CA1290958C - Channel device and tube connection and their fabrication procedures - Google Patents
Channel device and tube connection and their fabrication proceduresInfo
- Publication number
- CA1290958C CA1290958C CA000524723A CA524723A CA1290958C CA 1290958 C CA1290958 C CA 1290958C CA 000524723 A CA000524723 A CA 000524723A CA 524723 A CA524723 A CA 524723A CA 1290958 C CA1290958 C CA 1290958C
- Authority
- CA
- Canada
- Prior art keywords
- substrate
- tube
- set forth
- measuring channel
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/221—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N11/00—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
- G01N11/02—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by measuring flow of the material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/18—Investigating or analyzing materials by the use of thermal means by investigating thermal conductivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/85—Investigating moving fluids or granular solids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/062—LED's
- G01N2201/0622—Use of a compensation LED
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/60—Construction of the column
- G01N30/6052—Construction of the column body
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/60—Construction of the column
- G01N30/6095—Micromachined or nanomachined, e.g. micro- or nanosize
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49007—Indicating transducer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/4981—Utilizing transitory attached element or associated separate material
- Y10T29/49812—Temporary protective coating, impregnation, or cast layer
Abstract
A B S T R A C T
The invention discloses the construction of a channel device for the recording of thermal conductivity, viscosity, density, dielectric constant, ect. of liquids and/or gases (sample), where the sample is directed through a measuring channel, with at least one inlet and one outlet orifice, containing at least one sensor unit and is characterized in that a measuring channel is established by the substrate and a layer, forming a wall, which is arranged in a certain, predetermined distance and fabricated ie. by evaporation, spin on, sputtering, drop on, ect. procedures, where the layers can consist of synthetic resin, glass, ceramic, ect. and in that measuring units are deposited in layers in and/or on the substrate and/or in and/or on the wall forming layer.
The invention also discloses the fabrication procedure for the channel device, characterized in that a dissolvable substance (ie.
photoresist, syntethic resin, ect.) is deposited on a substrate, forming the inside of the measuring channel, on top of which a wall forming layer is deposited (by ie. spin on, drop on, evaporation, etc. techniques) where the layer not only covers at least part of the dissolvable substance but also at least a part of the substrate. The wall forming layer adheres well on the substrate and forms the measuring channel together with the substrate. The dissolvable substance can be dissolved and removed through the inlet and/or outlet orifices of the measuring channel.
The invention discloses furthermore a tube connection, characterized in that at least one tube, which can be connected with the substrate ie. by gravity forces, glue, ect. is covered by a layer, formed by drop on, evaporaton, sputtering, spin on, ect.
procedures and which forms a tight seal with the tube and the substrate. The tube ending is kept open by the layer that, together with the substrate, forms a cavity which represents a continuation of the tube.
The invention also discloses the fabrication procedure of the tube connector, characterized in that on a substrate and at least one tube, which can be connected to the substrate, ie. by a glue, a dissolvable substance, ie. photoresist, synthetic resin, ect. is deposited forming a continuation of the tube. A layer is deposited on top of at least part of the dissolvable substance and on at least part of the tube and at least part of the substrate by ie. drop on, sputtering, spin on, etc. techniques which is tightly adhering on the tube and substrate; afterwards, the dissolvable substance is dissolved and removed through the tube or the orifice of the tube continuation, which is formed by the layer and the substrate.
The invention discloses the construction of a channel device for the recording of thermal conductivity, viscosity, density, dielectric constant, ect. of liquids and/or gases (sample), where the sample is directed through a measuring channel, with at least one inlet and one outlet orifice, containing at least one sensor unit and is characterized in that a measuring channel is established by the substrate and a layer, forming a wall, which is arranged in a certain, predetermined distance and fabricated ie. by evaporation, spin on, sputtering, drop on, ect. procedures, where the layers can consist of synthetic resin, glass, ceramic, ect. and in that measuring units are deposited in layers in and/or on the substrate and/or in and/or on the wall forming layer.
The invention also discloses the fabrication procedure for the channel device, characterized in that a dissolvable substance (ie.
photoresist, syntethic resin, ect.) is deposited on a substrate, forming the inside of the measuring channel, on top of which a wall forming layer is deposited (by ie. spin on, drop on, evaporation, etc. techniques) where the layer not only covers at least part of the dissolvable substance but also at least a part of the substrate. The wall forming layer adheres well on the substrate and forms the measuring channel together with the substrate. The dissolvable substance can be dissolved and removed through the inlet and/or outlet orifices of the measuring channel.
The invention discloses furthermore a tube connection, characterized in that at least one tube, which can be connected with the substrate ie. by gravity forces, glue, ect. is covered by a layer, formed by drop on, evaporaton, sputtering, spin on, ect.
procedures and which forms a tight seal with the tube and the substrate. The tube ending is kept open by the layer that, together with the substrate, forms a cavity which represents a continuation of the tube.
The invention also discloses the fabrication procedure of the tube connector, characterized in that on a substrate and at least one tube, which can be connected to the substrate, ie. by a glue, a dissolvable substance, ie. photoresist, synthetic resin, ect. is deposited forming a continuation of the tube. A layer is deposited on top of at least part of the dissolvable substance and on at least part of the tube and at least part of the substrate by ie. drop on, sputtering, spin on, etc. techniques which is tightly adhering on the tube and substrate; afterwards, the dissolvable substance is dissolved and removed through the tube or the orifice of the tube continuation, which is formed by the layer and the substrate.
Description
.'~l ~l 2~ i8 CHANNEL DEVICE AND TUBE CONNECTION AND THEIR FABRICATION PROCEDURES
The invention is concerned with a channel device, especially for recordings of thermal conductivity, viscosity, density, dielectric constants, refractive indices, etc. of materials such as fluids and gases (called samples), where the material under investigation is guided through a measuring channel with at least one sensor and at least one inlet and one outlet orifice for the sample. The invention also concerns the fabrication procedure of the channel device, especially the recording unit for determining the thermal conductivity, viscosity, density, dielectric constant, etc. of samples where the material under investigation is passed through or brought into a measuring channel which is equipped with sensors and actuators.
The aim of the invention is to create a measuring arrangement capable of on-line recordings whicll is extremely sensative even for a very small sample volume and can be miniaturized for mass production, using photolithographic, thin-film and solid-state techniques.
~ ~90~.~8 According to one aspect, the invention provides a device for measuring at least one characteristic of a fluid, said device comprising:
means defining a measuring channel of a predetermined shape for conducting fluid flow therethrough; an inlet orifice and an outlet orifice for conducting the fluid into and out of said measuring channel; at least one sensor located adjacent said measuring channel for measuring the one characteristic of the fluid; said means defining said measuring channel including a substrate and a wall having opposite ends sealingly adhered to said substrate, said wall extending away from said substrate to define said measuring channel of a predetermined shape. The wall may be deposited by evaporation, spin-on, sputter, drop-on, reactive deposition, CVD (chemical vapour deposition), PECVD
(plasma enhancer chemical vapour deposition), etc., techniques and consist e.g. of synthetic material, glass, ceramic, Si3N4, SiO2, SiO or combinations of these materials.
According to another aspect, the invention provides a method for manufacturing a device for measuring at least one characteristic of a fluid, said device having a wall defining a measuring channel, an inlet orifice and an outlet orifice for conducting fluid into and out of the measuring channel, and at least one sensor for measuring at least one characteristic of the fluid which flows through the measuring channel, said method comprising the steps of: providing a substrate;
depositing on the substrate a first body of dissolvable material having a shape corresponding to the shape of the ~ ;~9(~95~3 measuring channel of the measuring device; controlling the shape of the first body of dissolvable material to obtain a measuring channel having appropriate dimensions for measur-ing said one characteristic of the fluid; forming the wall by depositing onto the first body of dissolvable material a second body of material by one of evaporation, spin on, drop on, sputtering, reactive deposition; dissolving the first body of dissolvable material by contacting the dissolvable material with a solvent which dissolves the first body of dissolvable material but does not interact with the material of the sub-strate and the wall; and attaching the at least one sensor to one of the substrate and the wall by one of evaporation, spin on, drop on, sputtering, reactive deposition, chemical vapor deposition, plasma enhanced chemical vapor deposition, and ion implantation.
According to another aspect, the invention provides a tube connection for a device for measuring at least one characteris-tic of a fluid, said tube connection comprising: a substrate;
a tube connected to said substrate; and a wall formed by a wall-forming layer deposited onto the substrate and over at least portions of the tube by a technique selected from a group consisting of drop on, evaporation, sputtering, spin on, reactive deposition, CVD, and PECVD whereby said wall adheres tightly to at least parts of the tube and at least part of the substrate in such a way that it keeps the end of the tube open and forms a cavity together with the substrate which represents an extension of the tube.
~ ~9(3~ 8 28173-l The fabrication procedure for such a connection is characterized, according to the invention, in that a dis-solvable substance, i.e. photoresist, synthetic resin, etc., is deposited onto a substrate as well as into a tube which can be mounted (i.e. glued) onto the substrate in such a way that this dissolvable substance forms a continuation of the tube. A
layer is then deposited onto the dissolvable substance so that it covers this substance as well as at least a part of the tube and at least a part of the substrate and forms a tight and sealing connection with the tube as well as with the substrate.
The deposition of the layer may be performed by evaporation, drop-on, sputtering, spin-on, reactive deposition, CVD, PECVD, etc. The dissolvable substance can be dissolved and removed through the open end(s) of the tube and/or through the open end of the continuation which was formed by the dissolvable sub-stance, using a solvent or procedure which will not affect the substrate or the layer or the tube.
The evaluation and analysis of the measurements is per-formed by electronic devices which are connected to sensors and actuators which are arranged in and/or on the layer and/or inand/or on the substrate. The temperature raise of the heating layers, the creation of surface accoustic waves and all other actuations which are necessary for proper recordings, can be generated by appropriate electronic devices.
It is easy to see that recording arrangements, which are differing from the ones described above, can be produced, using the invented fabrication techniques, i.e. miniaturized ~ ;~90~8 chromatographs, pH-meters, press~lre sensors, etc.
The selection of the dissolvable substances and their solvents can, to a large extent, be left to specialists.
-4a-9U~8 Aspects of the present invention are illustrated, merely by way of example, in the accompanying drawings, in which:
Figures 1, la and lc depict a cross-sectional view of the channel device of the present invention;
Figure lb is a graph showing the temperature of the sample flowing through the channel device over time;
Figures 2 and 2b depict a cross-sectional view of a channel device for measuring viscosity and dielectric constants;
Figure 2a is a graph depicting the slope of capacitance change and velocity of a sample in the calculation of viscosity;
Figure 3 is a schematic of a device consisting of a transmitter and receiver for measuring sample density;
Figure 3a is a cross-sectional view showing the location of the transmitter and receiver relative to the substrate;
Figure 4 is a view showing the connection of tubes to the substrate and channel layer by an adhesive layer;
Figure 5 is a cross-sectional view showing inlet and outlet tube positions relative to the sensor positions;
Figure 6 is a side view depicting the indentation of the tubes in the substrate;
Figure 7 schematically depicts the connection of the tube to the substrate via an adhesive layer; and Figures 8 and 9 are top views of a multiple tube/multiple channel device.
Figure 1 shows a channel device which is especially designed for recording thermal conductivity and viscosity of a fluid or a gas. A layer(2) is deposited on a substrate(l) in such ~ ~9~`35~ 28173-1 a way that a measuring channel is formed which has at least one inlet orifice(4) and one outlet orifice(5). The layer(2) is deposited onto the substrate(l) in such a way that a dissolvable substance is first deposited which has the shape of the measuring channel(3) on top of which the layer(2) is deposited, covering the dissolvable substance and at least parts of the substrate(l), so called boundary parts (2'), on which the layer(2) adheres tightly. Then, the dissolvable substance will be dissolved through the inlet and/or outlet orifices(4,5). Thus, the measuring channel(3) is formed by the substrate(l) and the layer(2). Actuators and/or sensors can be arranged on and/or in the substrate(l) and/or on and/or in the layer(2) in order to equip the measuring channel(3) with the desirable recording, sensing, and/or actuating units. The various sensor and/or actuator layers on and/or in the substrate(l) as well cover layers(8) on the substrate(l) are to be deposited before the deposition of the dissolvable substance. It is, however, possible to subsequently passivate the inside of the measuring channel(3) by inserting cover layers(8'') (Figure lc) or to increase the measuring channel(3) by etching or to modify the characteristics of the actuators and/or sensors by appropriate surface treatments.
3.~8 Heating layers(6,6') are shown as an example in Fig 1. in an indentation in the substrate(l) and on the layer(2), which can be formed by evaporation, implantation, doping, etc. The electrical connections to these actuators are not shown. Temperature sensors(7,7') are arranged in the substrate(l) and on the layer(2).
The temperature sensors(7,7') can consist of serniconductor layers, doped layers, metal layers, etc. Fig lc shows the layers 6' and 7' as being contained in layer(2); they can also be covered by a cover layer(8''). That is possible in particular if the layer(2) or the substrate(l) consists of silicon which can be formed into a sensor or actuator by doping or reactive deposition. In this case the layer(2) or the substrate(l) is part and/or basis for the sensor of actuator units.
The layers(6 and 7) can be, as shown in Fig 1., deposited in indentations in the substrate(l) or on the substrate(l)(Fiy la).
The layers(6 and 7) can also be covered by a cover layer(8) in order to prevent modifications of the layers (6 and 7). Another layer (9) can be put on top of layer (2) and the layers (6' and7') which can also be thicker to mechanically stabili~e the channel device.
The deposition of the layers(2,8,9,8'etc) can be performed by drop on, or spread on, sputtering, evaporation, spin on, etc procedures.
~I X9()~358 The thickness of the layer(2) is advantageously between 1 um and 50 um, the height of the measuriny channel(3) up to 50 um, the width of the measuring channel(3) can be between 1 um and 500 um and the length might be up to several 10 mm. These values can be changed, however, depending on the various applications. In most cases it might be advantageous to have the height of measuring channel(3) much smaller than the width in order to provide an optimum contact between the sample and the sensors and actuators.
The thickness of the sensor and actuator layers is usually in the range of 0.2 um and 40 um.
The viscosity measurement (Fig lb.) is performed by applying a heat pulse through the heating layer(6,6') onto the sample gas or liquid, which flows through the measuring channel, and measuring the resulting temperature change of the sample with the temperature sensors 7 and/or 7'. The time between ~he heat pulse application and the temperature change, measured with the sensors 7 or 7' determines the velocity of the sample in the solution which, in turn, is inverse proportion to the viscosity. The pressure difference between the inlet(4) and outlet(5) of the measuring channel(3) has to be known or controlled and can be measured with pressure sensors(7''). Pressure sensors can be avoided in case of using a reference measuring channel(3) and the same pressure difference in both channels.
~ ~t()'3~8 Thermal conductivity can be measured by applying a certain amount of heat with a certain amplitude course and detecting the occurrance of the temperature maximums, the amplitude course and the decrease of the maY~imum at the temperature sensors(7)(Fig lc).
All the explanations for Fig 1. are in principle valid also for the following figures and the described characteristics can be com'oined with the following ones:
Fig 2. shows a channel device for recording viscosity and/or dielectric constants. This channel device is in principle designed similar to the one described in Fig 1.: conducting layers(10,10') are deposited on the substrate(l) and the layer(2), forming a capacitor. As soon as the sample moves into and through the measuring channel(3), which was previously filled with air or was evacuated, the capacitance of the layers(10,10') will be changed, as shown in Fig 2a. The slope of the capacitance change is proportional to the velocity of the sample in the measuring channel(3) and permits the calculation of the viscosity.
It is advantageous, and increases the accuracy of the device, if the height of the measuring channel(3) has the same value as the thickness of the cover layer(8') in Fig 2.
The dielectric constant can be determined from the capacitance of the device as soon as the measuring channel(3) is completely filled with the sample.
'3(3~t.S~3 Fig 2b. shows a possible design of the channel device where the substrate(1) consists of a basic material (ie. silicon or p-doped Si)(1') topped by an n-doped layer (1''), forming a barrier layer.
Viscosity and dielectric constant measurements can be performed as described above.
Density measurements of the sample can be performed by the device shown in Fig 3. and Fig 3a. Transmitter(11) and receiver layers(12) are arranged on indentations or on the surface of a piezoelectric substrate. The transmitter layers(11) are connected to high frequency generators~13), supplying 20 to 50kHz in the low voltage range and generating surface accoustic waves in the substrate(1). The resonance signal, detected by the receiver layer(12), can be changed or damped in dependance of the density of the sample in the measuring channel(3).
Fig 4. shows two tubes(17) connected to the substrate(1), ie. by an adhesive layer(15). The two tubes(17) are connected to a layer(2) which forms a channeltl8) with the substrate(1), adheriny tightly to the tubes(17) and the substrate(1) as well. The transition between the layer(2) and the tubes(17), kinks, exposed bends, etc. can be strengthened mechanically by supportin~
layers(16) consisting of the same material or a material different from that of layer(2). The fabrication of such a connection is per ormed by depositing a dissolvable substance onto the ends of the tubes(17) and onto the substrate(1) with the desired shape of ~ ~9()~8 the channel(18). The shape of the dissolvable substance can be obtained, for instance, by photolithographic processes. The layer(2) will be deposited onto the dissolvable substance in such a way that the layer(2) forms a tight connection with the tubes(17) and the substrate(1). The dissolvable substance will be dissolved through the tubes(17). This technique allows the design of connections between and to tubes of various, especially very small, dimensions.
Fig 5. shows a design, appropriate to forming inlet and outlet orifices(4,5) of measuring channels(3). The tubes(17) replace the orifices(4,5) in the substrate(1). The design of the measuring arrangement with sensors and actuators can be as described in Figs 1 to 3. The layer(2) can be covered by a protective layer(16') which can be deposited in the same way as layer(2) consisting of the same, or a different material (ie. glue), as layer(2). The endings of the tubes(17) can be tilted.
Fig 6. shows that the tubes(17), especially their endings, can be covered by the layer(2) and thereby tightly connected to the substrate(1). The layer(16) can be of additional support and increase the adhesion of the tubes(17) to the substrate(1). Fig 6.
also shows the tubes(17) can be placed in indentations(19) in the substrate(1). The cross section of the tubes(17) can be of any shape, ie. round, rectangular, etc.
~ X~ 5~3 The same techniques which permit the producti.on of tube connections also permit the fabrication of special tube continuations (Fig 7.): a tube(17) which can be connected by an adhesive layer to a substrate(l) wi.ll be covered at its one ending by a dissolvable substance which also covers the substrate(l), being especially shaped at this part, ie. like a nozzle. The layer(2) will be deposited onto at least part of the tube(l7), at least parts of the dissolvable substance and at least parts of the substrate(l). The dissolvable substance will be dissolved, leaving a nozzle-like continuation of the tube(l7), formed by the layers(2) and the substrate(l), and which can be used ie. for injection of substances into the body tissue, etc. A similar nozzle-like extension of the tube(17) is also shown in Fiy 4., created by the layer(2'), which can be mechanically protected and/or strengthened by an additional layer(16).
Fig 8. shows several tubes(17) which are not necessarily arranged in parallel, and which are connected by a channel(3) which is f ormed by the layer(2) and the substrate(l). The endings of the tubes(17) on the lefthand side of Fig 8. are combined by the measuring channel(3) of decreasing cross sections. The measuring channel(3) finally splits up into several channels which can have dif f erent cross sections, each of which can be connected to a tube(17). The described invention allows the fabrication of almost any kind of bifurcation, cross section and channel shape in order to establish connections of, and among, numerous tubes creating the ~I X~0~ 3 possibility of forming valve-like control elements, flow regulators, etc.
It is also possible to etch the measuring channel~3) as shown in Fig 8. into the substrate(l) in order to achieve a smooth transition between the tubes(l7) and the measuring channel(3).
Preferable diameters of the tubes(17) for the described fabrication procedures are in the range between 5 um and 500 um. It is also possible to connect two tubes(17) with each other which are placed next to each other or located in such a way that their ends are almost touching each other.
The invented channel devices and the tube connections can be used for investigations of body and tissue liquids, for delivery of substances to various ie. nerves, organs, etc. and for industrial applications, ie. ink jet recorders, fuel injection systems, or other devices where pipe systems, consisting of fine tubes, have to be connected to each other or external, macroscopic, supply systems. A big advantage of the invention is also that the described channel devices yield precise results also in case of extremely small sample volumes, representing unique measuring units regarding response time, accuracy, resolution and reproductibility.
~ 29~ i8 The materials forming the layer(2) or (16) can consist of organic substances, such as synthetic resin, polymers, epoxy resin, ect. or any other organic susbstances such as Si3N4, SiO2, SiO, SiC, ect. or substances with similar mechanical and or electrical qualities.
The connections to the sensors and actuators can be established by thin film interconnect paths, deposited in similar ways as described above.
It is, of course, possible that one measuring channel(3) contains several sensors and/or actuators and combinations thereof which can be arranged on and/or in the substrate(l) and/or on and/or in the layer(2).
Light sources and light detectors can be used for refraction index measuremen.s: light can be, for instance, transferred through a light permeable layer(2) and light detectors will measure reflected and or transmitted light intensities which can be used, for instance, in order to calculate the refraction index of the sample. The light can also be transmitted through the tubes(17) or the tubes(17) can be replaced by optical fibers.
~ ll these values, of course, can be used in order to determine and analyze the composition of the sample.
3U9~3 Fig. 9 shows a device for flow regulations; the flow of a sample, ie. from tube(17') to tube(17'') in the channel, formed by layer(2), can be changed or totally directed into the tube (17''''). Miniaturized valve and flow control units can be fabricated.
Fig. 3a shows, in dashed lines, the connections of the substrate~l) to a supporting substrate(l''') which ie. could be an IC socket, consisting of a gold plated surface, which can be, in a well known way, sealed to a Si substrate(l). Tubes can be soldered to the substrate(l''') forming inlet(4') and outlet(5') orifices for the measuring channel(3). The sensors can be connected via wires(21) through ceramic feed throughs(20).
A temperature sensor(22) and a heating layer(23) is shown in Fig.2b. allowing evaporation heat measurements. For that reason, a channel is filled with the sample, the temperature of which will be measured. The evaporating sample attracts evaporation heat from the environment, which can be measured by the sensor(22). The temperature slope is shown in Fig. 2a by the dashed line. The evaporation heat can be calculated from the time course of the temperature between To (temperature in the beginning of the measurement, where the measuring channel is filled with the sample) and Tl(end temperature, where the measuring channel is empty).
Capacitance measurements can be performed at the same time, determining the amount of the substance in the channel, ect..
90~8 It is obvious that sensors and actuators, as shown in Fig 2., can be arranged next and/or above each other.
The invention is concerned with a channel device, especially for recordings of thermal conductivity, viscosity, density, dielectric constants, refractive indices, etc. of materials such as fluids and gases (called samples), where the material under investigation is guided through a measuring channel with at least one sensor and at least one inlet and one outlet orifice for the sample. The invention also concerns the fabrication procedure of the channel device, especially the recording unit for determining the thermal conductivity, viscosity, density, dielectric constant, etc. of samples where the material under investigation is passed through or brought into a measuring channel which is equipped with sensors and actuators.
The aim of the invention is to create a measuring arrangement capable of on-line recordings whicll is extremely sensative even for a very small sample volume and can be miniaturized for mass production, using photolithographic, thin-film and solid-state techniques.
~ ~90~.~8 According to one aspect, the invention provides a device for measuring at least one characteristic of a fluid, said device comprising:
means defining a measuring channel of a predetermined shape for conducting fluid flow therethrough; an inlet orifice and an outlet orifice for conducting the fluid into and out of said measuring channel; at least one sensor located adjacent said measuring channel for measuring the one characteristic of the fluid; said means defining said measuring channel including a substrate and a wall having opposite ends sealingly adhered to said substrate, said wall extending away from said substrate to define said measuring channel of a predetermined shape. The wall may be deposited by evaporation, spin-on, sputter, drop-on, reactive deposition, CVD (chemical vapour deposition), PECVD
(plasma enhancer chemical vapour deposition), etc., techniques and consist e.g. of synthetic material, glass, ceramic, Si3N4, SiO2, SiO or combinations of these materials.
According to another aspect, the invention provides a method for manufacturing a device for measuring at least one characteristic of a fluid, said device having a wall defining a measuring channel, an inlet orifice and an outlet orifice for conducting fluid into and out of the measuring channel, and at least one sensor for measuring at least one characteristic of the fluid which flows through the measuring channel, said method comprising the steps of: providing a substrate;
depositing on the substrate a first body of dissolvable material having a shape corresponding to the shape of the ~ ;~9(~95~3 measuring channel of the measuring device; controlling the shape of the first body of dissolvable material to obtain a measuring channel having appropriate dimensions for measur-ing said one characteristic of the fluid; forming the wall by depositing onto the first body of dissolvable material a second body of material by one of evaporation, spin on, drop on, sputtering, reactive deposition; dissolving the first body of dissolvable material by contacting the dissolvable material with a solvent which dissolves the first body of dissolvable material but does not interact with the material of the sub-strate and the wall; and attaching the at least one sensor to one of the substrate and the wall by one of evaporation, spin on, drop on, sputtering, reactive deposition, chemical vapor deposition, plasma enhanced chemical vapor deposition, and ion implantation.
According to another aspect, the invention provides a tube connection for a device for measuring at least one characteris-tic of a fluid, said tube connection comprising: a substrate;
a tube connected to said substrate; and a wall formed by a wall-forming layer deposited onto the substrate and over at least portions of the tube by a technique selected from a group consisting of drop on, evaporation, sputtering, spin on, reactive deposition, CVD, and PECVD whereby said wall adheres tightly to at least parts of the tube and at least part of the substrate in such a way that it keeps the end of the tube open and forms a cavity together with the substrate which represents an extension of the tube.
~ ~9(3~ 8 28173-l The fabrication procedure for such a connection is characterized, according to the invention, in that a dis-solvable substance, i.e. photoresist, synthetic resin, etc., is deposited onto a substrate as well as into a tube which can be mounted (i.e. glued) onto the substrate in such a way that this dissolvable substance forms a continuation of the tube. A
layer is then deposited onto the dissolvable substance so that it covers this substance as well as at least a part of the tube and at least a part of the substrate and forms a tight and sealing connection with the tube as well as with the substrate.
The deposition of the layer may be performed by evaporation, drop-on, sputtering, spin-on, reactive deposition, CVD, PECVD, etc. The dissolvable substance can be dissolved and removed through the open end(s) of the tube and/or through the open end of the continuation which was formed by the dissolvable sub-stance, using a solvent or procedure which will not affect the substrate or the layer or the tube.
The evaluation and analysis of the measurements is per-formed by electronic devices which are connected to sensors and actuators which are arranged in and/or on the layer and/or inand/or on the substrate. The temperature raise of the heating layers, the creation of surface accoustic waves and all other actuations which are necessary for proper recordings, can be generated by appropriate electronic devices.
It is easy to see that recording arrangements, which are differing from the ones described above, can be produced, using the invented fabrication techniques, i.e. miniaturized ~ ;~90~8 chromatographs, pH-meters, press~lre sensors, etc.
The selection of the dissolvable substances and their solvents can, to a large extent, be left to specialists.
-4a-9U~8 Aspects of the present invention are illustrated, merely by way of example, in the accompanying drawings, in which:
Figures 1, la and lc depict a cross-sectional view of the channel device of the present invention;
Figure lb is a graph showing the temperature of the sample flowing through the channel device over time;
Figures 2 and 2b depict a cross-sectional view of a channel device for measuring viscosity and dielectric constants;
Figure 2a is a graph depicting the slope of capacitance change and velocity of a sample in the calculation of viscosity;
Figure 3 is a schematic of a device consisting of a transmitter and receiver for measuring sample density;
Figure 3a is a cross-sectional view showing the location of the transmitter and receiver relative to the substrate;
Figure 4 is a view showing the connection of tubes to the substrate and channel layer by an adhesive layer;
Figure 5 is a cross-sectional view showing inlet and outlet tube positions relative to the sensor positions;
Figure 6 is a side view depicting the indentation of the tubes in the substrate;
Figure 7 schematically depicts the connection of the tube to the substrate via an adhesive layer; and Figures 8 and 9 are top views of a multiple tube/multiple channel device.
Figure 1 shows a channel device which is especially designed for recording thermal conductivity and viscosity of a fluid or a gas. A layer(2) is deposited on a substrate(l) in such ~ ~9~`35~ 28173-1 a way that a measuring channel is formed which has at least one inlet orifice(4) and one outlet orifice(5). The layer(2) is deposited onto the substrate(l) in such a way that a dissolvable substance is first deposited which has the shape of the measuring channel(3) on top of which the layer(2) is deposited, covering the dissolvable substance and at least parts of the substrate(l), so called boundary parts (2'), on which the layer(2) adheres tightly. Then, the dissolvable substance will be dissolved through the inlet and/or outlet orifices(4,5). Thus, the measuring channel(3) is formed by the substrate(l) and the layer(2). Actuators and/or sensors can be arranged on and/or in the substrate(l) and/or on and/or in the layer(2) in order to equip the measuring channel(3) with the desirable recording, sensing, and/or actuating units. The various sensor and/or actuator layers on and/or in the substrate(l) as well cover layers(8) on the substrate(l) are to be deposited before the deposition of the dissolvable substance. It is, however, possible to subsequently passivate the inside of the measuring channel(3) by inserting cover layers(8'') (Figure lc) or to increase the measuring channel(3) by etching or to modify the characteristics of the actuators and/or sensors by appropriate surface treatments.
3.~8 Heating layers(6,6') are shown as an example in Fig 1. in an indentation in the substrate(l) and on the layer(2), which can be formed by evaporation, implantation, doping, etc. The electrical connections to these actuators are not shown. Temperature sensors(7,7') are arranged in the substrate(l) and on the layer(2).
The temperature sensors(7,7') can consist of serniconductor layers, doped layers, metal layers, etc. Fig lc shows the layers 6' and 7' as being contained in layer(2); they can also be covered by a cover layer(8''). That is possible in particular if the layer(2) or the substrate(l) consists of silicon which can be formed into a sensor or actuator by doping or reactive deposition. In this case the layer(2) or the substrate(l) is part and/or basis for the sensor of actuator units.
The layers(6 and 7) can be, as shown in Fig 1., deposited in indentations in the substrate(l) or on the substrate(l)(Fiy la).
The layers(6 and 7) can also be covered by a cover layer(8) in order to prevent modifications of the layers (6 and 7). Another layer (9) can be put on top of layer (2) and the layers (6' and7') which can also be thicker to mechanically stabili~e the channel device.
The deposition of the layers(2,8,9,8'etc) can be performed by drop on, or spread on, sputtering, evaporation, spin on, etc procedures.
~I X9()~358 The thickness of the layer(2) is advantageously between 1 um and 50 um, the height of the measuriny channel(3) up to 50 um, the width of the measuring channel(3) can be between 1 um and 500 um and the length might be up to several 10 mm. These values can be changed, however, depending on the various applications. In most cases it might be advantageous to have the height of measuring channel(3) much smaller than the width in order to provide an optimum contact between the sample and the sensors and actuators.
The thickness of the sensor and actuator layers is usually in the range of 0.2 um and 40 um.
The viscosity measurement (Fig lb.) is performed by applying a heat pulse through the heating layer(6,6') onto the sample gas or liquid, which flows through the measuring channel, and measuring the resulting temperature change of the sample with the temperature sensors 7 and/or 7'. The time between ~he heat pulse application and the temperature change, measured with the sensors 7 or 7' determines the velocity of the sample in the solution which, in turn, is inverse proportion to the viscosity. The pressure difference between the inlet(4) and outlet(5) of the measuring channel(3) has to be known or controlled and can be measured with pressure sensors(7''). Pressure sensors can be avoided in case of using a reference measuring channel(3) and the same pressure difference in both channels.
~ ~t()'3~8 Thermal conductivity can be measured by applying a certain amount of heat with a certain amplitude course and detecting the occurrance of the temperature maximums, the amplitude course and the decrease of the maY~imum at the temperature sensors(7)(Fig lc).
All the explanations for Fig 1. are in principle valid also for the following figures and the described characteristics can be com'oined with the following ones:
Fig 2. shows a channel device for recording viscosity and/or dielectric constants. This channel device is in principle designed similar to the one described in Fig 1.: conducting layers(10,10') are deposited on the substrate(l) and the layer(2), forming a capacitor. As soon as the sample moves into and through the measuring channel(3), which was previously filled with air or was evacuated, the capacitance of the layers(10,10') will be changed, as shown in Fig 2a. The slope of the capacitance change is proportional to the velocity of the sample in the measuring channel(3) and permits the calculation of the viscosity.
It is advantageous, and increases the accuracy of the device, if the height of the measuring channel(3) has the same value as the thickness of the cover layer(8') in Fig 2.
The dielectric constant can be determined from the capacitance of the device as soon as the measuring channel(3) is completely filled with the sample.
'3(3~t.S~3 Fig 2b. shows a possible design of the channel device where the substrate(1) consists of a basic material (ie. silicon or p-doped Si)(1') topped by an n-doped layer (1''), forming a barrier layer.
Viscosity and dielectric constant measurements can be performed as described above.
Density measurements of the sample can be performed by the device shown in Fig 3. and Fig 3a. Transmitter(11) and receiver layers(12) are arranged on indentations or on the surface of a piezoelectric substrate. The transmitter layers(11) are connected to high frequency generators~13), supplying 20 to 50kHz in the low voltage range and generating surface accoustic waves in the substrate(1). The resonance signal, detected by the receiver layer(12), can be changed or damped in dependance of the density of the sample in the measuring channel(3).
Fig 4. shows two tubes(17) connected to the substrate(1), ie. by an adhesive layer(15). The two tubes(17) are connected to a layer(2) which forms a channeltl8) with the substrate(1), adheriny tightly to the tubes(17) and the substrate(1) as well. The transition between the layer(2) and the tubes(17), kinks, exposed bends, etc. can be strengthened mechanically by supportin~
layers(16) consisting of the same material or a material different from that of layer(2). The fabrication of such a connection is per ormed by depositing a dissolvable substance onto the ends of the tubes(17) and onto the substrate(1) with the desired shape of ~ ~9()~8 the channel(18). The shape of the dissolvable substance can be obtained, for instance, by photolithographic processes. The layer(2) will be deposited onto the dissolvable substance in such a way that the layer(2) forms a tight connection with the tubes(17) and the substrate(1). The dissolvable substance will be dissolved through the tubes(17). This technique allows the design of connections between and to tubes of various, especially very small, dimensions.
Fig 5. shows a design, appropriate to forming inlet and outlet orifices(4,5) of measuring channels(3). The tubes(17) replace the orifices(4,5) in the substrate(1). The design of the measuring arrangement with sensors and actuators can be as described in Figs 1 to 3. The layer(2) can be covered by a protective layer(16') which can be deposited in the same way as layer(2) consisting of the same, or a different material (ie. glue), as layer(2). The endings of the tubes(17) can be tilted.
Fig 6. shows that the tubes(17), especially their endings, can be covered by the layer(2) and thereby tightly connected to the substrate(1). The layer(16) can be of additional support and increase the adhesion of the tubes(17) to the substrate(1). Fig 6.
also shows the tubes(17) can be placed in indentations(19) in the substrate(1). The cross section of the tubes(17) can be of any shape, ie. round, rectangular, etc.
~ X~ 5~3 The same techniques which permit the producti.on of tube connections also permit the fabrication of special tube continuations (Fig 7.): a tube(17) which can be connected by an adhesive layer to a substrate(l) wi.ll be covered at its one ending by a dissolvable substance which also covers the substrate(l), being especially shaped at this part, ie. like a nozzle. The layer(2) will be deposited onto at least part of the tube(l7), at least parts of the dissolvable substance and at least parts of the substrate(l). The dissolvable substance will be dissolved, leaving a nozzle-like continuation of the tube(l7), formed by the layers(2) and the substrate(l), and which can be used ie. for injection of substances into the body tissue, etc. A similar nozzle-like extension of the tube(17) is also shown in Fiy 4., created by the layer(2'), which can be mechanically protected and/or strengthened by an additional layer(16).
Fig 8. shows several tubes(17) which are not necessarily arranged in parallel, and which are connected by a channel(3) which is f ormed by the layer(2) and the substrate(l). The endings of the tubes(17) on the lefthand side of Fig 8. are combined by the measuring channel(3) of decreasing cross sections. The measuring channel(3) finally splits up into several channels which can have dif f erent cross sections, each of which can be connected to a tube(17). The described invention allows the fabrication of almost any kind of bifurcation, cross section and channel shape in order to establish connections of, and among, numerous tubes creating the ~I X~0~ 3 possibility of forming valve-like control elements, flow regulators, etc.
It is also possible to etch the measuring channel~3) as shown in Fig 8. into the substrate(l) in order to achieve a smooth transition between the tubes(l7) and the measuring channel(3).
Preferable diameters of the tubes(17) for the described fabrication procedures are in the range between 5 um and 500 um. It is also possible to connect two tubes(17) with each other which are placed next to each other or located in such a way that their ends are almost touching each other.
The invented channel devices and the tube connections can be used for investigations of body and tissue liquids, for delivery of substances to various ie. nerves, organs, etc. and for industrial applications, ie. ink jet recorders, fuel injection systems, or other devices where pipe systems, consisting of fine tubes, have to be connected to each other or external, macroscopic, supply systems. A big advantage of the invention is also that the described channel devices yield precise results also in case of extremely small sample volumes, representing unique measuring units regarding response time, accuracy, resolution and reproductibility.
~ 29~ i8 The materials forming the layer(2) or (16) can consist of organic substances, such as synthetic resin, polymers, epoxy resin, ect. or any other organic susbstances such as Si3N4, SiO2, SiO, SiC, ect. or substances with similar mechanical and or electrical qualities.
The connections to the sensors and actuators can be established by thin film interconnect paths, deposited in similar ways as described above.
It is, of course, possible that one measuring channel(3) contains several sensors and/or actuators and combinations thereof which can be arranged on and/or in the substrate(l) and/or on and/or in the layer(2).
Light sources and light detectors can be used for refraction index measuremen.s: light can be, for instance, transferred through a light permeable layer(2) and light detectors will measure reflected and or transmitted light intensities which can be used, for instance, in order to calculate the refraction index of the sample. The light can also be transmitted through the tubes(17) or the tubes(17) can be replaced by optical fibers.
~ ll these values, of course, can be used in order to determine and analyze the composition of the sample.
3U9~3 Fig. 9 shows a device for flow regulations; the flow of a sample, ie. from tube(17') to tube(17'') in the channel, formed by layer(2), can be changed or totally directed into the tube (17''''). Miniaturized valve and flow control units can be fabricated.
Fig. 3a shows, in dashed lines, the connections of the substrate~l) to a supporting substrate(l''') which ie. could be an IC socket, consisting of a gold plated surface, which can be, in a well known way, sealed to a Si substrate(l). Tubes can be soldered to the substrate(l''') forming inlet(4') and outlet(5') orifices for the measuring channel(3). The sensors can be connected via wires(21) through ceramic feed throughs(20).
A temperature sensor(22) and a heating layer(23) is shown in Fig.2b. allowing evaporation heat measurements. For that reason, a channel is filled with the sample, the temperature of which will be measured. The evaporating sample attracts evaporation heat from the environment, which can be measured by the sensor(22). The temperature slope is shown in Fig. 2a by the dashed line. The evaporation heat can be calculated from the time course of the temperature between To (temperature in the beginning of the measurement, where the measuring channel is filled with the sample) and Tl(end temperature, where the measuring channel is empty).
Capacitance measurements can be performed at the same time, determining the amount of the substance in the channel, ect..
90~8 It is obvious that sensors and actuators, as shown in Fig 2., can be arranged next and/or above each other.
Claims (43)
1. A device for measuring at least one characteristic of a fluid, said device comprising:
means defining a measuring channel of a predetermined shape for conducting fluid flow therethrough;
an inlet orifice and an outlet orifice for conducting the fluid into and out of said measuring channel;
at least one sensor located adjacent said measuring channel for measuring the one characteristic of the fluid;
said means defining said measuring channel including a substrate and a wall having opposite ends sealingly adhered to said substrate, said wall extending away from said substrate to define said measuring channel of a predetermined shape.
means defining a measuring channel of a predetermined shape for conducting fluid flow therethrough;
an inlet orifice and an outlet orifice for conducting the fluid into and out of said measuring channel;
at least one sensor located adjacent said measuring channel for measuring the one characteristic of the fluid;
said means defining said measuring channel including a substrate and a wall having opposite ends sealingly adhered to said substrate, said wall extending away from said substrate to define said measuring channel of a predetermined shape.
2. A device as set forth in claim 1 wherein said wall is made of a material selected from the group consisting of a synthetic resin, glass, ceramic, silicon nitride, silicon monoxide, silicon dioxide, or combination of these materials.
3. A device as set forth in claim 1 further comprising an actuator for acting on the fluid during measuring the characteristic thereof.
4. A device as set forth in claim 1 further comprising at least one tube attached to said substrate and defining one of said inlet and outlet orifices, said wall tightly adhering to at least part of said one tube defining one of said inlet and outlet orifices upon being attached to said substrate.
5. A device as set forth in claim 4 further comprising at least one tube attached to said substrate and defining the other of said inlet and outlet orifices, said wall tightly adhering to at least part of said one tube defining the other of said inlet and outlet orifices upon being attached to said substrate.
6. A device as set forth in claim 5 wherein said one tube defining said inlet orifice forms a nozzle.
7. A device as set forth in claim 5 further comprising a layer at least partially covering said wall.
8. A device as set forth in claim 7 wherein said sub-strate has an indentation for receiving said one tube therein.
9. A device as set forth in claim 8 wherein the cross-section of said indentation corresponds substantially to the cross-section of said one tube.
10. A device as set forth in claim 4 further comprising more than two tubes communicating with said measuring channel, said measuring channel having a plurality of channel portions associated with respective tubes and having different cross-sections.
11. A device as set forth in claim 3 wherein said actuator includes at least one heating element for heating the fluid and said one sensor is a temperature sensor.
12. A device as set forth in claim 11 wherein said temperature sensor is located between said one heating element and said outlet orifice.
13. A device as set forth in claim 11 wherein said temperature sensor is located between said heating element and said inlet orifice.
14. A device as set forth in claim 1 wherein said one sensor includes two electrically conductive layers positioned along said measuring channel opposite each other on said sub-strate and said wall, respectively.
15. A device as set forth in claim 1 further comprising a transmitter of surface acoustic waves and a receiver positioned either between said inlet orifice and said transmitter or between said outlet orifice and said transmitter and on a piezoelectric substrate within said measuring channel.
16. A device as set forth in claim 1 wherein said one sensor is an optical sensor, said device further comprising an optical transmitter positioned opposite to said optical sensor for directing optical waves to the fluid.
17. A device as set forth in claim 1 wherein the height of said measuring channel is from 0.01 µm to 50 µm and the width of said measuring channel is equal to or greater than its height.
18. A device as set forth in claim 1 wherein said inlet and outlet orifices are formed by holes in said substrate.
19. A device as set forth in claim 1 further comprising a cover layer for protecting said one sensor.
20. A device as set forth in claim 1 wherein said one sensor is positioned on the outside of said wall and is protected with a cover layer.
21. A device as set forth in claim 1 further comprising a reference channel for comparison measurement of a reference sample.
22. A device as set forth in claim 1 wherein the thickness of said wall is equal to the height of said measuring channel.
23. A device as set forth in claim 1 wherein the cross-section of said measuring channel is either rectangular or trapezoidal.
24. A device as set forth in claim 1 wherein said sensor unit is deposited by a technique selected from a group consist-ing of evaporation, sputtering, CVD, PECVD, and ion implantation.
25. A device as set forth in claim 3 wherein said actua-tor is deposited by a technique selected from a group consisting of evaporation, sputtering, CVD, PECVD, and ion implantation.
26. A tube connection for a device for measuring at least one characteristic of a fluid, said tube connection comprising:
a substrate;
a tube connected to said substrate; and a wall formed by a wall-forming layer deposited onto the substrate and over at least portions of the tube by a technique selected from a group consisting of drop on, evaporation, sputtering, spin on, reactive deposition, CVD, and PECVD whereby said wall adheres tightly to at least parts of the tube and at least part of the substrate in such a way that it keeps the end of the tube open and forms a cavity together with the substrate which represents an extension of the tube.
a substrate;
a tube connected to said substrate; and a wall formed by a wall-forming layer deposited onto the substrate and over at least portions of the tube by a technique selected from a group consisting of drop on, evaporation, sputtering, spin on, reactive deposition, CVD, and PECVD whereby said wall adheres tightly to at least parts of the tube and at least part of the substrate in such a way that it keeps the end of the tube open and forms a cavity together with the substrate which represents an extension of the tube.
27. Tube connection according to claim 26 wherein said cavity connects at least two tubes.
28. Tube connection according to claim 26 wherein said cavity forms a nozzle.
29. Tube connection according to claim 26 wherein said layer is at least in part covered by another layer.
30. Tube connection according to claim 26 wherein said tube is arranged on the substrate within an identation which can exactly fit the tube shape.
31. Tube connection according to claim 27 wherein the cross-section of the cavity changes between the tubes.
32. Tube connection according to claim 31 wherein said cavity is ramified to several tubes.
33. Tube connection according to claim 31 wherein said cavity unites several tubes.
34. Tube connection according to claim 26 wherein said layer forms a measuring channel of a channel device.
35. A method for manufacturing a device for measuring at least one characteristic of a fluid, said device having a wall defining a measuring channel, an inlet orifice and an outlet orifice for conducting fluid into and out of the measuring channel, and at least one sensor for measuring at least one characteristic of the fluid which flows through the measuring channel, said method comprising the steps of:
providing a substrate;
depositing on the substrate a first body of dissolvable material having a shape corresponding to the shape of the measuring channel of the measuring device;
controlling the shape of the first body of dissolvable material to obtain a measuring channel having appropriate dimensions for measuring said one characteristic of the fluid;
forming the wall by depositing onto the first body of dissolvable material a second body of material by one of evaporation, spin on, drop on, sputtering, reactive deposition;
dissolving the first body of dissolvable material by contacting the dissolvable material with a solvent which dissolves the first body of dissolvable material but does not interact with the material of the substrate and the wall; and attaching the at least one sensor to one of the substrate and the wall by one of evaporation, spin on, drop on, sputtering, reactive deposition, chemical vapor deposition, plasma enhanced chemical vapor deposition, and ion implantation.
providing a substrate;
depositing on the substrate a first body of dissolvable material having a shape corresponding to the shape of the measuring channel of the measuring device;
controlling the shape of the first body of dissolvable material to obtain a measuring channel having appropriate dimensions for measuring said one characteristic of the fluid;
forming the wall by depositing onto the first body of dissolvable material a second body of material by one of evaporation, spin on, drop on, sputtering, reactive deposition;
dissolving the first body of dissolvable material by contacting the dissolvable material with a solvent which dissolves the first body of dissolvable material but does not interact with the material of the substrate and the wall; and attaching the at least one sensor to one of the substrate and the wall by one of evaporation, spin on, drop on, sputtering, reactive deposition, chemical vapor deposition, plasma enhanced chemical vapor deposition, and ion implantation.
36. A method as set forth in claim 35 wherein the step of forming the wall includes depositing on the first body of dissolvable material the second body of material selected from a group of materials consisting of synthetic resin, glass, ceramic Si3N4, SiO2, Sio and combinations thereof.
37. A method as set forth in claim 35 further comprising the step of depositing a cover layer on top of at least one of substrate, wall, one sensor, inlet orifice, and outlet orifice.
38. A method as set forth in claim 35 further comprising the step of attaching at least one tube to the substrate to form one of the inlet and outlet orifices, and wherein the step of forming the wall includes the step of depositing the second body of material on the tube.
39. A method as set forth in claim 35 further comprising the step of etching inner surfaces of the substrate and the wall defining the measuring channel.
40. A method as set forth in claim 35 further comprising the step of passivating inner surfaces of the substrate and the wall defining the measuring channel.
41. A method as set forth in claim 38 wherein the step of attaching at least one tube to the substrate includes the step of attaching a tube having a nozzle-like opening.
42. A method as set forth in claim 38 further comprising the step of forming an indentation in the substrate for receiving the one tube.
43. A method of manufacturing a device for measuring at least one characteristic of a fluid, said device having a wall defining a measuring channel, an inlet orifice and an outlet orifice for conducting fluid into and out of the measuring channel, and at least one sensor for measuring at least one characteristic of the fluid which flows through the measuring channel, said method comprising the steps of:
providing a substrate;
depositing on the substrate a first body of dissolvable material having a shape corresponding to the shape of the measuring channel of the measuring device;
forming the wall by depositing onto the first body of dissolvable material a second body of material by one of evaporation, spin on, drop on, sputtering, reactive deposition;
dissolving the first body of dissolvable material by contacting the dissolvable material but does not interact with the material of the substrate and the wall;
attaching the at least one sensor to one of the substrate and the wall by one of evaporation, spin on, drop on, sputtering, reactive deposition, chemical vapor deposition, plasma enhanced chemical vapor deposition, and ion implantation;
attaching at least one tube to the substrate to form one of the inlet and outlet orifices; and depositing the second body of material on the tube.
providing a substrate;
depositing on the substrate a first body of dissolvable material having a shape corresponding to the shape of the measuring channel of the measuring device;
forming the wall by depositing onto the first body of dissolvable material a second body of material by one of evaporation, spin on, drop on, sputtering, reactive deposition;
dissolving the first body of dissolvable material by contacting the dissolvable material but does not interact with the material of the substrate and the wall;
attaching the at least one sensor to one of the substrate and the wall by one of evaporation, spin on, drop on, sputtering, reactive deposition, chemical vapor deposition, plasma enhanced chemical vapor deposition, and ion implantation;
attaching at least one tube to the substrate to form one of the inlet and outlet orifices; and depositing the second body of material on the tube.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AT0356285A AT396998B (en) | 1985-12-09 | 1985-12-09 | MEASURING DEVICES AND PIPE CONNECTION AND METHOD FOR PRODUCING A MEASURING DEVICE AND METHOD FOR CONNECTING TUBES TO A MEASURING DEVICE OR FOR THE PRODUCTION OF PIPE CONNECTIONS |
| ATA3562/85 | 1985-12-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1290958C true CA1290958C (en) | 1991-10-22 |
Family
ID=3552234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000524723A Expired - Lifetime CA1290958C (en) | 1985-12-09 | 1986-12-08 | Channel device and tube connection and their fabrication procedures |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US5027499A (en) |
| EP (1) | EP0226570A3 (en) |
| JP (1) | JPS62228169A (en) |
| AT (1) | AT396998B (en) |
| CA (1) | CA1290958C (en) |
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-
1985
- 1985-12-09 AT AT0356285A patent/AT396998B/en not_active IP Right Cessation
-
1986
- 1986-11-28 EP EP86890331A patent/EP0226570A3/en not_active Withdrawn
- 1986-12-08 CA CA000524723A patent/CA1290958C/en not_active Expired - Lifetime
- 1986-12-08 JP JP61292270A patent/JPS62228169A/en active Pending
-
1989
- 1989-04-21 US US07/341,641 patent/US5027499A/en not_active Expired - Fee Related
-
1991
- 1991-07-02 US US07/726,648 patent/US5165292A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US5027499A (en) | 1991-07-02 |
| JPS62228169A (en) | 1987-10-07 |
| AT396998B (en) | 1994-01-25 |
| ATA356285A (en) | 1993-05-15 |
| EP0226570A3 (en) | 1989-03-15 |
| US5165292A (en) | 1992-11-24 |
| EP0226570A2 (en) | 1987-06-24 |
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