CA2011888A1 - Fluxless soldering process - Google Patents
Fluxless soldering processInfo
- Publication number
- CA2011888A1 CA2011888A1 CA2011888A CA2011888A CA2011888A1 CA 2011888 A1 CA2011888 A1 CA 2011888A1 CA 2011888 A CA2011888 A CA 2011888A CA 2011888 A CA2011888 A CA 2011888A CA 2011888 A1 CA2011888 A1 CA 2011888A1
- Authority
- CA
- Canada
- Prior art keywords
- soldering
- need
- soldering process
- cleaning
- fluxless soldering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/20—Preliminary treatment of work or areas to be soldered, e.g. in respect of a galvanic coating
- B23K1/206—Cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/38—Selection of media, e.g. special atmospheres for surrounding the working area
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3489—Composition of fluxes; Methods of application thereof; Other methods of activating the contact surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
Abstract
A method of soldering without the need for fluxing agents, high temperature, hydrogen, laser excitation or sputtering techniques. The method uses plasma excitation to remove surface oxides from solder surfaces, thereby eliminating the need for post-soldering cleaning in an accurate and efficient manner, resulting in a higher quality and long term reliability solder joint. In addition, serious environmental problems caused by cleaning solvents are avoided.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/324,247 US4921157A (en) | 1989-03-15 | 1989-03-15 | Fluxless soldering process |
US324,247 | 1989-03-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2011888A1 true CA2011888A1 (en) | 1990-09-15 |
CA2011888C CA2011888C (en) | 1995-06-13 |
Family
ID=23262749
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002011888A Expired - Fee Related CA2011888C (en) | 1989-03-15 | 1990-03-09 | Fluxless soldering process |
Country Status (11)
Country | Link |
---|---|
US (1) | US4921157A (en) |
EP (1) | EP0463098B1 (en) |
JP (1) | JP2527278B2 (en) |
KR (1) | KR0181951B1 (en) |
AU (1) | AU634441B2 (en) |
CA (1) | CA2011888C (en) |
DE (1) | DE69005104T2 (en) |
ES (1) | ES2049471T3 (en) |
HK (1) | HK45894A (en) |
MY (1) | MY106703A (en) |
WO (1) | WO1990010518A1 (en) |
Families Citing this family (77)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4032328A1 (en) * | 1989-11-06 | 1991-09-19 | Wls Karl Heinz Grasmann Weichl | METHOD AND DEVICE FOR PROCESSING JOINT PARTNERS TO BE SOLDERED |
JP2730645B2 (en) | 1989-12-13 | 1998-03-25 | 松下電器産業株式会社 | Manufacturing method of cream solder |
BR9006515A (en) * | 1989-12-26 | 1991-10-01 | Union Carbide Ind Gases Tech | WELDING COATING AND WELDING |
US5255840A (en) * | 1989-12-26 | 1993-10-26 | Praxair Technology, Inc. | Fluxless solder coating and joining |
US5341980A (en) * | 1990-02-19 | 1994-08-30 | Hitachi, Ltd. | Method of fabricating electronic circuit device and apparatus for performing the same method |
US6227436B1 (en) * | 1990-02-19 | 2001-05-08 | Hitachi, Ltd. | Method of fabricating an electronic circuit device and apparatus for performing the method |
US6471115B1 (en) | 1990-02-19 | 2002-10-29 | Hitachi, Ltd. | Process for manufacturing electronic circuit devices |
US5145104A (en) * | 1991-03-21 | 1992-09-08 | International Business Machines Corporation | Substrate soldering in a reducing atmosphere |
US5223691A (en) * | 1991-06-03 | 1993-06-29 | Motorola, Inc. | Plasma based soldering method requiring no additional heat sources or flux |
GB9123336D0 (en) * | 1991-11-04 | 1991-12-18 | Marconi Gec Ltd | Methods of joining components |
US5345056A (en) * | 1991-12-12 | 1994-09-06 | Motorola, Inc. | Plasma based soldering by indirect heating |
GB2287206B (en) * | 1992-03-19 | 1996-04-03 | Fujitsu Ltd | Soldering method |
FR2688727B1 (en) * | 1992-03-19 | 1996-03-15 | Fujitsu Ltd | METHODS FOR MAKING A METAL PARTICLE SPHERICAL AND FOR REMOVING AN OXIDE FILM, SOLDERING PASTE AND WELDING METHOD. |
DE4225378A1 (en) * | 1992-03-20 | 1993-09-23 | Linde Ag | METHOD FOR SOLDERING PCBS UNDER LOW PRESSURE |
JP2848960B2 (en) * | 1992-07-31 | 1999-01-20 | リンデ アクチエンゲゼルシヤフト | Soldering method of printed wiring board under low pressure |
WO1994022628A1 (en) * | 1993-04-05 | 1994-10-13 | Seiko Epson Corporation | Combining method and apparatus using solder |
TW268913B (en) * | 1993-08-30 | 1996-01-21 | Mitsubishi Gas Chemical Co | |
US5499754A (en) * | 1993-11-19 | 1996-03-19 | Mcnc | Fluxless soldering sample pretreating system |
US5407121A (en) * | 1993-11-19 | 1995-04-18 | Mcnc | Fluxless soldering of copper |
JP3312377B2 (en) * | 1993-12-09 | 2002-08-05 | セイコーエプソン株式会社 | Method and apparatus for joining with brazing material |
WO1995018249A1 (en) | 1993-12-24 | 1995-07-06 | Seiko Epson Corporation | Method and apparatus for processing surface with plasma under atmospheric pressure, method of producing semiconductor device and method of producing ink-jet printing head |
JP3136390B2 (en) * | 1994-12-16 | 2001-02-19 | 株式会社日立製作所 | Solder joining method and power semiconductor device |
US6006763A (en) * | 1995-01-11 | 1999-12-28 | Seiko Epson Corporation | Surface treatment method |
JPH08279495A (en) * | 1995-02-07 | 1996-10-22 | Seiko Epson Corp | Method and system for plasma processing |
JP3521587B2 (en) * | 1995-02-07 | 2004-04-19 | セイコーエプソン株式会社 | Method and apparatus for removing unnecessary substances from the periphery of substrate and coating method using the same |
WO1996031997A1 (en) * | 1995-04-07 | 1996-10-10 | Seiko Epson Corporation | Surface treatment apparatus |
US5609290A (en) * | 1995-04-20 | 1997-03-11 | The University Of North Carolina At Charlotte | Fluxless soldering method |
US5615825A (en) * | 1995-05-12 | 1997-04-01 | Mcnc | Fluorinated fluxless soldering |
US5985692A (en) * | 1995-06-07 | 1999-11-16 | Microunit Systems Engineering, Inc. | Process for flip-chip bonding a semiconductor die having gold bump electrodes |
US5823416A (en) * | 1995-07-28 | 1998-10-20 | Matsushita Electric Industrial Co., Ltd. | Apparatus and method for surface treatment, and apparatus and method for wire bonding using the surface treatment apparatus |
JP3598602B2 (en) * | 1995-08-07 | 2004-12-08 | セイコーエプソン株式会社 | Plasma etching method, liquid crystal display panel manufacturing method, and plasma etching apparatus |
JPH09233862A (en) * | 1995-12-18 | 1997-09-05 | Seiko Epson Corp | Method and device for generating power using piezoelectric body, and electronic equipment |
US5918794A (en) * | 1995-12-28 | 1999-07-06 | Lucent Technologies Inc. | Solder bonding of dense arrays of microminiature contact pads |
JPH09312545A (en) | 1996-03-18 | 1997-12-02 | Seiko Epson Corp | Piezoelectric element, its producing method and mount device of piezoelectric oscillator bar |
US5918354A (en) * | 1996-04-02 | 1999-07-06 | Seiko Epson Corporation | Method of making a piezoelectric element |
US5899737A (en) * | 1996-09-20 | 1999-05-04 | Lsi Logic Corporation | Fluxless solder ball attachment process |
US5992729A (en) * | 1996-10-02 | 1999-11-30 | Mcnc | Tacking processes and systems for soldering |
SE508596C2 (en) * | 1996-11-13 | 1998-10-19 | Aga Ab | Method of brazing by plasma |
US5902686A (en) * | 1996-11-21 | 1999-05-11 | Mcnc | Methods for forming an intermetallic region between a solder bump and an under bump metallurgy layer and related structures |
US6013381A (en) * | 1996-12-06 | 2000-01-11 | Mcnc | Fluorinated fluxless soldering |
US5776551A (en) * | 1996-12-23 | 1998-07-07 | Lsi Logic Corporation | Use of plasma activated NF3 to clean solder bumps on a device |
JP3557845B2 (en) * | 1997-04-15 | 2004-08-25 | セイコーエプソン株式会社 | Wax or solder material |
JPH1112716A (en) | 1997-06-19 | 1999-01-19 | Seiko Epson Corp | Material for brazing and its production |
JP3420917B2 (en) * | 1997-09-08 | 2003-06-30 | 富士通株式会社 | Semiconductor device |
US5961031A (en) * | 1997-11-21 | 1999-10-05 | The University Of North Carolina At Charlotte | Method and apparatus for forming hydrogen fluoride |
JP4029473B2 (en) | 1997-12-15 | 2008-01-09 | セイコーエプソン株式会社 | Solid bonding method and apparatus, conductor bonding method, and packaging method |
JP4497154B2 (en) * | 1997-12-15 | 2010-07-07 | セイコーエプソン株式会社 | Solid bonding method |
JPH11224981A (en) * | 1998-02-06 | 1999-08-17 | Matsushita Electric Ind Co Ltd | Soldering method and formation of solder bump |
US6250540B1 (en) * | 1999-04-30 | 2001-06-26 | International Business Machines Corporation | Fluxless joining process for enriched solders |
US6607613B2 (en) | 1998-07-10 | 2003-08-19 | International Business Machines Corporation | Solder ball with chemically and mechanically enhanced surface properties |
US6056831A (en) | 1998-07-10 | 2000-05-02 | International Business Machines Corporation | Process for chemically and mechanically enhancing solder surface properties |
FR2781706B1 (en) * | 1998-07-30 | 2000-08-25 | Air Liquide | METHOD OF BRAZING BY REFUSION OF ELECTRONIC COMPONENTS AND BRAZING DEVICE FOR CARRYING OUT SUCH A METHOD |
US6742701B2 (en) * | 1998-09-17 | 2004-06-01 | Kabushiki Kaisha Tamura Seisakusho | Bump forming method, presoldering treatment method, soldering method, bump forming apparatus, presoldering treatment device and soldering apparatus |
US6605175B1 (en) | 1999-02-19 | 2003-08-12 | Unaxis Balzers Aktiengesellschaft | Process for manufacturing component parts, use of same, with air bearing supported workpieces and vacuum processing chamber |
US6219910B1 (en) * | 1999-03-05 | 2001-04-24 | Intel Corporation | Method for cutting integrated circuit dies from a wafer which contains a plurality of solder bumps |
US6092714A (en) * | 1999-03-16 | 2000-07-25 | Mcms, Inc. | Method of utilizing a plasma gas mixture containing argon and CF4 to clean and coat a conductor |
JP3514670B2 (en) * | 1999-07-29 | 2004-03-31 | 松下電器産業株式会社 | Soldering method |
US6193135B1 (en) | 1999-09-13 | 2001-02-27 | Lucent Technologies Inc. | System for providing back-lighting of components during fluxless soldering |
US6206276B1 (en) | 1999-09-13 | 2001-03-27 | Lucent Technologies Inc. | Direct-placement fluxless soldering using inert gas environment |
US6196446B1 (en) | 1999-09-13 | 2001-03-06 | Lucent Technologies Inc. | Automated fluxless soldering using inert gas |
US6469394B1 (en) | 2000-01-31 | 2002-10-22 | Fujitsu Limited | Conductive interconnect structures and methods for forming conductive interconnect structures |
US6931723B1 (en) * | 2000-09-19 | 2005-08-23 | International Business Machines Corporation | Organic dielectric electronic interconnect structures and method for making |
US7098072B2 (en) * | 2002-03-01 | 2006-08-29 | Agng, Llc | Fluxless assembly of chip size semiconductor packages |
DE10210216A1 (en) * | 2002-03-08 | 2003-10-16 | Behr Gmbh & Co | Method of brazing aluminum |
US6926190B2 (en) * | 2002-03-25 | 2005-08-09 | Micron Technology, Inc. | Integrated circuit assemblies and assembly methods |
US6712260B1 (en) * | 2002-04-18 | 2004-03-30 | Taiwan Semiconductor Manufacturing Company | Bump reflow method by inert gas plasma |
US6936546B2 (en) * | 2002-04-26 | 2005-08-30 | Accretech Usa, Inc. | Apparatus for shaping thin films in the near-edge regions of in-process semiconductor substrates |
KR100521081B1 (en) * | 2002-10-12 | 2005-10-14 | 삼성전자주식회사 | Fabrication and installation method of flip chip |
WO2004059708A2 (en) * | 2002-12-20 | 2004-07-15 | Agere Systems Inc. | Structure and method for bonding to copper interconnect structures |
US20050170609A1 (en) * | 2003-12-15 | 2005-08-04 | Alie Susan A. | Conductive bond for through-wafer interconnect |
US7012328B2 (en) * | 2004-05-14 | 2006-03-14 | Intevac, Inc. | Semiconductor die attachment for high vacuum tubes |
US7608534B2 (en) * | 2004-06-02 | 2009-10-27 | Analog Devices, Inc. | Interconnection of through-wafer vias using bridge structures |
JP2011023509A (en) * | 2009-07-15 | 2011-02-03 | Renesas Electronics Corp | Method for manufacturing semiconductor device, and semiconductor manufacturing apparatus used in the same |
JP2011124398A (en) * | 2009-12-11 | 2011-06-23 | Hitachi Ltd | Junction structure and manufacturing method thereof |
US8492242B2 (en) * | 2010-05-25 | 2013-07-23 | Micron Technology, Inc. | Dry flux bonding device and method |
US9038883B2 (en) | 2013-09-11 | 2015-05-26 | Princeton Optronics Inc. | VCSEL packaging |
US11217550B2 (en) * | 2018-07-24 | 2022-01-04 | Xilinx, Inc. | Chip package assembly with enhanced interconnects and method for fabricating the same |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2294014A1 (en) * | 1974-12-13 | 1976-07-09 | Cerca | HOT ASSEMBLY PROCESS |
US4328044A (en) * | 1978-02-02 | 1982-05-04 | University Of Dayton | Method for cleaning metal parts |
US4405379A (en) * | 1980-02-06 | 1983-09-20 | University Of Dayton | Method for cleaning metal parts |
US4504007A (en) * | 1982-09-14 | 1985-03-12 | International Business Machines Corporation | Solder and braze fluxes and processes for using the same |
US4498046A (en) * | 1982-10-18 | 1985-02-05 | International Business Machines Corporation | Room temperature cryogenic test interface |
CH662007A5 (en) * | 1983-12-21 | 1987-08-31 | Bbc Brown Boveri & Cie | Method of soldering semiconductor components |
US4577398A (en) * | 1984-09-07 | 1986-03-25 | Trilogy Computer Development Partners, Ltd. | Method for mounting a semiconductor chip |
US5048746A (en) * | 1989-12-08 | 1991-09-17 | Electrovert Ltd. | Tunnel for fluxless soldering |
-
1989
- 1989-03-15 US US07/324,247 patent/US4921157A/en not_active Expired - Lifetime
-
1990
- 1990-03-09 CA CA002011888A patent/CA2011888C/en not_active Expired - Fee Related
- 1990-03-10 MY MYPI90000386A patent/MY106703A/en unknown
- 1990-03-14 ES ES90905786T patent/ES2049471T3/en not_active Expired - Lifetime
- 1990-03-14 EP EP90905786A patent/EP0463098B1/en not_active Expired - Lifetime
- 1990-03-14 JP JP2505487A patent/JP2527278B2/en not_active Expired - Lifetime
- 1990-03-14 AU AU53498/90A patent/AU634441B2/en not_active Ceased
- 1990-03-14 WO PCT/US1990/001404 patent/WO1990010518A1/en active IP Right Grant
- 1990-03-14 DE DE69005104T patent/DE69005104T2/en not_active Expired - Fee Related
-
1991
- 1991-09-14 KR KR1019910701117A patent/KR0181951B1/en not_active IP Right Cessation
-
1994
- 1994-05-12 HK HK45894A patent/HK45894A/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
AU634441B2 (en) | 1993-02-18 |
US4921157A (en) | 1990-05-01 |
JPH05500026A (en) | 1993-01-14 |
HK45894A (en) | 1994-05-20 |
DE69005104T2 (en) | 1994-07-07 |
EP0463098B1 (en) | 1993-12-08 |
DE69005104D1 (en) | 1994-01-20 |
JP2527278B2 (en) | 1996-08-21 |
EP0463098A1 (en) | 1992-01-02 |
WO1990010518A1 (en) | 1990-09-20 |
MY106703A (en) | 1995-07-31 |
KR0181951B1 (en) | 1999-05-01 |
ES2049471T3 (en) | 1994-04-16 |
CA2011888C (en) | 1995-06-13 |
AU5349890A (en) | 1990-10-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request | ||
MKLA | Lapsed |