CA1234022A - Actuator valve - Google Patents

Actuator valve

Info

Publication number
CA1234022A
CA1234022A CA000458423A CA458423A CA1234022A CA 1234022 A CA1234022 A CA 1234022A CA 000458423 A CA000458423 A CA 000458423A CA 458423 A CA458423 A CA 458423A CA 1234022 A CA1234022 A CA 1234022A
Authority
CA
Canada
Prior art keywords
valve piston
cylinder
control rod
air
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000458423A
Other languages
French (fr)
Inventor
James K. Wilden
Alan D. Tuck, Jr.
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PSG California LLC
Original Assignee
Wilden Pump and Engineering LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wilden Pump and Engineering LLC filed Critical Wilden Pump and Engineering LLC
Application granted granted Critical
Publication of CA1234022A publication Critical patent/CA1234022A/en
Expired legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/06Pumps having fluid drive
    • F04B43/073Pumps having fluid drive the actuating fluid being controlled by at least one valve
    • F04B43/0736Pumps having fluid drive the actuating fluid being controlled by at least one valve with two or more pumping chambers in parallel
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01LCYCLICALLY OPERATING VALVES FOR MACHINES OR ENGINES
    • F01L5/00Slide valve-gear or valve-arrangements
    • F01L5/04Slide valve-gear or valve-arrangements with cylindrical, sleeve, or part-annularly shaped valves
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/8593Systems
    • Y10T137/86493Multi-way valve unit
    • Y10T137/86879Reciprocating valve unit

Abstract

ACTUATOR VALVE
Abstract An air driven diaphragm pump having an actuator valve (20) for converting a source of compressed air into a reciprocating drive. The actuator valve includes a valve piston (120) for alternately directing air to one side or the other of the pumps, a control rod (56) fixed to the reciprocating elements (28 and 30) of the pump and means for shifting the valve piston responsive to the position of the control rod. An axially spaced bifurcated inlet (110) is employed to provide additional energy to the shifting of the valve piston. The valve piston also is arranged to cover vent ports (90 and 92) as a mechanism for closing off all compressed air under stalled condi-tions of the pump.

Description

72~/1532 DESCRIPTION
. _ _ ACTUATOR VALVE
Background of Invention The field of the present invention is actuator valves for air driven reciprocating devices, and more specifically wherein the valve includes a pneumatically controlled valve piston.
Actuator valves for reciprocating pneumatically driven devices have been developed which employ a pilot valve or rod responsive to the position of the reciprocating element of the device and a pneumatically controlled valve piston responsive to the position of the pilot rod. The valve piston in turn controls the incoming flow of pressurized air to provide an alternating flow to the reciprocating device. This alternating flow forces the device to stroke back and forih therby performing work and driving the pilot rod. Such actuator valves thus convert a relatively steady source of pressurized air into an alternating flow without need for any outside timing or control system. The source air pressure alone drives the valve as well as the working device.
One such actuator valve used primarily on air driven diaphragm pumps is disclosed in U.S. Patent No. 3,071,118. Such air dirven diaphragm pumps include diaphragms positioned on either side of an actuator valve in an arrangement similar to that set lZ34~

forth in the present figures, outwardly of the actuator valve and pilot or control rod. Such additional devices and configurations are illustrated in U.S. Patents No. 4,242,941, No. 4,247,264, No.
4,339,985 and No. D-268,413.
The shifting of the valve piston in such devices is understood to occur by the selective venting of one end of the enclosing cylinder in which the piston moves. By selectively vent-ing one end or the other of the cylinder, the energy stored in the form of compressed air at the unvented end of the cylinder acts to drive the piston to the alternate end of its stroke. Under proper conditions, the energy is more than sufficient to insure a complete piston stroke. However, under adverse conditions, such as when foreign material, dirt, grease and the like, is allowed to collect within the cylinder, the damping or resistance to movement of the piston may so increase that the system may require all available potential energy for shifting of the piston. Under such marginal conditions, all possible energy is advantageously applied to insure operation of the actuator valve. One mechanism for providing additional energy for shif~ing is presently included in the devices of the aforementioned patents. Additional compressed air is supplied through passageways to the expanding chamber at one end of the valve piston. The air is gated into the passageways by the location of the piston. Additional energy, however, could also be useful under severe conditions.

The nature of air driven reciprocating devices such as contemplated for use with the present actuator valve gives them the ability to be used on demand by simply stalling the device rather than by shutting off the source of eompressed air. Such a condition might exist with an air driven diaphragm pump where the produet to be pumped is maintained under pressure and control-led downstream of -2a-the pump by a valve. When the valve is opened, the pump is able to move material throuqh the pump and through the valve. When the valve is closed, the pump will stall when the driving air force equals the compression force on the material being driven.
Under such conditions, the pump remains ready to pump further material at any time that the downstream valve is opened.
When an air driven r~ciprocating device is employed in this manner, the actuator valve wil] simply remain in the position at the time of stall. Under such conditions virtually no air is used to maintain the pump. However, any passages open to atmosphere and also connected to the inlet pressure will continue to allow air flow therethrough. Therefore, it is advantageous to avoid any point in the pump or actuator valve stroke when such leakage can occur. Any such leakage can be noisy and esthetically unpleasing even if it is not sufficient to amount to a noticeable loss of compressed air.
SUMMARY OF INVENTION
The present invention pertains to an actuator valve for a reciprocating air driven device. Additional energy is provided to the valve piston during shifting to insure proper actuation of the valve piston.
According to one aspect of the invention there is provided an actuator valve for an air driven reciprocating device, in combination comprising: a valve piston having a single trans-verse passage; a control rod fixed to reciprocate with the air driven reciprocating device; a housing having a cylinder closed at each end and enclosing said valve piston, a passageway through which said control rod extends, an air inlet to said cylinder spaced from the ends of said cylinder, valve piston vent passages extending from said cylinder to said passageway, and control rod vent passage means for venting said passageway extending frorn said passageway to atmosphere, said valve piston cooperating with said housing to include means for directing incoming air to the ends of said valve piston and means for selectively directing incoming air to and exhausting outgoing air from the air driven reciprocating device, said air inlet including two ports axially spaced at said cylinder, said ports selectively aligning with said transverse passage when said piston is at the ends of said cylinder and said control rod including at least one axial passage in said control rod to cooperate with said valve piston vent passages and said control rod vent passage means.
Preferably, the valve includes two inlet passages extending to said two ports, said inlet passages being inclined to mutually diverge toward said ports.
The transverse passage may be a circumferential groove about the valve piston.
The two axially spaced ports are preferably separated by at least the width of said transverse passage.
Accordingly, it is an object of the present invention to provide an improved actuator valve for an air driven recipro-cating device. Other and further objects and advantages will appear hereinafter.
Brief Description of the Drawings Figure 1 is a cross-sectional elevation through an air driven reciprocating pump incorporating an actuator valve of the present invention.

1~4t)22 Figure 2 is an end view taken along line 2-2 of Figure 1.
Figure 3 is a cross-sectional elevation taken along line 3-3 of Figure 1.
Figure 4 is a cross-sectional elevation taken along line 4-4 of Figure 1.
Figure 5 is a cross-sectional view taken along line 5-5 of Figure 1.
Detailed Description of the Preferred Embodiment Turning in detail to the drawings, Figures 1 and 2 illustrate an air driven reciprocating device, namely an air driven diaphragm pump in conjunction with an actuator valve, generally designated 10. As can best be seen in Figure 3, the actuator valve housing generally includes a main body 12, a cylinder body 14 and a cover 16. The main body 12 is conveniently formed in the present embodiment integrally with the air chamber housings 18 and 20. The main body 12 r the cylinder body 14 and the cover 16 are held together by means of fasteners 22 of which there are conveniently four.
Before turning in detail to the actuator valve 10, the air driven diaphragm pump illustrated in Figures 1 and
2 include the aforementioned air chamber housings 18 and 20 integrally formed with the main body 12 of the actuator valve 10. Outwardly of the air chamber housings 18 and 20 are pump chamber housings 24 and 26. Between the air chamber housings 18 and 20 and the pump chamber housings 24 and 26 are resilient diaphragms 28 and 30. The dia-phragms 28 and 30 include a circular bead 32 positioned within grooves located in both of the air chamber housings 18 and 20 and the pump chamber housings 24 and 26. Clamp bands (not shown) may be positioned around the circular periphery of each pumping mechanism to retain the dia-phragms 28 and 30 and to prevent leakage. Each of the pump chamber housings 24 and 26 extends to a pump inlet 34 and pump outlet 36. Check valves, including valve seats 15 38 and valve balls 40 are arranged at the pump inlet 34 and pump outlets 36 to permit flow in one direction responsive to the pumping action of the diaphragm 28 and 30. Placement ribs 42 retain the balls 40 in position and O-ring seals 44 prevent leakage at the ports.
Associated with the pump inlet 34 is an intake manifold 46. The intake manifold 46 extends from a common inlet 48 to each of the pump inlets 34. As illustrated in the preferred embodiment, the intake manifold 46 is divided into 3 sections which may be conventionally held in place by means of clamp bands (not shown). The intake manifold 46 also includes feet 50 conveniently arranged for support of the pump. Diametrically opposed to the intake manifold 46 is an outlet manifold 52. The outlet manifold 52 is similarly constructed and includes a discharge from the central portion thereof. Additionally, clamp bands may be employed to hold the components in position. As illustrated in Figure 2, fastening elements 54 extend to hold the manifolds 46 and 52 in position on the pump. Four such fastening elements are conveniently employed.
Extending through the actuator valve 10 is a control rod 56. The control rod 56 extends to two pump piston assemblies at either end thereof. The pump piston assem-blies each include an inner plate 58 and an outer plate 60 between which is sandwiched the pump diaphragm 28 or 30.
The control rod and pump piston assemblies act to maintain the diaphragms in proper orientation, draw the diaphragm which is on an intake stroke into the air chamber and functionally convey the position of the pump to the actuator valve as will be discussed below.
In this embodiment, the pump is illustrated as principally being of polymeric material with the exception of the O-rings 44 and diaphragms 28 and 30 which are of generally elastomeric material. Additionally, the clamp bands (not shown) and the control rod 56 is more con-veniently of metallic material. Additional components in the actuator valve are also of metallic material as will be discussed below.
Looking then to the actuator valve 10, the main body 12 of the actuator valve 10 is integrally formed with the air chamber housings 18 and 20. Thus, opposed walls 62 are defined as both the inner portion o~ the air chamber housings 18 and 20 and the outer portions of the actuator valve 10. Opposed walls 64 and 66 extend between the opposed walls 62 to form a cavity within the main body 12 of the actuator valve 10. The cavity is closed on one side by the cover 16 which has an outlet 68. The outlet 68 is conveniently threaded to receive a muffler where noise reduction is appropriate or an exhaust pipe where exhausted air must be transported away from the pump.
Located centrally in the main body 12 is a passageway housing 70 extending between the opposed walls 62 for receipt of the control rod 56. The passageway housing 70 is conveniently spaced from the opposed walls 64 and 66 and the cover 16, but is integrally associated with a front wall 72. A control rod sleeve 74, conveniently made of metallic material such as brass extends through the passageway housing 70 to define a passageway 76 for the control rod 56.

A plurality of configurations for both the control rod 56 and the control rod sleeve 74 are available.
Reference is made to the aforementioned patents. In the embodiment illustrated, an axial passage 78 is centrally located in the control rod 56. Four sealing O-rings 80 are positioned in annular O-ring grooves 82 to divide the passageway 76 through which the control rod extends into separate zones.
Control rod vent passages 82 and 84 extend through both the control rod sleeve 74 and the passageway housing 70 such that they are discharged into the cavity or chamber within the main body 12 and then through outlet 68. Outwardly of the control rod vent passages 82 and 84, across sealing O-rings 80, are annular channels 86 and 88.
These annular channels are coupled with valve piston vent passages 90 and 92 which extend through the front wall 72 of the main body 12, extend across the surface of the front wall 72 as can best be seen in Figure 1 and into the cylinder body 14 as can best be seen in Figure 3. As can be seen in Figure 5, the valve piston vent passages 90 and 92 may be selectively opened for venting through the control rod vent passages 82 and 84 when the control rod 56 is positioned such that the axial passage 78 spans one or the other of the inner O-rings 80. This occurs at the ends of the stroke of the reciprocating device.
Also extending through the main body 12 of the actuator valve 10 are air chamber ducts 94 and 96. The air chamber ducts 94 and 96 extend through the opposed wall 62 to the air chambers for delivery of compressed working air to the reciprocating device. These ducts extend through the front wall 72 and the cylinder body 14 as can best be seen in Figure 3.
The cylinder body 14 is securely fastened to the front wall 72 of the main body 14 by the fasteners 22.
The cylinder body 14 generally includes a cylinder 98 which extends through the cylinder body 14 for facile machining. End caps 100 and 102 are positioned by means ~;~3 ~ X

of spring clips 104 in the ends of the cylinder 98.
O-rings 106 seal the cylinder 98 at the end caps. An alignment pin 108 is fixed through one of the end caps and extends into the cylinder 98 for alignment with the piston contained therein.
Also defined in the cylinder body 14 is an air inlet 110. The air inlet 110 is threaded for receipt of an appropriate fitting. The air inlet is bifurcated into two inlet passages 112 and 114 which mutually diverge toward two ports 116 and 118. The ports 116 and 118 each includes an eccentrically cut channel which extends part way around the cylinder 98 for greater air distribution into the cylinder 98. Thus, two ports 116 and 118 are axially spaced relative to the cylinder 98 for introduc-tion of compressed air into the actuator valve 10.
Located within the cylinder 98 is a valve pistonhaving a generally cylindrical body and spacers 122 on each end. The valve piston 120 is arranged to slide within the cylinder 98 such that the spacers 122 contact the end caps 100 and 102 at the ends of the stroke. The body of the valve piston is sized such that clearance is provided between the wall of the cylinder 98 and the valve piston 120 to provide means for continuously directing air to the ends of the cylinder. Longitudinal passages 124 extend part way through the piston body to each end thereof. A pin hole 126 is associated with each passage 124 such that a volume of incoming air through air inlet 110 may be directed tnrough the pin hole 126 and the passage 124 to one end or the other of the cylinder 98 when a pin hole is in direct communication with the inlet during a portion of the stroke. Conveniently, the guide pin 108 may be positioned in one of the passages 124 and is sized to allow free flow of air therethrough.
A cavity 128 is formed within the valve piston 120 and has two through ports 130 and 132 connecting the cavity 128 to one side of the cylinder 98. Four ports 134, 136, 138 and 140 are arranged along one wall of the V,4~

cylinder 98 to cooperate with the through ports 132 and 134. The ports 134 through 140 are arranged such that the through ports 130 and 132 will align with two of the supports with the piston at each end of its stroke. The ports 134 and 140 extend to passages 142 and 144 through the passageway housing 70 of the main body 12 to communi-cate with the cavity within the main body 12 for ex-hausting through outlet 68.
A transverse passage 146, which in the present embodiment is a circumferential groove~ extends about the center of the valve piston 120. The ports 136 and 138 are aligned such that the transverse passage 146 will communicate with one of the passages at the ends of the stroke of the valve piston. Additionally, the transverse 15 passage 146 is aligned with one of the intake ports 116 and 118 at the ends of the valve piston stroke. Thus, communication between the inlet 110 and one or the other of the ports 136 and 138 is achieved at the ends of the valve piston stroke through the transverse passage 146.
The axial spacing of the ports 116 and 118 may be conveniently arranged such that the separation between the ports 116 and 118 is roughly equal to the separation between the ports 136 and 138. This aligns the ports on either end of the transverse passage 146 for enhanced flow 25 therethrough. Also, the inlet ports 116 and 118 may be spaced such that both cannot be open to the transverse passage 146 at the same time. Extraneous airflow in the transverse passage 146 is not likely to have any effect on the shifting action with such spacing.
Major flow through the transverse passage 146 is initiated when the valve piston 120 opens one of the ports 116 and 118 as well as the corresponding one of the ports 136 and 138 where atmospheric pressure exists. When communication is initiated between a high pressure port and a low pressure port, the incoming air is directed at the piston 120 with velocity and against the side walls of the transverse port 136 to provide additional energy for 4~

--1 o--shifting of the valve piston 120. The flow of air through the transverse passage 146 is understood to have the effect of centering the passage 146 relative to the port, either 116 or 118, this being at one end or the other of the valve piston stroke. The mutual divergence of the inlet passages 112 and 114 also may give an axial component of flow velocity to further induce movement of the valve piston 120 to the end of its stroke.
The valve piston vent passages 90 and 92 are shown to intersect the cylinder 98 at locations adjacent to the ends of the cylinder 98 as defined by the end caps 100 and 102. However, these valve piston vent passages 90 and 92 are spaced from the ends of the cylinder 98 enough so that the valve piston body will selectively cover over and close the nearest valve piston vent passage at the ends of the stroke. The vent passages 90 and 92 are also diametrically opposed to the inlet 110. Because of pressures on the valve piston 120, the valve piston is forced away from the inlet 110 and against the side of the cylinder 98 where the valve piston vent passages 90 and 92 intersect the cylinder 98. Because of the energy directed to the valve piston 120 during shifting and the clearance around the valve piston 120, the valve piston 120 is capable of extending in its stroke until the spacers 122 contact one or the other of the end caps 100 and 102.
Care should be taken to insure that sufficient space remains at each end of the cylinder 98 such that momentary pressure buildup will not result in the remaining space acting as a pneumatic spring, once the valve piston vent passage, 90 or 92, is covered. As there is no unbalanced pressure which would tend to force the piston away from the end position, the valve piston remains in position covering one or the other of the valve piston vent passages 90 and 92 until the valve piston 120 is again caused to shift.
Having described the elements and features of the actuator valve, the operation of the system is here described. Compressed air is caused to enter the inlet 110 with the valve piston 120 at one end or the other of its stroke. Looking to the position as seen in Figure 3, compressed air proceeds through inlet passage 112, port 116 and transverse passage 146 to port 136. Thus, com-pressed air is supplied to the air chamber duct 96 where it proceeds to the air chamber on the right of the device as illustrated in Figure 1. This causes the diaphragms 28 and 30, the control rod 56 and the pump piston assemblies to move to the right as viewed in Figure 1 in a pump stroke. Having moved through a pump stroke, the axial passage 78 of the control rod 56 meets and traverses the sealing O-ring between the control rod vent passage 84 and the channel 88 connected with the valve piston vent passage 92. The vent passage 92, the valve piston vent pasaage 92, the axial passage 78 on the control rod 56 and the control rod vent passage 84 thus provide a means for venting the end of the cylinder 98 adjacent to the vent passage 92.
The piston 120 includes a clearance with the cylinder 98 such that compressed air has accumulated around the piston 120 with both vent passages 90 and 92 in the closed position. With the venting, as described above, of the valve piston vent passage 92, the compressed air around 25 the spacer 122 at the opposite end of the valve piston 120 causes the valve piston 120 to shift toward the other end of the cylinder 9~. Once the piston 120 has moved a certain distance, the pin hole 126, which is in communi-cation with the closed end of the valve piston 120, is 30 exposed to the inlet 110 at the port 116. At this time, additional compressed air is directed to the trailing end of the valve piston 120 to add further energy to the shift. As the shift of the valve piston 120 continues, the transverse passage 146 approaches the port 138 in the 35 side of the cylinder 98 and also the intake port 118. As these ports come into communication with the transverse passage 146, additional air is directed at the transverse 344 1~:

passage 146 which i5 allowed to then pass through the port 138. With the orientation of the inlet passage 114, the air is believed to have an axial component aiding in the movement of the valve piston in its stroke and a centering effect to move and retain the transverse passage 146 in line with one of the inlet ports 116 and 118. In this way, energy is supplied to the valve piston 120 for its stroke to the opposite end of the cylinder 98.
The valve piston 120 is also maintained throughout its operation abutting against the side of the cylinder 98 diametrically opposed to the inlet 110. This results from the fact that at least the ports 134 and 140 are always open to atmosphere while the inlet 110 is open to com-pressed air. Thus, there is a pressure differential across the valve piston 120 holding it against the side of the cylinder 98 with the ports 134, 136, 138, 140 and the passages 90 and 92.
Once the shift of the piston 120 has occurred, air ~lows through the inlet passage 114, the transverse passage 146 and the port 138 into the air chamber duct 94.
This compressed air then pushes the diaphragm to the left to initiate a return stroke. As may be recognized, the through ports 130 and 132 cooperate to vent, through the air chamber ducts 94 and 96, the side of the pump which is not being supplied with compressed air. In this way, the pump is able to reciprocate responsive to the positioning of the valve piston 120 which in turn is responsive to the location of the control rod 56. As the control rod 56 moves with the reciprocation of the pump, a continuous control loop is defined to convert a constant compressed air input into reciprocating motion. With the valve piston 120 at either end of its stroke, the valve piston vent passages 90 and 92 are alternately closed to the cylinder 98. If the pump is stalled with the control rod 56 in a position to vent one end or the other of the cylinder 98, the piston 120 will have shifted to cover the corresponding valve piston vent passage to substantially close off all flow of air from the entire device. This naturally conserves on compressed air and the energy to create same as well as removing objectionable noise under the stalled condition.
Thus, an improved actuator valve for an air driven reciprocating device is disclosed. While embodiments and applications of this invention have been shown and described, it would be apparent to those skilled in the art that many more modifications are possible without departing from the inventive concepts herein. The invention, therefore, is not to be restricted except in the spirit of the appended claims.

Claims (4)

THE EMBODIMENTS OF THE INVENTION IN WHICH AN EXCLUSIVE
PROPERTY OR PRIVILEGE IS CLAIMED ARE DEFINED AS FOLLOWS:
1. An actuator valve for an air driven reciprocating device, in combination comprising:
a valve piston having a single transverse passage;
a control rod fixed to reciprocate with the air driven reciprocating device;
a housing having a cylinder closed at each end and enclosing said valve piston, a passageway through which said control rod extends, an air inlet to said cylinder spaced from the ends of said cylinder, valve piston vent passages extending from said cylinder to said passageway, and control rod vent passage means for venting said passageway extending from said passageway to atmosphere, said valve piston cooperating with said housing to include means for directing incoming air to the ends of said valve piston and means for selectively directing incoming air to and exhausting outgoing air from the air driven reciprocating device, said air inlet including two ports axially spaced at said cylinder, said ports selectively aligning with said transverse passage when said piston is at the ends of said cylinder and said control rod including at least one axial passage in said control rod to cooperate with said valve piston vent passages and said control rod vent passage means.
2. An actuator valve for an air driven reciprocating device, in combination comprising:
a valve piston having a single transverse passage;
a control rod fixed to reciprocate with the air driven reciprocating device;

a housing having a cylinder closed at each end and enclosing said valve piston, a passageway through which said control rod extends, an air inlet to said cylinder spaced from the ends of said cylinder, valve piston vent passages extending from said cylinder to said passageway, and control rod vent passage means for venting said passageway extending from said passageway to atmosphere, said valve piston cooperating with said housing to include means for directing incoming air to the ends of said valve piston and means for selectively directing incoming air to and exhausting outgoing air from the air driven reciprocating device, said air inlet including two ports axially spaced at said cylinder and two inlet passages extending to said two ports, said inlet passages being inclined to mutually diverge toward said ports, said ports selectively aligning with said transverse passage when said piston is at the ends of said cylinder and said control rod including at least one axial passage in said control rod to cooperate with said valve piston vent passages and said control rod vent passage means.
3. An actuator valve for an air driven reciprocating device, in combination comprising:
a valve piston having a single transverse passage, said transverse passage being a circumferential groove about said valve piston, a control rod fixed to reciprocate with the air driven reciprocating device;
a housing having a cylinder closed at each end and enclosing said valve piston, a passageway through which said control rod extends, an air inlet to said cylinder spaced from the ends of said cylinder, valve piston vent passages extending from said cylinder to said passageway, and control rod vent passage means for venting said passageway extending from said passageway to atmosphere, said valve piston cooperating with said housing to include means for directing incoming air to the ends of said valve piston and means for selectively directing incoming air to and exhausting outgoing air from the air driven reciprocating device, said air inlet including two ports axially spaced at said cylinder and two inlet passages extending to said two ports, said inlet passages being inclined to mutually diverge toward said ports, said ports selectively aligning with said transverse passage when said piston is at the ends of said cylinder and said control rod including at least one axial passage in said control rod to cooperate with said valve piston vent passages and said control rod vent passage means.
4. An actuator valve for an air driven reciprocating device, in combination comprising:
a valve piston having a single transverse passage;
a control rod fixed to reciprocate with the air driven reciprocating device;
a housing having a cylinder closed at each end and enclosing said valve piston, a passageway through which said control rod extends, an air inlet to said cylinder spaced from the ends of said cylinder, valve piston vent passages extending from said cylinder to said passageway, and control rod vent passage means for venting said passageway extending from said passageway to atmosphere, said valve piston cooperating with said housing to include means for directing incoming air to the ends of said valve piston and means for selectively directing incoming air to and exhausting outgoing air from the air driven reciprocating device, said air inlet including two ports axially spaced at said cylinder, said ports selectively aligning with said transverse passage when said piston is at the ends of said cylinder and said control rod including at least one axial passage in said control rod to cooperate with said valve piston vent passages and said control rod vent passage means, said axially spaced ports being separated by at least the width of said transverse passage.
CA000458423A 1983-08-03 1984-07-09 Actuator valve Expired CA1234022A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US519,988 1983-08-03
US06/519,988 US4549467A (en) 1983-08-03 1983-08-03 Actuator valve

Publications (1)

Publication Number Publication Date
CA1234022A true CA1234022A (en) 1988-03-15

Family

ID=24070726

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000458423A Expired CA1234022A (en) 1983-08-03 1984-07-09 Actuator valve

Country Status (5)

Country Link
US (1) US4549467A (en)
JP (1) JPS6047889A (en)
CA (1) CA1234022A (en)
DE (1) DE3428607A1 (en)
GB (1) GB2144493B (en)

Families Citing this family (79)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8529085D0 (en) * 1985-11-26 1986-01-02 Blagdon Durham Ltd Pump
US4936753A (en) * 1988-06-03 1990-06-26 The Aro Corporation Diaphragm pump with interchangeable valves and manifolds
US5169296A (en) * 1989-03-10 1992-12-08 Wilden James K Air driven double diaphragm pump
US5213485A (en) * 1989-03-10 1993-05-25 Wilden James K Air driven double diaphragm pump
US5378122A (en) 1993-02-16 1995-01-03 Wilden Pump & Engineering Co. Air driven diaphragm pump
US5391060A (en) * 1993-05-14 1995-02-21 The Aro Corporation Air operated double diaphragm pump
US5441281A (en) * 1993-05-21 1995-08-15 Wilden Pump & Engineering Co. Shaft seal
US5607290A (en) * 1995-11-07 1997-03-04 Wilden Pump & Engineering Co. Air driven diaphragm pump
US5743170A (en) 1996-03-27 1998-04-28 Wilden Pump & Engineering Co. Diaphragm mechanism for an air driven diaphragm pump
US5927954A (en) * 1996-05-17 1999-07-27 Wilden Pump & Engineering Co. Amplified pressure air driven diaphragm pump and pressure relief value therefor
TW539918B (en) * 1997-05-27 2003-07-01 Tokyo Electron Ltd Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process
US5957670A (en) * 1997-08-26 1999-09-28 Wilden Pump & Engineering Co. Air driven diaphragm pump
US6102363A (en) * 1998-04-20 2000-08-15 Wilden Pump & Engineering Co. Actuator for reciprocating air driven devices
US6257845B1 (en) * 1998-07-14 2001-07-10 Wilden Pump & Engineering Co. Air driven pumps and components therefor
US6152705A (en) 1998-07-15 2000-11-28 Wilden Pump & Engineering Co. Air drive pumps and components therefor
US6168394B1 (en) * 1999-06-18 2001-01-02 Wilden Pump & Engineering Co. Air driven double diaphragm pump
EP1234322A2 (en) 1999-11-02 2002-08-28 Tokyo Electron Limited Method and apparatus for supercritical processing of multiple workpieces
US6748960B1 (en) 1999-11-02 2004-06-15 Tokyo Electron Limited Apparatus for supercritical processing of multiple workpieces
US6561774B2 (en) * 2000-06-02 2003-05-13 Tokyo Electron Limited Dual diaphragm pump
KR100750018B1 (en) 2000-07-26 2007-08-16 동경 엘렉트론 주식회사 High pressure processing chamber for semiconductor substrate
US20040040660A1 (en) * 2001-10-03 2004-03-04 Biberger Maximilian Albert High pressure processing chamber for multiple semiconductor substrates
US7001468B1 (en) 2002-02-15 2006-02-21 Tokyo Electron Limited Pressure energized pressure vessel opening and closing device and method of providing therefor
US7387868B2 (en) * 2002-03-04 2008-06-17 Tokyo Electron Limited Treatment of a dielectric layer using supercritical CO2
US7021635B2 (en) * 2003-02-06 2006-04-04 Tokyo Electron Limited Vacuum chuck utilizing sintered material and method of providing thereof
US7225820B2 (en) * 2003-02-10 2007-06-05 Tokyo Electron Limited High-pressure processing chamber for a semiconductor wafer
US7077917B2 (en) 2003-02-10 2006-07-18 Tokyo Electric Limited High-pressure processing chamber for a semiconductor wafer
US7270137B2 (en) 2003-04-28 2007-09-18 Tokyo Electron Limited Apparatus and method of securing a workpiece during high-pressure processing
US7025578B2 (en) * 2003-05-07 2006-04-11 Ingersoll-Rand Company Pump having air valve with integral pilot
US7163380B2 (en) * 2003-07-29 2007-01-16 Tokyo Electron Limited Control of fluid flow in the processing of an object with a fluid
US20050035514A1 (en) * 2003-08-11 2005-02-17 Supercritical Systems, Inc. Vacuum chuck apparatus and method for holding a wafer during high pressure processing
US20050067002A1 (en) * 2003-09-25 2005-03-31 Supercritical Systems, Inc. Processing chamber including a circulation loop integrally formed in a chamber housing
US7186093B2 (en) * 2004-10-05 2007-03-06 Tokyo Electron Limited Method and apparatus for cooling motor bearings of a high pressure pump
US7168928B1 (en) 2004-02-17 2007-01-30 Wilden Pump And Engineering Llc Air driven hydraulic pump
US7367785B2 (en) * 2004-03-19 2008-05-06 Ingersoll-Rand Company Reduced icing valves and gas-driven motor and reciprocating pump incorporating same
US7063516B2 (en) * 2004-05-04 2006-06-20 Wilden Pump And Engineering Llc One-way valve
US7125229B2 (en) * 2004-05-10 2006-10-24 Wilden Pump And Engineering Llc Reciprocating air distribution system
US7063517B2 (en) * 2004-06-16 2006-06-20 Ingersoll-Rand Company Valve apparatus and pneumatically driven diaphragm pump incorporating same
US7250374B2 (en) 2004-06-30 2007-07-31 Tokyo Electron Limited System and method for processing a substrate using supercritical carbon dioxide processing
US7307019B2 (en) 2004-09-29 2007-12-11 Tokyo Electron Limited Method for supercritical carbon dioxide processing of fluoro-carbon films
US20060065189A1 (en) * 2004-09-30 2006-03-30 Darko Babic Method and system for homogenization of supercritical fluid in a high pressure processing system
US8047222B2 (en) * 2004-10-18 2011-11-01 Wilden Pump And Engineering Llc Air valve for an air driven reciprocating device
US7491036B2 (en) 2004-11-12 2009-02-17 Tokyo Electron Limited Method and system for cooling a pump
US7658598B2 (en) * 2005-10-24 2010-02-09 Proportionair, Incorporated Method and control system for a pump
CA3127360A1 (en) * 2004-11-17 2006-05-26 Proportionair, Inc. Control system for an air operated diaphragm pump
US7517199B2 (en) * 2004-11-17 2009-04-14 Proportion Air Incorporated Control system for an air operated diaphragm pump
US7140393B2 (en) 2004-12-22 2006-11-28 Tokyo Electron Limited Non-contact shuttle valve for flow diversion in high pressure systems
US7434590B2 (en) 2004-12-22 2008-10-14 Tokyo Electron Limited Method and apparatus for clamping a substrate in a high pressure processing system
US7291565B2 (en) 2005-02-15 2007-11-06 Tokyo Electron Limited Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid
US7435447B2 (en) 2005-02-15 2008-10-14 Tokyo Electron Limited Method and system for determining flow conditions in a high pressure processing system
US7767145B2 (en) * 2005-03-28 2010-08-03 Toyko Electron Limited High pressure fourier transform infrared cell
US7380984B2 (en) * 2005-03-28 2008-06-03 Tokyo Electron Limited Process flow thermocouple
US20060225772A1 (en) * 2005-03-29 2006-10-12 Jones William D Controlled pressure differential in a high-pressure processing chamber
US7494107B2 (en) * 2005-03-30 2009-02-24 Supercritical Systems, Inc. Gate valve for plus-atmospheric pressure semiconductor process vessels
US7789971B2 (en) 2005-05-13 2010-09-07 Tokyo Electron Limited Treatment of substrate using functionalizing agent in supercritical carbon dioxide
US7524383B2 (en) 2005-05-25 2009-04-28 Tokyo Electron Limited Method and system for passivating a processing chamber
US7399168B1 (en) 2005-12-19 2008-07-15 Wilden Pump And Engineering Llc Air driven diaphragm pump
US7811067B2 (en) 2006-04-19 2010-10-12 Wilden Pump And Engineering Llc Air driven pump with performance control
MX351912B (en) 2008-10-22 2017-11-03 Graco Minnesota Inc Portable airless sprayer.
ES2581203T3 (en) 2009-01-23 2016-09-02 Warren Rupp, Inc. Procedure to increase the performance of compressed air in a pump
AU2010245694B2 (en) * 2009-05-08 2014-10-02 Warren Rupp, Inc. Air operated diaphragm pump with electric generator
US8382445B2 (en) * 2009-12-16 2013-02-26 Warren Rupp, Inc. Air logic controller
US8496451B2 (en) 2010-06-21 2013-07-30 Wilden Pump And Engineering Llc Pump diaphragm
US8479879B2 (en) * 2011-06-13 2013-07-09 King Fahd University Of Petroleum And Minerals Expandable chamber acoustic silencer
US9976545B2 (en) 2014-01-31 2018-05-22 Wilden Pump And Engineering Llc Air operated pump
JP6574189B2 (en) 2014-02-07 2019-09-11 グラコ ミネソタ インコーポレーテッド Non-pulsating positive displacement pump operating mechanism
US10300569B2 (en) 2014-10-14 2019-05-28 Technical Tooling L.L.C. Method for fabricating vacuum fixturing using granular media
US10933594B2 (en) * 2014-10-14 2021-03-02 Technical Tooling LLC Method for forming a part using a layup tool
US10077763B2 (en) 2015-03-25 2018-09-18 Wilden Pump And Engineering Llc Air operated pump
US10422331B2 (en) 2016-08-12 2019-09-24 Ingersoll-Rand Company One piece diaphragm
US11007545B2 (en) 2017-01-15 2021-05-18 Graco Minnesota Inc. Handheld airless paint sprayer repair
EP3409987B1 (en) * 2017-05-31 2020-11-04 Hamilton Sundstrand Corporation Spring sealed pneumatic servo valve
IT201700121760A1 (en) * 2017-10-26 2019-04-26 Annovi Reverberi Spa PUMP MANIFOLD
US11022106B2 (en) 2018-01-09 2021-06-01 Graco Minnesota Inc. High-pressure positive displacement plunger pump
US20220234062A1 (en) 2019-05-31 2022-07-28 Graco Minnesota Inc. Handheld fluid sprayer
EP4127471A1 (en) 2020-03-31 2023-02-08 Graco Minnesota Inc. Electrically operated displacement pump
US10968903B1 (en) 2020-06-04 2021-04-06 Graco Minnesota Inc. Handheld sanitary fluid sprayer having resilient polymer pump cylinder
US10926275B1 (en) 2020-06-25 2021-02-23 Graco Minnesota Inc. Electrostatic handheld sprayer
EP3995694A1 (en) * 2020-11-09 2022-05-11 Idromeccanica Bertolini S.p.A. Pump for pumping corrosive fluids
US11746771B2 (en) * 2021-04-16 2023-09-05 Teryair Equipment Pvt. Ltd. Actuator valve of an air operated double diaphragm pump

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1058804A (en) * 1911-12-29 1913-04-15 M T Davidson Company Steam-pump.
US2528097A (en) * 1946-05-17 1950-10-31 Frank L Weed Valve mechanism for steam engines
US2890658A (en) * 1956-07-10 1959-06-16 Skf Svenska Kullagerfab Ab Pneumatic liquid pressure pump
US4085655A (en) * 1976-03-29 1978-04-25 Olson Lawrence P Control for reciprocating pumps or the like
US4242941A (en) * 1979-05-14 1981-01-06 Wilden Pump & Engineering Co. Actuator valve
US4339985A (en) * 1980-04-21 1982-07-20 Wilden Pump & Engineering Co., Inc. Air driven reciprocating device

Also Published As

Publication number Publication date
DE3428607A1 (en) 1985-02-14
GB2144493A (en) 1985-03-06
US4549467A (en) 1985-10-29
GB8419798D0 (en) 1984-09-05
JPS6047889A (en) 1985-03-15
GB2144493B (en) 1986-12-17

Similar Documents

Publication Publication Date Title
CA1234022A (en) Actuator valve
US7399168B1 (en) Air driven diaphragm pump
US4854832A (en) Mechanical shift, pneumatic assist pilot valve for diaphragm pump
US4830586A (en) Double acting diaphragm pump
US6817846B2 (en) Gas compressor and method with improved valve assemblies
US5558506A (en) Pneumatically shifted reciprocating pump
US5362212A (en) Air driven diaphragm pump
CA2159798C (en) Mechanical shift, pneumatic assist pilot valve
US6722256B2 (en) Reduced icing valves and gas-driven motor and diaphragm pump incorporating same
US5538042A (en) Air driven device
EP0371407A3 (en) Ring valve type air compressor
US4242941A (en) Actuator valve
US5607290A (en) Air driven diaphragm pump
US5611678A (en) Shaft seal arrangement for air driven diaphragm pumping systems
US4756230A (en) Sound attenuator for pneumatic motors
EP0038618B1 (en) Actuator valve
US7367785B2 (en) Reduced icing valves and gas-driven motor and reciprocating pump incorporating same
US4233000A (en) Variable ratio intensifier
EP0018143B1 (en) Air driven diaphragm pump
EP0537334A1 (en) Diaphragm and piston pump
US6736612B2 (en) Pump
NZ215091A (en) Gas or steam engine with reciprocating free piston
CA1089332A (en) Variable ratio intensifier
WO2003048577A1 (en) Double action pump
GB2369411A (en) Double-acting pump with pressure equalisation between chambers

Legal Events

Date Code Title Description
MKEX Expiry