surface
US7025774B2 (en) 2001-06-12 2006-04-11 Pelikan Technologies, Inc. Tissue penetration device
US8337419B2 (en) 2002-04-19 2012-12-25 Sanofi-Aventis Deutschland Gmbh Tissue penetration device
US7981056B2 (en) 2002-04-19 2011-07-19 Pelikan Technologies, Inc. Methods and apparatus for lancet actuation
JP4210045B2 (en) * 2001-06-25 2009-01-14 横河電機株式会社 Cleaning device
DE10136937C1 (en) * 2001-07-28 2003-02-13 Fraunhofer Ges Forschung Cleaning method for dishwashing machine uses electrical field for providing electrocapillary cleaning effect
US6904968B2 (en) * 2001-09-14 2005-06-14 Hewlett-Packard Development Company, L.P. Method and apparatus for individually cooling components of electronic systems
US7108584B2 (en) * 2001-09-26 2006-09-19 Fuji Photo Film Co., Ltd. Method and apparatus for manufacturing liquid drop ejecting head
EP1302966A1 (en) * 2001-10-09 2003-04-16 Matsushita Electric Industrial Co., Ltd. Method and apparatus for removing film and method for manufacturing display panel
US6852173B2 (en) * 2002-04-05 2005-02-08 Boc, Inc. Liquid-assisted cryogenic cleaning
US20050217706A1 (en) * 2002-04-05 2005-10-06 Souvik Banerjee Fluid assisted cryogenic cleaning
US7297122B2 (en) 2002-04-19 2007-11-20 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US8372016B2 (en) 2002-04-19 2013-02-12 Sanofi-Aventis Deutschland Gmbh Method and apparatus for body fluid sampling and analyte sensing
US7229458B2 (en) 2002-04-19 2007-06-12 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US8267870B2 (en) 2002-04-19 2012-09-18 Sanofi-Aventis Deutschland Gmbh Method and apparatus for body fluid sampling with hybrid actuation
US8579831B2 (en) 2002-04-19 2013-11-12 Sanofi-Aventis Deutschland Gmbh Method and apparatus for penetrating tissue
US8702624B2 (en) 2006-09-29 2014-04-22 Sanofi-Aventis Deutschland Gmbh Analyte measurement device with a single shot actuator
US7674232B2 (en) 2002-04-19 2010-03-09 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US7232451B2 (en) 2002-04-19 2007-06-19 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US7901362B2 (en) 2002-04-19 2011-03-08 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US7175642B2 (en) 2002-04-19 2007-02-13 Pelikan Technologies, Inc. Methods and apparatus for lancet actuation
US7892183B2 (en) 2002-04-19 2011-02-22 Pelikan Technologies, Inc. Method and apparatus for body fluid sampling and analyte sensing
US8221334B2 (en) 2002-04-19 2012-07-17 Sanofi-Aventis Deutschland Gmbh Method and apparatus for penetrating tissue
US8784335B2 (en) 2002-04-19 2014-07-22 Sanofi-Aventis Deutschland Gmbh Body fluid sampling device with a capacitive sensor
US7331931B2 (en) 2002-04-19 2008-02-19 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US8360992B2 (en) 2002-04-19 2013-01-29 Sanofi-Aventis Deutschland Gmbh Method and apparatus for penetrating tissue
US9314194B2 (en) 2002-04-19 2016-04-19 Sanofi-Aventis Deutschland Gmbh Tissue penetration device
US7713214B2 (en) 2002-04-19 2010-05-11 Pelikan Technologies, Inc. Method and apparatus for a multi-use body fluid sampling device with optical analyte sensing
US9795334B2 (en) 2002-04-19 2017-10-24 Sanofi-Aventis Deutschland Gmbh Method and apparatus for penetrating tissue
US9248267B2 (en) 2002-04-19 2016-02-02 Sanofi-Aventis Deustchland Gmbh Tissue penetration device
US7909778B2 (en) 2002-04-19 2011-03-22 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US7491178B2 (en) 2002-04-19 2009-02-17 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US7547287B2 (en) 2002-04-19 2009-06-16 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US7976476B2 (en) 2002-04-19 2011-07-12 Pelikan Technologies, Inc. Device and method for variable speed lancet
US7101260B2 (en) * 2002-07-29 2006-09-05 Nanoclean Technologies, Inc. Methods for resist stripping and other processes for cleaning surfaces substantially free of contaminants
US7297286B2 (en) * 2002-07-29 2007-11-20 Nanoclean Technologies, Inc. Methods for resist stripping and other processes for cleaning surfaces substantially free of contaminants
US7134941B2 (en) * 2002-07-29 2006-11-14 Nanoclean Technologies, Inc. Methods for residue removal and corrosion prevention in a post-metal etch process
US6764385B2 (en) 2002-07-29 2004-07-20 Nanoclean Technologies, Inc. Methods for resist stripping and cleaning surfaces substantially free of contaminants
US7066789B2 (en) * 2002-07-29 2006-06-27 Manoclean Technologies, Inc. Methods for resist stripping and other processes for cleaning surfaces substantially free of contaminants
US20040029494A1 (en) * 2002-08-09 2004-02-12 Souvik Banerjee Post-CMP cleaning of semiconductor wafer surfaces using a combination of aqueous and CO2 based cryogenic cleaning techniques
US8574895B2 (en) 2002-12-30 2013-11-05 Sanofi-Aventis Deutschland Gmbh Method and apparatus using optical techniques to measure analyte levels
JP2004245613A (en) * 2003-02-12 2004-09-02 Japan Science & Technology Agency Flow cell type qcm device and specimen measuring method
US8262614B2 (en) 2003-05-30 2012-09-11 Pelikan Technologies, Inc. Method and apparatus for fluid injection
JP4118194B2 (en) * 2003-06-02 2008-07-16 横河電機株式会社 Cleaning device
US7850621B2 (en) 2003-06-06 2010-12-14 Pelikan Technologies, Inc. Method and apparatus for body fluid sampling and analyte sensing
WO2006001797A1 (en) 2004-06-14 2006-01-05 Pelikan Technologies, Inc. Low pain penetrating
WO2005033659A2 (en) 2003-09-29 2005-04-14 Pelikan Technologies, Inc. Method and apparatus for an improved sample capture device
EP1680014A4 (en) 2003-10-14 2009-01-21 Pelikan Technologies Inc Method and apparatus for a variable user interface
US7822454B1 (en) 2005-01-03 2010-10-26 Pelikan Technologies, Inc. Fluid sampling device with improved analyte detecting member configuration
US8668656B2 (en) 2003-12-31 2014-03-11 Sanofi-Aventis Deutschland Gmbh Method and apparatus for improving fluidic flow and sample capture
US20080211061A1 (en) * 2004-04-21 2008-09-04 California Institute Of Technology Method For the Fabrication of GaAs/Si and Related Wafer Bonded Virtual Substrates
WO2006011062A2 (en) 2004-05-20 2006-02-02 Albatros Technologies Gmbh & Co. Kg Printable hydrogel for biosensors
KR20040101948A (en) * 2004-05-31 2004-12-03 (주)케이.씨.텍 Nozzle for Injecting Sublimable Solid Particles Entrained in Gas for Cleaning Surface
US9775553B2 (en) 2004-06-03 2017-10-03 Sanofi-Aventis Deutschland Gmbh Method and apparatus for a fluid sampling device
EP1765194A4 (en) 2004-06-03 2010-09-29 Pelikan Technologies Inc Method and apparatus for a fluid sampling device
US7134946B1 (en) * 2004-12-13 2006-11-14 Cool Clean Technologies, Inc. Apparatus to treat and inspect a substrate
KR100615654B1 (en) * 2004-12-23 2006-08-25 오승환 A Lowest Temperature Bottle Dry Cleaning Method and System therefor
US8652831B2 (en) 2004-12-30 2014-02-18 Sanofi-Aventis Deutschland Gmbh Method and apparatus for analyte measurement test time
WO2006076005A1 (en) * 2005-01-12 2006-07-20 Boc, Inc. System for cleaning a surface using cryogenic aerosol and fluid reactant
US20070089761A1 (en) * 2005-10-21 2007-04-26 Souvik Banerjee Non-plasma method of removing photoresist from a substrate
US7784477B2 (en) * 2006-02-14 2010-08-31 Raytheon Company Automated non-contact cleaning
US7673638B1 (en) 2006-06-16 2010-03-09 Western Digital Technologies, Inc. System and method to monitor particles removed from a component
US20090139539A1 (en) * 2007-11-29 2009-06-04 Joel Heimlich Method and apparatus for cleaning
EP2265324B1 (en) 2008-04-11 2015-01-28 Sanofi-Aventis Deutschland GmbH Integrated analyte measurement system
US20100111845A1 (en) * 2008-10-31 2010-05-06 Searete Llc, A Limited Liability Corporation Of The State Of Delaware Compositions and methods for therapeutic delivery with frozen particles
US9060931B2 (en) 2008-10-31 2015-06-23 The Invention Science Fund I, Llc Compositions and methods for delivery of frozen particle adhesives
US8603495B2 (en) * 2008-10-31 2013-12-10 The Invention Science Fund I, Llc Compositions and methods for biological remodeling with frozen particle compositions
US20100111834A1 (en) * 2008-10-31 2010-05-06 Searete Llc, A Limited Liability Corporation Of The State Of Delaware Compositions and methods for therapeutic delivery with frozen particles
US9072799B2 (en) 2008-10-31 2015-07-07 The Invention Science Fund I, Llc Compositions and methods for surface abrasion with frozen particles
US9072688B2 (en) * 2008-10-31 2015-07-07 The Invention Science Fund I, Llc Compositions and methods for therapeutic delivery with frozen particles
US8551505B2 (en) * 2008-10-31 2013-10-08 The Invention Science Fund I, Llc Compositions and methods for therapeutic delivery with frozen particles
US9050070B2 (en) * 2008-10-31 2015-06-09 The Invention Science Fund I, Llc Compositions and methods for surface abrasion with frozen particles
US9060926B2 (en) * 2008-10-31 2015-06-23 The Invention Science Fund I, Llc Compositions and methods for therapeutic delivery with frozen particles
US8788211B2 (en) * 2008-10-31 2014-07-22 The Invention Science Fund I, Llc Method and system for comparing tissue ablation or abrasion data to data related to administration of a frozen particle composition
US9050317B2 (en) * 2008-10-31 2015-06-09 The Invention Science Fund I, Llc Compositions and methods for therapeutic delivery with frozen particles
US8762067B2 (en) * 2008-10-31 2014-06-24 The Invention Science Fund I, Llc Methods and systems for ablation or abrasion with frozen particles and comparing tissue surface ablation or abrasion data to clinical outcome data
US8793075B2 (en) 2008-10-31 2014-07-29 The Invention Science Fund I, Llc Compositions and methods for therapeutic delivery with frozen particles
US8545855B2 (en) * 2008-10-31 2013-10-01 The Invention Science Fund I, Llc Compositions and methods for surface abrasion with frozen particles
US8603494B2 (en) 2008-10-31 2013-12-10 The Invention Science Fund I, Llc Compositions and methods for administering compartmentalized frozen particles
US9060934B2 (en) * 2008-10-31 2015-06-23 The Invention Science Fund I, Llc Compositions and methods for surface abrasion with frozen particles
US8563012B2 (en) * 2008-10-31 2013-10-22 The Invention Science Fund I, Llc Compositions and methods for administering compartmentalized frozen particles
US8613937B2 (en) * 2008-10-31 2013-12-24 The Invention Science Fund I, Llc Compositions and methods for biological remodeling with frozen particle compositions
US20100111857A1 (en) 2008-10-31 2010-05-06 Boyden Edward S Compositions and methods for surface abrasion with frozen particles
US9056047B2 (en) 2008-10-31 2015-06-16 The Invention Science Fund I, Llc Compositions and methods for delivery of frozen particle adhesives
US20110150765A1 (en) * 2008-10-31 2011-06-23 Searete Llc, A Limited Liability Corporation Of The State Of Delaware Frozen compositions and methods for piercing a substrate
US8518031B2 (en) * 2008-10-31 2013-08-27 The Invention Science Fund I, Llc Systems, devices and methods for making or administering frozen particles
US8731840B2 (en) * 2008-10-31 2014-05-20 The Invention Science Fund I, Llc Compositions and methods for therapeutic delivery with frozen particles
US8731841B2 (en) * 2008-10-31 2014-05-20 The Invention Science Fund I, Llc Compositions and methods for therapeutic delivery with frozen particles
US8721583B2 (en) 2008-10-31 2014-05-13 The Invention Science Fund I, Llc Compositions and methods for surface abrasion with frozen particles
US8725420B2 (en) * 2008-10-31 2014-05-13 The Invention Science Fund I, Llc Compositions and methods for surface abrasion with frozen particles
US9375169B2 (en) 2009-01-30 2016-06-28 Sanofi-Aventis Deutschland Gmbh Cam drive for managing disposable penetrating member actions with a single motor and motor and control system
US8454409B2 (en) * 2009-09-10 2013-06-04 Rave N.P., Inc. CO2 nozzles
US8451578B1 (en) 2010-02-12 2013-05-28 Western Digital Technologies, Inc. Hard drive particle cleaning system and method
US8965476B2 (en) 2010-04-16 2015-02-24 Sanofi-Aventis Deutschland Gmbh Tissue penetration device
TW201210748A (en) * 2010-09-10 2012-03-16 Hon Hai Prec Ind Co Ltd Cylindrical grinding apparatus and method for cylindrical grinding using same
TW201249551A (en) * 2010-10-28 2012-12-16 Rave N P Inc Integrated substrate cleaning system and method
JP2013059711A (en) * 2011-09-12 2013-04-04 Japan Display East Inc Cleaning method
FR2982786B1 (en) * 2011-11-21 2014-09-19 Air Liquide INSTALLATION AND METHOD FOR WORKING BY CRYOGENIC FLUID JETS WITH IMPROVEMENT OF THE SUCTION BELL
US20130263890A1 (en) * 2012-03-20 2013-10-10 Mid-American Gunite, Inc. Cleaning of radioactive contamination using dry ice
US20150224627A1 (en) * 2012-11-15 2015-08-13 Mitsubishi Heavy Industries, Ltd. Adhered substances removing device, and vapor deposition system and removal method using such adhered substances removing device
US20140137910A1 (en) * 2012-11-20 2014-05-22 Bratney Companies Dry ice blasting cleaning system and method of using the same
US9221067B2 (en) 2013-06-18 2015-12-29 Cleanlogic Llc CO2 composite spray method and apparatus
US10099344B2 (en) * 2016-04-19 2018-10-16 Joseph P. Sergio Dry ice and abbrasive blasting media apparatus and method
DE102017107030A1 (en) * 2017-03-31 2018-10-04 Fm Marketing Gmbh Refurbishing with dry ice blasting
WO2018187513A1 (en) 2017-04-04 2018-10-11 Cleanlogix Llc Passive electrostatic co2 composite spray applicator
CN109926714A (en) * 2017-12-19 2019-06-25 海太半导体(无锡)有限公司 Laser marking machine automated cleaning control system
CN108325950B (en) * 2018-03-30 2024-02-27 厦门维拓科力智能技术有限公司 Solid carbon dioxide cleaning machine
JP2022500259A (en) * 2018-09-17 2022-01-04 ハイパーサーム インコーポレイテッド Mobile water jetrail repair system
KR102107350B1 (en) * 2019-04-19 2020-05-13 씨티에스(주) Apparatus for cleaning optical element
US20210131949A1 (en) * 2019-11-06 2021-05-06 Entegris, Inc. Optical sensor window cleaner
CN111069187A (en) * 2019-12-27 2020-04-28 安徽富乐德科技发展有限公司 Automatic laser cleaning equipment and method for OLED organic evaporation equipment
US20210384881A1 (en) * 2020-05-20 2021-12-09 Ebara Corporation Method for determining cleanliness of cleaning member, method for determining adsorption characteristics of contaminants that contaminate cleaning member, method for determining cleanliness of substrate, program for determining cleanliness of substrate, and program for determining end point of cleaning process

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1887395A (en) * 1930-05-29 1932-11-08 New Haven Sand Blast Company Sand blast apparatus
US2276345A (en) * 1938-05-13 1942-03-17 Pangborn Corp Abrading apparatus
US3589081A (en) * 1967-08-21 1971-06-29 Pennwalt Corp Abrading method
US3691695A (en) * 1971-01-20 1972-09-19 Norman Green Rapid acting abrasive trimmer for micro-electronic devices
JPS58156299U (en) * 1982-04-13 1983-10-19 株式会社東芝 Automatic stack cleaning device
US4655847A (en) * 1983-09-01 1987-04-07 Tsuyoshi Ichinoseki Cleaning method
JPS6067077A (en) * 1983-09-19 1985-04-17 Ishikawajima Harima Heavy Ind Co Ltd Ice grain grinding method and system
US4617064A (en) * 1984-07-31 1986-10-14 Cryoblast, Inc. Cleaning method and apparatus
US4631250A (en) * 1985-03-13 1986-12-23 Research Development Corporation Of Japan Process for removing covering film and apparatus therefor
JPS6343160A (en) * 1986-08-11 1988-02-24 Toshiba Corp Electrophotographic sensitive body
US4806171A (en) * 1987-04-22 1989-02-21 The Boc Group, Inc. Apparatus and method for removing minute particles from a substrate
US4832753A (en) * 1987-05-21 1989-05-23 Tempress Measurement & Control Corporation High-purity cleaning system, method, and apparatus
US4936922A (en) * 1987-05-21 1990-06-26 Roger L. Cherry High-purity cleaning system, method, and apparatus
FR2627121B1 (en) * 1988-02-12 1994-07-01 Carboxyque Francaise METHOD, INSTALLATION AND SPRAY NOZZLE FOR THE TREATMENT OF TRAPS BY BLASTING BLAST
JPH0622224B2 (en) 1988-03-05 1994-03-23 大阪酸素工業株式会社 Supply of liquefied carbon dioxide with few or no particles
NL8801577A (en) * 1988-06-21 1990-01-16 Harko B V Staalstraalbedrijf Cryogenic jet spray arrangement - using carbon di:oxide grit for cleaning building facades, grit is fed to bunker and cooled under pressure via gas tight sluice
JPH0227766U (en) * 1988-08-12 1990-02-22
JPH02130921A (en) * 1988-11-11 1990-05-18 Taiyo Sanso Co Ltd Cleaning equipment for solid surface
US4962891A (en) * 1988-12-06 1990-10-16 The Boc Group, Inc. Apparatus for removing small particles from a substrate
US5063015A (en) * 1989-03-13 1991-11-05 Cold Jet, Inc. Method for deflashing articles
JPH02251288A (en) * 1989-03-22 1990-10-09 Toshiba Corp Washing apparatus
JPH02270322A (en) * 1989-04-11 1990-11-05 Taiyo Sanso Co Ltd Cleaning device of semiconductor wafer
JPH02277236A (en) * 1989-04-18 1990-11-13 Taiyo Sanso Co Ltd Cleaning apparatus
JPH0349224A (en) * 1989-07-17 1991-03-04 Mitsubishi Electric Corp Treating method for substrate
JP2529431B2 (en) 1990-02-09 1996-08-28 大陽酸素株式会社 Cleaning equipment
US5062898A (en) * 1990-06-05 1991-11-05 Air Products And Chemicals, Inc. Surface cleaning using a cryogenic aerosol
US5125979A (en) * 1990-07-02 1992-06-30 Xerox Corporation Carbon dioxide snow agglomeration and acceleration
US5044129A (en) * 1990-07-05 1991-09-03 The United States Of America As Represented By The Secretary Of The Air Force Cryogenic mechanical means of paint removal
US5123207A (en) * 1990-10-30 1992-06-23 Tti Engineering Inc. Mobile co2 blasting decontamination system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110216095A (en) * 2019-05-22 2019-09-10 重庆北崎包装制品有限公司 A kind of intelligence machine cleaning equipment

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DE69209957D1 (en) 1996-05-23
JPH05253551A (en) 1993-10-05
DE69209957T2 (en) 1996-09-19
EP0535680B1 (en) 1996-04-17
EP0535680B2 (en) 2001-11-21
CA2077463C (en) 1999-04-20
TW203565B (en) 1993-04-11
KR930007526A (en) 1993-05-20
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EP0535680A1 (en) 1993-04-07
US5315793A (en) 1994-05-31

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