CA1097823A - Cleaning of high aspect ratio through holes in multilayer printed circuit boards - Google Patents

Cleaning of high aspect ratio through holes in multilayer printed circuit boards

Info

Publication number
CA1097823A
CA1097823A CA310,044A CA310044A CA1097823A CA 1097823 A CA1097823 A CA 1097823A CA 310044 A CA310044 A CA 310044A CA 1097823 A CA1097823 A CA 1097823A
Authority
CA
Canada
Prior art keywords
holes
board
printed circuit
solution
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA310,044A
Other languages
French (fr)
Inventor
Warren A. Alpaugh
Michael J. Canestaro
Theron L. Ellis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of CA1097823A publication Critical patent/CA1097823A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0011Working of insulating substrates or insulating layers
    • H05K3/0055After-treatment, e.g. cleaning or desmearing of holes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0779Treatments involving liquids, e.g. plating, rinsing characterised by the specific liquids involved
    • H05K2203/0783Using solvent, e.g. for cleaning; Regulating solvent content of pastes or coatings for adjusting the viscosity
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0779Treatments involving liquids, e.g. plating, rinsing characterised by the specific liquids involved
    • H05K2203/0786Using an aqueous solution, e.g. for cleaning or during drilling of holes
    • H05K2203/0789Aqueous acid solution, e.g. for cleaning or etching
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/08Treatments involving gases
    • H05K2203/081Blowing of gas, e.g. for cooling or for providing heat during solder reflowing
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/08Treatments involving gases
    • H05K2203/088Using a vapour or mist, e.g. cleaning using water vapor

Abstract

CLEANING OF HIGH ASPECT RATIO THROUGH HOLES
IN MULTILAYER PRINTED CIRCUIT BOARDS
ABSTRACT OF THE DISCLOSURE
A cleaning process for high aspect ratio through holes of multilayer printed circuit boards assures the removal of any loosened fiberous material or epoxy smears in the through holes and also provides an inverted "T"
structure at the innerplanes of the internal conductive circuits within the printed circuit board sandwich. The inverted "T" structure helps to move the contact point between the plating of the through hole and internal cir-cuit lines further into the circuit board, thereby elimi-nating the "Z" stress at the edge of the innerplane. This process is accomplished by first vapor blasting the through holes, soaking the board in a suitable solvent to loosen any fibers or smears on the circuit innerplanes of the board, removing the excess solvent from the through holes and then feeding a unilateral stream of a cleaning solution through the holes, the cleaning solution opera-ting to remove excess fibers and smears in the through holes and to produce a slight, uniform etchback of the metal innerplanes of the printed circuit boards. There-after, the solution may be reduced and any excess clean-ing solution is removed.

Description

~ .
1~7~323 1 CLEANING OF ~IGH ASPECT RATIO THROUGH HOLES
IN MULTILAYER PRINTED CIRCUIT BOARDS
ABSTRACT OF THE DISCLOSURE
A cleaning process for high aspect ratio through holes of multilayer printed circuit boards assures the removal of any loosened fiberous material or epoxy smears in the through holes and also provides an inverted "T"
structure at the innerplanes of the internal conductive circuits within the printed circuit board sandwich. The inverted "T" structure helps to move the contact point between the plating of the through hole and internal cir-cuit lines further into the circuit board, thereby elimi-nating the "Z" stress at the edge of the innerplane. This process is accomplished by first vapor blasting the through holes, soaking the board in a suitable solvent to loosen any fibers or smears on the circuit innerplanes of the board, removing the excess solvent from the through holes and then feeding a unilateral stream of a cleaning solution through the holes, the cleaning solution opera-ting to remove excess fibers and smears in the throughholes and to produce a slight, uniform etchback of the metal innerplanes of the printed circuit boards. There-after, the solution may be reduced and any excess clean-ing solution is removed.
BACKGROUND OF THE INVENTION
Field of the Invention The present invention relates to the cleaning of through holes in multilayer printed circuit boards, and more particularly relates to the cleaning of high as-pect ratio through holes in multilayer printed circuitboards.

~og7~23 1 Description of the Prior Art In the development of printed circuit boards, the cir-cuit line densities on the board surfaces and inner-planes have increased and in addition the number of layers in a multilayer board has also increased to provide the neces-sary circuit capability. Accompanying these two phenomena have been the requirement that the size of the .hrough holes in nultilayer printed circuit boards be smaller to use up less of the board and inner-plane surfaces. This has resulted in relatively high aspect ratio through holes in the multilayer printed circuit board to provide the necessary interconnections between the external planes of the printed circuit board and the internal planes of the printed circuit boards. The aspect ratio is defined as the length of the through hole (thickness of the multi-layer printed circuit bcard) compared to the diameter of the through hole.
As the aspect ratio of the multilayer printed cir-cuit boards has increased, it has become more difficult to effectively plate in a reliable fashion the necessary conductive metal in the through holes. Much of this has been due to the difficulty of removing internal smears, burrs, etc., from the through holes which are formed as a result of drilling or forming the through holes in the multilayer board. Conventional prior art techniques, such as vapor spraying and air blasting, do not provide the necessary cleanliness of the through holes prior to plating since with the high aspect ratio, the force of the vapor spray or air blast is diminished long before it proceeds through the hole.
With difficulties in cleaning, have come the 1~78~:3 l problem~ of failiny to provide adequate contact to the innerplanes when the through hole is plated and a failure to provide a strong enough bond between the plated through hole and the innerplanes. The bond reliability may be viewed as being partially due to the increased "Z" stress placed on the through hole when interconnecting pins are passed therethrough.
In a paper entitled "Copper Plating Advanced Multi-layer Boards - A Capability Study", by W.A. Alpaugh and J.M. McCreary presented at the Institute of Printed Cir-cuit Meeting of September 20, 1976, it was noted that many of these problems can be eliminated in high aspect ratio through holes, if a slightly recessed "T" connection can be provided at the intersection between the plated through holes and the innerplane. However, to accomplish such a reliable "T" connection, it is necessary that there be a uniform etchback of the innerplanes and a very thorough, uniform cleaning of the materials in the high aspect ratio through holes.
OBJECTS AND SUMMARY OF THE IN~ENTION
_ _ Accordingly, it is a principal object of the present invention to provide an improved cleaning process for high aspect ratio through holes in multilayer printed circuit boards which overcome the foregoing difficulties of the prior art.
Another object of the present invention is to pro-vide an improved process for cleaning high aspect ratio through holes in multilayer printed circuit boards which provides a uniform "T" connection capability at the bound-ary between the through hole and the innerplanes of the multilayer printed circuit boards.

l~q78Z3 1 Yet another object of the invention is to provide an improved process for cleaning high aspect ratio through holes in multilayer printed circuit boards which is both economical and reliable.
The foregoing and other objects and advantages of the invention are accomplished according to one embodiment whereby the through holes in a multllayer printed circuit board are first subjected to a vapor blasting at approxi-mately right angles to the printed circuit board surface, ]0 following which the board is soaked in a suitable solvent to loosen any fibers or smears on the circuit innerplanes of the through holes in the board. Next, the excess sol vent is removed from the through holes and a unilateral stream of a cleaning solution is passed through the through holes, the cleaning solution operating to remove excess fibers and smears in the through holes and further to pro-duce a uniform etchback of the metal innerplanes of the printed circuit board. Thereafter, the cleaning solution may be reduced and any excess cleaning solution is re-moved from the through holes.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a partial cross-sectiona] view of a high aspect ratio through hole in a multilayer printed circuit board after the holes have been drilled in the board, but prior to cleaning and plating;
FIG. 2 is a partial cross-sectional view of a high aspect ratio through hole in a multilayer printed circuit board after the drilled hole has been cleaned and plated;
and FIG. 3 is a diagramatic representation of apparatus 1 for feeding a unilateral stream of a solution through the through holes of a multilayer printed circuit board ;
according to the present invention.
DESCRIPTION OF THE PREFERRED EMBODIMENT
For a better understanding of the present invention together with other further objects and advantages there-of, reference is had to the following detailed descrip-tion taken in conjunction with the above-described draw-ings. Referring first to FIG. 1, there is shown in partial sectional view a drilled through hole 11 in a printed circuit board having three innerplanes 13, 15 and 17. The innerplanes are separated by insulating layers 19, 21, 23 and 25. Following the drilling opera-tion, the internal edge 27 of the through hole 11 is relatively rough and may have smears 29 or jagged parti-cles 31 extending therefrom which must be removed prior to a plating operation.
Further, as illustrated in FIG. 2, it is desired that the innerplanes 13, 15 and 17 be etched back slightly from the surface ed~e of the inner hole to provide "T" con-nections 33, 35 and 37 between the innerplanes and the plated conductor 39. With the resultant configuration as shown in FIG. 2, the "Z" stresses exerted on the inter-plated surface 39 due to pin insertion, thermal stress or other stresses applied thereto, are minimized since there is no sheer edge at which point the stresses and subsequent failures can occur.
In order to clean the through holes and remove the debris 29 and 31 therefrom, the panel is treated in the following manner. Eirst, a vapor blast is directed at substantially right angles to the surface of the board ~9713~3 1 and directed downward through the hole. After the vapor blast, the board is placed in a soak solution of N-methyl-2-pyrrolidone of 100%
concentration for a period of approximately 5 minutes. Thereafter, it is removed from the N-methyl-2-pyrrolidone and placed in a soak solution of 100% methyl chloroform for about 4 minutes. The board is then removed from the soak bath and dried with an air blow-off of any remaining liquid 'or approximately 1-1/2 minutes.
Once the board is dried, it is placed on a support and a solu-tion of chrome/sulfuric acid comprising about 40-50% sulfuric acid with 50-80 grams per liter of CrO3 are gravity fed through the holes for approximately 1-1/4 minutes. Next, a drag out with deionized water is unilaterally fed through the board for about 1/2 minute, followed by a reducing solution comprising about 21 grams per liter of sodium bisulfite in solution being gravity fed through the holes of the board for abcut 1 minute. This is followed by a second re-ducing solution again for about 1 minute.
After the solutions in the board and through holes have been re-moved, a running rinse using deionized water is gravity fed through the holes for approximately 3 minutes following which the board is placed in a stagnant rinse soak bath using deionized water for be-tween 10 and 20 minutes. Thereafter, the board is dried with an air blow-off, followed again by a vapor blast directed at approximately right angles to the board surface so that the vapor passes through the through holes in the board.
For the unilateral gravity feeds of the above process, apparatus as illustrated in FIG. 3 can be used. In FN~-77-QlQ - 6 -~ 7823 this apparatus, the board 41 is placed on a support shelf 43 extending around the periphery of the walls so that the board is held substantially flat on the shelf near the wall 45 of a vessel adapted to contain liquids. The underside of the liquid containing vessel below the board is funnel shaped to a trough 47 adapted to return the through dra.ined liquid to a reservoir 49. Liquid is pumped from the reservoir by means of a motor 51 forcing the liquid through a channel 53 and adapted to be poured into the top part of the liquid containing vessel within the walls 45. An overflow trough 57 is connected to one side of the liquid containinq vessel so that after the liquid 59 reaches a predetermined level, excess liquid drains out through a port 61 into the overflow trough 57 and is returned to the reservoir 49. The liquid contain-ing vessel, with its attendant members including the over-flow trough and the return funnel 47, may be mounted on wheels or rollers 63 to facilitate removal of the board and apparatus from the gravity feed tanks.
Using the process and apparatus according to the present invention, it was found possible to prepare clean through holes with etchback of copper i:nnerplanes to the desired depth for through holes having aspect ratios as high as 10:1. For example, for through holes of approxi-mately 15 mils diameter and 150 mils in length, using a gravity feed of chrome/sulfuric acid at a rate of approxi-mately 5cc per minute through each hole, the hole was desirably cleaned and a uniform etchback of approximately 0.3 mils of each innerplane occurs.
Referring again to FIG. 3, it was found that the desired height of the overflow port 61 above the surface 78~3 1of the board 41 is between 7-1/2 and 10 centimeters. This provided sufficient pressure on the surface of the board to provide the de-sired through flow of between 4 and 6 cubic centimeters per minute of the chrome/sulfuric acid. As a general rule, it was found that using the same return rate, that the overflow port was seldom used for the other gravity feed solutions of the distilled water and the sodium bisulfite solutions, since their viscosities and that of water provided the desired rate of flow through the hole without a buildup of a significant head.
10In the preferred embodiment, the chrome/sulfuric acid solution is fed through the board for about 1 minute, although it could go as low as 30 seconds and as high as 5 minutes depending on the amount of etchback desired. Also, while the desired reducing agent is sodium bisulfite in a solution of 21 grams per liter, other suitable reducing agents can be used including ferrous salts and sodium thiosulfate.
A main purpose of the reducing agent is to reduce any Cr+6 to Cr~3 which can be easily removed from waste drain water before it is discharged.
It was found that using this process the etchback of the innerplanes was very uniform, even if initially the innerplanes had much debris such as particle 31 or large, varying smears 29, in FIG. 1 on an inner-plane surface. ~hile it is not exactly understood why this occurs, it is believed that the strong solvent not only loosens the fibers, but makes any debris or smear subsequently transparent to the chrome/
sulfuric acid solution, thereby allowing the acid to etch the circuit planes back by a EN~-77-010 - 8 -~7~3Z3 1 uniform amount whether or not they are covered by smear and independent of the amount of smear. It was also found that equivalent results could not be obtained using prior art methods without the unilateral feed, since while the planes in the top and bottom of the hole were properly etched, the planes in the center were not. This is be-lieved to be due to the fact that the etching solution did not uniformly contact the entire surface of the through hole.
It will be readily apparent to those skilled in the art that other modifications and variations can be made to the present invention without departing from the spirit thereof. For example, other solvent solutions could be used to replace the N-methyl-2-pyrrolidone, such as N,N'di-methylformamide and dimethylsulfoxide.
Also, rather than using a gravity feed method to pass the various solutions through the through holes, the solu-tions can be passed therethrough under pressure; e.g. by using a hydrostatic pressure in a closed environment. As indicated above, other reducing baths could also be used to replace the preferred sodium bisulfite.
It is therefore intended that the invention not be limited to the specifics of the foregoing description of the preferred embodiment, but rather as to embrace the full scope of the following claims.

Claims (8)

The embodiments of the invention in which an exclusive property or privilege is claimed are defined as follows:
1. A method of cleaning the surfaces of through holes in a multilayered printed circuit board prior to plating therethrough, wherein said printed circuit board consists of a plurality of inner metal circuit planes separated by insulating layers, said cleaning comprising the steps of of:
vapor blasting the through holes at approximately right angles to the printed circuit board surface;
placing the board in a solvent to loosen any fibers or smears on the circuit innerplanes of the board, wherein said solvent is a compound selected from the group consisting of N-methyl-2-pyrrolidone, N,N' dimethyl-formamide, and dimethylsulfoxide;
removing excess solvent from the through holes;
flowing a unilateral stream of a cleaning solution through said through holes, said flow of cleaning solution being sufficient to remove excess fibers and smears in the through holes and produce an etchback of the metal innerplanes of the printed circuit board; and removing any excess cleaning solution from said through holes.
2. The invention according to claim 1 wherein said sol-vent is N-methyl-2-pyrrolidone and wherein said removing excess solvent from the through holes comprises the steps of:
placing the board in a solution of methyl chloroform;
and drying the board.
3. The invention according to claim 1 wherein said clean-ing solution is a chrome/sulfuric acid comprising a 40-50%
H2SO4 solution with 50-80 grams per liter of CrO3.
4. The invention according to claim 1 wherein said uni-lateral stream of a cleaning solution is provided by plac-ing the board in a holder with the board surfaces defining a horizontal plane and the through holes extending there-through in the vertical and gravity feeding the cleaning solution down through said through holes.
5. The invention according to claim 4 wherein said through holes are approximately 0.015 inches in diameter and said cleaning solution is fed therethrough at a rate of 4-6cc/
minute per through holes.
6. The invention according to claim 5 wherein said clean-ing solution is fed through said through holes for about one minute.
7. The invention according to claim 1 additionally com-prising the steps of reducing any Cr+6 to Cr+3 by gravity feeding a solution of 21 gram/liter of sodium bisulfite through said through holes.
8. The invention according to claim 1 additionally com-prising the steps of:
having a running rinse of said board with deionized water;
having a stagnant rinse of said board in deionized water;
blow drying said board; and a second vapor blasting of said through holes at approx-imately right angles to the printed circuit board surface.
CA310,044A 1977-12-12 1978-08-25 Cleaning of high aspect ratio through holes in multilayer printed circuit boards Expired CA1097823A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US860,033 1977-12-12
US05/860,033 US4155775A (en) 1977-12-12 1977-12-12 Cleaning of high aspect ratio through holes in multilayer printed circuit boards

Publications (1)

Publication Number Publication Date
CA1097823A true CA1097823A (en) 1981-03-17

Family

ID=25332351

Family Applications (1)

Application Number Title Priority Date Filing Date
CA310,044A Expired CA1097823A (en) 1977-12-12 1978-08-25 Cleaning of high aspect ratio through holes in multilayer printed circuit boards

Country Status (2)

Country Link
US (1) US4155775A (en)
CA (1) CA1097823A (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4239586A (en) * 1979-06-29 1980-12-16 International Business Machines Corporation Etching of multiple holes of uniform size
US4398993A (en) * 1982-06-28 1983-08-16 International Business Machines Corporation Neutralizing chloride ions in via holes in multilayer printed circuit boards
KR900003157B1 (en) * 1986-04-02 1990-05-09 가부시끼가이샤 히다찌세이샤꾸쇼 Pretreatment of through-hole plating
US5372701A (en) * 1986-12-30 1994-12-13 Gerdon; Louis J. Process and apparatus for electroplating
JPH04250874A (en) * 1991-01-09 1992-09-07 Canon Inc Liquid introducing device
US5311660A (en) * 1993-02-10 1994-05-17 International Business Machines Corporation Methyl chloroform-free desmear process in additive circuitization
US5653893A (en) * 1995-06-23 1997-08-05 Berg; N. Edward Method of forming through-holes in printed wiring board substrates
US6395097B1 (en) * 1999-12-16 2002-05-28 Lsi Logic Corporation Method and apparatus for cleaning and removing flux from an electronic component package
WO2005092043A2 (en) * 2004-03-22 2005-10-06 Epic Research Company, Inc. Process for fabrication of printed circuit boards
US20070256710A1 (en) * 2004-06-10 2007-11-08 Dtl Technologies, Inc. Chemical process operations on wafers having through-holes and a pressure differential between the major surfaces thereof
JP2008019495A (en) * 2006-07-14 2008-01-31 Ebara Corp Method for cleaning porous body, and cleaning device therefor
US8221557B2 (en) * 2007-07-06 2012-07-17 Micron Technology, Inc. Systems and methods for exposing semiconductor workpieces to vapors for through-hole cleaning and/or other processes
US20100034965A1 (en) * 2008-08-06 2010-02-11 Retallick Richard C Direct Metallization Process

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3462832A (en) * 1966-10-24 1969-08-26 Gen Dynamics Corp Process for fabricating high density multilayer electrical interconnections
US3653997A (en) * 1970-06-22 1972-04-04 North American Rockwell Conditioning and shaping solution for circuit boards
DE2309196A1 (en) * 1973-02-21 1974-09-05 Matsushita Electric Ind Co Ltd Making electrical contacts - by plating bore of substrate internally
US4012307A (en) * 1975-12-05 1977-03-15 General Dynamics Corporation Method for conditioning drilled holes in multilayer wiring boards

Also Published As

Publication number Publication date
US4155775A (en) 1979-05-22

Similar Documents

Publication Publication Date Title
CA1097823A (en) Cleaning of high aspect ratio through holes in multilayer printed circuit boards
KR930010062B1 (en) Process and device for cleaning activating and/or metallizing bore holes in horizontally transported
US20060046481A1 (en) Manufacturing methods and electroless plating apparatus for manufacturing wiring circuit boards
EP0638669A1 (en) Electroplating process and composition
EP0752807A1 (en) Method for fluid transport
US6265020B1 (en) Fluid delivery systems for electronic device manufacture
CN113766747A (en) PCB (printed Circuit Board) micro-etching process for fine circuit and circuit board
US7063800B2 (en) Methods of cleaning copper surfaces in the manufacture of printed circuit boards
JP3301341B2 (en) Surface roughening equipment
CN1337844A (en) Surface treatment method and apparatus for printed circuit board
US4611554A (en) Method and device for the treatment of printed circuit boards
JP2004174463A (en) Method for cleaning substrate
US4913931A (en) Method and solution for the prevention of smear in the manufacture of printed circuit boards
JP2754828B2 (en) Manufacturing method of printed wiring board
JP3226627B2 (en) Copper sulfate plating method for printed wiring boards
JP2737344B2 (en) Manufacturing method of printed wiring board
JPS63311797A (en) Manufacture of multilayered printed interconnection board
JP2003283111A (en) Method for cleaning printed wiring board
JP2005101304A (en) Method for manufacturing wiring board
KR100934106B1 (en) Complete Addition Method for Fabrication of Fine Pitch Printed Circuit Boards
JPH0823164A (en) Plating method for printed board
JP2004207403A (en) Surface treatment method of wiring board
JPH0715114A (en) Surface processing vessel for formation of pattern of printed circuit board
JPS6277495A (en) Plating device for printed circuit board
JPH06196859A (en) Chemical treatment apparatus and electrodeposition apparatus

Legal Events

Date Code Title Description
MKEX Expiry