CA1298530C - Silicon micromachined non-elastic flow valves - Google Patents
Silicon micromachined non-elastic flow valvesInfo
- Publication number
- CA1298530C CA1298530C CA000579255A CA579255A CA1298530C CA 1298530 C CA1298530 C CA 1298530C CA 000579255 A CA000579255 A CA 000579255A CA 579255 A CA579255 A CA 579255A CA 1298530 C CA1298530 C CA 1298530C
- Authority
- CA
- Canada
- Prior art keywords
- valve
- plate
- valve plate
- silicon
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
- F02M61/16—Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
- F02M61/18—Injection nozzles, e.g. having valve seats; Details of valve member seated ends, not otherwise provided for
- F02M61/1853—Orifice plates
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C3/00—Circuit elements having moving parts
- F15C3/005—Circuit elements having moving parts using loose plates or foils
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
- F16K27/0236—Diaphragm cut-off apparatus
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
- F16K27/029—Electromagnetically actuated valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0005—Lift valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0005—Lift valves
- F16K99/0007—Lift valves of cantilever type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49229—Prime mover or fluid pump making
- Y10T29/49298—Poppet or I.C. engine valve or valve seat making
- Y10T29/49314—Poppet or I.C. engine valve or valve seat making with assembly or composite article making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Abstract
ABSTRACT OF THE DISCLOSURE
A valve assembly for controlling fluid flow includes a valve plate and a nozzle plate which are not attached to each other but can be moved into and out off contact with each other. The valve plate has an opening for passing an actuator and fluid. A nozzle plate has an opening for passing fluid and the opening is aligned with a mesa on the valve plate which can seal the nozzle orifice. The actuator separates the nozzle plate from the valve plate to permit fluid flow and a spring means brings the nozzle plate into a closed position against the valve plate to stop fluid flow.
A valve assembly for controlling fluid flow includes a valve plate and a nozzle plate which are not attached to each other but can be moved into and out off contact with each other. The valve plate has an opening for passing an actuator and fluid. A nozzle plate has an opening for passing fluid and the opening is aligned with a mesa on the valve plate which can seal the nozzle orifice. The actuator separates the nozzle plate from the valve plate to permit fluid flow and a spring means brings the nozzle plate into a closed position against the valve plate to stop fluid flow.
Description
- ~2~353() ~I~ICON MICRONaCHINED NONo~LA6TIC ~LOW VALVES
This invention relates to a structur~ of a silicon valveO
An article entitled "Fabrication of Novel Three-Dimensional Microstructures by the Anisotropic Etching of (100) and (110) Silicon", by E. Bassous, IEEE Transactions on Electron Devices, Vol. ED-25, No.
10, October 1978, pages 1178-~5 teaches the use of anistropic etching of single crystal silicon to make ink jet nozzles, optical waveguides, multisocket miniature electrical connectors and electromechanical devices.
U.S. Patents 4,157,935 issued to Solyst and 4,455,192 issued to Tamai teach methods of forming an ink jet nozzle array by chemical etching of a silicon wafer.
It is also known to fabricate conventional metal fluid metering valves such as those using matched fittings of very precisely machined metal components.
Typical tolerances of the lapped machine parts are in the million~hs of an inch. This is a complicated, labor-intensive, time-consuming manufacturing process yielding components which are expensive and subject to reliability problems as the internal tolerances change due to wear and exposure to fuel and fuel contaminants.
It would be desirable to fabricate fuel injectors and other valves with substantially less labor and time using a significantly less complicated manufacturing process. That is, superior tolerances are desirable as is an insensitivity to fuel contaminants and improved reliability.
Further, it is also known to use a silicon valve for controlling the flow of fluid using first and second silicon msmbers. The first silicon member is generally planar and has an orifice for passiny the fluid. The second silicon member has a planar silicon ... '.' ~ '`~
~zg8s30 surface aligned with, and relatively moveable to, the orifice for selectively opening and closing the orifice thereby controlling flow of fluid through the orifice.
Such a silicon valve and method for fabricating it are further described in U.S. Patent No. 4,628,~76 issued December 16, 1986 and U.S. Patent No. 4,647,013 issued March 3, 1987, both assigned to Ford Motor Company.
U.S. Patent No. 1,243,122 discloses a valve which is used to vaporize a gasoline and air mixture as the mixture leaves the carburetor of an engine. FIG. 1 of that patent illustrates the valve comprising perforated plates 10, 12 positioned to receive the gasoline and air mixture from the carburetor 6. The plates 10, 11 are normally held against one another with the perforations in each plate offset to block any flow through the valve. When a partial vacuum is formed in manifold 5, the plate 12 moves away from the fixed plate 10 thereby vaporizing the fuel mixture as seen in FIG. 3 of that patent. This reference neither teaches nor suggests the use of silicon to construct a valve.
U.S. Patent No. 4,538,642 disaloses a valve which, as seen in FIG. 1, includes an electrically conductive sheet-like member 4 provided with an electrically insulative face surface 6 and an array of apertures 7-11. A second electrically conductive sheet-like member 12 abuts the first member 4 at face surface 6 to close off apertures 7-ll. The second sheet-like member 12 has apertures 16-13 which are non-aligned with the apertures 7-ll. To open the valve, switch 28 is closed, causing electric current to pass through member 4, then through conductor 26, and then through member 12 to produce opposing electromagnetic fields to raise the sheet member 4, 6 as seen in FIG.
3. Again, there is no teaching or suggestion of using silicon to construct the valveO
. ,,,,~
3C~
The above prior art has shown that precise control of fluid flow, including gaseous, liquid or vacuum, is very difficult to achieve. The conventional approach using metal valve systems requires precise machining on very small components. Valve to valve variability is very difficult to control and the total operation is very expensive. These metal valves usually include a metal housing and pintle and are susceptible to clogging by very small foreign matter introduced through the fluids. Other approaches now in use include injection molding of a plastic valve seat against which a rubber-tipped plunger is forced to effect closure. This type of valve is subject to sticking due to environmental conditions such as very low temperature. Simpler actuation and improved flow control in silicon valves would also be desirable.
These are some of the problems this invention overcomes.
In accordance with one aspect of the present invention, there is provided a silicon valve assembly for controlling the flow of fluid including a first generally planar silicon valve plate having a flow orifice for passing fluids and an actuator opening, a second generally planar silicon nozzle plate having a planar silicon surface and nozzle orifices ~ormed through the plane of the nozzle plate for passing fluid in a spray pattern, the nozzle plate and the valve plate being free of each other at a generally parallel and adjacent position, a spring means for pressing the nozzle plate and valve plate toward each other thereby sealing the valve assembly to prevent fluid flow, and an actuator means acting through the actuator opening aganist the nozzle plate and the spring means to separate the nozzle plate and valve plate thereby permitting fluid flow through the valve assembly.
A valve assembly in accordance with an embodiment of this invention includes a valve plate and , ,' A ' ~$
~;~98S3(3 a nozzle plate which have orifices for passing fluid.
Further, the valve plate has an opening for passing an actuator to deflect the nozzle plate. The valve plate and nozzle plate are not sealed to each other and operation of the valve does not depend upon the elasticity of the silicon. That is, the nozzle plate and tha valve plate are separated from one another to permit fluid flow and brought together to stop fluid flow.
A spring means such as a Belleville washer-type spring can be used to keep the nozzle plate in a closed position against the valve plate. This approach reduces the amount of force that the actuator must generate to open the valve in comparison to bending a silicon plate. The valve plate can be fabricated by a simultaneous double-sided etch process.
In another aspect of the present invention, there i5 provided a method for fabricating a silicon valve for controlling fluid flow including the step of forming a supply orifice in a generally planar square valve plate member, performing double-sided etching on the valve plate., and removing outside corners from the valve plate thus increasing the suxface area of the valve plate which can be contained within a circle.
The invention is described further, by way of illustration, with reference to the accompanyin~
drawings, wherein:
FIG. 1 is a plan view of a valve plate of a valve assembly in accordance with an embodiment of this 30 invention;
FIG. 2 is a side view of the valve plate of FIG. 1;
FIG. 3 is a section along line 3-3 of FIG. 1;
FIG. 4 is a section along line 4-4 of FIG. 1;
FIG. 5 is a plan view of a nozzle plate of a valve assembly in accordance with an embodiment of this invention;
S3~
FIG. 6 i~ a section along line 6-6 o~ FIG. 5;
FIG. 7 is a perspective, partly broken away view of the assembly of the valve plate of FIG. 1 and the nozzle plate of FIG. 5;
FIG. 8 is a plan view of a valve plate in accordance with another embodiment of this invention;
FIG. 9 is a side view of the valve plate of FIG. 8;
FIG. 10 is a section view along line 10-10 of FIG. 8;
FIG. 11 is a section view along 11-11 of FIG.
8;
FIG. 12 is a perspective, partly broken away view of a valve assembly including the nozzle plate of FIG. 5 and the valve plate of FIG. 8 in accordance with another smbodiment of this invention;
FIG. 13 is a side section view of a valve assembly in combination with a valve washer and actuator in a closed position; and FIG. 14 is the valve combination of FIG. 13 n an open posltion.
Referring to FIGS. 1-4, a plan view of a valve plate 20 includes four flow orifices 21, a central actuating opening 22, four mesas 23 positioned around central opening 22, and four notched corners 24.
Referring to FIGS. 5 and 6, a nozzle plate 50 includes four openings 51 for passing fluid and aligned with mesas 23 of valve plate 20. FIG. 7 shows the valve assembly 30 with valve plate 20 and no~zle plate 50.
Notched corners 24 of valve plate 20 are advantageous to increase the surface area of the valve.
When valve plate 20 is fitted into a circular opening ....
~Z9~530 5a an advantageously large covering of the opening can be achieved by removing the corners of valve plate 20.
Referring to FIGS. 8-11, a valve plate 80 includes fabrication using double-sided etching and has flow openings 81 positioned adjacent the four corners of valve plate 80 and around a central opening 83.
Double sided etching has been used to remove corners 82 from valve plate 80. A central opening B3 is surrounded by m~sas 84 positioned between adjacent flow openings B1. The double-sided etching of valve plate 80 is apparent in side view FIG. 9. Valve plate 80 also includes a peripheral wall 85 and a membrane 86 positioned between ~9~3(~
peripheral wall 85 and mesas 84.
Valve plate 80 can be used with any number of nozzle plates such as nozzle plate 50 shown in FIGS. 5 and 12. FIGS. 13 and 14 show the addîtion of a valve washer 100 which presses valve plate 80 to nozzle plate 50 and which is deflected by an actuator 101 thereby spacing nozzle plate 50 from valve plate 80 and permitting fluid flow through the openings in nozzle plate 50. Valve washer 100 may be a Belleville washer or, alternatively, be formed of an elastomeric material.
Various modi~ications and variations will no doubt occur to those skilled in the art to which this invention pertains. For example, the particular size and shape of the silicon members may be varied from that dîsclosed herein. These and all other variations which basically rely on the teachings through which this disclosure has advanced the art are properly considered within the scope o~ this invention.
_ ~g
This invention relates to a structur~ of a silicon valveO
An article entitled "Fabrication of Novel Three-Dimensional Microstructures by the Anisotropic Etching of (100) and (110) Silicon", by E. Bassous, IEEE Transactions on Electron Devices, Vol. ED-25, No.
10, October 1978, pages 1178-~5 teaches the use of anistropic etching of single crystal silicon to make ink jet nozzles, optical waveguides, multisocket miniature electrical connectors and electromechanical devices.
U.S. Patents 4,157,935 issued to Solyst and 4,455,192 issued to Tamai teach methods of forming an ink jet nozzle array by chemical etching of a silicon wafer.
It is also known to fabricate conventional metal fluid metering valves such as those using matched fittings of very precisely machined metal components.
Typical tolerances of the lapped machine parts are in the million~hs of an inch. This is a complicated, labor-intensive, time-consuming manufacturing process yielding components which are expensive and subject to reliability problems as the internal tolerances change due to wear and exposure to fuel and fuel contaminants.
It would be desirable to fabricate fuel injectors and other valves with substantially less labor and time using a significantly less complicated manufacturing process. That is, superior tolerances are desirable as is an insensitivity to fuel contaminants and improved reliability.
Further, it is also known to use a silicon valve for controlling the flow of fluid using first and second silicon msmbers. The first silicon member is generally planar and has an orifice for passiny the fluid. The second silicon member has a planar silicon ... '.' ~ '`~
~zg8s30 surface aligned with, and relatively moveable to, the orifice for selectively opening and closing the orifice thereby controlling flow of fluid through the orifice.
Such a silicon valve and method for fabricating it are further described in U.S. Patent No. 4,628,~76 issued December 16, 1986 and U.S. Patent No. 4,647,013 issued March 3, 1987, both assigned to Ford Motor Company.
U.S. Patent No. 1,243,122 discloses a valve which is used to vaporize a gasoline and air mixture as the mixture leaves the carburetor of an engine. FIG. 1 of that patent illustrates the valve comprising perforated plates 10, 12 positioned to receive the gasoline and air mixture from the carburetor 6. The plates 10, 11 are normally held against one another with the perforations in each plate offset to block any flow through the valve. When a partial vacuum is formed in manifold 5, the plate 12 moves away from the fixed plate 10 thereby vaporizing the fuel mixture as seen in FIG. 3 of that patent. This reference neither teaches nor suggests the use of silicon to construct a valve.
U.S. Patent No. 4,538,642 disaloses a valve which, as seen in FIG. 1, includes an electrically conductive sheet-like member 4 provided with an electrically insulative face surface 6 and an array of apertures 7-11. A second electrically conductive sheet-like member 12 abuts the first member 4 at face surface 6 to close off apertures 7-ll. The second sheet-like member 12 has apertures 16-13 which are non-aligned with the apertures 7-ll. To open the valve, switch 28 is closed, causing electric current to pass through member 4, then through conductor 26, and then through member 12 to produce opposing electromagnetic fields to raise the sheet member 4, 6 as seen in FIG.
3. Again, there is no teaching or suggestion of using silicon to construct the valveO
. ,,,,~
3C~
The above prior art has shown that precise control of fluid flow, including gaseous, liquid or vacuum, is very difficult to achieve. The conventional approach using metal valve systems requires precise machining on very small components. Valve to valve variability is very difficult to control and the total operation is very expensive. These metal valves usually include a metal housing and pintle and are susceptible to clogging by very small foreign matter introduced through the fluids. Other approaches now in use include injection molding of a plastic valve seat against which a rubber-tipped plunger is forced to effect closure. This type of valve is subject to sticking due to environmental conditions such as very low temperature. Simpler actuation and improved flow control in silicon valves would also be desirable.
These are some of the problems this invention overcomes.
In accordance with one aspect of the present invention, there is provided a silicon valve assembly for controlling the flow of fluid including a first generally planar silicon valve plate having a flow orifice for passing fluids and an actuator opening, a second generally planar silicon nozzle plate having a planar silicon surface and nozzle orifices ~ormed through the plane of the nozzle plate for passing fluid in a spray pattern, the nozzle plate and the valve plate being free of each other at a generally parallel and adjacent position, a spring means for pressing the nozzle plate and valve plate toward each other thereby sealing the valve assembly to prevent fluid flow, and an actuator means acting through the actuator opening aganist the nozzle plate and the spring means to separate the nozzle plate and valve plate thereby permitting fluid flow through the valve assembly.
A valve assembly in accordance with an embodiment of this invention includes a valve plate and , ,' A ' ~$
~;~98S3(3 a nozzle plate which have orifices for passing fluid.
Further, the valve plate has an opening for passing an actuator to deflect the nozzle plate. The valve plate and nozzle plate are not sealed to each other and operation of the valve does not depend upon the elasticity of the silicon. That is, the nozzle plate and tha valve plate are separated from one another to permit fluid flow and brought together to stop fluid flow.
A spring means such as a Belleville washer-type spring can be used to keep the nozzle plate in a closed position against the valve plate. This approach reduces the amount of force that the actuator must generate to open the valve in comparison to bending a silicon plate. The valve plate can be fabricated by a simultaneous double-sided etch process.
In another aspect of the present invention, there i5 provided a method for fabricating a silicon valve for controlling fluid flow including the step of forming a supply orifice in a generally planar square valve plate member, performing double-sided etching on the valve plate., and removing outside corners from the valve plate thus increasing the suxface area of the valve plate which can be contained within a circle.
The invention is described further, by way of illustration, with reference to the accompanyin~
drawings, wherein:
FIG. 1 is a plan view of a valve plate of a valve assembly in accordance with an embodiment of this 30 invention;
FIG. 2 is a side view of the valve plate of FIG. 1;
FIG. 3 is a section along line 3-3 of FIG. 1;
FIG. 4 is a section along line 4-4 of FIG. 1;
FIG. 5 is a plan view of a nozzle plate of a valve assembly in accordance with an embodiment of this invention;
S3~
FIG. 6 i~ a section along line 6-6 o~ FIG. 5;
FIG. 7 is a perspective, partly broken away view of the assembly of the valve plate of FIG. 1 and the nozzle plate of FIG. 5;
FIG. 8 is a plan view of a valve plate in accordance with another embodiment of this invention;
FIG. 9 is a side view of the valve plate of FIG. 8;
FIG. 10 is a section view along line 10-10 of FIG. 8;
FIG. 11 is a section view along 11-11 of FIG.
8;
FIG. 12 is a perspective, partly broken away view of a valve assembly including the nozzle plate of FIG. 5 and the valve plate of FIG. 8 in accordance with another smbodiment of this invention;
FIG. 13 is a side section view of a valve assembly in combination with a valve washer and actuator in a closed position; and FIG. 14 is the valve combination of FIG. 13 n an open posltion.
Referring to FIGS. 1-4, a plan view of a valve plate 20 includes four flow orifices 21, a central actuating opening 22, four mesas 23 positioned around central opening 22, and four notched corners 24.
Referring to FIGS. 5 and 6, a nozzle plate 50 includes four openings 51 for passing fluid and aligned with mesas 23 of valve plate 20. FIG. 7 shows the valve assembly 30 with valve plate 20 and no~zle plate 50.
Notched corners 24 of valve plate 20 are advantageous to increase the surface area of the valve.
When valve plate 20 is fitted into a circular opening ....
~Z9~530 5a an advantageously large covering of the opening can be achieved by removing the corners of valve plate 20.
Referring to FIGS. 8-11, a valve plate 80 includes fabrication using double-sided etching and has flow openings 81 positioned adjacent the four corners of valve plate 80 and around a central opening 83.
Double sided etching has been used to remove corners 82 from valve plate 80. A central opening B3 is surrounded by m~sas 84 positioned between adjacent flow openings B1. The double-sided etching of valve plate 80 is apparent in side view FIG. 9. Valve plate 80 also includes a peripheral wall 85 and a membrane 86 positioned between ~9~3(~
peripheral wall 85 and mesas 84.
Valve plate 80 can be used with any number of nozzle plates such as nozzle plate 50 shown in FIGS. 5 and 12. FIGS. 13 and 14 show the addîtion of a valve washer 100 which presses valve plate 80 to nozzle plate 50 and which is deflected by an actuator 101 thereby spacing nozzle plate 50 from valve plate 80 and permitting fluid flow through the openings in nozzle plate 50. Valve washer 100 may be a Belleville washer or, alternatively, be formed of an elastomeric material.
Various modi~ications and variations will no doubt occur to those skilled in the art to which this invention pertains. For example, the particular size and shape of the silicon members may be varied from that dîsclosed herein. These and all other variations which basically rely on the teachings through which this disclosure has advanced the art are properly considered within the scope o~ this invention.
_ ~g
Claims (6)
1. A silicon valve assembly for controlling the flow of fluid including:
a first generally planar silicon valve plate having a flow orifice for passing fluids and an actuator opening;
a second generally planar silicon nozzle plate having a planar silicon surface and nozzle orifices formed through the plane of said nozzle plate for passing fluid in a spray pattern;
said nozzle plate and said valve plate being free of each other at a generally parallel and adjacent position;
a spring means for pressing said nozzle plate and valve plate toward each other thereby sealing said valve assembly to prevent fluid flow; and an actuator means acting through said actuator opening against said nozzle plate and said spring means to separate said nozzle plate and valve plate thereby permitting fluid flow through said valve assembly.
a first generally planar silicon valve plate having a flow orifice for passing fluids and an actuator opening;
a second generally planar silicon nozzle plate having a planar silicon surface and nozzle orifices formed through the plane of said nozzle plate for passing fluid in a spray pattern;
said nozzle plate and said valve plate being free of each other at a generally parallel and adjacent position;
a spring means for pressing said nozzle plate and valve plate toward each other thereby sealing said valve assembly to prevent fluid flow; and an actuator means acting through said actuator opening against said nozzle plate and said spring means to separate said nozzle plate and valve plate thereby permitting fluid flow through said valve assembly.
2. A silicon valve assembly as recited in claim 1 for controlling the flow of fluid wherein the side walls of said valve plate have two angular planes formed by doubled sided etching.
3. A silicon valve assembly for controlling the flow of fluid as recited in claim 2 wherein said valve plate is a generally square plate with outside corners from which a four sided portion has been removed thereby forming a total of eight exterior corners on said valve plate.
4. A silicon valve assembly as recited in claim 3 wherein said spring means is a Belleville washer.
5. A silicon valve assembly as recited in claim 3 wherein said spring means is a elastomeric material.
6. A method for fabricating a silicon valve for controlling fluid flow including the step of forming a supply orifice in a generally planar square valve plate member, performing double-sided etching on the valve plate, and removing outside corners from the valve plate thus increasing the surface area of the valve plate which can be contained within a circle.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US07/109,976 US4768751A (en) | 1987-10-19 | 1987-10-19 | Silicon micromachined non-elastic flow valves |
| US109,976 | 1987-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1298530C true CA1298530C (en) | 1992-04-07 |
Family
ID=22330601
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000579255A Expired - Lifetime CA1298530C (en) | 1987-10-19 | 1988-10-04 | Silicon micromachined non-elastic flow valves |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4768751A (en) |
| EP (1) | EP0314286B1 (en) |
| CA (1) | CA1298530C (en) |
| DE (1) | DE3873019T2 (en) |
Families Citing this family (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4768751A (en) * | 1987-10-19 | 1988-09-06 | Ford Motor Company | Silicon micromachined non-elastic flow valves |
| EP0314285B1 (en) * | 1987-10-19 | 1993-09-22 | Ford Motor Company Limited | A silicon valve assembly for controlling the flow of fluid |
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-
1987
- 1987-10-19 US US07/109,976 patent/US4768751A/en not_active Expired - Lifetime
-
1988
- 1988-09-16 EP EP88308580A patent/EP0314286B1/en not_active Expired - Lifetime
- 1988-09-16 DE DE8888308580T patent/DE3873019T2/en not_active Expired - Fee Related
- 1988-10-04 CA CA000579255A patent/CA1298530C/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US4768751A (en) | 1988-09-06 |
| EP0314286A1 (en) | 1989-05-03 |
| EP0314286B1 (en) | 1992-07-22 |
| DE3873019D1 (en) | 1992-08-27 |
| DE3873019T2 (en) | 1993-03-18 |
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| MKLA | Lapsed |